CN110275247B - 光学装置 - Google Patents

光学装置 Download PDF

Info

Publication number
CN110275247B
CN110275247B CN201910419195.6A CN201910419195A CN110275247B CN 110275247 B CN110275247 B CN 110275247B CN 201910419195 A CN201910419195 A CN 201910419195A CN 110275247 B CN110275247 B CN 110275247B
Authority
CN
China
Prior art keywords
region
grating
light
interference
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910419195.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN110275247A (zh
Inventor
陈书履
那允中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FORELUX Inc
Original Assignee
FORELUX Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FORELUX Inc filed Critical FORELUX Inc
Priority to CN201910419195.6A priority Critical patent/CN110275247B/zh
Publication of CN110275247A publication Critical patent/CN110275247A/zh
Application granted granted Critical
Publication of CN110275247B publication Critical patent/CN110275247B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328—Diffractive elements operating in reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29323—Coupling to or out of the diffractive element through the lateral surface of the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29356—Interference cavity within a single light guide, e.g. between two fibre gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
CN201910419195.6A 2013-10-25 2014-10-24 光学装置 Active CN110275247B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910419195.6A CN110275247B (zh) 2013-10-25 2014-10-24 光学装置

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
US201361895493P 2013-10-25 2013-10-25
US61/895,493 2013-10-25
US201461925629P 2014-01-09 2014-01-09
US61/925,629 2014-01-09
US201461946657P 2014-02-28 2014-02-28
US61/946,657 2014-02-28
US201461979489P 2014-04-14 2014-04-14
US61/979,489 2014-04-14
US201462012446P 2014-06-16 2014-06-16
US62/012,446 2014-06-16
US201462014182P 2014-06-19 2014-06-19
US62/014,182 2014-06-19
US14/510,799 US9239507B2 (en) 2013-10-25 2014-10-09 Grating based optical coupler
US14/510,799 2014-10-09
CN201410579585.7A CN104570203B (zh) 2013-10-25 2014-10-24 光学装置
CN201910419195.6A CN110275247B (zh) 2013-10-25 2014-10-24 光学装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201410579585.7A Division CN104570203B (zh) 2013-10-25 2014-10-24 光学装置

Publications (2)

Publication Number Publication Date
CN110275247A CN110275247A (zh) 2019-09-24
CN110275247B true CN110275247B (zh) 2024-04-16

Family

ID=51753063

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201910419195.6A Active CN110275247B (zh) 2013-10-25 2014-10-24 光学装置
CN201410579585.7A Active CN104570203B (zh) 2013-10-25 2014-10-24 光学装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201410579585.7A Active CN104570203B (zh) 2013-10-25 2014-10-24 光学装置

Country Status (8)

Country Link
US (2) US9239507B2 (enExample)
EP (1) EP2866067B1 (enExample)
JP (1) JP6640445B2 (enExample)
KR (1) KR20150048078A (enExample)
CN (2) CN110275247B (enExample)
CA (1) CA2867951A1 (enExample)
SG (1) SG10201406933YA (enExample)
TW (1) TWI648564B (enExample)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
DE102013212752B4 (de) * 2013-03-01 2024-02-29 IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik Integriert-optische Koppler-Vorrichtung zwischen integriert-optischen Wellenleitern und einer optischen Mehrmodenfaser, sowie optoelektronische Vorrichtung und Anordnung mit einer solchen Koppler-Vorrichtung
US9239507B2 (en) 2013-10-25 2016-01-19 Forelux Inc. Grating based optical coupler
US10386581B2 (en) 2013-10-25 2019-08-20 Forelux Inc. Grating based optical transmitter
US9766410B1 (en) * 2014-07-11 2017-09-19 Acacia Communications, Inc. Wafer-level testing of photonic integrated circuits with optical IOs
KR20170092522A (ko) * 2014-09-08 2017-08-11 더 리서치 파운데이션 포 더 스테이트 유니버시티 오브 뉴욕 금속 격자 및 이의 측정 방법
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
WO2016113534A1 (en) 2015-01-12 2016-07-21 Milan Momcilo Popovich Environmentally isolated waveguide display
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
WO2016146963A1 (en) * 2015-03-16 2016-09-22 Popovich, Milan, Momcilo Waveguide device incorporating a light pipe
EP4425153A3 (en) 2015-06-12 2024-11-20 Pacific Biosciences Of California, Inc. Integrated target waveguide devices and systems for optical coupling
TWI566918B (zh) 2015-07-29 2017-01-21 財團法人工業技術研究院 立體列印系統
JP6089077B1 (ja) * 2015-08-25 2017-03-01 沖電気工業株式会社 導波路型光回折格子及び光波長フィルタ
KR102640201B1 (ko) * 2015-08-28 2024-02-23 삼성전자주식회사 페브리-페로 공진기 구조를 포함하는 온칩 광학필터 및 분광기
US9939587B2 (en) * 2015-08-28 2018-04-10 Samsung Electronics Co., Ltd. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer
EP3359999A1 (en) 2015-10-05 2018-08-15 Popovich, Milan Momcilo Waveguide display
US9798084B2 (en) * 2015-11-20 2017-10-24 Google Inc. Photonic chip grating couplers
US10992104B2 (en) 2015-12-17 2021-04-27 Ii-Vi Delaware, Inc. Dual layer grating coupler
CN108701962B (zh) 2015-12-17 2021-04-16 菲尼萨公司 表面耦合系统
US10067303B1 (en) * 2016-01-14 2018-09-04 Finisar Corporation Optical grating
US11513350B2 (en) 2016-12-02 2022-11-29 Digilens Inc. Waveguide device with uniform output illumination
WO2018129398A1 (en) 2017-01-05 2018-07-12 Digilens, Inc. Wearable heads up displays
US10412378B2 (en) 2017-05-08 2019-09-10 Microsoft Technology Licensing, Llc Resonating optical waveguide using multiple diffractive optical elements
US10222615B2 (en) 2017-05-26 2019-03-05 Microsoft Technology Licensing, Llc Optical waveguide with coherent light source
US11262605B2 (en) * 2017-08-31 2022-03-01 Lightwave Logic Inc. Active region-less polymer modulator integrated on a common PIC platform and method
FR3071626B1 (fr) * 2017-09-26 2019-11-01 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de couplage optique pour un circuit photonique.
CN107765375B (zh) * 2017-11-21 2019-06-25 南京大学 基于双层光栅的芯片-光纤垂直耦合结构
JP7145436B2 (ja) * 2017-12-27 2022-10-03 パナソニックＩｐマネジメント株式会社 光学装置
WO2019136473A1 (en) 2018-01-08 2019-07-11 Digilens, Inc. Methods for fabricating optical waveguides
KR102768598B1 (ko) 2018-01-08 2025-02-13 디지렌즈 인코포레이티드. 도파관 셀 내의 홀로그래픽 격자의 높은 처리능력의 레코딩을 위한 시스템 및 방법
WO2019159345A1 (ja) * 2018-02-19 2019-08-22 三菱電機株式会社 半導体光集積デバイス
CN108333681B (zh) * 2018-04-08 2023-10-13 浙江大学 基于部分透射式角反射镜组的片上集成部分反射器
TWI673618B (zh) * 2018-06-27 2019-10-01 英業達股份有限公司 導光體輔助設計方法
US11435522B2 (en) * 2018-09-12 2022-09-06 Ii-Vi Delaware, Inc. Grating coupled laser for Si photonics
US10914892B2 (en) * 2018-10-18 2021-02-09 Cisco Technology, Inc. Germanium photodetector coupled to a waveguide
US10802213B2 (en) * 2018-12-27 2020-10-13 Juniper Networks, Inc. Photodetector with sequential asymmetric-width waveguides
JP7252598B2 (ja) * 2019-01-08 2023-04-05 国立大学法人東京工業大学 光機能デバイスの制御方法および制御装置
WO2020149956A1 (en) 2019-01-14 2020-07-23 Digilens Inc. Holographic waveguide display with light control layer
WO2020163524A1 (en) 2019-02-05 2020-08-13 Digilens Inc. Methods for compensating for optical surface nonuniformity
US20220283377A1 (en) 2019-02-15 2022-09-08 Digilens Inc. Wide Angle Waveguide Display
EP3924759B1 (en) 2019-02-15 2025-07-30 Digilens Inc. Methods and apparatuses for providing a holographic waveguide display using integrated gratings
US11404850B2 (en) 2019-04-22 2022-08-02 Ii-Vi Delaware, Inc. Dual grating-coupled lasers
