CN102636204A - Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor - Google Patents
Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor Download PDFInfo
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Abstract
The invention discloses a self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor (SAW sensor); a plurality of SAW resonators are connected in parallel, wherein one resonator is a reference resonator; and a design with smaller sensitive character of sensing quantity is adopted. Other SAW resonators are sensitive resonators, at least one sensitive resonator corresponds to one sensing quantity to be measured, and the resonators are respectively designed into structures with significant sensitive characteristics to the sensing quantity to be measured. Within a regulated working frequency band, the tolerance interval group of the resonance frequency of all the SAW resonators is set through a frequency division method, and all the intervals do not coincide. The SAW sensors are combined and numbered through frequency intervals, and the total numbers are equal to the product of the numbers of all frequency intervals. The SAW passive and wireless resonance type sensor is a self-numbering sensor, maintains the advantages of general frequency difference structure SAW sensors, the numbers of the sensors can be identified by roughly estimating the resonance frequency of all the resonators in the sensors, the actual parameters of the sensors are quoted, so that the sensing quantity testing precision can be greatly improved.
Description
Technical field
The present invention relates to Internet of Things wireless senser, particularly surface acoustic wave (SAW) passive and wireless mode of resonance sensor (SAW sensor).
Technical background
Surface acoustic wave (SAW) sensor be utilize piezo chips and on transducing structures such as the interdigital transducer susceptibility of environment parameter stress to external world, test its electrology characteristic and obtain the environment parameter value, be applied in a lot of fields.
The rise of Internet of Things comes into one's own wireless senser; Because the SAW device does not need the outside resources, its interdigital transducer can direct-connected antenna receiving-sending wireless radiofrequency electric wave and characteristics such as can under rugged surroundings, work, passive and wireless SAW sensor becomes various countries' research and development emphasis.
SAW passive and wireless sensor is divided into two types by detecting principle: the harmonious vibration shape of delaying type.SAW passive and wireless mode of resonance sensor (calling the SAW sensor in the following text) has mainly utilized the resonance frequency and the relevant characteristics of environmentally sensitive value of living in of SAW resonator, and existing commodity are applied in multiple occasions such as doughnut, power network.
SAW sensor now, primary structure are the SAW resonator (combination) that directly connects a small size antenna (sensor antenna).The SAW resonator is a resonant element, and its resonance frequency is responsive to the sensing amount of environment of living in.After sensor antenna receives the same frequency range pulse interrogation signal that reader sends, be compelled to excitation, store electromagnetic energy.After the interrogation pulse excitation was accomplished, energy relaxation can have the electromagnetism echo of frequency for its resonance frequency through the outside emission of sensor antenna.Reader receives and the detection of echoes frequency characteristic, just can converse the sensing value of sensor environment of living in.Be characterized in: the frequency test technology maturation; Echoed signal is stronger, and measurement sensitivity is good; Utilize the difference of resonator resonance frequency, can realize the anticollision function.
Present SAW sensor, adopted multiple structure:
The single resonance type: sensor only is made up of a SAW resonator, tests its resonance frequency and obtains sensor environment sensing value.Its deficiency is: directly test the high frequency frequency, need the high precision local vibration source; When sensor and reader distance variation, influence strengthens wireless channel to frequency test.
The double resonance type: sensor is made up of two different SAW resonators of resonance frequency; It is poor to test two SAW resonator resonance frequencies; Obtain sensor environmentally sensitive value of living in, overcome the deficiency of single resonance type, this frequency difference structure is the main flow of present SAW sensor.
Multi-resmator type: increase the different SAW resonator of resonance frequency for a plurality of physical quantitys detect simultaneously.Use the SAW tyre pressure sensor like automobile, used the different SAW resonator packages of three resonance frequencies in a base, a shared antenna can be measured the temperature and pressure in the doughnut simultaneously.
From numbering sensor: added the different SAW resonator of only using of N resonance frequency, realized 2 as the numbering code element
NNumbering.Because a sensor has N+1 the SAW resonator that resonance frequency is different at least, it is wide to take frequency range, complex structure.
By above-mentioned, be to obtain sensing value to be detected under the sensor environment of living in, each SAW resonator resonance frequency (basic value) of sensor of (under the align mode) is consistent with the product specification nominal value in the time of must guaranteeing under regulation environment sensing amount reference value.At present, because the restriction of device processing procedure process capability, actual SAW sensor its each SAW resonator resonance frequency basic value under align mode has bigger difference with its nominal value, causes measuring accuracy decline.
Summary of the invention
Adopt numbering SAW sensor can solve the restriction because of device processing procedure process capability, resonance frequency basic value and its nominal value of actual SAW sensor have than big-difference, cause this problem of measuring accuracy decline.Through scene identification SAW sensor number, consult this sensor actual parameter (each resonator resonance frequency basic value etc.) data, just can obviously promote the measuring accuracy of sensing value.But existing from numbering sensor, constitute complex structure by N+1 the different SAW resonator of resonance frequency at least.
The present invention designs a kind of from numbering SAW passive and wireless mode of resonance sensor (SAW sensor), is to be the benchmark resonator with a resonator design in the frequency difference structure, and realizes numbering through the frequency division mode.
The technical solution adopted for the present invention to solve the technical problems is: number SAW passive and wireless mode of resonance sensor certainly and adopt a plurality of SAW resonators and connect.One of them is the benchmark resonator, adopts the less design of sensing amount sensitivity characteristic, and its resonance frequency f0 is called the reference frequency of SAW sensor.Remaining SAW resonator is called responsive resonator, and its resonance frequency is called the sensitive frequency of SAW sensor, and at least one responsive resonator is corresponding to a sensing amount to be measured, and they are designed to corresponding sensing measurer to be measured is had the structure of obvious sensitivity characteristic respectively.
All SAW resonators are direct-connected through matching network and sensor small size antenna.
Different SAW resonators can be to adopt different piezoelectrics to make, and also can on same piezoelectric, pass through design technology fabrication techniques such as the different arrangement in crystal orientation, interdigital transducer structure and loaded medium film.
In the SAW working sensor frequency range of regulation, adopt the frequency division mode that the resonance frequency tolerance interval group of each SAW resonator is set.Interval big or small considered is in the sensing quantitative change scope of needs and under the environment for use condition, and the resonance frequency of each SAW resonator changes and device technology tolerance sum does not exceed the interval.
Interval number can be different in the interval group of the resonance frequency of each resonator, and the interval of all resonator resonance frequencies does not all overlap.
The SAW sensor adopts the frequency separation combination number.Bigness scale goes out each resonant frequency value of SAW sensor, can obtain the SAW number of sensor.Same model SAW number of sensor sum equals the long-pending of each resonance frequency interval number.
The sensor groups that a plurality of SAW sensors of some numbering combinations constitute has the anticollision function.
Beneficial effect of the present invention is said simple from numbering sensor construction; It has kept the advantage of general frequency difference structure SAW sensor; And resonance frequency through each resonator in the bigness scale sensor; Can discern its numbering, quote the actual parameter of this individual sensor, can bigger lifting sensing value measuring accuracy.
Description of drawings
Fig. 1 is the SAW of the numbering certainly passive and wireless mode of resonance sensor synoptic diagram of the embodiment of the invention.
Fig. 2 is the routine frequency separation setting of a SAW double resonance type temperature sensor of the embodiment of the invention and two resonator resonance frequency nominal values that are numbered the sensor of A1.
Fig. 3 is the anticollision functional schematic of the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further explain.
Fig. 1 is the synoptic diagram that the present invention numbers SAW passive and wireless mode of resonance sensor certainly, and sensor adopts a plurality of SAW resonators and connects.One of them is the benchmark resonator, adopts the less design of sensing amount sensitivity characteristic, and its resonance frequency f0 is called the reference frequency of SAW sensor.All the other N SAW resonators are called responsive resonator, and its resonance frequency is called the sensitive frequency of SAW sensor, and at least one responsive resonator is corresponding to a sensing amount to be measured, and they are designed to corresponding sensing measurer to be measured is had the structure of obvious sensitivity characteristic respectively.
All SAW resonators are direct-connected through matching network and sensor small size antenna.
Different SAW resonators can be to adopt different piezoelectrics to make, and also can on same piezoelectric, pass through design technology fabrication techniques such as the different arrangement in crystal orientation, interdigital transducer structure and loaded medium film.
The present invention can adopt a plurality of resonators to detect a plurality of sensing amounts simultaneously, and the number of resonator is Duoed one (a benchmark resonator promptly must be arranged) than sensing amount number to be measured at least.
The SAW resonator that adopts the less design of a sensing amount sensitivity characteristic is as the benchmark resonator; Two advantages are arranged: the one, increase same model number of sensor ability; The 2nd, to homogeneity of product sensor preferably; Even do not introduce the actual parameter of individual sensor, the test error of difference frequency test is not too large, and better practicability is arranged.
SAW benchmark resonator generally is the high Q resonator that adopts quartz substrate to make, and takes the multiple technologies means, reduces the influence to its resonance frequency of manufacturing process and environmental stress as far as possible.Like this, the single frequency interval range of benchmark resonator is narrower, that is to say, it is interval that more reference frequency can be set.
For concisely, adopting the temperature sensor of double resonator with one below is example explanation the present invention.
The design for temperature sensor frequency of operation is the 434MHz frequency range.In the 434MHz frequency range, the frequency separation of silica based quasi-resonance device is as long as 0.2MHz utilizes the 2MHz frequency range just can be provided with between ten benchmark resonator region.
Responsive resonator needs the frequency separation of broad, and its width is mainly confirmed by the sensing amount sensitivity characteristic of piezoelectric substrate material, sensing value scope to be measured, other environmental parameter influence and device making technology tolerance etc.
Aforementioned temperature Sensor Design example; The temperature coefficient of selecting piezoelectric for use is 8ppm/ ℃, and temperature range to be measured is 100 ℃, in the 434MHz frequency range; The frequency separation of responsive to temperature resonator is about 0.5MHz, and it is interval to utilize the 2MHz frequency range that four responsive to temperature resonant frequencies can only be set at most.
In the SAW working sensor frequency range of regulation, adopt the frequency division method that the natural resonance frequency tolerance interval of each SAW resonator is set, each interval does not overlap.
In said temperature Sensor Design example, because of a testing environment temperature, so adopt two SAW resonators enough.Use 432MHz ~ 436MHz frequency range, reference frequency interval and responsive to temperature frequency separation such as Fig. 2 of sensor can be set, wherein the alphabetical A of the interval employing of reference frequency; B ... J representes, is positioned between 433MHz ~ 435MHz; Each interval wide 0.2MHz, and the responsive to temperature frequency separation adopts numeral 1,2; Expression, the both sides that the apportion reference frequency is interval, interval width is 0.5MHz.
The SAW sensor adopts the frequency separation combination number, and same model SAW number of sensor sum equals the long-pending of each frequency separation number.
In said design for temperature sensor example, its numbering is followed successively by: A1, and A2, A3, A4, B1 ... J4, totally 40 numberings.Wherein A1 representes that the benchmark resonator resonance frequency nominal value of sensor is 433.1MHz, be positioned at the interval A of reference frequency, and its responsive resonator resonance frequency nominal value is 432.25MHz, is positioned at sensitive frequency interval 1, representes like the heavy line among Fig. 2.The rest may be inferred by analogy.
In use; The reference frequency and the sensitive frequency that should first bigness scale go out the SAW sensor; Obtain frequency separation separately by two frequency values; Because the frequency separation that is provided with does not overlap, the SAW number of sensor of surveying is unique, just can consult the basic value of this numbering sensor individuality reference frequency and sensitive frequency under align mode.Thus, adopt the difference frequency measuring technology again, just can obtain environment temperature to be measured accurately.
Choose one group that everybody different a plurality of SAW sensors of numbering constitute, have the anticollision function, maximum anticollision number is a smaller value in the frequency separation number of reference frequency and each sensitive frequency.For example in the said temperature Sensor Design example, adopt A2, B1, a group of four sensors formations of C4 and D3 just has the anticollision function, can detect temperature everywhere simultaneously.The last illustrated of Fig. 3 constitutes four sensors of same anticollision sensor groups, the frequency configuration of their eight resonators, and figure below is surveyed the signal of resonance frequency spectrum by reader, can distinguish each sensor, and measure each sensor environment temperature of living in.
The SAW sensor chip adopts standard SAW designs and technology to make, and answers the user to require to be integrated into the sensor of a practicability, and reader adopts conventional frequency test technology, and can be integrated in the wireless network.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should be appreciated that; The present invention is not restricted to the described embodiments; That describes in the foregoing description and the instructions just explains principle of the present invention, and under the prerequisite that does not break away from spirit and scope of the invention, the present invention also has various changes and modifications; These variations and improvement all fall in the scope of the invention that requires protection, and the present invention requires protection domain to be defined by its equivalent of appending claims.
Claims (6)
1. self-editing bugle call surface wave passive and wireless mode of resonance sensor, it is characterized in that: it adopts a plurality of SAW resonators and connects; One of them is the benchmark resonator; Remaining SAW resonator is responsive resonator, and at least one responsive resonator is corresponding to a sensing amount to be measured, and they are designed to corresponding sensing measurer to be measured is had the structure of obvious sensitivity characteristic respectively; All resonators are direct-connected through matching network and sensor small size antenna.
2. self-editing bugle call surface wave passive and wireless mode of resonance sensor according to claim 1 is characterized in that: in the regulation working frequency range, adopt the frequency division mode that each SAW resonator resonance frequency tolerance interval group is set, each interval does not overlap; Surface acoustic wave sensor adopts the frequency separation combination number, and the numbering sum equals the long-pending of each frequency separation number.
3. self-editing bugle call surface wave passive and wireless mode of resonance sensor according to claim 1 is characterized in that: said benchmark resonator, adopt the less design of sensing amount sensitivity characteristic.
4. self-editing bugle call surface wave passive and wireless mode of resonance sensor according to claim 1 is characterized in that: said benchmark resonator is the high Q resonator that adopts quartz substrate to make.
5. self-editing bugle call surface wave passive and wireless mode of resonance sensor according to claim 1; It is characterized in that: different SAW resonators; Can be to adopt different piezoelectrics to make, also can on same piezoelectric, pass through design technology fabrication techniques such as the different arrangement in crystal orientation, interdigital transducer structure and loaded medium film.
6. according to claim 1 and 2 described self-editing bugle call surface wave passive and wireless mode of resonance sensors, it is characterized in that: the sensor groups that a plurality of surface acoustic wave sensors of some numbering combinations constitute has the anticollision function.
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| CN102980678A (en) * | 2012-11-27 | 2013-03-20 | 安徽鑫龙电器股份有限公司 | Wireless passive temperature measuring device |
| CN103398773A (en) * | 2013-08-06 | 2013-11-20 | 常州智梭传感科技有限公司 | Same-frequency-interference-resistant surface acoustic wave sensor |
| CN104406613A (en) * | 2014-12-09 | 2015-03-11 | 常州智梭传感科技有限公司 | Acoustic surface wave sensor with high frequency resource utilization rate and identification method of acoustic surface wave sensor |
| CN105092080A (en) * | 2015-03-03 | 2015-11-25 | 重庆感知沃德科技发展有限公司 | Novel frequency sweep algorithm applied to surface acoustic wave wireless passive temperature measurement system |
| CN105181219A (en) * | 2015-08-11 | 2015-12-23 | 中国电子科技集团公司第四十一研究所 | Pressure parameter extraction equipment capable of working in ultra high temperature environment |
| CN105571743A (en) * | 2016-02-24 | 2016-05-11 | 南京科睿博电气科技有限公司 | Surface acoustic wave technology-based switch cabinet temperature measurement interference shielding apparatus |
| CN107576345A (en) * | 2017-07-21 | 2018-01-12 | 南京航空航天大学 | The wireless measuring system and measuring method of multinode resonator type surface acoustic wave sensor |
| CN109990819A (en) * | 2019-03-29 | 2019-07-09 | 电子科技大学 | A kind of frequency signal detection system and detection method based on surface acoustic wave sensor |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102980678A (en) * | 2012-11-27 | 2013-03-20 | 安徽鑫龙电器股份有限公司 | Wireless passive temperature measuring device |
| CN103398773A (en) * | 2013-08-06 | 2013-11-20 | 常州智梭传感科技有限公司 | Same-frequency-interference-resistant surface acoustic wave sensor |
| CN104406613A (en) * | 2014-12-09 | 2015-03-11 | 常州智梭传感科技有限公司 | Acoustic surface wave sensor with high frequency resource utilization rate and identification method of acoustic surface wave sensor |
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| CN105092080B (en) * | 2015-03-03 | 2018-01-05 | 重庆感知沃德科技发展有限公司 | A kind of new Method of Sweeping Algorithm applied in the passive temp measuring system of surface acoustic wave wireless |
| CN105181219A (en) * | 2015-08-11 | 2015-12-23 | 中国电子科技集团公司第四十一研究所 | Pressure parameter extraction equipment capable of working in ultra high temperature environment |
| CN105571743A (en) * | 2016-02-24 | 2016-05-11 | 南京科睿博电气科技有限公司 | Surface acoustic wave technology-based switch cabinet temperature measurement interference shielding apparatus |
| CN107576345A (en) * | 2017-07-21 | 2018-01-12 | 南京航空航天大学 | The wireless measuring system and measuring method of multinode resonator type surface acoustic wave sensor |
| CN109990819A (en) * | 2019-03-29 | 2019-07-09 | 电子科技大学 | A kind of frequency signal detection system and detection method based on surface acoustic wave sensor |
| CN109990819B (en) * | 2019-03-29 | 2021-06-01 | 电子科技大学 | Frequency signal detection system and detection method based on surface acoustic wave sensor |
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