CN110231263A - A kind of PM2.5 mass sensor and preparation method thereof with self-cleaning function - Google Patents
A kind of PM2.5 mass sensor and preparation method thereof with self-cleaning function Download PDFInfo
- Publication number
- CN110231263A CN110231263A CN201910433998.7A CN201910433998A CN110231263A CN 110231263 A CN110231263 A CN 110231263A CN 201910433998 A CN201910433998 A CN 201910433998A CN 110231263 A CN110231263 A CN 110231263A
- Authority
- CN
- China
- Prior art keywords
- resonant frequency
- mass sensor
- piezoelectric membrane
- column array
- interdigital electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 18
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 239000012528 membrane Substances 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims description 33
- 239000010408 film Substances 0.000 claims description 26
- 239000002061 nanopillar Substances 0.000 claims description 16
- 238000005516 engineering process Methods 0.000 claims description 9
- 238000004528 spin coating Methods 0.000 claims description 8
- 238000000609 electron-beam lithography Methods 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 5
- 239000008187 granular material Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 11
- 239000003570 air Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005250 beta ray Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010897 surface acoustic wave method Methods 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention discloses a kind of PM2.5 mass sensor and preparation method thereof with self-cleaning function, the PM2.5 mass sensor includes SAW device and nano column array；SAW device is made of a pair of of low resonant frequency interdigital electrode, a pair of of high resonant frequency interdigital electrode, piezoelectric membrane, substrate；Nano column array is grown on piezoelectric membrane, positioned at the symmetrical central area of two pairs of interdigital electrodes.PM2.5 mass sensor with self-cleaning function of the invention adsorbs the PM2.5 particle in surrounding air by nano column array, and drift occurs for the signal frequency for exporting low resonant frequency interdigital electrode to monitor the concentration of PM2.5；The self-cleaning function of sensor is realized by high resonant frequency interdigital electrode.Operation of the present invention is simple, can facilitate, is accurate, the economic monitoring for realizing PM2.5 granule density under various environment.
Description
Technical field
The invention belongs to air quality sensor field, it is related to PM2.5 particulate matter quantity sensor in a kind of surrounding air,
More particularly to it is a kind of by nano column array and surface acoustic wave combine with self-cleaning function PM2.5 mass sensor and
Preparation method.
Background technique
As industrialization constantly develops, the burning of a large amount of fossil energies and the discharge of vehicle exhaust, haze phenomenon are got over
Come more serious.Haze is made of mist and haze, and mist itself is harmless, but due to the pollution of environment, the inside can include many right
The harmful substance of human body, microorganism etc.；Haze is mainly made of sulfur dioxide, nitrogen oxides and fine particle, fine grained therein
Object just refer to equivalent aerodynamic less than 2.5 microns can grain, i.e. PM2.5.PM2.5 seed activity is strong, and specific surface is big, is easy
Subsidiary poisonous and harmful substances, are the main reason for haze impact human health and atmospheric environment.2 months 2012, China
" ambient air quality " (GB3095-2012) of Environmental Protection Department publication clearly proposes that the PM2.5's in surrounding air is dense
Limit value is spent, with the reinforcement that the development of social economy and human health are realized, it is accurate to carry out to the PM2.5 concentration in surrounding air
Effective monitoring is of great significance.
The method of existing monitoring PM2.5 concentration has weight method, β ray method, trace oscillating balance method etc. at present.Weight method
Mainly by the way that PM2.5 to be directly trapped in transition film, balance weighing is then carried out, such methods are although simple and convenient, but
It is that can not accurately collect PM2.5 particle, superfine small particle can even pass through filter membrane, while cannot effectively carry out reality
When monitor on-line；And for β ray method, then it is to be collected into PM2.5 on filter paper, then by β radiation exposure, monitors ray
Attenuation degree is to calculate the weight of PM2.5, although wider by the dynamic range that β ray method monitors the measurement of PM2.5 concentration,
But beta ray source is needed, operational lower the problem of existing simultaneously radiation；Trace oscillating balance method is shaken based on conical component
Microbalance principle is swung to be tested, although real time on-line monitoring may be implemented, it is larger to be needed equipment volume, be easy by
The interference of temperature humidity, cost are very expensive.
Although existing PM2.5 concentration monitor means can effectively monitor PM2.5 concentration, exist technically or
Therefore economically the problem of, for the requirement of existing PM2.5 concentration monitor, is badly in need of a kind of simple effective method, Neng Goushi at present
When be monitored online, being capable of acquisition PM2.5 concentration results conveniently, accurate, economic.
Summary of the invention
In view of the problems of the existing technology, the PM2.5 matter with self-cleaning function that the object of the present invention is to provide a kind of
Quantity sensor and preparation method thereof, bulky to solve PM2.5 concentration monitor sensor poor accuracy in the prior art, knot
The technical problem of structure complexity.
In order to solve the above-mentioned technical problem, the invention adopts a technical scheme as:
A kind of PM2.5 mass sensor with self-cleaning function, including SAW device and nano column array；
Including SAW device and nano column array；
The SAW device includes substrate, the piezoelectric membrane being deposited in substrate and is deposited on piezoelectric membrane
A pair of of low resonant frequency electrode and a pair of of high resonant frequency electrode；
The nano column array is grown on piezoelectric membrane, and is located at the symmetrical central area of two pairs of interdigital electrodes；
Further, the pair of low resonant frequency electrode is a pair of of low resonant frequency interdigital electrode, and the pair of height is humorous
Vibration frequency electrode is a pair of of high resonant frequency interdigital electrode；The pair of low resonant frequency interdigital electrode is located at nano-pillar battle array
Two sides are arranged, refer to spacing coordination electrode resonance frequency by adjusting interdigital electrode；The pair of high resonant frequency interdigital electrode difference
Positioned at nano column array two sides, high resonance direction is referred to perpendicular to low resonant frequency direction by adjusting interdigital electrode
Spacing coordination electrode resonance frequency；
Further, the nano column array is radial array on piezoelectric membrane.
Further, the nano column array region is preferably circular or polygon, for example, square, rectangle,
Regular pentagon, regular hexagon and octagon etc..
Further, the high resonant frequency interdigital electrode and low resonant frequency interdigital electrode are metallic conduction electricity
Pole, preferred material Mo, Pt, Au or Al.
Further, the piezoelectric membrane is preferably that AlN piezoelectric membrane, Sc doping AlN piezoelectric membrane, PZT piezoelectricity are thin
Film or ZnO piezoelectric film.
Further, the substrate is high resistivity material, preferably High Resistivity Si.
The present invention also provides a kind of PM2.5 mass sensor with self-cleaning function preparation method, comprising steps of
S110 depositing piezoelectric film in substrate；
S120 one layer photoresist of spin coating on piezoelectric membrane；
S130 is removed by way of photoetching or electron beam lithography need to prepare low resonant frequency and high resonant frequency is interdigital
The photoresist of electrode zone；
S140 deposits interdigital electrode metallic film on the photoresist having already patterned；
S150 removes extra photoresist and extra metallic film by stripping technology；
S160 one layer photoresist of spin coating on the piezoelectric membrane for be prepared for interdigital electrode；
S170 removes the photoresist that need to prepare nano column array region by way of photoetching or electron beam lithography；
S180 deposits preparation nano-pillar film on the photoresist having already patterned；
S190 removes extra photoresist and extra nano-pillar by stripping technology, prepares on piezoelectric membrane by receiving
Rice column nano column array arranged according to certain rules.
The medicine have the advantages that
A kind of PM2.5 mass sensor with self-cleaning function provided by the invention, nano column array can be effective
The PM2.5 particle in surrounding air is adsorbed, PM2.5 can be realized to interdigital electrode in conjunction with low resonant frequency and high resonant frequency two
The monitoring of concentration and the self-cleaning effect of sensor, have broad application prospects.
Detailed description of the invention
Fig. 1 is the schematic top plan view of PM2.5 mass sensor in the embodiment of the present invention；
Fig. 2 is PM2.5 mass sensor schematic cross-sectional view in this Fig. 1, wherein (a) is the section view signal in the direction A-A in Fig. 1
Figure, (b) in Fig. 1 the direction B-B schematic cross-sectional view.
Fig. 3 is that deposition one is laminated conductive film schematic diagram in substrate in the embodiment of the present invention；
Fig. 4 be the embodiment of the present invention on piezoelectric membrane one layer photoresist schematic diagram of spin coating；
Fig. 5 is to pattern photoresist in the embodiment of the present invention, prepares low resonant frequency and high resonant frequency interdigital electrode area
Domain schematic shapes；
Fig. 6 is that interdigital electrode film is deposited on the photoresist having already patterned in the embodiment of the present invention；
In Fig. 7 embodiment of the present invention, extra photoresist is removed by stripping technology and prepares low resonant frequency and high resonance
Frequency interdigital electrode schematic diagram；
In Fig. 8 embodiment of the present invention, one layer photoresist of spin coating is illustrated on the piezoelectric membrane for be prepared for interdigital electrode
Figure；
In Fig. 9 embodiment of the present invention, nano column array area need to be prepared by being removed by way of photoetching or electron beam lithography
The photoresist schematic diagram in domain；
In Figure 10 embodiment of the present invention, nano-pillar film schematic diagram is deposited on the photoresist having already patterned；
In Figure 11 embodiment of the present invention, extra photoresist and extra nano-pillar film are removed by stripping technology,
Nano column array schematic diagram is prepared on piezoelectric membrane.
The components in the drawings are labeled as follows:
1- substrate, 2- piezoelectric membrane, 3- photoresist, 4- interdigital electrode film, 5- low resonant frequency input terminal interdigital electrode,
6- low resonant frequency output end interdigital electrode, 7- nano-pillar film, 8- nano-pillar, 9- high resonant frequency input terminal interdigital electrode,
10- high resonant frequency output end interdigital electrode.
Specific embodiment
In order to illustrate more clearly of the present invention and/or technical solution in the prior art, Detailed description of the invention sheet will be compareed below
Inventive embodiments.It should be evident that the accompanying drawings in the following description is only section Example of the invention, it is common for this field
For technical staff, without creative efforts, it is also possible to obtain other drawings based on these drawings, and obtain
Obtain other embodiments.
Fig. 1 and Fig. 2 is respectively the vertical view and schematic cross-sectional view of PM2.5 mass sensor preferred embodiment of the invention.Such as
Fig. 1 and the PM2.5 mass sensor shown in Fig. 2 with self-cleaning function include SAW device and nano column array.
The SAW device include a pair of of low resonant frequency interdigital electrode, a pair of of high resonant frequency interdigital electrode,
Piezoelectric membrane 2 and substrate 1；Two pairs of interdigital electrodes, piezoelectric membrane 2 and substrate 1 are in sandwich structure, are followed successively by from below to up
Substrate 1, piezoelectric membrane 2 and interdigital electrode.
By nano-pillar 8, array is formed the nano column array according to certain rules, is grown on piezoelectric membrane 2, and array is grown
Region is the circle of spoke-like.
The pair of low resonant frequency interdigital electrode includes that low resonant frequency input terminal interdigital electrode 5 and low resonant frequency are defeated
Outlet interdigital electrode 6；The pair of high resonant frequency interdigital electrode includes high resonant frequency input terminal interdigital electrode 9 and high resonance
Frequency output terminal interdigital electrode 10；The low resonant frequency input terminal interdigital electrode 5 and the interdigital electricity of low resonant frequency output end
Pole 6 is symmetrically located in nano column array two sides；The high resonant frequency input terminal interdigital electrode 9 and high resonant frequency output end
Interdigital electrode 10 is symmetrically located in the other two sides of nano column array, and direction is perpendicular to low resonant frequency input terminal interdigital electrode
5 and 6 direction of low resonant frequency output end interdigital electrode.PM2.5 mass sensor with self-cleaning function of the invention
Monitoring mode are as follows: radio-frequency signal source gives rf signal in low resonant frequency input terminal interdigital electrode 5, thin by piezoelectricity
The piezoelectric effect of film 2 causes low resonant frequency input terminal interdigital electrode 5 to generate resonance, and excites surface acoustic wave along piezoelectricity
2 surface of film is moved by nano-pillar 8 to low resonant frequency output end interdigital electrode 6, causes low resonant frequency output end interdigital
Electrode 6 generates resonance, exports electric signal to electric signal receiver.Surrounding air can be adsorbed by being located in the middle nano column array
PM2.5 particle, changes so as to cause the quality at nano column array, then makes low resonant frequency output end interdigital electrode 6
The signal frequency of output drifts about.Under different PM2.5 concentration, the PM2.5 granular mass of nano column array absorption is not
Equally, so that the signal frequency drift of the output of low resonant frequency output end interdigital electrode 6 is different.Low resonant frequency output end
The signal frequency drift data that interdigital electrode 6 exports can effectively reflect PM2.5 granule density, to realize to PM2.5
The monitoring of concentration.
The automatically cleaning mode of PM2.5 mass sensor with self-cleaning function of the invention are as follows: passed in the PM2.5 mass
Sensor closes the radiofrequency signal input in low resonant frequency input terminal interdigital electrode 5 after completing monitoring, while radio-frequency signal source exists
High frequency radio signals are given in high resonant frequency input terminal interdigital electrode 9, since high-frequency signal enables to high resonant frequency defeated
Enter to hold interdigital electrode 9 to generate violent vibration, and excites the surface acoustic wave of high frequency along 2 surface of piezoelectric membrane by nano-pillar
Array is moved to high resonant frequency output end interdigital electrode 10, and high resonant frequency output end interdigital electrode 10 is caused to generate resonance,
Electric signal is exported to electric signal receiver.The surface acoustic wave of high frequency can make nano column array generate violent movement, so that receiving
The PM2.5 that rice column 8 adsorbs is shaken off into surrounding air, realizes self-cleaning effect.It is interdigital by high resonant frequency output end
Whether the detectable nano column array of the electric signal that electrode 10 exports is clean, if high resonant frequency output end interdigital electrode 10
The electric signal of output restores the initial value before detection, then shows that nano column array is clean.
Fig. 3~11 show the direction PM2.5 mass sensor preferred embodiment A-A of the invention shown in Fig. 1~2 and are regarded
Processing step, it is specific as follows:
(110) as shown in figure 3, deposition one is laminated conductive film 2 on the base 1；
(120) as shown in figure 4, on piezoelectric membrane 2 one layer photoresist 3 of spin coating；
(130) as shown in figure 5, low resonant frequency need to be prepared and height is humorous by being removed by way of photoetching or electron beam lithography
The photoresist 3 in vibration frequency interdigital electrode region；
(140) as shown in fig. 6, depositing interdigital electrode film 4 on the photoresist 3 having already patterned；
(150) as shown in fig. 7, removing extra photoresist 3 and extra interdigital electrode film 4 by stripping technology, then
It is formd on piezoelectric membrane 2 in low resonant frequency input terminal interdigital electrode 5, low resonant frequency output end interdigital electrode 6 and figure
Unshowned high resonant frequency input terminal interdigital electrode 9 and high resonant frequency output end interdigital electrode 10；
(160) as shown in figure 8, on the piezoelectric membrane 2 for being prepared for interdigital electrode one layer photoresist 3 of spin coating；
(170) as shown in figure 9, nano column array region need to be prepared by being removed by way of photoetching or electron beam lithography
Photoresist 3；
(180) as shown in Figure 10, nano-pillar film 7 is deposited on the photoresist 3 having already patterned；
(190) as shown in figure 11, extra photoresist 3 and extra nano-pillar film 7 are removed by stripping technology, pressed
It has been prepared on conductive film by the nano column array arranged according to certain rules of nano-pillar 8.
Claims (9)
1. a kind of PM2.5 mass sensor with self-cleaning function, it is characterized in that:
Including SAW device and nano column array；
The SAW device includes substrate, the piezoelectric membrane being deposited in substrate and be deposited on piezoelectric membrane one
To low resonant frequency electrode and a pair of of high resonant frequency electrode；
The nano column array is grown on piezoelectric membrane, and is located at the symmetrical central area of two pairs of interdigital electrodes.
2. PM2.5 mass sensor as described in claim 1, it is characterized in that:
A pair of of low resonant frequency electrode is located at nano column array two sides；A pair of of high resonant frequency electrode point
It Wei Yu not the other two sides of nano column array；High resonant frequency electrode direction is vertical with low resonant frequency electrode direction.
3. the PM2.5 mass sensor as described in claim 1 and 2, it is characterized in that: the high resonant frequency electrode and low resonance
Frequency electrode is interdigital electrode.
4. the PM2.5 mass sensor as described in claim 1 and 2, it is characterized in that: the nano column array is on piezoelectric membrane
For radial array.
5. PM2.5 mass sensor as claimed in claim 4, it is characterized in that: the nano column array region is circle
Shape or polygon.
6. the PM2.5 mass sensor as described in claim 1 and 2, it is characterized in that: the high resonant frequency electrode and low resonance
Frequency electrode is metal conducting electrodes, and metal conducting electrodes material is Mo, Pt, Au or Al.
7. the PM2.5 mass sensor as described in claim 1 and 2, it is characterized in that: the piezoelectric membrane is that AlN piezoelectricity is thin
Film, Sc doping AlN piezoelectric membrane, PZT piezoelectric membrane or ZnO piezoelectric film etc..
8. the PM2.5 mass sensor as described in claim 1 and 2, it is characterized in that: the substrate is the high resistant of high resistivity
Silicon.
9. a kind of preparation method of the PM2.5 mass sensor with self-cleaning function, characterized in that include the following steps:
S110 depositing piezoelectric film in substrate；
S120 one layer photoresist of spin coating on piezoelectric membrane；
S130 is removed by way of photoetching or electron beam lithography need to prepare low resonant frequency and high resonant frequency interdigital electrode
The photoresist in region；
S140 deposits interdigital electrode metallic film on the photoresist having already patterned；
S150 removes extra photoresist and extra metallic film by stripping technology；
S160 one layer photoresist of spin coating on the piezoelectric membrane for be prepared for interdigital electrode；
S170 removes the photoresist that need to prepare nano column array region by way of photoetching or electron beam lithography；
S180 deposits preparation nano-pillar film on the photoresist having already patterned；
S190 removes extra photoresist and extra preparation nano-pillar film by stripping technology, prepares on piezoelectric membrane
By nano-pillar nano column array arranged according to certain rules.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910433998.7A CN110231263B (en) | 2019-05-23 | 2019-05-23 | PM2.5 mass sensor with self-cleaning function and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910433998.7A CN110231263B (en) | 2019-05-23 | 2019-05-23 | PM2.5 mass sensor with self-cleaning function and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110231263A true CN110231263A (en) | 2019-09-13 |
| CN110231263B CN110231263B (en) | 2020-10-30 |
Family
ID=67861586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910433998.7A Active CN110231263B (en) | 2019-05-23 | 2019-05-23 | PM2.5 mass sensor with self-cleaning function and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110231263B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN114100707A (en) * | 2021-10-21 | 2022-03-01 | 天津大学 | Device for capturing micro-nano particles |
| CN114989969A (en) * | 2022-05-27 | 2022-09-02 | 天津大学 | Device and method for capturing micro-nano particles in solution |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030024806A1 (en) * | 2001-07-16 | 2003-02-06 | Foret Todd L. | Plasma whirl reactor apparatus and methods of use |
| CN104075957A (en) * | 2013-03-29 | 2014-10-01 | 天津同阳科技发展有限公司 | Trace particulate matter measuring system based on composite tube oscillation balance and measuring method thereof |
| CN104697882A (en) * | 2014-09-30 | 2015-06-10 | 北京工业大学 | Mass sensor for ambient air PM (particulate matter)2.5 based on ZnO nanowire array and preparation method for mass sensor |
| WO2015189230A1 (en) * | 2014-06-10 | 2015-12-17 | Koninklijke Philips N.V. | Aerosol mass sensor and sensing method |
| CN105547901A (en) * | 2015-12-10 | 2016-05-04 | 中国电子科技集团公司信息科学研究院 | Particle adsorption apparatus and preparation method thereof |
| US20160197643A1 (en) * | 2013-09-17 | 2016-07-07 | Murata Manufacturing Co., Ltd. | High-frequency module and communication device |
| US20170023509A1 (en) * | 2014-04-15 | 2017-01-26 | Chemisense, Inc. | Crowdsourced wearable sensor system |
| US20170184548A1 (en) * | 2014-05-30 | 2017-06-29 | Koninklijke Philips N.V. | Aerosol particle mass sensor and sensing method |
| JP2017521646A (en) * | 2014-06-10 | 2017-08-03 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Aerosol sensor and sensor method |
| CN107045040A (en) * | 2016-12-28 | 2017-08-15 | 汪家琳 | Indoor toxic gas automatic detection and purification air interchanger |
| CN107422082A (en) * | 2017-05-31 | 2017-12-01 | 广东美的环境电器制造有限公司 | Air detection instrument and air purifier |
| CN107543783A (en) * | 2016-06-23 | 2018-01-05 | 中国科学院声学研究所 | A kind of PM2.5 detectors based on surface acoustic wave |
| CN107741376A (en) * | 2017-12-08 | 2018-02-27 | 南昌大学 | A kind of piezo-electric resonance type PM2.5 monitoring systems |
| CN108566174A (en) * | 2018-04-17 | 2018-09-21 | 武汉大学 | Default cavity protection wall type thin film bulk acoustic wave resonator and preparation method |
| CN108645741A (en) * | 2018-04-26 | 2018-10-12 | 天津同阳科技发展有限公司 | Oscillating balance and atmosphere particle concentration monitoring method |
| CN208013003U (en) * | 2017-12-08 | 2018-10-26 | 南昌大学 | A kind of piezo-electric resonance type PM2.5 monitorings system |
| CN109489843A (en) * | 2018-10-29 | 2019-03-19 | 武汉大学 | High sensor and preparation method thereof |
-
2019
- 2019-05-23 CN CN201910433998.7A patent/CN110231263B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030024806A1 (en) * | 2001-07-16 | 2003-02-06 | Foret Todd L. | Plasma whirl reactor apparatus and methods of use |
| CN104075957A (en) * | 2013-03-29 | 2014-10-01 | 天津同阳科技发展有限公司 | Trace particulate matter measuring system based on composite tube oscillation balance and measuring method thereof |
| US20160197643A1 (en) * | 2013-09-17 | 2016-07-07 | Murata Manufacturing Co., Ltd. | High-frequency module and communication device |
| US20170023509A1 (en) * | 2014-04-15 | 2017-01-26 | Chemisense, Inc. | Crowdsourced wearable sensor system |
| US20170184548A1 (en) * | 2014-05-30 | 2017-06-29 | Koninklijke Philips N.V. | Aerosol particle mass sensor and sensing method |
| JP2017521646A (en) * | 2014-06-10 | 2017-08-03 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Aerosol sensor and sensor method |
| WO2015189230A1 (en) * | 2014-06-10 | 2015-12-17 | Koninklijke Philips N.V. | Aerosol mass sensor and sensing method |
| CN104697882A (en) * | 2014-09-30 | 2015-06-10 | 北京工业大学 | Mass sensor for ambient air PM (particulate matter)2.5 based on ZnO nanowire array and preparation method for mass sensor |
| CN105547901A (en) * | 2015-12-10 | 2016-05-04 | 中国电子科技集团公司信息科学研究院 | Particle adsorption apparatus and preparation method thereof |
| CN107543783A (en) * | 2016-06-23 | 2018-01-05 | 中国科学院声学研究所 | A kind of PM2.5 detectors based on surface acoustic wave |
| CN107045040A (en) * | 2016-12-28 | 2017-08-15 | 汪家琳 | Indoor toxic gas automatic detection and purification air interchanger |
| CN107422082A (en) * | 2017-05-31 | 2017-12-01 | 广东美的环境电器制造有限公司 | Air detection instrument and air purifier |
| CN107741376A (en) * | 2017-12-08 | 2018-02-27 | 南昌大学 | A kind of piezo-electric resonance type PM2.5 monitoring systems |
| CN208013003U (en) * | 2017-12-08 | 2018-10-26 | 南昌大学 | A kind of piezo-electric resonance type PM2.5 monitorings system |
| CN108566174A (en) * | 2018-04-17 | 2018-09-21 | 武汉大学 | Default cavity protection wall type thin film bulk acoustic wave resonator and preparation method |
| CN108645741A (en) * | 2018-04-26 | 2018-10-12 | 天津同阳科技发展有限公司 | Oscillating balance and atmosphere particle concentration monitoring method |
| CN109489843A (en) * | 2018-10-29 | 2019-03-19 | 武汉大学 | High sensor and preparation method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN114100707A (en) * | 2021-10-21 | 2022-03-01 | 天津大学 | Device for capturing micro-nano particles |
| CN114989969A (en) * | 2022-05-27 | 2022-09-02 | 天津大学 | Device and method for capturing micro-nano particles in solution |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110231263B (en) | 2020-10-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110231263A (en) | A kind of PM2.5 mass sensor and preparation method thereof with self-cleaning function | |
| US6544478B1 (en) | QCM sensor | |
| Xuan et al. | A film bulk acoustic resonator oscillator based humidity sensor with graphene oxide as the sensitive layer | |
| Penza et al. | Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir–Blodgett layer of carbon nanotubes | |
| GB2506991A (en) | Measuring the mass of particulate matter in a gas | |
| CN103336053B (en) | A kind of surface acoustic wave gas sensors array of private reference | |
| EP1090288B1 (en) | Method and device for operating a microacoustic sensor array | |
| Wen et al. | A novel NO2 gas sensor using dual track SAW device | |
| JP2000338022A (en) | Multi-channel qcm sensor device and multi-channel qcm measuring system | |
| Huang et al. | Impedance based biosensor array for monitoring mammalian cell behavior | |
| Bertke et al. | Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection | |
| JP3933340B2 (en) | Multi-channel QCM sensor device | |
| CN107741376A (en) | A kind of piezo-electric resonance type PM2.5 monitoring systems | |
| CN104697882B (en) | A kind of mass sensitivity device of surrounding air PM2.5 particulate matters based on ZnO nanowire array and preparation method thereof | |
| CN104034798A (en) | Cell suspension concentration detection system and its detection method | |
| GB2371362A (en) | Monitoring apparatus and method for detecting particles in a gas stream using ionisation means and a SAW detector | |
| CN208013003U (en) | A kind of piezo-electric resonance type PM2.5 monitorings system | |
| CN110411925B (en) | System and method for measuring ultrafine particles based on surface acoustic wave technology | |
| DE102009047807A1 (en) | Apparatus and method for detecting at least one substance | |
| JP3066393B2 (en) | Sensor and manufacturing method thereof | |
| CN214585089U (en) | Surface acoustic wave ammonia sensor based on polyacrylic acid film | |
| WO2004067797A1 (en) | Arrangement consisting of a zinc oxide film applied to a substrate, method for producing said arrangement, and use of the same | |
| Chellasivalingam et al. | MEMS based gravimetric sensor for the detection of ultra-fine aerosol particles | |
| Wen et al. | A SF6 gas sensor using a dual track SAW device based on multi-wall carbon nanotubes | |
| Zielinski et al. | Compositional Analysis of Adsorbed Organic Aerosol on a Microresonator Mass Sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220407 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220901 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |