CN203746813U - Novel silicon wafer supporting tray of silicon wafer testing machine - Google Patents
Novel silicon wafer supporting tray of silicon wafer testing machine Download PDFInfo
- Publication number
- CN203746813U CN203746813U CN201420103147.9U CN201420103147U CN203746813U CN 203746813 U CN203746813 U CN 203746813U CN 201420103147 U CN201420103147 U CN 201420103147U CN 203746813 U CN203746813 U CN 203746813U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- ring body
- cylinder
- threaded disk
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 28
- 239000010703 silicon Substances 0.000 title claims abstract description 28
- 238000012360 testing method Methods 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a novel silicon wafer supporting tray of a silicon wafer testing machine. The silicon wafer supporting tray comprises a screw thread disk, a ring body, a supporting component and a cylinder; at least three holes are evenly distributed on the screw thread disc; edges inside the ring body are uniformly provided with three limiting grooves; the supporting component includes a circular supporting plate; the periphery of the circular supporting plate are uniformly provided with three limiting blocks; the limiting block is just embedded in the limiting groove; a supporting column is vertically arranged on the limiting block; the screw thread disc is arranged on the ring body; the three supporting columns penetrate through the three holes; the cylinder is placed under the ring body; and a piston rod of the cylinder is connected with the bottom of the circular supporting plate. The novel silicon wafer supporting tray of the silicon wafer testing machine is simple in structure, improves the silicon wafer testing efficiency, and reduces the damage to the silicon wafer.
Description
Technical field
The utility model relates to semiconductor fabrication techniques field, particularly a kind of Novel silicon slice test machine take advantage of sheet platform dish.
Background technology
The sheet platform dish of taking advantage of of existing silicon test machine is a threaded disk, and this disc surfaces does not have jut, and silicon chip needs to go gripping with tweezers completing after test like this, more difficult in the process of gripping, because silicon chip is thinner, there is no gripping point, easily cause the damage of silicon chip.
Summary of the invention
The technical problems to be solved in the utility model, what be to provide a kind of Novel silicon slice test machine takes advantage of sheet platform dish, and it is simple in structure, has improved the testing efficiency of silicon chip, and has reduced the damage that silicon chip is caused.
What the utility model was achieved in that a kind of Novel silicon slice test machine takes advantage of sheet platform dish, comprises a threaded disk, described in take advantage of sheet platform dish also to comprise a ring body, a supporting component and a cylinder; On described threaded disk, be evenly distributed with at least 3 holes, described ring body inside edge evenly offers three limited impressions, described supporting component comprises a circular base slab, described circular base slab surrounding is evenly distributed with three guide vane end stops, described guide vane end stop be able to be embedded in described limited impression, on described guide vane end stop, be vertically installed with support column, described threaded disk is placed on described ring body, and three support columns are through described 3 holes; Described cylinder is placed in ring body below, and the piston rod of cylinder is connected with described circular base slab bottom.
Further, offer three screwed holes on described threaded disk, described threaded disk passes screwed hole by screw and is fixed and is connected with described ring body.
The utility model has the advantage of: in test, the support column of supporting component is retracted into behind threaded disk bottom, silicon chip is tested.After being completed, by cylinder, by supporting component jack-up, such three support columns can be propped up silicon chip, just very convenient when tweezers carry out gripping again, and can not cause damage to silicon chip, have improved production efficiency, have reduced production cost.
Brief description of the drawings
Fig. 1 is threaded disk structural representation of the present utility model.
Fig. 2 is partial structurtes schematic diagram of the present utility model.
Embodiment
Refer to shown in Fig. 1 and Fig. 2, a kind of Novel silicon slice test machine take advantage of sheet platform dish, comprise a threaded disk 1, described in take advantage of sheet platform dish also to comprise a ring body 2, a supporting component 3 and a cylinder 4; On described threaded disk 1, be evenly distributed with at least 3 holes 11, described ring body 2 inside edges evenly offer three limited impressions 21, described supporting component 3 comprises a circular base slab 31, described circular base slab 31 surroundings are evenly distributed with three guide vane end stops 32, described guide vane end stop 32 be able to be embedded in described limited impression 21, on described guide vane end stop 32, be vertically installed with support column 33, described threaded disk 1 is placed on described ring body 2, and three support columns 33 are through described 3 holes 11; Described cylinder 4 is placed in ring body 2 belows, and the piston rod of cylinder 4 is connected with described circular base slab 31 bottoms.
Wherein, offer three screwed holes 12 on described threaded disk 1, described threaded disk 1 is fixed and is connected with described ring body 2 through screwed hole 12 by screw (not shown).Make like this threaded disk 1 can be placed in more firmly on ring body 2.
In a word, the utility model is retracted into the support column of supporting component behind threaded disk bottom in test, and silicon chip is tested.After being completed, by cylinder, by supporting component jack-up, such three support columns can be propped up silicon chip, just very convenient when tweezers carry out gripping again, and can not cause damage to silicon chip, have improved production efficiency, have reduced production cost.
The foregoing is only preferred embodiment of the present utility model, all equalizations of doing according to the utility model claim change and modify, and all should belong to covering scope of the present utility model.
Claims (2)
- Novel silicon slice test machine take advantage of a sheet platform dish, comprise a threaded disk, it is characterized in that: described in take advantage of sheet platform dish also to comprise a ring body, a supporting component and a cylinder; On described threaded disk, be evenly distributed with at least 3 holes, described ring body inside edge evenly offers three limited impressions, described supporting component comprises a circular base slab, described circular base slab surrounding is evenly distributed with three guide vane end stops, described guide vane end stop be able to be embedded in described limited impression, on described guide vane end stop, be vertically installed with support column, described threaded disk is placed on described ring body, and three support columns are through described 3 holes; Described cylinder is placed in ring body below, and the piston rod of cylinder is connected with described circular base slab bottom.
- A kind of Novel silicon slice test machine according to claim 1 take advantage of sheet platform dish, it is characterized in that: on described threaded disk, offer three screwed holes, described threaded disk passes screwed hole by screw and is fixed and is connected with described ring body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420103147.9U CN203746813U (en) | 2014-03-07 | 2014-03-07 | Novel silicon wafer supporting tray of silicon wafer testing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420103147.9U CN203746813U (en) | 2014-03-07 | 2014-03-07 | Novel silicon wafer supporting tray of silicon wafer testing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203746813U true CN203746813U (en) | 2014-07-30 |
Family
ID=51346577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420103147.9U Expired - Fee Related CN203746813U (en) | 2014-03-07 | 2014-03-07 | Novel silicon wafer supporting tray of silicon wafer testing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203746813U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299297A (en) * | 2018-03-23 | 2019-10-01 | 上海新昇半导体科技有限公司 | A kind of silicon test platform |
-
2014
- 2014-03-07 CN CN201420103147.9U patent/CN203746813U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299297A (en) * | 2018-03-23 | 2019-10-01 | 上海新昇半导体科技有限公司 | A kind of silicon test platform |
| CN110299297B (en) * | 2018-03-23 | 2022-02-15 | 上海新昇半导体科技有限公司 | Silicon wafer test bench |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Novel silicon wafer supporting tray of silicon wafer testing machine Effective date of registration: 20180611 Granted publication date: 20140730 Pledgee: China Co. truction Bank Corp Putian branch Pledgor: FUJIAN ANGSTREM MICROELECTRONICS CO.,LTD. Registration number: 2018350000050 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140730 |