CN114207492A (zh) 2019-06-07 2022-03-18 迪吉伦斯公司 带透射光栅和反射光栅的波导及其生产方法
CN110161600B (zh) * 2019-07-09 2022-08-30 京东方科技集团股份有限公司 一种阵列基板及其制备方法和液晶显示装置
KR102775783B1 (ko) 2019-08-29 2025-02-28 디지렌즈 인코포레이티드. 진공 격자 및 이의 제조 방법
US11067765B2 (en) 2019-11-27 2021-07-20 Cisco Technology, Inc. Evanescent coupling of photodiode with optical waveguide
US11378750B2 (en) 2020-01-17 2022-07-05 Taiwan Semiconductor Manufacturing Company, Ltd. Germanium photodetector embedded in a multi-mode interferometer
WO2021241779A1 (ko) * 2020-05-28 2021-12-02 엘지전자 주식회사 Owc를 위한 주파수 그래디언트 메타서페이스 기반 패스트 빔 스티어링 전송 방법 및 장치
US11204463B1 (en) 2020-07-17 2021-12-21 Globalfoundries U.S. Inc. Integrated circuit structure with optical absorber layer over optical grating coupler
US11869991B2 (en) * 2020-09-18 2024-01-09 Taiwan Semiconductor Manufacturing Company Limited Semiconductor device and method of making
EP4020027A1 (en) 2020-12-23 2022-06-29 EFFECT Photonics B.V. An environmentally protected photonic integrated circuit
CN114675369A (zh) * 2020-12-24 2022-06-28 天津大学 波导光栅器件、光波导相控阵、光学扫描及光通信装置
WO2022150841A1 (en) 2021-01-07 2022-07-14 Digilens Inc. Grating structures for color waveguides
US11474294B2 (en) * 2021-01-29 2022-10-18 Globalfoundries U.S. Inc. Grating couplers with segments having sections of inverted curvature
JP2024508926A (ja) 2021-03-05 2024-02-28 ディジレンズ インコーポレイテッド 真空周期的構造体および製造の方法
WO2024125102A1 (zh) * 2022-12-16 2024-06-20 上海鲲游科技有限公司 二维光栅结构、扩瞳结构、耦出结构以及衍射光波导
EP4459370A1 (en) * 2023-05-02 2024-11-06 Alpine Quantum Technologies GmbH Suppression of spontaneous emissions
CN116908991B (zh) * 2023-07-18 2025-07-29 河南皓泽电子股份有限公司 棱镜镜头一体式驱动装置
WO2025238847A1 (ja) * 2024-05-17 2025-11-20 Ｎｔｔ株式会社 半導体レーザ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6104852A (en) * 1996-01-18 2000-08-15 British Telecommunications Public Limited Company Optical waveguide with photosensitive refractive index cladding
CN1468385A (zh) * 2000-07-21 2004-01-14 �Ƹ��� 表面等离子体偏振子带隙结构
US6775427B2 (en) * 2001-03-09 2004-08-10 Photodigm, Inc. Laterally coupled wave guides
CN101652941A (zh) * 2007-07-27 2010-02-17 化光通信技术有限公司 基于聚合物波导的可调谐激光器模块
CN101793998A (zh) * 2010-03-10 2010-08-04 中国科学院半导体研究所 带有分布布拉格反射镜的波导光栅耦合器及其制作方法
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法
CN104570203A (zh) * 2013-10-25 2015-04-29 光引研创股份有限公司 光学装置
CN104570202A (zh) * 2013-10-25 2015-04-29 光引研创股份有限公司 光学装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692913B2 (ja) 1987-12-19 1997-12-17 株式会社東芝 グレーティング結合型表面発光レーザ素子およびその変調方法
US5038185A (en) 1989-11-30 1991-08-06 Xerox Corporation Structurally consistent surface skimming hetero-transverse junction lasers and lateral heterojunction bipolar transistors
US6031243A (en) 1996-10-16 2000-02-29 Geoff W. Taylor Grating coupled vertical cavity optoelectronic devices
JPH10178165A (ja) * 1996-12-19 1998-06-30 Furukawa Electric Co Ltd:The 感度可変型光集積素子
JPH11281829A (ja) * 1998-03-31 1999-10-15 Minolta Co Ltd 光導波路デバイス及びその製造方法
JP3647656B2 (ja) * 1998-11-05 2005-05-18 株式会社東芝 光機能素子及び光通信装置
US6714575B2 (en) * 2001-03-05 2004-03-30 Photodigm, Inc. Optical modulator system
US20040114642A1 (en) 2002-03-22 2004-06-17 Bullington Jeff A. Laser diode with output fiber feedback
US6970488B2 (en) 2002-10-16 2005-11-29 Eastman Kodak Company Tunable organic VCSEL system
JP2005159002A (ja) * 2003-11-26 2005-06-16 Seiko Epson Corp 受光素子、光モジュール、及び光伝送装置
JP4793820B2 (ja) * 2006-03-20 2011-10-12 国立大学法人京都大学 ２次元フォトニック結晶面発光レーザ光源
JP4772585B2 (ja) * 2006-05-10 2011-09-14 浜松ホトニクス株式会社 光検出器
US7643709B2 (en) 2006-05-12 2010-01-05 Interuniversitair Microelektronica Centrum (Imec) Slanted segmented coupler
CN102047160B (zh) * 2008-05-19 2014-11-19 Imec公司 集成光子器件
JP2009288718A (ja) * 2008-05-30 2009-12-10 Kyoto Institute Of Technology 共振グレーティングカップラ
CN101915965B (zh) * 2010-08-23 2013-11-06 清华大学 光栅耦合器及其封装结构
US8270791B2 (en) 2010-10-05 2012-09-18 Tdk Corporation Optical waveguide and thermally-assisted magnetic recording head therewith
US10078190B2 (en) * 2010-12-20 2018-09-18 Alcatel Lucent Multi-core optical cable to photonic circuit coupler
WO2013089755A1 (en) 2011-12-15 2013-06-20 Intel Corporation An efficient backside-emitting/collecting grating coupler
CN102565955B (zh) * 2012-01-16 2013-03-20 中国科学院半导体研究所 电可调谐光栅耦合器
JP5884532B2 (ja) * 2012-02-06 2016-03-15 三菱電機株式会社 フォトダイオード、波長センサ、波長測定装置
EP2634605B1 (en) 2012-02-29 2015-10-28 Huawei Technologies Co., Ltd. A diffractive coupling grating for perpendicular coupling

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6104852A (en) * 1996-01-18 2000-08-15 British Telecommunications Public Limited Company Optical waveguide with photosensitive refractive index cladding
CN1468385A (zh) * 2000-07-21 2004-01-14 �Ƹ��� 表面等离子体偏振子带隙结构
US6775427B2 (en) * 2001-03-09 2004-08-10 Photodigm, Inc. Laterally coupled wave guides
CN101652941A (zh) * 2007-07-27 2010-02-17 化光通信技术有限公司 基于聚合物波导的可调谐激光器模块
CN101793998A (zh) * 2010-03-10 2010-08-04 中国科学院半导体研究所 带有分布布拉格反射镜的波导光栅耦合器及其制作方法
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法
CN104570203A (zh) * 2013-10-25 2015-04-29 光引研创股份有限公司 光学装置
CN104570202A (zh) * 2013-10-25 2015-04-29 光引研创股份有限公司 光学装置

Also Published As

Publication number Publication date
CA2867951A1 (en) 2015-04-25
CN104570203A (zh) 2015-04-29
TW201530206A (zh) 2015-08-01
US9703043B2 (en) 2017-07-11
JP6640445B2 (ja) 2020-02-05
KR20150048078A (ko) 2015-05-06
JP2015111255A (ja) 2015-06-18
US9239507B2 (en) 2016-01-19
SG10201406933YA (en) 2015-05-28
CN104570203B (zh) 2019-08-27
EP2866067A1 (en) 2015-04-29
CN110275247A (zh) 2019-09-24
EP2866067B1 (en) 2020-07-29
TWI648564B (zh) 2019-01-21
US20160147019A1 (en) 2016-05-26
US20150117808A1 (en) 2015-04-30

Similar Documents

Publication Publication Date Title
CN110275247B (zh) 光学装置
CN104882782B (zh) 光发射器
JP2015111255A5 (enExample)
US10386581B2 (en) Grating based optical transmitter
US10663680B2 (en) Surface coupled laser and laser optical interposer
US10539719B2 (en) Photonic apparatus with periodic structures
TWI652513B (zh) 可轉向入射電磁波之光學裝置
US9548589B2 (en) Grating based optical transmitter
Beck et al. Grating design methodology for tailored free-space beam-forming
Van Thourhout et al. Coupling mechanisms for a heterogeneous silicon nanowire platform
CN110301075B (zh) 基于光栅的光发射机
Romero-García et al. Misalignment tolerant couplers for hybrid integration of semiconductor lasers with silicon photonics parallel transmitters
Wenzel et al. Modeling and Characterization by Experiment of Higher Order Surface Bragg Gratings for Ultra-Narrow Linewidth Diode Lasers
Carletti et al. Wave-front-engineered grating mirrors for VCSELs
Wieczorek Integrated spot size converters for InP based photonic systems
Park Vertical-cavity laser with a novel grating mirror
Topley Erasable diffractive grating couplers in silicon on insulator
Afshar et al. Towards the formal verification of optical interconnects

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant