CN110231263B - PM2.5 mass sensor with self-cleaning function and preparation method thereof - Google Patents
PM2.5 mass sensor with self-cleaning function and preparation method thereof Download PDFInfo
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- 238000004140 cleaning Methods 0.000 title claims abstract description 18
- 238000002360 preparation method Methods 0.000 title abstract description 6
- 239000002061 nanopillar Substances 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 10
- 239000010408 film Substances 0.000 claims description 49
- 229920002120 photoresistant polymer Polymers 0.000 claims description 33
- 239000010409 thin film Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
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- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 238000004528 spin coating Methods 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
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- 238000012544 monitoring process Methods 0.000 description 12
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
Abstract
The invention discloses a PM2.5 mass sensor with a self-cleaning function and a preparation method thereof, wherein the PM2.5 mass sensor comprises a surface acoustic wave device and a nano-column array; the surface acoustic wave device consists of a pair of low resonance frequency interdigital electrodes, a pair of high resonance frequency interdigital electrodes, a piezoelectric film and a substrate; the nano-pillar array is grown on the piezoelectric film and is positioned in the symmetrical central area of the two pairs of interdigital electrodes. The PM2.5 mass sensor with the self-cleaning function adsorbs PM2.5 particles in ambient air through the nano-pillar array, so that the frequency of an electric signal output by the low-resonance-frequency interdigital electrode drifts to monitor the concentration of PM 2.5; the self-cleaning function of the sensor is realized by the high-resonance-frequency interdigital electrode. The method is simple to operate, and can conveniently, accurately and economically monitor the concentration of the PM2.5 particles in various environments.
Description
Technical Field
The invention belongs to the field of air quality sensors, relates to a PM2.5 particle mass sensor in ambient air, and particularly relates to a PM2.5 mass sensor with a self-cleaning function through combination of a nano-column array and a surface acoustic wave and a preparation method thereof.
Background
Along with the continuous development of industrialization, the haze phenomenon is more and more serious due to the combustion of a large amount of fossil energy and the emission of automobile exhaust. The haze consists of fog and haze, the fog is harmless, but the fog can contain a plurality of substances, microorganisms and the like which are harmful to human bodies due to environmental pollution; the haze is mainly composed of sulfur dioxide, nitrogen oxides and fine particulate matter, wherein the fine particulate matter refers to particles with aerodynamic equivalent of less than 2.5 microns, namely PM 2.5. The PM2.5 particles have strong activity and large specific surface, are easy to carry toxic and harmful substances, and are the main reasons for influencing the human health and the atmospheric environment by haze. In month 2 2012, the "environmental air quality standard" (GB3095-2012) issued by the ministry of environmental protection of china clearly proposes the concentration limit of PM2.5 in ambient air, and has important significance in accurately and effectively monitoring the concentration of PM2.5 in ambient air along with the development of social economy and the enhancement of human health consciousness.
The existing methods for monitoring the concentration of PM2.5 include a weighing method, a beta-ray method, a micro-oscillation balance method and the like. The weighing method mainly comprises the steps of directly intercepting PM2.5 on a transition membrane, and then weighing by a balance, wherein the method is simple and convenient, but cannot accurately collect PM2.5 particles, and extremely fine particles can even pass through a filtering membrane, and cannot effectively perform real-time online monitoring; in the beta-ray method, the PM2.5 is collected on filter paper, then the weight of the PM2.5 is calculated by irradiating the filter paper through beta rays and monitoring the attenuation degree of the rays, although the dynamic range of the measurement is wider when the concentration of the PM2.5 is monitored through the beta-ray method, a beta-ray source is needed, the operability is low, and the radiation problem exists; the principle of the micro-oscillation balance is that the test is carried out based on the principle of the conical element oscillation micro-balance, and although real-time online monitoring can be realized, the required equipment has large volume, is easily interfered by temperature and humidity, and has very high cost.
