CN201348624Y - Multi-channel surface acoustic wave chemical sensing device - Google Patents
Multi-channel surface acoustic wave chemical sensing device Download PDFInfo
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- CN201348624Y CN201348624Y CNU2008201450208U CN200820145020U CN201348624Y CN 201348624 Y CN201348624 Y CN 201348624Y CN U2008201450208 U CNU2008201450208 U CN U2008201450208U CN 200820145020 U CN200820145020 U CN 200820145020U CN 201348624 Y CN201348624 Y CN 201348624Y
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Abstract
The utility model discloses a multi-channel surface acoustic wave chemical sensing device, which comprises a multi-channel surface acoustic wave chemical sensor, a mixing circuit and an oscillation circuit, and the multi-channel surface acoustic wave chemical sensor is formed by attaching different sensitive films to each detection channel of the multi-channel surface acoustic wave sensor. The multi-channel surface acoustic wave sensor is formed by using piezocrystal as the substrate of the surface acoustic wave sensor, and a plurality of pairs of parallel interdigital transducers are made on the substrate so as to form a plurality of detection channels and one reference channel; each pair of the interdigital transducers comprises an input transducer and an output transducer. The multi-channel surface acoustic wave chemical sensor is divided into a delay linear type and a resonant type. The mixing circuit is used for obtaining a difference frequency signal between each detection channel and the reference channel, and the oscillation circuit is used for driving the interdigital transducers to generate oscillation with a fixed frequency which is used as the working frequency of the multi-channel surface acoustic wave chemical sensor. The utility model can detect various kinds of external gas and the ingredients of chemical substances, and have great significance for production practice.
Description
Technical field
The utility model relates to the detection technique field, particularly relates to a kind of multichannel surface acoustic wave chemical sensing device.
Background technology
The surface acoustic wave chemical sensing device has unique advantage, compares with semiconductor chemical sensor commonly used, and it is little and be easy to advantages such as compensation, highly sensitive, good stability that surface acoustic wave sensor has a temperature influence; And compare with Fibre Optical Sensor, the surface acoustic wave sensor project organization is flexible, with low cost, temperature influence little and be easy to the compensation.
Surface acoustic wave sensor to multiple factor sensitivities such as electricity, heat, power, sound, light, chemistry and biologies, and adopts surface acoustic wave techniques.Make its output signal show as the variation of oscillator frequency, output signal need not the conversion through modulus A/D again, is easy to directly and computing machine carries out interface.In addition, the surface acoustic wave chemical sensing device has also that antijamming capability is strong, highly sensitive, the sensing range linearity is good, advantages such as good, suitable long-distance transmissions of measuring repeatability and realization remote measuring and controlling, it can adopt the SIC (semiconductor integrated circuit) planar technology to make, thereby can realize integratedly, intelligent, make that the surface acoustic wave sensor volume is little, in light weight, easy to carry, cost is low, can produce in enormous quantities.
The surface acoustic wave sensing device is made of piezoelectric, interdigital transducer and oscillatory circuit.The surface acoustic wave sensing device adopts quartz, lithium niobate LiNbO usually
3Or lithium tantalate LiTaO
3Deng piezoelectric crystal as substrate, the SIC (semiconductor integrated circuit) planar technology is made two interdigital transducers on substrate, be respectively applied for and transmit and receive, spacing between two interdigital transducers produces the time delay or the vibration of signal, constitute SAW (Surface Acoustic Wave) delay line or resonator, current, SAW (Surface Acoustic Wave) device has been widely used in the civil and military fields such as communication, radar, electronic countermeasure, radio and television.
On the sound passage of SAW (Surface Acoustic Wave) device, attach specific sensitive thin film, can be made into special surface acoustic wave chemical senser element.Adopt at present both at home and abroad mostly channel structure, passage is used for the compensation to factors such as environment temperature, humidity, pressure, and another passage is used for measuring, and attaches different absorption sensitive thin films on this channel of acoustic wave.Cause the variation of acoustic surface wave speed and time delay after thin film adsorbs gas and the chemical substance, thereby cause change of resonance frequency, by detecting the difference on the frequency of two passages, i.e. the concentration of detectable gas.
Can detect SO according to different base material, different chemical sensitive thin films
2, H
2, NH
3, H
2S, NO
2, number of chemical composition such as acetone, methyl alcohol, water vapor.Therefore can be widely used in fields such as atmosphere environment supervision, Chemical Engineering Process Control, the control of motor vehicle emission tail gas, clinical analysis.
This sensing device can also detect the poison gas that destroys human nerve, blood, comprises chemical warfare agents such as Sarin (sarin), Soman (soman), VX, Mustard (yperite), Nitrogen Mustard (mustargen), HydrogenCyanide (hydrogen cyanide), Cyanogen Chloride (cyanogen chloride), Lewisite (lewisite), organophosphorus, organic sulfur.
Report is essentially the double-channel SAW sensing device that detects pure gas both at home and abroad at present, yet in the practical application of military and civilian, need to detect simultaneously multiple gases and chemical substance composition, therefore urgently develop a kind of multichannel surface acoustic wave chemical sensing device at present, can detect by while multiple gases and chemical substance composition to external world.
The utility model content
In view of this, the purpose of this utility model provides a kind of multichannel surface acoustic wave chemical sensing device, can detect by while multiple gases and chemical substance composition to external world, its have sound field capacity usage ratio height, rational in infrastructure, compact, cost is lower, the advantage such as little of crosstalking, be of great practical significance.
For this reason, the utility model provides a kind of multichannel surface acoustic wave chemical sensing device, includes multichannel surface acoustic wave chemical sensor and mixting circuit, oscillatory circuit, wherein,
Described multichannel surface acoustic wave chemical sensor constitutes by attach different sensitive thin films on each sense channel on the multichannel surface acoustic wave sensor, described multichannel surface acoustic wave sensor is with the substrate of piezoelectric crystal as surface acoustic wave sensor, have a plurality of sense channels and a reference channel on it, be manufactured with many in this substrate to parallel array interdigital transducer, every pair of interdigital transducer comprises input transducer and output transducer, is respectively applied for to constitute delay line type and mode of resonance SAW (Surface Acoustic Wave) device;
Described mixting circuit is used to obtain the difference frequency signal between each sense channel and the reference channel;
Described oscillatory circuit is used to drive the vibration that interdigital transducer produces fixed frequency, as the central task frequency of multichannel surface acoustic wave chemical sensor.
Preferably, the substrate of described surface acoustic wave sensor is that YZ cuts lithium niobate LiNbO
3Crystal or quartz crystal.
Preferably, described multichannel surface acoustic wave chemical sensor constitutes by attach different certain sensitive films with the method for coating or evaporation or deposition on each sense channel on the multichannel surface acoustic wave sensor.
Preferably, the method for making interdigital transducer in substrate is the SIC (semiconductor integrated circuit) planar technology.
Preferably, the central task frequency of delaying type surface acoustic wave sensor is 100MHz, and the central task frequency of resonator type surface acoustic wave sensor is 148MHz.
Preferably, described sensitive thin film is for plating thickness on quartz substrate is the zinc paste of 1.2 μ m, and plating thickness again is properly mixed indium oxide and the tin oxide formation of 40-200nm.
Preferably, also comprise the shaping circuit that is connected with mixting circuit, this shaping circuit is used for and will carries out shaping by the difference frequency signal between resulting sense channel of mixting circuit and the reference channel, form one with difference frequency signal with frequently square-wave signal.
Preferably, the signal output part of described shaping circuit is connected with counter, and this counter is used to write down the process shaping circuit and carries out the square wave number that shaping is exported.
The technical scheme that is provided by above the utility model as seen, the utility model compared with prior art, multichannel surface acoustic wave chemical sensing device of the present utility model can detect four kinds and above gas and chemical substance composition simultaneously, wherein, four passages are used for measuring, another passage is used for the factors such as temperature of environment are compensated, adopt channel structure to compare with common surface acoustic wave chemical sensing device, owing to propose and employing multi-channel parallel technology, can measure different gas and chemical substance composition simultaneously.
In addition, the multichannel surface acoustic wave chemical sensing device that the utility model provides have sound field capacity usage ratio height, rational in infrastructure, compact, cost is lower, the advantage such as little of crosstalking, therefore be of great practical significance.
Description of drawings
The structural representation of interdigital transducer in the multichannel surface acoustic wave chemical sensing device that Fig. 1 provides for the utility model;
The structural representation of the five-way road surface acoustic wave chemical sensor in the multichannel surface acoustic wave chemical sensing device that Fig. 2 provides for the utility model;
The detection principle schematic of surface wave chemical sensor in the multichannel surface acoustic wave chemical sensing device that Fig. 3 provides for the utility model;
The synoptic diagram of mixting circuit in the multichannel surface acoustic wave chemical sensing device that Fig. 4 provides for the utility model;
The circuit diagram that in the multichannel surface acoustic wave chemical sensing device that Fig. 5 provides for the utility model the difference frequency signal of mixting circuit output is carried out shaping;
The circuit diagram that the interdigital transducer of surface wave chemical sensor produces vibration and amplifies in the multichannel surface acoustic wave chemical sensing device that Fig. 6 provides for the utility model.
Embodiment
In order to make those skilled in the art person understand the utility model scheme better, the utility model is described in further detail below in conjunction with drawings and embodiments.
The utility model adopts and processes the substrate of the piezoelectric crystal of different materials (the higher YZ of electromechanical coupling factor cuts lithium niobate LiNbO3, quartz etc.) as surface acoustic wave sensor.And in substrate, be manufactured with many to parallel array interdigital transducer, respectively as the input and output transducer.Input electrical signal produces alternating electric field in the input transducer, because piezoelectric effect excites elastic vibration in substrate, produces surface acoustic wave, and output transducer receives the surface acoustic wave signal and is converted to electric signal, constitutes delay line type and mode of resonance SAW (Surface Acoustic Wave) device.
In the utility model, the substrate of described surface acoustic wave sensor is that YZ cuts lithium niobate LiNbO
3Crystal or quartz crystal.
In addition, go up with methods such as coating, evaporation, depositions at a plurality of passages (the utility model is the five-way road), attach different sensitive thin films, form hyperchannel (five-way road) surface acoustic wave chemical sensor, cause acoustic surface wave speed or the variation on time delay after its adsorbed gas and the chemical substance, thereby cause signal amplitude (insertion loss) and change of resonance frequency, by difference on the frequency or the oscillation amplitude change of detection with reference channel, according to base material kind and tangential, film kind etc., can detect the kind or the concentration of test substance.
Multichannel surface acoustic wave chemical sensor of the present utility model can be surveyed multiple gases simultaneously.Select different surface-sensitive membraneous materials and different substrate combination for use, in order to detecting different gas, and factor such as thickness of sensitive thin film, sonic delay line length also has very big influence to detection sensitivity.For example, when sensitive thin film adopts isotropy insulating material, conductive material and metal oxide semiconductor material, the surface acoustic wave chemical sensor changes the variation of the conductivity of overlayer density, film respectively into to the suction-operated of gas, thereby cause that the surface acoustic wave velocity of wave changes, and makes oscillation frequency change.
On the specific implementation, the utility model can be cut at YZ and apply the triethanolamine film on the lithium columbate crystal, thereby can detect SO
2, H
2S gas componant and concentration thereof; Apply WO
3Film can detect H
2S gas componant and concentration thereof; Apply the phthalocyanine film and can detect NO
2, NH
3, CO, SO
2Etc. gas componant and concentration thereof; Apply palladium film (Pd) film and can detect hydrogen; Coated polymer can detect steam, smog etc.
The utility model adopts the SIC (semiconductor integrated circuit) planar technology to make interdigital transducer on crystalline substrate, utilizes multiple method of weighting and adopts split finger transducer can improve the frequency response characteristic of transducer.The utility model is made a plurality of passages on same crystalline substrate, each passage is made up of respectively two interdigital transducers, and a plurality of passages constitute delaying type or resonator type surface acoustic wave sensor jointly.
In the utility model, the central task frequency of delaying type surface acoustic wave sensor is preferably 100MHz, and the central task frequency of resonator type surface acoustic wave SAW sensor is preferably 148MHz.Need to prove that the resonance frequency of SAW sensor is high more, the sensitivity of its detection is high more, but simultaneously between the passage crosstalk and the manufacture craft difficulty big more.
Referring to Fig. 3, Fig. 3 is the detection principle schematic of surface wave chemical sensor.In the utility model, the testing circuit of surface acoustic wave chemical sensor comprises amplifier A and frequency mixer, and this amplifier A is used for providing feedback to interdigital transducer, makes interdigital transducer can produce the vibration of fixed frequency.
In order to obtain the difference on the frequency between sense channel and reference channel, we have used frequency mixer (being presented as mixting circuit).Mixting circuit is made up of multiplier and low-pass filter, according to formula:
ω
1And ω
2Be respectively the sinusoidal signal frequency of two passages, by formula as can be known, can obtain behind the sine function signal multiplication of two passages these two sinusoidal signals frequency and and difference on the frequency, filter high fdrequency component by low-pass filtering, just can obtain the difference frequency signal (difference on the frequency signal) between sense channel and reference channel.The advantage that mixing detects is the influence that can reduce environment, because environment has same influence to sense channel and reference channel around the temperature, pressure etc.
In view of the sensitive thin film that attaches on the sense channel can adsorb gas to be measured and chemical substance, do not have sensitive thin film on the reference channel and do not adsorb gas to be measured and chemical substance, so the difference frequency between sense channel and the reference channel is owing to test substance produces, so the difference frequency detection can be eliminated Effect of Environmental.
The particular circuit configurations of mixting circuit as shown in Figure 4.In this mixing (being that frequency multiplies each other) circuit, its core component is mc1496 (two balance modulation integrated circuit), and mc1496 finishes its mixing purpose by the peripheral circuit among the figure.RC adopts straight cutting or Chip-R inductance respectively in the experiment, and the 12V power supply has used stabilized voltage supply.
This mixting circuit is connected to the signal of reference channel and monitoring channel respectively on the car-pin and sio+ pin of mc1496, other peripheral circuits are by as above circuit diagram link, can produce the difference frequency of two paths of signals this moment at the out+ pin, and it is got final product every the direct extremely output of straight coupling capacitance by one.
Need to prove, among Fig. 4, describedly be connected with reference channel with reference to the sound travel end, described input end is connected with a plurality of sense channels, and the pin meanings of mc1496 is respectively: SIO: signal input, CAR: carrier wave input, OUT: signal output, BIAS: voltage bias, GADJ: gain-adjusted, VEE: negative supply port.Mixting circuit can obtain the difference on the frequency and the output of two paths of signals (sense channel and reference channel).The principle of mixing is set forth in the above.
About the relation between difference on the frequency and the gas concentration, gas absorption is to sensitive thin film, and gas concentration will have influence on the density of membraneous material, thereby changes the velocity of sound by film, causes the acoustical signal frequency change, causes output electric signal frequency change.
Referring to the frequency change formula:
In the formula, the size of the surface acoustic wave sensor frequency displacement that causes owing to adsorbed gas in the Δ f-overlayer; k
1, k
2, k
3-piezoelectric substrate material constant; f
0Center oscillation frequency when-surface acoustic wave sensor is undisturbed; The h-film thickness; ρ-membraneous material density; μ
0-membraneous material modulus of shearing; λ-film Rameau constant; v
R-surface acoustic wave phase velocity when undisturbed.
By above-mentioned formula as seen, frequency change and gas concentration are closely related, and be also relevant with parameters such as the crystalline substrate material of device, tangential, gaseous species, membraneous material and thickness.Determine for other each parameters of sensor of determining, therefore can be by the variation of frequency change detected gas concentration.
Referring to Fig. 5, Fig. 5 is the synoptic diagram of shaping circuit, and mixting circuit is connected with this shaping circuit, the difference on the frequency signal of the two paths of signals (sense channel and reference channel) that is obtained by mixting circuit, therefore can carry out shaping by this shaping circuit, form a square-wave signal with the same frequency of difference frequency signal.
LM306 among Fig. 5 is a high speed voltage comparator, because counter needs the form of square wave when record, so need be converted to the square wave form to the signal after the mixing by sinusoidal form, so that counter identification, the utility model is connected to the output of mixting circuit an input pin of this comparer, another input pin ground connection of comparer so just can utilize analog to digital conversion to produce the counter identification of a square-wave signal the same with the difference frequency frequency for the back.
Need to prove that the difference frequency that obtains after the mixing is a sinusoidal signal, can obtain the quantitative result of gas and chemical substance by observation of use instrument and detecting sensor output signal.Digital signal processing for the ease of circuit design and rear end.Can add counter in the signal output part back of shaping circuit, this counter is used for the sequence signal after the front end shaping is counted, the certain square wave number of record in the stipulated time of timer, because the frequency of this square wave sequence equates with the difference frequency signal frequency, so in the information process unit of rear end, just can calculate the frequency of difference frequency signal, at last output signal is shown with digital form, so that record and storage.
In order to make interdigital transducer can produce the vibration of fixed frequency, central task frequency as the multichannel surface acoustic wave chemical sensor, referring to Fig. 6, the utility model provides an oscillator-amplification circuit, this oscillator-amplification circuit is for producing the basis of oscillator signal, drive the interdigital transducer of surface acoustic wave chemical sensor by it, produce needed oscillation frequency.By to the constantly test and improving improving the stability of frequency of wherein parameter, thereby strengthened the precision of experiment.
Above-mentioned oscillator-amplification circuit has utilized feedback principle, makes crystal produce vibration by triode, and this just need have crystal the feedback frequency of intrinsic oscillation frequency own and circuit all to be designed to the frequency that we need.In circuit, triode has adopted 9018 or 3sk122, and tunable capacitor, resistance R, inductance L, capacitor C all adopt the paster encapsulation.Three socket JP1, JP2, P1 are in order to insert the detection means design among the figure.The circuit right side is an amplifying circuit, and the signal that oscillatory circuit is produced is amplified, and the signal after amplifying will insert an input end in the mixting circuit.
The integrated circuit socket plate is used to insert the surface acoustic wave chemical sensor of our development, to insert the ground of device respectively, input, output.Each stitch is a patchhole, and is corresponding with input, output and ground pin on the surface acoustic wave chemical senser element.
Embodiment:
On the specific implementation, referring to Fig. 2, four passages in the five-way of the present utility model road device are to cut at YZ to apply or plate phthalocyanine film and metal-oxide film on the lithium columbate crystal, to detect NO as sense channel
2, NH
3, CO, SO
2Deng gas.The passage of a no coated film of residue is used to eliminate ectocines such as temperature, pressure as the reference passage.
In addition, in the utility model, can also plate the zinc paste that thickness is 1.2 μ m on quartz substrate, plating thickness again is properly mixed indium oxide and the tin oxide formation sensitive thin film of 40-200nm, to detect NO
2, NH
3, CO, SO
2Concentration with gases such as steams.
It is respectively each passage output to be carried out difference frequency with reference channel output with mixting circuit to detect that output signal detects.
On the specific implementation, for example, five-way road surface acoustic wave chemical sensor is when adopting the five-way road device at the bottom of the lithium niobate base in the utility model device, and its every index is:
Base material is a Y Z lithium niobate, and wave length of sound λ is 34.85 μ m, and centre frequency is 100MHz,
Input interdigital transducer (ITD) refers to logarithm: 25.5 pairs, output interdigital transducer (ITD) refers to logarithm: 35.5 pairs, sound aperture is 100 wavelength, is specially 3485.00 μ m, the distance L of the edge-to-edge between the input and output ITD
0Be 1099.04 μ m, the width ratio in finger and slit is 1: 1, and the thickness of interdigital transducer aluminium film is 300nm.
Interdigital transducer IDT adopts the division of 1/8 wavelength to refer to structure, and in order to reduce the influence of interdigital edge reflections, the concrete structure of interdigital transducer is referring to shown in Figure 1.
In the utility model, for different gas, have different detectable concentration scopes, be about ppm (1,000,000/) magnitude, different with concentration with gaseous species, the response time of surface acoustic wave SAW sensor is several seconds to tens seconds.
In sum, the utility model compared with prior art, multichannel surface acoustic wave chemical sensing device of the present utility model can detect four kinds and above gas and chemical substance simultaneously, wherein, four passages are used for measuring, and another passage is used for the factors such as temperature of environment are compensated, and adopt channel structure to compare with common surface acoustic wave chemical sensing device, owing to propose and employing multi-channel parallel technology, can measure different gas and chemical substance simultaneously.
The multichannel surface acoustic wave chemical sensing device that provides in view of the utility model adopts a plurality of detection channels and a reference channel parallel organization, its have sound field capacity usage ratio height, rational in infrastructure, compact, cost is lower, the advantage such as little of crosstalking, be of great practical significance.
The multichannel surface acoustic wave chemical sensing device that the utility model provides can detect ambient atmos and chemical substance, is applied to multiple civilian, military domain such as environmental protection, safety monitoring, chemical warfare agent detection, clinical analysis.
The above only is a preferred implementation of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (8)
1, a kind of multichannel surface acoustic wave chemical sensing device is characterized in that, includes multichannel surface acoustic wave chemical sensor and mixting circuit, oscillatory circuit, wherein,
Described multichannel surface acoustic wave chemical sensor constitutes by attach different sensitive thin films on each sense channel on the multichannel surface acoustic wave sensor, described multichannel surface acoustic wave sensor is with the substrate of piezoelectric crystal as surface acoustic wave sensor, have a plurality of sense channels and a reference channel on it, be manufactured with many in this substrate to parallel array interdigital transducer, every pair of interdigital transducer comprises input transducer and output transducer, is respectively applied for to constitute delay line type and mode of resonance SAW (Surface Acoustic Wave) device;
Described mixting circuit is used to obtain the difference frequency signal between each sense channel and the reference channel;
Described oscillatory circuit is used to drive the vibration that interdigital transducer produces fixed frequency, as the central task frequency of multichannel surface acoustic wave chemical sensor.
2, multichannel surface acoustic wave chemical sensing device as claimed in claim 1 is characterized in that, the substrate of described surface acoustic wave sensor is that YZ cuts lithium niobate LiNbO
3Crystal or quartz crystal.
3, multichannel surface acoustic wave chemical sensing device as claimed in claim 1, it is characterized in that described multichannel surface acoustic wave chemical sensor constitutes by attach different certain sensitive films with the method for coating or evaporation or deposition on each sense channel on the multichannel surface acoustic wave sensor.
4, multichannel surface acoustic wave chemical sensing device as claimed in claim 1 is characterized in that, the method for making interdigital transducer in substrate is the SIC (semiconductor integrated circuit) planar technology.
5, multichannel surface acoustic wave chemical sensing device as claimed in claim 1 is characterized in that, the central task frequency of delaying type surface acoustic wave sensor is 100MHz, and the central task frequency of resonator type surface acoustic wave sensor is 148MHz.
6, multichannel surface acoustic wave chemical sensing device as claimed in claim 1 is characterized in that, described sensitive thin film is the zinc paste of 1.2 μ m for plating thickness on quartz substrate, and plating thickness again is properly mixed indium oxide and the tin oxide of 40-200nm.
7, multichannel surface acoustic wave chemical sensing device as claimed in claim 1, it is characterized in that, also comprise the shaping circuit that is connected with mixting circuit, this shaping circuit is used for being carried out shaping with detect the sense channel and the difference frequency signal between the reference channel that obtain by mixting circuit, form one with difference frequency signal with frequently square-wave signal.
8, multichannel surface acoustic wave chemical sensing device as claimed in claim 7 is characterized in that, the signal output part of described shaping circuit is connected with counter, and this counter is used to write down the process shaping circuit and carries out the square wave number that shaping is exported.
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| CNU2008201450208U CN201348624Y (en) | 2008-12-29 | 2008-12-29 | Multi-channel surface acoustic wave chemical sensing device |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102376890A (en) * | 2010-08-06 | 2012-03-14 | 中国科学院微电子研究所 | Method for manufacturing high-selectivity semiconductor film |
| CN102376889A (en) * | 2010-08-06 | 2012-03-14 | 中国科学院微电子研究所 | Method for manufacturing semiconductor film |
| CN102636204A (en) * | 2012-05-08 | 2012-08-15 | 中国电子科技集团公司第五十五研究所 | Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor |
| CN102778503A (en) * | 2011-05-12 | 2012-11-14 | 中国科学院微电子研究所 | Surface acoustic wave gas sensor and manufacturing method thereof |
| CN102798663A (en) * | 2012-08-17 | 2012-11-28 | 天津理工大学 | SAW gas sensor applying dispersion interdigital transducer |
| WO2014015577A1 (en) | 2012-07-27 | 2014-01-30 | 上海赛赫信息科技有限公司 | Wireless temperature and humidity sensor and system, and measurement method |
| CN104034798A (en) * | 2013-03-07 | 2014-09-10 | 浙江工商大学 | Cell suspension concentration detection system and its detection method |
| CN105116051A (en) * | 2015-09-06 | 2015-12-02 | 北京中讯四方科技股份有限公司 | Sound surface chemical sensor |
| CN106124883A (en) * | 2016-06-12 | 2016-11-16 | 肖小玉 | A kind of down-hole power equipment inspection system based on gas detecting |
| CN107741455A (en) * | 2017-11-27 | 2018-02-27 | 桂林电子科技大学 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
| CN110345985A (en) * | 2018-04-05 | 2019-10-18 | 海成帝爱斯株式会社 | Optical sensor arrangement and packaging part comprising this optical sensor arrangement |
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- 2008-12-29 CN CNU2008201450208U patent/CN201348624Y/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102376890A (en) * | 2010-08-06 | 2012-03-14 | 中国科学院微电子研究所 | Method for manufacturing high-selectivity semiconductor film |
| CN102376889A (en) * | 2010-08-06 | 2012-03-14 | 中国科学院微电子研究所 | Method for manufacturing semiconductor film |
| CN102376889B (en) * | 2010-08-06 | 2013-08-07 | 中国科学院微电子研究所 | Method for manufacturing semiconductor film |
| CN102778503A (en) * | 2011-05-12 | 2012-11-14 | 中国科学院微电子研究所 | Surface acoustic wave gas sensor and manufacturing method thereof |
| CN102636204A (en) * | 2012-05-08 | 2012-08-15 | 中国电子科技集团公司第五十五研究所 | Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor |
| CN102636204B (en) * | 2012-05-08 | 2014-11-12 | 中国电子科技集团公司第五十五研究所 | Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor |
| WO2014015577A1 (en) | 2012-07-27 | 2014-01-30 | 上海赛赫信息科技有限公司 | Wireless temperature and humidity sensor and system, and measurement method |
| US9835501B2 (en) | 2012-07-27 | 2017-12-05 | Sh Infotech Co., Ltd. | Wireless temperature and humidity sensor and system, and measurement method |
| CN102798663A (en) * | 2012-08-17 | 2012-11-28 | 天津理工大学 | SAW gas sensor applying dispersion interdigital transducer |
| CN104034798A (en) * | 2013-03-07 | 2014-09-10 | 浙江工商大学 | Cell suspension concentration detection system and its detection method |
| CN105116051A (en) * | 2015-09-06 | 2015-12-02 | 北京中讯四方科技股份有限公司 | Sound surface chemical sensor |
| CN106124883A (en) * | 2016-06-12 | 2016-11-16 | 肖小玉 | A kind of down-hole power equipment inspection system based on gas detecting |
| CN107741455A (en) * | 2017-11-27 | 2018-02-27 | 桂林电子科技大学 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
| CN110345985A (en) * | 2018-04-05 | 2019-10-18 | 海成帝爱斯株式会社 | Optical sensor arrangement and packaging part comprising this optical sensor arrangement |
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