CN110249267B - 高压放电灯 - Google Patents

高压放电灯 Download PDF

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Publication number
CN110249267B
CN110249267B CN201880009946.0A CN201880009946A CN110249267B CN 110249267 B CN110249267 B CN 110249267B CN 201880009946 A CN201880009946 A CN 201880009946A CN 110249267 B CN110249267 B CN 110249267B
Authority
CN
China
Prior art keywords
reflector
side tube
light emitting
lamp
tube portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880009946.0A
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English (en)
Chinese (zh)
Other versions
CN110249267A (zh
Inventor
原田智纪
川岛洋德
榎本芳幸
吉本芳幸
富樫工
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Phoenix Motor Co ltd
Original Assignee
V Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Priority to CN202110935321.0A priority Critical patent/CN113791521A/zh
Publication of CN110249267A publication Critical patent/CN110249267A/zh
Application granted granted Critical
Publication of CN110249267B publication Critical patent/CN110249267B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/36Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
CN201880009946.0A 2017-02-02 2018-01-31 高压放电灯 Active CN110249267B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110935321.0A CN113791521A (zh) 2017-02-02 2018-01-31 高压放电灯

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017017856 2017-02-02
JP2017-017856 2017-02-02
PCT/JP2018/003293 WO2018143300A1 (ja) 2017-02-02 2018-01-31 高圧放電ランプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202110935321.0A Division CN113791521A (zh) 2017-02-02 2018-01-31 高压放电灯

Publications (2)

Publication Number Publication Date
CN110249267A CN110249267A (zh) 2019-09-17
CN110249267B true CN110249267B (zh) 2021-09-03

Family

ID=63040732

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201880009946.0A Active CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯
CN202110935321.0A Pending CN113791521A (zh) 2017-02-02 2018-01-31 高压放电灯

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202110935321.0A Pending CN113791521A (zh) 2017-02-02 2018-01-31 高压放电灯

Country Status (5)

Country Link
JP (1) JP6457162B2 (ja)
KR (1) KR102483865B1 (ja)
CN (2) CN110249267B (ja)
TW (1) TWI765960B (ja)
WO (1) WO2018143300A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111033385B (zh) * 2017-08-23 2022-09-13 凤凰电机公司 光源装置、曝光装置以及光源装置的判定方法
WO2020130090A1 (ja) * 2018-12-21 2020-06-25 株式会社ブイ・テクノロジー 露光装置用光照射装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290716A (ja) * 1992-04-14 1993-11-05 Toshiba Corp ヒューズ溶断検出回路
JP3481612B2 (ja) * 1999-12-02 2003-12-22 松下電器産業株式会社 放電ランプおよびランプ装置
US6784601B2 (en) * 1999-12-02 2004-08-31 Matsushita Electric Industrial Co., Ltd. Discharge lamp including heat releasing device and lamp device
JP2002075014A (ja) * 2000-06-16 2002-03-15 Matsushita Electric Ind Co Ltd ランプユニットおよび画像投影装置
JP3855955B2 (ja) * 2003-03-28 2006-12-13 セイコーエプソン株式会社 光源装置及びプロジェクタ
KR20040102301A (ko) * 2003-05-27 2004-12-04 삼성전자주식회사 보조광원을 채용하는 조명 장치 및 프로젝션 시스템
JP2006260891A (ja) * 2005-03-16 2006-09-28 Phoenix Denki Kk 超高圧放電灯ユニット
CN1881522A (zh) * 2005-06-15 2006-12-20 晶赞光电股份有限公司 一种具有辅助反射装置的高压气体放电灯
DE112007003409A5 (de) * 2007-05-04 2010-06-02 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe mit Zündhilfe
JP5243837B2 (ja) * 2008-04-14 2013-07-24 三菱電機照明株式会社 反射鏡付放電ランプ
JP2010244821A (ja) * 2009-04-06 2010-10-28 Ushio Inc 光照射装置
DE202009011727U1 (de) * 2009-08-28 2009-12-17 Osram Gesellschaft mit beschränkter Haftung Entladungslampe mit Reflektor
JP5376409B2 (ja) * 2010-01-07 2013-12-25 ウシオ電機株式会社 光源装置および光照射装置
JP2012113269A (ja) 2010-11-29 2012-06-14 Nsk Technology Co Ltd 露光装置用光照射装置
JP5702122B2 (ja) * 2010-11-29 2015-04-15 Nskテクノロジー株式会社 露光装置用光照射装置
JP5765622B2 (ja) * 2011-06-22 2015-08-19 ウシオ電機株式会社 光源装置
JP2013012389A (ja) * 2011-06-29 2013-01-17 Ushio Inc 光源素子
JP5869713B1 (ja) 2015-04-13 2016-02-24 フェニックス電機株式会社 光源装置及び露光装置とその検査方法

Also Published As

Publication number Publication date
WO2018143300A1 (ja) 2018-08-09
KR102483865B1 (ko) 2023-01-03
KR20190111045A (ko) 2019-10-01
CN113791521A (zh) 2021-12-14
CN110249267A (zh) 2019-09-17
TW201832268A (zh) 2018-09-01
JP6457162B2 (ja) 2019-01-23
JPWO2018143300A1 (ja) 2019-02-07
TWI765960B (zh) 2022-06-01

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SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20210918

Address after: Japan Hyogo Prefecture

Patentee after: PHOENIX MOTOR Co.,Ltd.

Address before: Kanagawa, Japan

Patentee before: V TECHNOLOGY Co.,Ltd.

TR01 Transfer of patent right