Although the existing PM2.5 concentration monitoring means can effectively monitor the PM2.5 concentration, the technical or economic problem exists, and therefore, aiming at the existing PM2.5 concentration monitoring requirement, a simple and effective method is urgently needed, the monitoring can be carried out on line in real time, and the PM2.5 concentration result can be conveniently, accurately and economically obtained.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a PM2.5 mass sensor with a self-cleaning function and a preparation method thereof, so as to solve the technical problems of poor accuracy, large volume and complex structure of the PM2.5 concentration monitoring sensor in the prior art.
In order to solve the technical problems, the invention adopts the technical scheme that:
a PM2.5 mass sensor with a self-cleaning function comprises an acoustic surface wave device and a nano-pillar array;
the device comprises an acoustic surface wave device and a nano-pillar array;
the surface acoustic wave device comprises a substrate, a piezoelectric film deposited on the substrate, and a pair of low resonance frequency electrodes and a pair of high resonance frequency electrodes deposited on the piezoelectric film;
the nano-pillar array grows on the piezoelectric film and is positioned in the symmetrical central area of the two pairs of interdigital electrodes;
further, the pair of low resonant frequency electrodes is a pair of low resonant frequency interdigital electrodes, and the pair of high resonant frequency electrodes is a pair of high resonant frequency interdigital electrodes; the pair of low-resonance-frequency interdigital electrodes are respectively positioned on two sides of the nano-pillar array, and the resonance frequency of the electrodes is controlled by adjusting the interdigital electrode finger distance; the pair of high-resonance-frequency interdigital electrodes are respectively positioned on two sides of the nano-pillar array, the direction of high resonance is vertical to the direction of low resonance frequency, and the resonance frequency of the electrodes is controlled by adjusting the distance between the interdigital electrodes;
further, the nanopillar array is a radial array on the piezoelectric film.
Further, the area where the nanopillar array is located is preferably a circle or a polygon, such as a square, a rectangle, a regular pentagon, a regular hexagon, a regular octagon, and the like.
Furthermore, the high-resonance-frequency interdigital electrode and the low-resonance-frequency interdigital electrode are both metal conductive electrodes, and the preferable material is Mo, Pt, Au or Al.
Further, the piezoelectric thin film is preferably an AlN piezoelectric thin film, a Sc-doped AlN piezoelectric thin film, a PZT piezoelectric thin film, or a ZnO piezoelectric thin film.
Further, the substrate is made of a high-resistivity material, preferably high-resistivity silicon.
The invention also provides a preparation method of the PM2.5 mass sensor with the self-cleaning function, which comprises the following steps:
s110, depositing a piezoelectric film on a substrate;
s120, spin-coating a layer of photoresist on the piezoelectric film;
s130, removing the photoresist in the interdigital electrode area with the low resonance frequency and the high resonance frequency in a photoetching or electron beam etching mode;
s140, depositing an interdigital electrode metal film on the patterned photoresist;
s150, removing redundant photoresist and redundant metal films through a stripping process;
s160, spin-coating a layer of photoresist on the piezoelectric film on which the interdigital electrode is prepared;
s170, removing the photoresist in the area where the nano-pillar array needs to be prepared in a photoetching or electron beam etching mode;
s180, depositing and preparing a nano-column thin film on the patterned photoresist;
s190, removing the redundant photoresist and the redundant nano-pillars through a stripping process, and preparing the nano-pillar array formed by arranging the nano-pillars according to a certain rule on the piezoelectric film.
The invention has the beneficial effects that:
according to the PM2.5 mass sensor with the self-cleaning function, the nano-column array can effectively adsorb PM2.5 particles in ambient air, the monitoring of the concentration of PM2.5 and the self-cleaning effect of the sensor can be realized by combining two pairs of interdigital electrodes with low resonance frequency and high resonance frequency, and the sensor has a wide application prospect.
Drawings
FIG. 1 is a schematic top view of a PM2.5 mass sensor in an embodiment of the invention;
fig. 2 is a schematic cross-sectional view of the PM2.5 mass sensor of fig. 1, wherein (a) is a schematic cross-sectional view in the direction of a-a in fig. 1, and (B) is a schematic cross-sectional view in the direction of B-B in fig. 1.
FIG. 3 is a schematic diagram of a piezoelectric film deposited on a substrate according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of spin coating a layer of photoresist on a piezoelectric film according to an embodiment of the present invention;
FIG. 5 is a schematic illustration of the shapes of the interdigital electrode regions for preparing low resonant frequency and high resonant frequency by patterning photoresist in accordance with an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating the deposition of an interdigital electrode film on a patterned photoresist in accordance with an embodiment of the present invention;
FIG. 7 is a schematic diagram of interdigital electrodes with low resonant frequency and high resonant frequency prepared by removing excess photoresist via a lift-off process in accordance with an embodiment of the present invention;
FIG. 8 is a schematic view of spin-coating a photoresist layer on a piezoelectric film on which interdigital electrodes have been fabricated, in accordance with an embodiment of the present invention;
FIG. 9 is a schematic diagram illustrating a process of removing photoresist in a region where a nano-pillar array is to be fabricated by photolithography or electron beam etching according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of the deposition of a nanopillar thin film on a patterned photoresist according to an embodiment of the present invention;
fig. 11 is a schematic diagram of a nano-pillar array fabricated on a piezoelectric film by removing excess photoresist and excess nano-pillar film through a lift-off process in an embodiment of the invention.
The parts in the drawings are numbered as follows:
the structure comprises a substrate 1, a piezoelectric film 2, a photoresist 3, an interdigital electrode film 4, a low resonant frequency input end interdigital electrode 5, a low resonant frequency output end interdigital electrode 6, a nano-pillar film 7, a nano-pillar 8, a high resonant frequency input end interdigital electrode 9 and a high resonant frequency output end interdigital electrode 10.
Detailed Description
In order to more clearly illustrate the present invention and/or the technical solutions in the prior art, the following will describe embodiments of the present invention with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
Fig. 1 and 2 are schematic top and cross-sectional views, respectively, of a preferred embodiment of a PM2.5 mass sensor of the present invention. The PM2.5 mass sensor having a self-cleaning function as shown in fig. 1 and 2 includes a surface acoustic wave device and a nanopillar array.
The surface acoustic wave device comprises a pair of interdigital electrodes with low resonant frequency, a pair of interdigital electrodes with high resonant frequency, a piezoelectric film 2 and a substrate 1; the two pairs of interdigital electrodes, the piezoelectric film 2 and the substrate 1 are of a sandwich structure, and the substrate 1, the piezoelectric film 2 and the interdigital electrodes are arranged from bottom to top in sequence.
The nano-pillar array is formed by arraying nano-pillars 8 according to a certain rule, grows on the piezoelectric film 2, and the growth array area is in a spoke-shaped circular shape.
The pair of low resonant frequency interdigital electrodes comprises a low resonant frequency input end interdigital electrode 5 and a low resonant frequency output end interdigital electrode 6; the pair of high resonant frequency interdigital electrodes comprises a high resonant frequency input end interdigital electrode 9 and a high resonant frequency output end interdigital electrode 10; the interdigital electrode 5 at the input end with low resonant frequency and the interdigital electrode 6 at the output end with low resonant frequency are symmetrically positioned at two sides of the nano-pillar array; the high resonant frequency input end interdigital electrode 9 and the high resonant frequency output end interdigital electrode 10 are symmetrically positioned at the other two sides of the nano-pillar array, and the directions of the high resonant frequency input end interdigital electrode and the high resonant frequency output end interdigital electrode are vertical to the directions of the low resonant frequency input end interdigital electrode 5 and the low resonant frequency output end interdigital electrode 6. The monitoring mode of the PM2.5 quality sensor with the self-cleaning function is as follows: the radio frequency signal source gives a radio frequency electric signal on the interdigital electrode 5 at the input end with the low resonance frequency, the interdigital electrode 5 at the input end with the low resonance frequency is caused to generate resonance through the piezoelectric effect of the piezoelectric film 2, the surface acoustic wave is excited to move to the interdigital electrode 6 at the output end with the low resonance frequency along the surface of the piezoelectric film 2 through the nano-pillar 8, the interdigital electrode 6 at the output end with the low resonance frequency is caused to generate resonance, and the electric signal is output to the electric signal receiver. The nano-pillar array positioned in the middle can adsorb PM2.5 particles of ambient air, so that the mass of the nano-pillar array is changed, and the frequency of an electric signal output by the interdigital electrode 6 at the low resonant frequency output end is shifted. Under different PM2.5 concentrations, the mass of PM2.5 particles adsorbed by the nano-pillar array is different, so that the frequency drift of an electric signal output by the interdigital electrode 6 at the output end of the low resonant frequency is different. The frequency drift data of the electric signals output by the interdigital electrode 6 at the low resonant frequency output end can effectively reflect the concentration of PM2.5 particles, so that the concentration of PM2.5 can be monitored.
The self-cleaning mode of the PM2.5 mass sensor with the self-cleaning function is as follows: after the PM2.5 quality sensor finishes monitoring, the radio frequency signal input on the interdigital electrode 5 of the low resonant frequency input end is closed, meanwhile, a radio frequency signal source gives a high-frequency radio frequency signal on the interdigital electrode 9 of the high resonant frequency input end, the high-frequency signal can enable the interdigital electrode 9 of the high resonant frequency input end to generate violent vibration, and the surface acoustic wave exciting high frequency moves to the interdigital electrode 10 of the high resonant frequency output end along the surface of the piezoelectric film 2 through the nano-pillar array, so that the interdigital electrode 10 of the high resonant frequency output end generates resonance, and the electric signal is output to an electric signal receiver. The high-frequency surface acoustic wave can enable the nano-pillar array to generate violent motion, so that PM2.5 adsorbed by the nano-pillars 8 is shaken off to the ambient air, and the self-cleaning effect is realized. Whether the nano-pillar array is clean or not can be detected through the electric signal output by the interdigital electrode 10 at the high resonant frequency output end, and if the electric signal output by the interdigital electrode 10 at the high resonant frequency output end is restored to the initial value before detection, the nano-pillar array is clean.
FIGS. 3-11 illustrate process steps in the A-A direction of the preferred embodiment of the PM2.5 mass sensor of the present invention shown in FIGS. 1-2, as follows:
(110) as shown in fig. 3, a piezoelectric film 2 is deposited on a substrate 1;
(120) as shown in fig. 4, a layer of photoresist 3 is spin-coated on the piezoelectric film 2;
(130) as shown in fig. 5, the photoresist 3 in the interdigital electrode area with low resonant frequency and high resonant frequency to be prepared is removed by means of photolithography or electron beam etching;
(140) as shown in fig. 6, depositing an interdigital electrode thin film 4 on the patterned photoresist 3;
(150) as shown in fig. 7, by removing the excess photoresist 3 and the excess interdigital electrode film 4 through a lift-off process, a low resonant frequency input terminal interdigital electrode 5, a low resonant frequency output terminal interdigital electrode 6, and a high resonant frequency input terminal interdigital electrode 9 and a high resonant frequency output terminal interdigital electrode 10, which are not shown in the figure, are formed on the piezoelectric film 2;
(160) as shown in fig. 8, a layer of photoresist 3 is spin-coated on the piezoelectric film 2 on which the interdigital electrodes have been prepared;
(170) as shown in fig. 9, the photoresist 3 in the area where the nano-pillar array is to be prepared is removed by means of photolithography or electron beam etching;
(180) as shown in fig. 10, a nanopillar thin film 7 is deposited on the patterned photoresist 3;
(190) as shown in fig. 11, the extra photoresist 3 and the extra nano-pillar film 7 are removed by a lift-off process, and a nano-pillar array formed by regularly arranging nano-pillars 8 is prepared on the piezoelectric film.
Claims (8)
1. A PM2.5 mass sensor with self-cleaning function, characterized by:
the device comprises an acoustic surface wave device and a nano-pillar array;
the surface acoustic wave device comprises a substrate, a piezoelectric film deposited on the substrate, and a pair of low resonance frequency electrodes and a pair of high resonance frequency electrodes deposited on the piezoelectric film;
the nano-pillar array grows on the piezoelectric film and is positioned in the symmetrical central area of the two pairs of interdigital electrodes;
the pair of low resonant frequency electrodes are respectively positioned on two sides of the nano-pillar array; the pair of high-resonance-frequency electrodes are respectively positioned on the other two sides of the nano-pillar array; the direction of the high resonance frequency electrode is vertical to the direction of the low resonance frequency electrode.
2. A PM2.5 mass sensor as set forth in claim 1, wherein: the high resonance frequency electrode and the low resonance frequency electrode are interdigital electrodes.
3. A PM2.5 mass sensor as set forth in claim 1, wherein: the nanopillar array is a radial array on the piezoelectric film.
4. A PM2.5 mass sensor as set forth in claim 3, wherein: the area where the nano-pillar array is located is circular or polygonal.
5. A PM2.5 mass sensor as set forth in claim 1, wherein: the high resonance frequency electrode and the low resonance frequency electrode are both metal conductive electrodes, and the metal conductive electrodes are made of Mo, Pt, Au or Al.
6. A PM2.5 mass sensor as set forth in claim 1, wherein: the piezoelectric film is an AlN piezoelectric film, a Sc-doped AlN piezoelectric film, a PZT piezoelectric film or a ZnO piezoelectric film.
7. A PM2.5 mass sensor as set forth in claim 1, wherein: the substrate is high-resistivity high-resistance silicon.
8. A method for preparing a PM2.5 mass sensor with a self-cleaning function according to claim 1, comprising the steps of:
s110, depositing a piezoelectric film on a substrate;
s120, spin-coating a layer of photoresist on the piezoelectric film;
s130, removing the photoresist in the interdigital electrode area with the low resonance frequency and the high resonance frequency in a photoetching or electron beam etching mode;
s140, depositing an interdigital electrode metal film on the patterned photoresist;
s150, removing redundant photoresist and redundant metal films through a stripping process;
s160, spin-coating a layer of photoresist on the piezoelectric film on which the interdigital electrode is prepared;
s170, removing the photoresist in the area where the nano-pillar array needs to be prepared in a photoetching or electron beam etching mode;
s180, depositing and preparing a nano-column thin film on the patterned photoresist;
s190, removing the redundant photoresist and the redundant nano-pillar film through a stripping process, and preparing a nano-pillar array formed by arranging nano-pillars according to a certain rule on the piezoelectric film.
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| WO2015160830A1 (en) * | 2014-04-15 | 2015-10-22 | Chemisense, Inc. | Crowdsourced wearable sensor system |
| JP6454733B2 (en) * | 2014-05-30 | 2019-01-16 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Aerosol particle mass sensor and sensing method |
| US20170097255A1 (en) * | 2014-06-10 | 2017-04-06 | Koninklijke Philips N.V. | Aerosol mass sensor and sensing method |
| CN106461527A (en) * | 2014-06-10 | 2017-02-22 | 皇家飞利浦有限公司 | Aerosol sensor and sensing method |
| CN104697882B (en) * | 2014-09-30 | 2017-07-21 | 北京工业大学 | A kind of mass sensitivity device of surrounding air PM2.5 particulate matters based on ZnO nanowire array and preparation method thereof |
| CN105547901A (en) * | 2015-12-10 | 2016-05-04 | 中国电子科技集团公司信息科学研究院 | Particle adsorption apparatus and preparation method thereof |
| CN107543783B (en) * | 2016-06-23 | 2019-11-19 | 中国科学院声学研究所 | A kind of PM2.5 detector based on surface acoustic wave |
| CN107045040A (en) * | 2016-12-28 | 2017-08-15 | 汪家琳 | Indoor toxic gas automatic detection and purification air interchanger |
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| CN107741376A (en) * | 2017-12-08 | 2018-02-27 | 南昌大学 | A kind of piezo-electric resonance type PM2.5 monitoring systems |
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