CN103336053A - Acoustic surface wave gas sensor array with single-used reference - Google Patents
Acoustic surface wave gas sensor array with single-used reference Download PDFInfo
- Publication number
- CN103336053A CN103336053A CN201310241518XA CN201310241518A CN103336053A CN 103336053 A CN103336053 A CN 103336053A CN 201310241518X A CN201310241518X A CN 201310241518XA CN 201310241518 A CN201310241518 A CN 201310241518A CN 103336053 A CN103336053 A CN 103336053A
- Authority
- CN
- China
- Prior art keywords
- sensor
- acoustic wave
- surface acoustic
- wave gas
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses an acoustic surface wave gas sensor array with a single-used reference. The acoustic surface wave gas sensor array comprises n measurement sensors and n reference sensors and further comprises a sensor array circuit board provided with 2n oscillation circuits, and an air chamber formed by tightly buckling an air cover on the circuit board; the n measurement sensors and the n reference sensors are mounted in the air chamber at the same time; the measurement sensors and the reference sensors are respectively arrayed into two rows along an air flow direction; the measurement sensors and the reference sensors at the opposite potions of an air flow are respectively in one pair, and is subjected to circuit frequency mixing to output n difference frequency signals. According to the acoustic surface wave gas sensor array disclosed by the invention, the measurement sensors and the reference sensors are located on equal-temperature points of an air flow temperature field so that the influences on responses of the sensor array by environmental temperature fluctuation can be effectively reduced.
Description
Technical field
The invention belongs to electronic technology field, relate to gas sensor, be specifically related to a kind of surface acoustic wave gas sensors array of private reference.
Background technology
Sonic surface wave gas sensors is at SAW (Surface Acoustic Wave) device deposition one deck sensitive thin film, and forms oscillatory circuit and forming circuit and constituting.After object gas to be detected was adsorbed by sensitive thin film, density, the electricity of sensitive membrane led, the variation of viscoelasticity etc. causes the change of the velocity of sound, tests out the variation of frequency or phase place by oscillatory circuit, thereby reaches the purpose of detection.It has advantages such as highly sensitive, that response is fast, volume is little, in light weight, low in energy consumption, is particularly suitable for the detection of light concentration gas such as poisonous, harmful.But gas to be measured all is among the complex environment atmosphere usually, need to adopt a plurality of sensors, in the different sensitive membrane of each sensor coating, constitute sensor array, utilize algorithm for pattern recognition that the signal of sensor array is handled, identify and detect specific object to be measured in the mixed atmosphere thereby be implemented in.
Sonic surface wave gas sensors is except the mass-sensitive to deposition, and is also very sensitive to the fluctuation of environment temperature etc.For reducing the influence of environment temperature, sensor adopts the double passage differential structure usually.Namely a sensor coating sensitive membrane constitutes the measurement passage, and another does not apply sensitive membrane formation reference channel, and the difference on the frequency of two passages is as signal of sensor.
Existing SAW sensor array, bibliographical information be to be constituted by a plurality of survey sensors and 1 reference sensor mostly, this 1 reference sensor forms differential signal with each survey sensor respectively.Typical document is as follows: 1. Rapp M, Reibel J, Voigt A, et al. New miniaturized SAW-sensor array for organic gas detection driven by multiplexed oscillators, Sensors and Actuators B, 2000,65:169 – 172.8 survey sensors and 1 reference sensor of this article are lined up two rows, by the gas channel series connection of loop line shape.
Be to improve the sensitivity of SAW sensor, through the front end of the SAW sensor array of being everlasting enricher is set; Perhaps in order to improve the resolution characteristic to mixed gas, be provided with chromatography column at the front end of SAW sensor array.All will produce thermal current during the work of enricher and chromatographic column, when the sensor array of thermal current array structure along the line was propagated, the temperature certainty on each sensor/reference reduce gradually and produce the temperature difference.But the sensor array array structure that shares reference not only can't be eliminated the temperature difference on each channel, and the temperature additional signal that produces of each channel also each is unequal.
The temperature coefficient of surface acoustic wave sensor mainly determined by the material of piezoelectric substrate and cut direction, the tangential quartz of AT be at present the most frequently used low temperature float tangential, its frequency-temperature coefficient also has 10 * 10-6/ ℃.But the dominant frequency of SAW sensor commonly used is more than 200MHz, even 0.1 ℃ temperature fluctuation also will cause the signal fluctuation of 200Hz at present.When the SAW sensor front end has enricher or chromatogram, when high temperature gas flow flows through successively along sensor array, will produce the very big temperature difference between the adjacent sensors.
For eliminating the temperature difference of sensor array, a method commonly used is active constant temperature measures such as employing semiconductor chilling plate.In such cases, reference sensor even the gas circuit of can getting along well are connected, and only play the effect of frequency reducing and no longer possess the effect of balance circumstance of temperature difference.Referring to document: 2. Grate J W, Rose-Pehrsson S L, Venezky D L, et al. Smart sensor system for trace organophosphorus and organosulfur vapor detection employing a temperature-controlled array of surface acoustic wave sensors, automated sample preconcentration, and pattern recognition, Anal Chem, 1993,65:1868-1881; 3. Milner G M, Detection/classification/quantification of chemical agents using an array of surface acoustic wave (SAW) devices, SPIE Vol. 5778, (2005), 305-316.But the employing of semiconductor chilling plate has increased the power consumption of sensor inevitably, and is very unfavorable for battery-powered hand-held gas detector.
Summary of the invention
At above-mentioned prior art, the technical problem to be solved in the present invention is: the surface acoustic wave gas sensors array how a kind of private reference is provided, under the situation that does not increase the sensor power consumption, eliminate the temperature difference on each channel, the signal that makes each sensor export is not subjected to the influence of temperature fluctuation.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of surface acoustic wave gas sensors array of private reference, comprise n survey sensor and n reference sensor, it is characterized in that, also comprise a sensor array circuitry plate with 2n oscillation circuit and be held on the circuit board and the air chamber that constitutes by a gas hood; Described survey sensor and reference sensor all are arranged in the described air chamber, ambient atmos enters from an end of air chamber, and discharge from the other end, direction along air-flow, n survey sensor and n reference sensor are lined up two row, the survey sensor and the reference sensor that are in reciprocity position are formed 1 pair, by n difference frequency signal of output after the circuit board mixing.
The surface acoustic wave gas sensors array of a kind of private reference that provides according to such scheme, it is characterized in that, the left and right sides of described gas hood has 1-2 air intake opening and exhausr port, the complete hollow of the inner chamber of gas hood, or by two row loculuses constitute, every row's loculus is ganged up common n each other, and two row's loculuses are laid survey sensor and reference sensor respectively.
The material of described gas hood is metals such as aluminium, copper.
The surface acoustic wave gas sensors array of a kind of private reference that provides according to such scheme is characterized in that, n 〉=3, generally, n≤10.
The surface acoustic wave gas sensors array of a kind of private reference that provides according to such scheme, it is characterized in that, applied different sensitive thin films on n the survey sensor, do not apply sensitive membrane on the reference sensor, the type of sensitive thin film mainly contains: nonconducting polymkeric substance is (as PIB, PEI etc.), conducting polymer is (as polyaniline, polythiophene etc.), molecular sieve and molecularly imprinted polymer, carbon nano-tube and Graphene, the inorganic, metal oxide semiconductor is (as SnO2, ZnO etc.), inorganic organic compound film is (as polypyrrole/In2O3, carbon black/polymkeric substance, carbon pipe/polymkeric substance etc.).
The surface acoustic wave gas sensors array of a kind of private reference that provides according to such scheme is characterized in that described piezoelectric substrate is various tangential quartz, LiNbO
3, LiTaO
3And the ZnO on the Si substrate, AlN piezoelectric membrane.
The surface acoustic wave gas sensors array of a kind of private reference that provides according to such scheme; it is characterized in that; n survey sensor and n reference sensor are made of discrete device; the separation SAW device that removes after metal coating is covered is reference sensor; the SAW device that interdigitated metal electrode IDT goes up after the coating sensitive membrane is survey sensor, adopts the metal base of TO-39 type to connect to realize that device inserts at circuit board.
