CN201364325Y - Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function - Google Patents
Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function Download PDFInfo
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- CN201364325Y CN201364325Y CNU2009200787859U CN200920078785U CN201364325Y CN 201364325 Y CN201364325 Y CN 201364325Y CN U2009200787859 U CNU2009200787859 U CN U2009200787859U CN 200920078785 U CN200920078785 U CN 200920078785U CN 201364325 Y CN201364325 Y CN 201364325Y
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Abstract
The utility model discloses a surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function, belonging to electronic technical field. The utility model relates to a gas sensor, in particular to a method for preventing the electromagnetic interference between SAW gas sensor array units, which comprises at least two SAW devices and a driving circuit, and is characterized in that the method also comprises a gas distribution system which consists of a micro air pump and at least two metal chambers; each SAW device is respectively arranged in the independent metal chamber; and various metal chambers are communicated with each other through a vent hole. The SAW gas sensor array skillfully integrates the functions of gas distribution and electromagnetic shielding, and has the characteristics of simple structure, easy realization, good electromagnetic shielding effect and the like.
Description
Technical field
The utility model belongs to electronic technology field, relates to gas sensor, is specifically related to prevent the method for electromagnetic interference (EMI) between the surface acoustic wave gas sensors array unit.
Background technology
Sonic surface wave gas sensors is deposition one deck sensitive thin film on SAW (Surface Acoustic Wave) device, and forms oscillatory circuit and constitute.When object gas to be detected by after the sensitive thin film absorption, the density of sensitive membrane (quality), electricity are led, the variation of viscoelasticity etc. causes the change of the velocity of sound, test out the variation of frequency or phase place by oscillatory circuit, thereby reach the purpose of detection.It has highly sensitive, volume is little, little with semiconductor technology compatibility, power consumption, be convenient to characteristics such as remote measurement.
Sonic surface wave gas sensors is determined by the physicochemical characteristics of sensitive thin film fully to the selective adsorption of object gas, use the total cross sensitive characteristic that exists to a certain degree of single sensitive material, the sensitive material that has complete specific adsorption ability for object gas does not almost have.Be head it off, adopt sensor array usually, apply different sensitive materials on each unit, array provides multiple information, qualitative even composition and concentration definite gas to be measured quantitatively by mode identification technology.
Usually, each unit in the surface acoustic wave gas sensors array all has independently oscillatory circuit, and oscillation frequency is very close.When all unit integrated in array, serious electromagnetic interference (EMI) can take place in the high-frequency signal between array element, particularly when making array of saw sensors on a piezoelectric substrate, also may exist acoustics between array element and crosstalk.In addition,,, also adopt channel structure usually, exist same electromagnetic interference problem in order to eliminate the influence of temperature etc. in the environment even for single surface acoustic wave sensor.These interference have reduced the signal to noise ratio (S/N ratio) of sensor, influence the detection sensitivity of sensor.
For solving the electromagnetic interference (EMI) between surface acoustic wave sensor each passage or each array element of array of saw sensors, existing solution mainly is the improvement of device aspect or the improvement of circuit aspect.
1) improvement of device aspect
U.S. Pat 5325704 discloses a kind of surface acoustic wave chemical sensor array, has adopted the measure at sound interchannel coating acoustic absorbant to reduce electromagnetic interference (EMI).Other improvement aspect device are mainly at Surface Acoustic Wave Filter, though just can be used as surface acoustic wave sensor, not relevant bibliographical information in principle after applying sensitive thin film on these wave filters that improved.Disclose a kind of Surface Acoustic Wave Filter as patent CN99804380.X, by the particular design to interdigital electrode IDT, when making the work of IDT symmetry, the magnetic flux of induction is zero.U.S. Patent application US20070279156A1 discloses a kind of Surface Acoustic Wave Filter with improved frequency selectivity and isolation, by the metal electrode of ground connection is set at adjacent sound interchannel, reaches to reduce and crosstalks, and strengthens the purpose of isolating.
2) improvement of circuit aspect
U.S. Pat 6321588B1 discloses a kind of chemical sensor array, adopted the power sharing device to come to power in proper order to each sensor unit, in each time period, all have only a surface acoustic wave sensor unit like this, fundamentally eliminated electromagnetic interference (EMI) in work.But above-mentioned patent exists long shortcoming of sampling time, because after each surface acoustic wave sensor restarts, needs the regular hour to reach thermal equilibrium, otherwise the sensitivity meeting of sensor reduces.For this reason, European patent EP 9806011 has increased a controllable phase shifter in each oscillatory circuit, oscillatory circuit other parts except that phase shifter, always be in power-up state as power amplifier etc., and phase shifter is by FPGA sequential gating, and be operated on separately the optimum phase point, thereby reach the purpose identical with United States Patent (USP) 6321588B1, but reduced heat balance time.
Above-mentioned two classes are improved one's methods and had following shortcoming: the improvement of (1) device aspect is all carried out at monolithic integrated-type device, a plurality of sensor units are integrated on the piezoelectric substrate, though help device miniaturization, be unfavorable for the coating of multiple sensitive thin film.Sensitive thin film adopts organic film more, and its selectivity is better than inorganic thin film greatly.The preparation method of organic film has spin coating, spraying, dip-coating, LB film, self assembly etc., will prepare multiple organic film in the zones of different of same array device, has increased the difficulty of technology, even incompatible on the technology.(2) each sensor unit work principle has successively been adopted in the improvement of circuit aspect, has prolonged the sampling time inevitably, has reduced the response speed of sensor, makes it be difficult to satisfy poisonous, inflammable, explosion hazard gases and detects the requirement to fast-response.
Summary of the invention
The utility model provides a kind of surface acoustic wave gas sensors array with electro-magnetic screen function, can eliminate the electromagnetic interference (EMI) between each of sonic surface wave gas sensors passage or each array element of array of saw sensors fully, and simple in structure, be easy to make.
The technical matters that the utility model proposed is to solve like this:
A kind of surface acoustic wave gas sensors array with electro-magnetic screen function, as shown in Figure 2, comprise at least two SAW (Surface Acoustic Wave) device and driving circuit, it is characterized in that, also comprise a gas delivery system, described gas delivery system is made of micro air pump and two metal cells at least, and each SAW (Surface Acoustic Wave) device lays respectively at independently in the metal cell, is connected by air hole between each metal cell.
According to a kind of surface acoustic wave gas sensors array with electro-magnetic screen function that such scheme provides, described SAW (Surface Acoustic Wave) device and driving circuit are installed on the printed circuit board; Described all metal cells constitute the metallic shield of an integral body, and affiliated metallic shield is installed on the printed circuit board; Has air packing between described metallic shield and the printed circuit board, to guarantee the impermeability of metal cell except that air hole.
A kind of surface acoustic wave gas sensors array with electro-magnetic screen function that provides according to such scheme, according to the direction of gas flow, each SAW (Surface Acoustic Wave) device can adopt the mode of serial or parallel connection to lay respectively at independently in the metal cell.When each SAW (Surface Acoustic Wave) device adopted series system to lay respectively at independently in the metal cell, described gas delivery system had an air admission hole and a micro air pump; When each SAW (Surface Acoustic Wave) device adopted parallel way to lay respectively at independently in the metal cell, described gas delivery system had and identical air admission hole and the micro air pump of SAW (Surface Acoustic Wave) device way in parallel.
According to a kind of surface acoustic wave gas sensors array that such scheme provides, it is characterized in that its corresponding driving circuit of described SAW (Surface Acoustic Wave) device is positioned at same metal cell with electro-magnetic screen function.
A kind of surface acoustic wave gas sensors array that provides according to such scheme with electro-magnetic screen function, it is characterized in that its corresponding driving circuit of described SAW (Surface Acoustic Wave) device lays respectively at the printed circuit board two sides, only places SAW (Surface Acoustic Wave) device in the metal cell.
A kind of surface acoustic wave gas sensors array that provides according to such scheme with electro-magnetic screen function, it is characterized in that described SAW (Surface Acoustic Wave) device is R wave device, Love wave device, surface transverse wave device, lamb wave devic or horizontal shear Lamb wave device.
The utility model has following advantage:
The utility model makes surface acoustic wave gas sensors array have the function of electromagnetic screen because each SAW (Surface Acoustic Wave) device in the surface acoustic wave gas sensors array is placed respectively independently within the metal cell.And the utlity model has simple in structure, handling ease, effectiveness is good, is widely used wide characteristics.
Description of drawings:
Fig. 1 is the radome that has air chamber.
Fig. 2 is the sensor array scheme of installation.
Wherein, 1 for containing the metallic shield of a plurality of metal cells; 2 is pore; 3 is air chamber; 4 is SAW (Surface Acoustic Wave) device; 5 is air packing; 6 is printed circuit board; 7 is the oscillatory circuit in the driving circuit; 8 is the mixting circuit in the driving circuit.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further described.
Be the radome that has air chamber as shown in Figure 1, this metallic shield 1 is made by metallic copper, include 4 air chambers 3, the cascaded structure that is arranged in a linear, between the air chamber 3 and and external environment condition between by pore 2 conductings, bleed by micro air pump (not drawing among the figure) and to realize gas mobile each air chamber 3 in.
Shown in Figure 2 is that this has the radome of air chamber and the scheme of installation of sensor array.At first SAW (Surface Acoustic Wave) device 4 and circuit thereof are installed on the printed circuit board 6, situation about optimizing is the one side that circuit such as oscillatory circuit 7, mixting circuit 8 is installed in printed circuit board 6, and SAW (Surface Acoustic Wave) device 4 is installed in the another side of printed circuit board 6,4 SAW (Surface Acoustic Wave) device 4 also are arranged in a linear, and are corresponding one by one with the position of pore 3 in the metallic shield 1.Then metallic shield 1 is buckled on the printed circuit board 6, makes SAW (Surface Acoustic Wave) device 4 imbed in the air chamber 3, air packing 5 is close on the upper surface of metallic shield 1 and with screw (not drawing among the figure) and fixes.
In 4 SAW (Surface Acoustic Wave) device 4 of the foregoing description, be positioned at and be coated with different sensitive thin films on 3 SAW (Surface Acoustic Wave) device 4a in air-flow the place ahead and constitute 3 surface acoustic wave sensors (measurement passage), and do not have sensitive thin film on last SAW (Surface Acoustic Wave) device 4b, as public reference channel.The corresponding air chamber of SAW (Surface Acoustic Wave) device 4b is fully airtight, does not have pore to communicate with the external world.
Claims (7)
1, a kind of surface acoustic wave gas sensors array with electro-magnetic screen function, comprise at least two SAW (Surface Acoustic Wave) device and driving circuit, it is characterized in that, also comprise a gas delivery system, described gas delivery system is made of micro air pump and two metal cells at least, each SAW (Surface Acoustic Wave) device lays respectively at independently in the metal cell, is connected by air hole between each metal cell.
2, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1 is characterized in that, described SAW (Surface Acoustic Wave) device and driving circuit are installed on the printed circuit board; Described all metal cells constitute the metallic shield of an integral body, and affiliated metallic shield is installed on the printed circuit board; Has air packing between described metallic shield and the printed circuit board, to guarantee the impermeability of metal cell except that air hole.
3, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1 is characterized in that, described each SAW (Surface Acoustic Wave) device adopts the mode of series connection to lay respectively at independently in the metal cell according to the direction of gas flow; Described gas delivery system has an air admission hole and a micro air pump.
4, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1 is characterized in that, described each SAW (Surface Acoustic Wave) device adopts mode in parallel to lay respectively at independently in the metal cell according to the direction of gas flow; Described gas delivery system has and identical air admission hole and the micro air pump of SAW (Surface Acoustic Wave) device way in parallel.
5, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1 is characterized in that, its corresponding driving circuit of described SAW (Surface Acoustic Wave) device is positioned at same metal cell.
6, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1, it is characterized in that its corresponding driving circuit of described SAW (Surface Acoustic Wave) device lays respectively at the printed circuit board two sides, only places SAW (Surface Acoustic Wave) device in the metal cell.
7, the surface acoustic wave gas sensors array with electro-magnetic screen function according to claim 1, it is characterized in that described SAW (Surface Acoustic Wave) device is R wave device, Love wave device, surface transverse wave device, lamb wave devic or horizontal shear Lamb wave device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200787859U CN201364325Y (en) | 2009-01-21 | 2009-01-21 | Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200787859U CN201364325Y (en) | 2009-01-21 | 2009-01-21 | Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function |
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| Publication Number | Publication Date |
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| CN201364325Y true CN201364325Y (en) | 2009-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU2009200787859U Expired - Lifetime CN201364325Y (en) | 2009-01-21 | 2009-01-21 | Surface acoustic wave (SAW) gas sensor array with electromagnetic shielding function |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101493437B (en) * | 2009-01-21 | 2010-12-29 | 电子科技大学 | Surface acoustic wave gas sensors array with electromagnetic shielding function |
| CN102662033A (en) * | 2012-05-21 | 2012-09-12 | 电子科技大学 | Structure of test cavity |
| CN114280141A (en) * | 2021-12-28 | 2022-04-05 | 电子科技大学 | Lamb wave array device and atmospheric environment particle detection method thereof |
-
2009
- 2009-01-21 CN CNU2009200787859U patent/CN201364325Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101493437B (en) * | 2009-01-21 | 2010-12-29 | 电子科技大学 | Surface acoustic wave gas sensors array with electromagnetic shielding function |
| CN102662033A (en) * | 2012-05-21 | 2012-09-12 | 电子科技大学 | Structure of test cavity |
| CN114280141A (en) * | 2021-12-28 | 2022-04-05 | 电子科技大学 | Lamb wave array device and atmospheric environment particle detection method thereof |
| CN114280141B (en) * | 2021-12-28 | 2023-06-27 | 电子科技大学 | Lamb wave array device and atmospheric environment particle detection method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20091216 Effective date of abandoning: 20090121 |