Compared with prior art, the present invention has following beneficial effect:
One, survey sensor of the present invention and reference sensor since be in air-flow temperature etc. on the warm spot, can reduce the influence that environmental temperature fluctuation responds sensor array effectively;
Two, to adopt substrate to be convenient to as substrate integrated for surface acoustic wave gas sensors array provided by the invention, and the preparation method is simple, adopts traditional micro-processing technology just can realize.
Description of drawings
Fig. 1 is the structural representation of the surface acoustic wave gas sensors array of private reference of the present invention;
Fig. 2 is the differential principle synoptic diagram of the surface acoustic wave gas sensors array of private reference of the present invention;
Fig. 3 is the private reference surface acoustic wave gas sensors array of monolithic integrated form of the present invention;
Fig. 4 is the surface acoustic wave gas sensors array of the private reference that is made of discrete device of the present invention;
Reference numeral is: 1 is gas hood, and 2 is reference sensor, and 3 is survey sensor, and 4 is circuit board, and 5 are sound absorption glue, and 6 is quartz base plate, and 7 is the loculus in the gas hood, and 8 is the TO-39 pedestal.
Embodiment
Provide following description with reference to accompanying drawing to be limited by claim and equivalent thereof to help complete understanding.Following examples only are exemplary, so those of ordinary skill in the art will recognize, various changes and the modification under situation about not departing from the scope of the present invention with spirit embodiment made all fall into protection scope of the present invention.
As shown in Figure 3, the surface acoustic wave gas sensors array of present embodiment has 4 survey sensors 3 and 4 reference sensor 2, they all prepare on the quartz base plate 6 that same AT cuts, quartz base plate 6 is fixed on the circuit board 4, formed the sensor array of monolithic integrated form, be coated with sound absorption glue 5 between each sensor and crosstalk to prevent the acoustics of each sensor when working.The size of single SAW device electrode (comprising pad) is 12mm * 3mm, and the substrate area of whole 4 * 2 arrays is 60mm * 8mm.4 survey sensors and 4 reference sensor are lined up two rows respectively, and the frequency of last row's i reference sensor and i the survey sensor of arranging is down exported behind the frequency mixer difference frequency.Aluminum gas hood 1 is strip, and inner hollow fully covers quartz base plate 6 and be held on the circuit board 4, forms the gas test chamber.Left and right sides central authorities at gas hood 1 are respectively equipped with an air intake opening and an exhausr port, and the external air pump (not shown) of exhausr port makes gas to be measured uniflux in air chamber.Air-flow by equivalent locations reference sensor and during survey sensor, temperature equates, thereby has reduced the influence of gas temperature fluctuation to the sensor response.
As different from Example 1, the SAW (Surface Acoustic Wave) device of embodiment 2 employing separation is that the SAW device makes up sensor array.The SAW device is used as wave filter in a large number at communication field; the SAW wave filter of buying 433.94MHz, TO-39 encapsulation; after its metal coating lid removed, just become the reference sensor of embodiment 2, and then after the IDT of SAW device coating sensitive membrane, just formed survey sensor.The same with embodiment 1, adopt 4 survey sensors 3 and 4 reference sensor 2 to form sensor array equally, as shown in Figure 4.Difference has 2 points: the one, and the metal gas hood 1 of present embodiment contains 8 cavitys, when its fastening is on circuit board 4,8 SAW sensors just in time are filled in these cavitys, thereby have formed the electromagnetic screen between the SAW device, can prevent the electromagnetic interference (EMI) between the device; The 2nd, in these 8 cavitys, 4 cavitys of last row communicate with each other, and 4 cavitys of following row communicate with each other, and form two gas channels, and therefore whole gas hood 1 has two air intake openings and two exhausr ports.The gentle opening of the cavity of two rows is just the same, therefore has identical temperature in the position of equity.
Be positioned at reciprocity position effective inhibiting effect that the sensor temperature is floated of temperature for the checking reference sensor, tested sensor front end when being connected to enricher, the response of the thermal current that private reference SAW sensor array and shared reference SAW sensor array produce enricher.Sharing the reference sensor array is the alignment structure, can lay 1 reference and 3 survey sensors.Control methods is as follows: adopt same group of measurement/reference sensor, at first it is installed in No. 1 position and No. 4 positions of sharing the reference sensor array, spacing is approximately 30mm, and for the thermal current that enricher produces, test obtains the peak value of response of 430Hz.And when this group measurement/reference sensor was installed in No. 1 position of private reference SAW sensor array on a 50-50 basis, the peak value of thermal current only had about 50Hz.As seen, private reference SAW sensor array provided by the invention significantly the extraneous temperature fluctuation of balance to the influence of sensor response.
Claims (8)
1. the surface acoustic wave gas sensors array of a private reference, comprise n survey sensor and n reference sensor, it is characterized in that, also comprise a sensor array circuitry plate with 2n oscillation circuit and be held on the circuit board and the air chamber that constitutes by a gas hood; Described survey sensor and reference sensor all are arranged in the described air chamber, ambient atmos enters from an end of air chamber, and discharge from the other end, direction along air-flow, n survey sensor and n reference sensor are lined up two row, the survey sensor and the reference sensor that are in reciprocity position are formed 1 pair, by n difference frequency signal of output after the circuit board mixing.
2. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place, it is characterized in that, the left and right sides of described gas hood has 1-2 air intake opening and exhausr port, the complete hollow of the inner chamber of gas hood or constituted by two evacuation chambers, gang up common n between every evacuation chamber each other, two evacuation chambers are laid survey sensor and reference sensor respectively.
3. require the surface acoustic wave gas sensors array of 1 or 2 described private references according to the power place, it is characterized in that, the material of described gas hood is aluminium, copper metal.
4. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place, it is characterized in that, n 〉=3, generally, n≤10.
5. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place, it is characterized in that, survey sensor and reference sensor are produced on the sensor array that constitutes the monolithic integrated form on the same piezoelectric substrate.
6. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place, it is characterized in that, described piezoelectric substrate is various tangential quartz, lithium niobate LiNbO
3, lithium tantalate LiTaO
3And the ZnO on the Si substrate, AlN piezoelectric membrane.
7. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place; it is characterized in that; n survey sensor and n reference sensor are made of discrete device; the separation SAW device that removes after metal coating is covered is reference sensor, and the SAW device that interdigitated metal electrode IDT goes up after the coating sensitive membrane is survey sensor.
8. require the surface acoustic wave gas sensors array of 1 described private reference according to the power place, it is characterized in that, at n the different sensitive thin film of survey sensor coating, do not apply sensitive membrane on the reference sensor, described sensitive thin film is nonconducting polymkeric substance, conducting polymer, molecular sieve and molecularly imprinted polymer, carbon nano-tube and Graphene, inorganic, metal oxide semiconductor, inorganic organic compound film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241518.XA CN103336053B (en) | 2013-06-18 | 2013-06-18 | A kind of surface acoustic wave gas sensors array of private reference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241518.XA CN103336053B (en) | 2013-06-18 | 2013-06-18 | A kind of surface acoustic wave gas sensors array of private reference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103336053A true CN103336053A (en) | 2013-10-02 |
| CN103336053B CN103336053B (en) | 2015-11-04 |
Family
ID=49244257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310241518.XA Active CN103336053B (en) | 2013-06-18 | 2013-06-18 | A kind of surface acoustic wave gas sensors array of private reference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103336053B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954733A (en) * | 2014-05-07 | 2014-07-30 | 广西玉柴机器股份有限公司 | Detection tool of gas sensor |
| CN103995050A (en) * | 2014-06-04 | 2014-08-20 | 深圳大学 | Surface acoustic wave glucose sensor and making method thereof |
| CN104502631A (en) * | 2015-01-05 | 2015-04-08 | 厦门烯成科技有限公司 | Accelerating sensor based on graphene |
| CN106525963A (en) * | 2016-11-23 | 2017-03-22 | 北京无线电计量测试研究所 | Sewage harmful gas sensor and method |
| CN107643228A (en) * | 2017-08-31 | 2018-01-30 | 中国船舶重工集团公司第七〇九研究所 | Measure chip of mercury vapour and preparation method thereof, sensor and its application method |
| CN110554155A (en) * | 2019-10-22 | 2019-12-10 | 深圳市无眼界科技有限公司 | Constant temperature gas detection system |
| CN110988113A (en) * | 2019-07-09 | 2020-04-10 | 天津中德应用技术大学 | Chemical warfare agent sensor and preparation method thereof |
| WO2021195827A1 (en) * | 2020-03-30 | 2021-10-07 | 京东方科技集团股份有限公司 | Acoustic wave transducer and driving method therefor |
| CN115628765A (en) * | 2022-10-27 | 2023-01-20 | 中船重工安谱（湖北）仪器有限公司 | Surface acoustic wave measuring device |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1983001511A1 (en) * | 1981-10-13 | 1983-04-28 | Univ Maine | Surface acoustic wave oscillator gas detector |
| US4895017A (en) * | 1989-01-23 | 1990-01-23 | The Boeing Company | Apparatus and method for early detection and identification of dilute chemical vapors |
| US5323636A (en) * | 1993-06-11 | 1994-06-28 | The United States Of America As Represented By The Secretary Of The Army | Dual-channel flexural acoustic wave chemical sensor |
| US6378370B1 (en) * | 2000-03-08 | 2002-04-30 | Sensor Research & Development Corp. | Temperature compensated surface-launched acoustic wave sensor |
| CN101135674A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Method for improving sonic surface wave gas sensors temperature stability |
| CN101135670A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Two-channel sonic surface wave gas sensors having humidity compensate function |
| CN101458230A (en) * | 2008-12-29 | 2009-06-17 | 南开大学 | Multichannel surface acoustic wave chemical sensing system |
| CN101493437A (en) * | 2009-01-21 | 2009-07-29 | 电子科技大学 | Surface acoustic wave gas sensors array with electromagnetic shielding function |
| CN101607167A (en) * | 2009-07-24 | 2009-12-23 | 电子科技大学 | A kind of micro gas enricher and using method thereof with refrigerator |
| CN102012399A (en) * | 2010-09-27 | 2011-04-13 | 电子科技大学 | Device for improving response stability of surface acoustic wave gas sensor |
| CN102636564A (en) * | 2012-04-25 | 2012-08-15 | 电子科技大学 | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof |
-
2013
- 2013-06-18 CN CN201310241518.XA patent/CN103336053B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1983001511A1 (en) * | 1981-10-13 | 1983-04-28 | Univ Maine | Surface acoustic wave oscillator gas detector |
| US4895017A (en) * | 1989-01-23 | 1990-01-23 | The Boeing Company | Apparatus and method for early detection and identification of dilute chemical vapors |
| US5323636A (en) * | 1993-06-11 | 1994-06-28 | The United States Of America As Represented By The Secretary Of The Army | Dual-channel flexural acoustic wave chemical sensor |
| US6378370B1 (en) * | 2000-03-08 | 2002-04-30 | Sensor Research & Development Corp. | Temperature compensated surface-launched acoustic wave sensor |
| CN101135674A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Method for improving sonic surface wave gas sensors temperature stability |
| CN101135670A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Two-channel sonic surface wave gas sensors having humidity compensate function |
| CN101458230A (en) * | 2008-12-29 | 2009-06-17 | 南开大学 | Multichannel surface acoustic wave chemical sensing system |
| CN101493437A (en) * | 2009-01-21 | 2009-07-29 | 电子科技大学 | Surface acoustic wave gas sensors array with electromagnetic shielding function |
| CN101607167A (en) * | 2009-07-24 | 2009-12-23 | 电子科技大学 | A kind of micro gas enricher and using method thereof with refrigerator |
| CN102012399A (en) * | 2010-09-27 | 2011-04-13 | 电子科技大学 | Device for improving response stability of surface acoustic wave gas sensor |
| CN102636564A (en) * | 2012-04-25 | 2012-08-15 | 电子科技大学 | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954733B (en) * | 2014-05-07 | 2016-04-27 | 广西玉柴机器股份有限公司 | The detection frock of gas sensor |
| CN103954733A (en) * | 2014-05-07 | 2014-07-30 | 广西玉柴机器股份有限公司 | Detection tool of gas sensor |
| CN103995050A (en) * | 2014-06-04 | 2014-08-20 | 深圳大学 | Surface acoustic wave glucose sensor and making method thereof |
| CN104502631A (en) * | 2015-01-05 | 2015-04-08 | 厦门烯成科技有限公司 | Accelerating sensor based on graphene |
| CN104502631B (en) * | 2015-01-05 | 2017-06-06 | 厦门烯成石墨烯科技有限公司 | A kind of acceleration transducer based on Graphene |
| CN106525963B (en) * | 2016-11-23 | 2019-03-08 | 北京无线电计量测试研究所 | A kind of sewage harmful gas sensor and method |
| CN106525963A (en) * | 2016-11-23 | 2017-03-22 | 北京无线电计量测试研究所 | Sewage harmful gas sensor and method |
| CN107643228A (en) * | 2017-08-31 | 2018-01-30 | 中国船舶重工集团公司第七〇九研究所 | Measure chip of mercury vapour and preparation method thereof, sensor and its application method |
| CN110988113A (en) * | 2019-07-09 | 2020-04-10 | 天津中德应用技术大学 | Chemical warfare agent sensor and preparation method thereof |
| CN110554155A (en) * | 2019-10-22 | 2019-12-10 | 深圳市无眼界科技有限公司 | Constant temperature gas detection system |
| WO2021195827A1 (en) * | 2020-03-30 | 2021-10-07 | 京东方科技集团股份有限公司 | Acoustic wave transducer and driving method therefor |
| US11533558B2 (en) | 2020-03-30 | 2022-12-20 | Beijing Boe Technology Development Co., Ltd. | Acoustic transducer and driving method thereof |
| CN115628765A (en) * | 2022-10-27 | 2023-01-20 | 中船重工安谱（湖北）仪器有限公司 | Surface acoustic wave measuring device |
| CN115628765B (en) * | 2022-10-27 | 2023-11-07 | 中船重工安谱（湖北）仪器有限公司 | Surface acoustic wave measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103336053B (en) | 2015-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103336053B (en) | A kind of surface acoustic wave gas sensors array of private reference | |
| Dean et al. | A capacitive fringing field sensor design for moisture measurement based on printed circuit board technology | |
| CN101135670B (en) | Two-channel sonic surface wave gas sensors having humidity compensate function | |
| US11460434B2 (en) | Gas detection system with eliminating influence of ambient temperature and humidity changes and the method thereof | |
| CN102636564A (en) | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof | |
| Douglas Shields | Low-frequency wind noise correlation in microphone arrays | |
| CN206038938U (en) | MEMS electric field sonde system | |
| CN103994939A (en) | Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor | |
| CN105738470B (en) | A kind of sonic surface wave gas sensors | |
| CN102305827A (en) | Love wave sensor testing system based on frequency sweeping technology, and a testing method thereof | |
| CN104330470B (en) | Detection means based on SAW sensor | |
| CN105890661A (en) | Multi-physical-parameter sensor based on multi-channel surface acoustic wave | |
| CN101493437B (en) | Surface acoustic wave gas sensors array with electromagnetic shielding function | |
| CN105203979A (en) | Electrostatic direction finding system | |
| CN105807340B (en) | A kind of temperature-compensation method of Temperature Humidity Sensor peculiar to vessel | |
| CN109187737B (en) | Carbon monoxide sensor based on SAW device and concentration calculation method thereof | |
| CN201364325Y (en) | Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function | |
| Hejczyk et al. | Semiconductor sensor layer in SAW gas sensors configuration | |
| CN205785612U (en) | A kind of surface acoustic wave sensor based on microgap pressure monitoring | |
| Hrach et al. | Capacitive flowmeter for gas-solids flow applications exploiting spatial frequency | |
| CN106442717A (en) | Surface acoustic wave transducer for detecting volatile organic pollutants | |
| CN206920380U (en) | Portable trace mercury analyzer | |
| Peltzer et al. | Experimental investigations of natural and controlled transition on a laminar flow airfoil | |
| CN102774064B (en) | Sensitive adsorption film and its manufacturing method | |
| CN109405998A (en) | A kind of new type of SAW temperature sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |