CN107576345A - The wireless measuring system and measuring method of multinode resonator type surface acoustic wave sensor - Google Patents

The wireless measuring system and measuring method of multinode resonator type surface acoustic wave sensor Download PDF

Info

Publication number
CN107576345A
CN107576345A CN201710601239.8A CN201710601239A CN107576345A CN 107576345 A CN107576345 A CN 107576345A CN 201710601239 A CN201710601239 A CN 201710601239A CN 107576345 A CN107576345 A CN 107576345A
Authority
CN
China
Prior art keywords
surface acoustic
acoustic wave
module
type surface
resonator type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710601239.8A
Other languages
Chinese (zh)
Other versions
CN107576345B (en
Inventor
陈智军
陈赵兴
陈涛
赵文玉
贾浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Aeronautics and Astronautics
Original Assignee
Nanjing University of Aeronautics and Astronautics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Aeronautics and Astronautics filed Critical Nanjing University of Aeronautics and Astronautics
Priority to CN201710601239.8A priority Critical patent/CN107576345B/en
Publication of CN107576345A publication Critical patent/CN107576345A/en
Application granted granted Critical
Publication of CN107576345B publication Critical patent/CN107576345B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)

Abstract

本发明公开了一种多节点谐振型声表面波传感器的无线测量系统及测量方法,其主要特点是与每一个谐振型声表面波传感器的频带相对应,阅读器发射电路通过多个本振源来同时发射多个频点的激励信号,以同时测量多个传感器的谐振频率。并且,阅读器接收电路直接对放大和滤波后的射频回波信号进行带通采样,再对傅里叶变换后的回波频谱信息进行频域插值。本发明与传统的阅读器采用单个本振源、通过轮询方式测量每个传感器的谐振频率相比,其测量实时性得到了大幅度提高,且通过频域插值方法提高了测量精度。除此之外,由于阅读器接收电路采用射频信号直接带通采样的方式,省去了下变频电路,不仅结构简单、成本低,同时还提高了信噪比。

The invention discloses a wireless measurement system and a measurement method of a multi-node resonant surface acoustic wave sensor. Its main feature is that it corresponds to the frequency band of each resonant surface acoustic wave sensor. To transmit excitation signals of multiple frequency points at the same time to measure the resonant frequency of multiple sensors at the same time. Moreover, the receiving circuit of the reader directly performs bandpass sampling on the amplified and filtered radio frequency echo signal, and then performs frequency domain interpolation on the echo spectrum information after Fourier transform. Compared with the traditional reader which adopts a single local oscillator source and measures the resonant frequency of each sensor by polling, the present invention greatly improves the real-time performance of measurement, and improves the measurement accuracy through the frequency domain interpolation method. In addition, since the receiving circuit of the reader adopts the method of direct band-pass sampling of the radio frequency signal, the down-conversion circuit is omitted, which not only has a simple structure and low cost, but also improves the signal-to-noise ratio.

Description

多节点谐振型声表面波传感器的无线测量系统及测量方法Wireless measurement system and measurement method of multi-node resonant surface acoustic wave sensor

技术领域:Technical field:

本发明涉及一种多节点谐振型声表面波传感器的无线测量系统及测量方法,属于无线传感领域。The invention relates to a wireless measuring system and a measuring method of a multi-node resonant surface acoustic wave sensor, belonging to the field of wireless sensing.

背景技术:Background technique:

声表面波器件可用作传感器,从结构上可分为谐振型和延迟型两种,分别如图1和图2所示。谐振型声表面波器件由压电基底、叉指换能器、反射栅构成,叉指换能器两端的反射栅呈密集型阵列布置,以形成声学谐振腔。延迟型声表面波器件由压电基底、输入叉指换能器、输出叉指换能器构成。声表面波器件用作传感器时,根据待测对象引起声表面波传播速度和压电材料参数变化,并进一步导致谐振型声表面波器件的谐振频率变化或延迟型声表面波器件的时延、相位变化来实现传感功能。Surface acoustic wave devices can be used as sensors, which can be divided into two types: resonant type and delay type, as shown in Figure 1 and Figure 2 respectively. The resonant surface acoustic wave device is composed of a piezoelectric substrate, an interdigital transducer, and a reflective grating. The reflective gratings at both ends of the interdigital transducer are arranged in a dense array to form an acoustic resonant cavity. The delayed surface acoustic wave device is composed of a piezoelectric substrate, an input interdigital transducer, and an output interdigital transducer. When the surface acoustic wave device is used as a sensor, the surface acoustic wave propagation velocity and piezoelectric material parameters change according to the object to be measured, and further cause the resonant frequency of the resonant surface acoustic wave device to change or the time delay of the delay type surface acoustic wave device, Phase change to realize the sensing function.

在阅读器和天线的配合下,声表面波传感器在无线传感的同时也不需要电源。声表面波传感器最引人注目的便是其无线功能和无源本质,因此获得了极大关注。与延迟型声表面波传感器相比,谐振型声表面波传感器的Q值(品质因数)更高,同等条件下的无线测量距离更远,且电-声和声-电转换通过同一个叉指换能器进行,更易通过同一个天线实现传感器对激励信号的接收和对回波信号的发射功能,因此在无线传感领域的应用更为广泛。With the cooperation of the reader and the antenna, the surface acoustic wave sensor does not need a power source while performing wireless sensing. Most notably, SAW sensors are gaining a lot of attention due to their wireless capabilities and passive nature. Compared with the delay type SAW sensor, the Q value (quality factor) of the resonant SAW sensor is higher, the wireless measurement distance is longer under the same conditions, and the electrical-acoustic and acoustic-electric conversion passes through the same finger Transducer, it is easier to realize the sensor's reception of excitation signal and transmission of echo signal through the same antenna, so it is more widely used in the field of wireless sensing.

在无线传感的实际应用场合,通常不会只存在单个传感器,而是多个传感器以多个节点的形式同时存在。如针对智能电网的高压开关柜温度检测,需在线实时测量柜内不同位置的节点温度;针对发动机的转轴扭矩检测,需在线实时测量转轴上不同位置的节点扭矩。谐振型声表面波传感器通常采用频分多址的方式以实现多个节点的防碰撞测量,即各个传感器的频带各不相同。在多节点无线测量中,很多节点还以差动型结构成对出现。如在高压开关柜的温度检测中,通过差动型结构以消除天线阻抗变化等其它环境因素对测温结果的影响;在转轴的扭矩检测中,通过差动型结构以消除温度等环境因素对扭矩测量结果的影响。对于上述差动型节点,也是采用频分多址的方式来实现差动频率的测量。In the practical application of wireless sensing, usually there is not only a single sensor, but multiple sensors exist simultaneously in the form of multiple nodes. For example, for the temperature detection of the high-voltage switchgear of the smart grid, it is necessary to measure the node temperature at different positions in the cabinet in real time online; for the torque detection of the engine shaft, it is necessary to measure the node torque at different positions on the shaft in real time. Resonant surface acoustic wave sensors usually use frequency division multiple access to achieve anti-collision measurement of multiple nodes, that is, the frequency bands of each sensor are different. In multi-node wireless measurements, many nodes also appear in pairs with a differential structure. For example, in the temperature detection of high-voltage switchgear, the differential structure is used to eliminate the influence of other environmental factors such as antenna impedance changes on the temperature measurement results; in the torque detection of the rotating shaft, the differential structure is used to eliminate environmental factors such as temperature. Influence on torque measurements. For the above-mentioned differential nodes, the frequency division multiple access method is also used to realize the measurement of the differential frequency.

针对多节点谐振型声表面波传感器的无线测量,目前存在着以下问题:For the wireless measurement of multi-node resonant surface acoustic wave sensors, the following problems currently exist:

(1)传统的阅读器发射链路通常只存在单个本振源,每次只发射单个频点的激励信号,以轮询方式测量每个传感器的谐振频率。当节点数量较多时,轮询时间变长,从而影响测量的实时性。(1) There is usually only a single local oscillator source in the traditional reader transmission chain, and only a single frequency point excitation signal is transmitted each time, and the resonance frequency of each sensor is measured in a polling manner. When the number of nodes is large, the polling time becomes longer, which affects the real-time performance of the measurement.

(2)对于差动型节点,由于轮询方式对两个差动型传感器的测量存在着时间差,在待测对象快速变化的情况下,不仅测量结果会产生较大误差,也无法准确监测待测对象的动态变化过程。(2) For the differential node, due to the time difference between the polling method and the measurement of the two differential sensors, in the case of rapid changes in the object to be measured, not only will the measurement result have a large error, but also cannot accurately monitor the The dynamic change process of the measured object.

(3)传统的阅读器接收链路通常采用下变频结构,不仅电路结构复杂、成本高,而且还存在着噪声增多、信噪比降低等问题。(3) The traditional reader receiving link usually adopts a down-conversion structure, which not only has a complex circuit structure and high cost, but also has problems such as increased noise and reduced signal-to-noise ratio.

(4)谐振型声表面波传感器的测量精度取决于谐振频率的估计精度。对于傅里叶变换测频谱的方法,鉴于频谱分辨率的限制,谐振频率的估计精度较低;若采用扫频测强度的谐振频率估计方法,需要通过步进频率的细分来提高估计精度,则多个节点的轮询时间将急剧变长,测量实时性进一步受到影响。(4) The measurement accuracy of the resonant SAW sensor depends on the estimation accuracy of the resonant frequency. For the method of Fourier transform spectrum measurement, due to the limitation of spectrum resolution, the estimation accuracy of resonance frequency is low; if the resonance frequency estimation method of frequency sweep measurement intensity is used, it is necessary to improve the estimation accuracy by subdividing the step frequency. Then the polling time of multiple nodes will become longer dramatically, and the real-time performance of measurement will be further affected.

发明内容:Invention content:

本发明是为了解决上述现有技术存在的问题而提供一种多节点谐振型声表面波传感器的无线测量系统及测量方法,其目的是对于声表面波无线传感的实际应用,当测量系统包括多个谐振型声表面波传感器时,针对目前存在的相关问题提供相应的解决方案。The present invention provides a wireless measurement system and measurement method of a multi-node resonant surface acoustic wave sensor in order to solve the problems existing in the above-mentioned prior art, and its purpose is for the practical application of surface acoustic wave wireless sensing. When multiple resonant surface acoustic wave sensors are used, corresponding solutions are provided for the existing related problems.

本发明采用如下技术方案:一种多节点谐振型声表面波传感器的无线测量系统,由阅读器和若干个谐振型声表面波传感器节点构成;其中:若干个谐振型声表面波传感器节点分为两种类型,一种为普通型节点,即该节点仅一个谐振型声表面波传感器,另一种为差动型节点,即该节点包括两个谐振型声表面波传感器;各个谐振型声表面波传感器具有相邻但彼此各不重叠的频带;与每一个谐振型声表面波传感器的频带相对应,阅读器同时发射多个频点的激励信号,以同时测量所有谐振型声表面波传感器的谐振频率。The present invention adopts the following technical scheme: a wireless measurement system of a multi-node resonant surface acoustic wave sensor, which is composed of a reader and several resonant surface acoustic wave sensor nodes; wherein: several resonant surface acoustic wave sensor nodes are divided into There are two types, one is a common node, that is, the node has only one resonant SAW sensor, and the other is a differential node, that is, the node includes two resonant SAW sensors; each resonant SAW sensor The wave sensor has frequency bands that are adjacent but not overlapping with each other; corresponding to the frequency band of each resonant surface acoustic wave sensor, the reader simultaneously transmits excitation signals of multiple frequency points to simultaneously measure the frequency bands of all resonant surface acoustic wave sensors. Resonant frequency.

进一步地,所述阅读器由发射模块、收发隔离模块、天线模块、接收模块以及信号处理模块构成。Further, the reader is composed of a transmitting module, a transceiver isolation module, an antenna module, a receiving module and a signal processing module.

进一步地,所述发射模块由多本振源模块、带通滤波器模块以及射频功率放大器模块构成。Further, the transmitting module is composed of a multi-local oscillator module, a bandpass filter module and a radio frequency power amplifier module.

进一步地,所述多本振源模块由多个结构完全相同的锁相环模块和合路器模块构成;其中,锁相环模块的数量以及合路器模块的输入端口数量都与谐振型声表面波传感器的数量相同,各个锁相环模块的输出端分别与合路器模块的各个输入端口连接。Further, the multi-local oscillator source module is composed of a plurality of phase-locked loop modules and combiner modules with identical structures; wherein, the number of phase-locked loop modules and the number of input ports of the combiner module are the same as those of the resonant surface acoustic surface The number of wave sensors is the same, and the output ends of each phase-locked loop module are respectively connected to each input port of the combiner module.

进一步地,所述锁相环模块采用程控锁相环芯片,各个锁相环模块具有相同的参考频率,通过倍频系数的不同来产生与各个谐振型声表面波传感器的谐振频率对应的不同频点的激励信号。Further, the phase-locked loop module adopts a program-controlled phase-locked loop chip, and each phase-locked loop module has the same reference frequency, and generates different frequencies corresponding to the resonance frequencies of each resonant surface acoustic wave sensor through the difference in frequency multiplication coefficients. point of the stimulus signal.

进一步地,所述阅读器的天线模块的频带涵盖了所有谐振型声表面波传感器的频带。Further, the frequency band of the antenna module of the reader covers the frequency bands of all resonant surface acoustic wave sensors.

进一步地,所述阅读器的接收模块包括低噪声射频放大器模块、带通滤波器模块以及射频信号带通采样模块;其中,射频信号带通采样模块直接对放大和滤波后的射频回波信号进行带通采样。Further, the receiving module of the reader includes a low-noise radio frequency amplifier module, a bandpass filter module and a radio frequency signal bandpass sampling module; wherein, the radio frequency signal bandpass sampling module directly amplifies and filters the radio frequency echo signal Bandpass sampling.

进一步地,所述阅读器的信号处理模块对接收到的包括所有谐振型声表面波传感器的回波信号进行傅里叶变换,得到完整的回波频谱信息,然后搜索到与谐振型声表面波传感器数量对应的多个频谱极大值,之后在每一个频谱极大值附近分别进行频域插值,以获得每一个谐振型声表面波传感器的谐振频率。Further, the signal processing module of the reader performs Fourier transform on the received echo signals including all resonant surface acoustic wave sensors to obtain complete echo spectrum information, and then searches for the resonant surface acoustic wave Multiple spectral maxima corresponding to the number of sensors, and then perform frequency domain interpolation around each spectral maxima to obtain the resonant frequency of each resonant surface acoustic wave sensor.

本发明还采用如下技术方案:一种多节点谐振型声表面波传感器的无线测量系统的测量方法,工作步骤如下:The present invention also adopts the following technical scheme: a measurement method for a wireless measurement system of a multi-node resonant surface acoustic wave sensor, the working steps are as follows:

步骤A,阅读器的发射模块首先通过多本振源模块产生包含多个频点的激励信号,然后进行带通滤波和功率放大,之后经收发隔离模块通过天线模块发射出去;Step A, the transmitting module of the reader first generates an excitation signal containing multiple frequency points through the multi-local oscillator module, then performs band-pass filtering and power amplification, and then transmits it through the antenna module through the transceiver isolation module;

步骤B,各个谐振型声表面波传感器通过传感器天线接收到阅读器发射的包含多个频点的激励信号,通过叉指换能器选频并经逆压电效应产生相应频率的声表面波沿压电基底表面向两侧传播,经反射栅多次相干反射并叠加,在谐振腔内形成驻波,再通过叉指换能器经正压电效应转换成电磁波,并经传感器天线将各个传感器的回波发射回阅读器,当阅读器的激励信号经收发隔离模块调制为间歇信号时,各个传感器的回波信号为幅值随时间呈指数规律衰减的双边带信号,其载波频率与随待测对象变化的传感器谐振频率一致;Step B, each resonant surface acoustic wave sensor receives the excitation signal containing multiple frequency points emitted by the reader through the sensor antenna, selects the frequency through the interdigital transducer and generates the surface acoustic wave of the corresponding frequency through the inverse piezoelectric effect. The surface of the piezoelectric substrate propagates to both sides, and is coherently reflected and superimposed by the reflective grating multiple times, forming a standing wave in the resonant cavity, and then converted into electromagnetic waves by the positive piezoelectric effect through the interdigital transducer, and each sensor is transmitted by the sensor antenna. The echo of the sensor is transmitted back to the reader. When the excitation signal of the reader is modulated into an intermittent signal by the transceiver isolation module, the echo signal of each sensor is a double-sided band signal whose amplitude decays exponentially with time. The resonant frequency of the sensor with the change of the measured object is the same;

步骤C,阅读器经天线模块接收所有传感器叠加的回波信号,通过收发隔离模块进入接收模块,经低噪声放大、带通滤波后进入射频信号带通采样模块,获得回波数字信号;Step C, the reader receives the echo signals superimposed by all sensors through the antenna module, enters the receiving module through the transceiver isolation module, and enters the radio frequency signal bandpass sampling module after low noise amplification and bandpass filtering to obtain the echo digital signal;

步骤D,回波数字信号进入信号处理模块,通过傅里叶变换获得包含所有谐振型声表面波传感器谐振频率的频谱信息,然后搜索到与谐振型声表面波传感器数量对应的多个频谱极大值,之后再在每一个频谱极大值附近分别进行频域插值,以更为准确地获得每一个谐振型声表面波传感器的谐振频率;Step D, the echo digital signal enters the signal processing module, obtains the spectrum information including the resonant frequency of all resonant surface acoustic wave sensors through Fourier transform, and then searches for multiple spectral maxima corresponding to the number of resonant surface acoustic wave sensors value, and then perform frequency-domain interpolation around each spectrum maximum value to obtain the resonant frequency of each resonant SAW sensor more accurately;

步骤E,对于普通型节点,根据相应谐振型声表面波传感器的谐振频率测得该节点处的待测对象值,对于差动型节点,根据两个差动型谐振型声表面波传感器的谐振频率之差测得该节点处的待测对象值。Step E, for a common node, measure the value of the object to be measured at the node according to the resonance frequency of the corresponding resonant surface acoustic wave sensor; for a differential node, measure the value of the object to be measured at the node according to the resonance frequency The difference in frequency measures the value of the measurand at the node.

本发明具有如下有益效果:The present invention has following beneficial effect:

(1)阅读器通过多个本振源来同时发射多个频点的激励信号,以同时测量多个传感器的谐振频率,与传统的阅读器采用单个本振源、通过轮询方式测量相比,其测量实时性得到了大幅度提高;(1) The reader simultaneously transmits excitation signals of multiple frequency points through multiple local oscillator sources to measure the resonance frequency of multiple sensors at the same time, compared with the traditional reader using a single local oscillator source and measuring by polling , the real-time performance of its measurement has been greatly improved;

(2)对于差动型节点,在待测对象快速变化的情况下,避免了轮询方式对两个差动型传感器的测量存在着时间差的问题,不仅大幅度减小了测量误差,也能够较为准确地监测待测对象的动态变化过程;(2) For differential nodes, when the object to be measured changes rapidly, the polling method avoids the problem of time difference in the measurement of two differential sensors, which not only greatly reduces the measurement error, but also can More accurately monitor the dynamic change process of the object to be measured;

(3)阅读器接收电路采用射频信号直接带通采样的方式,省去了传统阅读器的下变频电路,不仅结构简单、成本低,同时还提高了信噪比;(3) The receiving circuit of the reader adopts the direct band-pass sampling method of the radio frequency signal, which saves the down-conversion circuit of the traditional reader, not only has a simple structure and low cost, but also improves the signal-to-noise ratio;

(4)阅读器对傅里叶变换后的回波频谱信息进行频域插值,提高了谐振频率的估计精度,从而获得的待测对象值更为精确。(4) The reader performs frequency-domain interpolation on the echo spectrum information after Fourier transform, which improves the estimation accuracy of the resonant frequency, thereby obtaining more accurate values of the object to be measured.

附图说明:Description of drawings:

图1为谐振型声表面波器件。Figure 1 shows a resonant surface acoustic wave device.

图2为延迟型声表面波器件。Figure 2 is a delayed surface acoustic wave device.

图3为多节点谐振型声表面波传感器的无线测量系统结构。Figure 3 shows the structure of the wireless measurement system of the multi-node resonant surface acoustic wave sensor.

图4为系统的阅读器结构。Fig. 4 is the reader structure of the system.

图5为系统的发射模块结构。Figure 5 shows the structure of the launch module of the system.

图6为系统的多本振源模块结构。Figure 6 shows the multi-local oscillator module structure of the system.

图7为系统的接收模块结构。Figure 7 shows the structure of the receiving module of the system.

图8为系统的信号处理模块功能。Figure 8 is the function of the signal processing module of the system.

具体实施方式:detailed description:

下面结合附图对本发明的技术方案做进一步的详细说明:Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:

请参照图3所示,本发明多节点谐振型声表面波传感器的无线测量系统由阅读器和若干个谐振型声表面波传感器节点构成;其中:若干个谐振型声表面波传感器节点分为两种类型,一种为普通型节点,即该节点仅一个谐振型声表面波传感器,另一种为差动型节点,即该节点包括两个谐振型声表面波传感器;各个谐振型声表面波传感器具有相邻但彼此各不重叠的频带;与每一个谐振型声表面波传感器的频带相对应,阅读器同时发射多个频点的激励信号,以同时测量所有谐振型声表面波传感器的谐振频率。Please refer to shown in Fig. 3, the wireless measuring system of multi-node resonant surface acoustic wave sensor of the present invention is made of reader and several resonant surface acoustic wave sensor nodes; Wherein: several resonant type surface acoustic wave sensor nodes are divided into two There are two types, one is common node, that is, the node has only one resonant SAW sensor, and the other is differential node, that is, the node includes two resonant SAW sensors; each resonant SAW sensor The sensors have adjacent but non-overlapping frequency bands; corresponding to the frequency band of each resonant surface acoustic wave sensor, the reader simultaneously transmits excitation signals of multiple frequency points to simultaneously measure the resonance of all resonant surface acoustic wave sensors frequency.

请参照图4所示,阅读器由发射模块、收发隔离模块、天线模块、接收模块以及信号处理模块构成。Please refer to Figure 4, the reader is composed of a transmitting module, a transceiver isolation module, an antenna module, a receiving module and a signal processing module.

请参照图5所示,发射模块由多本振源模块、带通滤波器模块以及射频功率放大器模块构成。Please refer to FIG. 5 , the transmitting module is composed of multiple local oscillator modules, a bandpass filter module and a radio frequency power amplifier module.

请参照图6所示,多本振源模块由多个结构完全相同的锁相环模块和合路器模块构成;其中,锁相环模块的数量以及合路器模块的输入端口数量都与谐振型声表面波传感器的数量相同,各个锁相环模块的输出端分别与合路器模块的各个输入端口连接。Please refer to Figure 6, the multi-LO source module is composed of multiple phase-locked loop modules and combiner modules with the same structure; among them, the number of phase-locked loop modules and the number of input ports of the combiner module are the same as those of the resonant type The number of surface acoustic wave sensors is the same, and the output ends of each phase-locked loop module are respectively connected to each input port of the combiner module.

锁相环模块采用程控锁相环芯片,各个锁相环模块具有相同的参考频率,通过倍频系数的不同来产生与各个谐振型声表面波传感器的谐振频率对应的不同频点的激励信号。The phase-locked loop module adopts a program-controlled phase-locked loop chip, and each phase-locked loop module has the same reference frequency, and generates excitation signals of different frequency points corresponding to the resonance frequency of each resonant surface acoustic wave sensor through different frequency multiplication coefficients.

请参照图3、图4所示,阅读器的天线模块的频带较宽,涵盖了所有谐振型声表面波传感器的频带。Please refer to Figure 3 and Figure 4, the antenna module of the reader has a wide frequency band, covering the frequency bands of all resonant surface acoustic wave sensors.

请参照图7所示,阅读器的接收模块包括低噪声射频放大器模块、带通滤波器模块以及射频信号带通采样模块;其中,射频信号带通采样模块直接对放大和滤波后的射频回波信号进行带通采样,省去了下变频环节,避免了因下变频过程导致的噪声增多、信噪比降低等问题。Please refer to Figure 7, the receiving module of the reader includes a low-noise radio frequency amplifier module, a bandpass filter module and a radio frequency signal bandpass sampling module; wherein, the radio frequency signal bandpass sampling module directly amplifies and filters the radio frequency echo The signal is sampled in a band pass, which saves the down-conversion link and avoids problems such as increased noise and lower signal-to-noise ratio caused by the down-conversion process.

请参照图8所示,阅读器的信号处理模块对接收到的包括所有谐振型声表面波传感器的回波信号进行傅里叶变换,得到完整的回波频谱信息,然后搜索到与谐振型声表面波传感器数量对应的多个频谱极大值,之后再在每一个频谱极大值附近分别进行频域插值,以更为精确地获得每一个谐振型声表面波传感器的谐振频率。Please refer to Figure 8. The signal processing module of the reader performs Fourier transform on the received echo signals including all resonant surface acoustic wave sensors to obtain complete echo spectrum information, and then searches for the echo signals that are compatible with the resonant surface acoustic wave sensors. Multiple spectral maxima corresponding to the number of surface wave sensors, and then perform frequency domain interpolation around each spectral maxima to more accurately obtain the resonant frequency of each resonant surface acoustic wave sensor.

请参照图3所示,本发明多节点谐振型声表面波传感器的无线测量系统的测量方法,工作步骤如下:Please refer to Fig. 3, the measurement method of the wireless measurement system of the multi-node resonant surface acoustic wave sensor of the present invention, the working steps are as follows:

步骤A,阅读器的发射模块首先通过多本振源模块产生包含多个频点的激励信号,然后进行带通滤波和功率放大,之后经收发隔离模块通过天线模块发射出去;Step A, the transmitting module of the reader first generates an excitation signal containing multiple frequency points through the multi-local oscillator module, then performs band-pass filtering and power amplification, and then transmits it through the antenna module through the transceiver isolation module;

步骤B,各个谐振型声表面波传感器通过传感器天线接收到阅读器发射的包含多个频点的激励信号,通过叉指换能器选频并经逆压电效应产生相应频率的声表面波沿压电基底表面向两侧传播,经反射栅多次相干反射并叠加,在谐振腔内形成驻波,再通过叉指换能器经正压电效应转换成电磁波,并经传感器天线将各个传感器的回波发射回阅读器,当阅读器的激励信号经收发隔离模块调制为间歇信号时,各个传感器的回波信号为幅值随时间呈指数规律衰减的双边带信号,其载波频率与随待测对象变化的传感器谐振频率一致;Step B, each resonant surface acoustic wave sensor receives the excitation signal containing multiple frequency points emitted by the reader through the sensor antenna, selects the frequency through the interdigital transducer and generates the surface acoustic wave of the corresponding frequency through the inverse piezoelectric effect. The surface of the piezoelectric substrate propagates to both sides, and is coherently reflected and superimposed by the reflective grating multiple times, forming a standing wave in the resonant cavity, and then converted into electromagnetic waves by the positive piezoelectric effect through the interdigital transducer, and each sensor is transmitted by the sensor antenna. The echo of the sensor is transmitted back to the reader. When the excitation signal of the reader is modulated into an intermittent signal by the transceiver isolation module, the echo signal of each sensor is a double-sided band signal whose amplitude decays exponentially with time. The resonant frequency of the sensor with the change of the measured object is the same;

步骤C,阅读器经天线模块接收所有传感器叠加的回波信号,通过收发隔离模块进入接收模块,经低噪声放大、带通滤波后进入射频信号带通采样模块,获得回波数字信号;Step C, the reader receives the echo signals superimposed by all sensors through the antenna module, enters the receiving module through the transceiver isolation module, and enters the radio frequency signal bandpass sampling module after low noise amplification and bandpass filtering to obtain the echo digital signal;

步骤D,回波数字信号进入信号处理模块,通过傅里叶变换获得包含所有传感器谐振频率的频谱信息,然后搜索到与传感器数量对应的多个频谱极大值,之后再在每一个频谱极大值附近分别进行频域插值,以更为准确地获得每一个传感器的谐振频率;Step D, the echo digital signal enters the signal processing module, obtains the spectrum information including the resonant frequency of all sensors through Fourier transform, and then searches for a plurality of spectrum maxima corresponding to the number of sensors, and then finds a maximum of each spectrum Frequency-domain interpolation is performed around the value to obtain the resonant frequency of each sensor more accurately;

步骤E,对于普通型节点,根据相应传感器的谐振频率测得该节点处的待测对象值,对于差动型节点,根据两个差动型传感器的谐振频率之差测得该节点处的待测对象值。Step E, for a normal node, measure the value of the object to be measured at the node according to the resonance frequency of the corresponding sensor; for a differential node, measure the value of the object to be measured at the node according to the difference between the resonance frequencies of the two differential sensors measured object value.

以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下还可以作出若干改进,这些改进也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, some improvements can also be made without departing from the principle of the present invention, and these improvements should also be regarded as the invention. protected range.

Claims (9)

  1. A kind of 1. wireless measuring system of multinode resonator type surface acoustic wave sensor, it is characterised in that:By reader and some Individual resonator type surface acoustic wave sensor node is formed;Wherein:Several resonator type surface acoustic wave sensor nodes are divided into two species Type, one kind is plain edition node, i.e. the node only one resonator type surface acoustic wave sensor, and another kind is differential-type node, i.e., The node includes two resonator type surface acoustic wave sensors;Each resonator type surface acoustic wave sensor have it is adjacent but each other it is each not Overlapping frequency band;Corresponding with the frequency band of each resonator type surface acoustic wave sensor, reader launches multiple frequencies simultaneously Pumping signal, to measure the resonant frequency of all resonator type surface acoustic wave sensors simultaneously.
  2. 2. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 1, it is characterised in that:Institute Reader is stated to be made up of transmitter module, transceiver insulation module, Anneta module, receiving module and signal processing module.
  3. 3. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 2, it is characterised in that:Institute Transmitter module is stated to be made up of more local oscillator source modules, bandpass filter module and radio-frequency power amplifier module.
  4. 4. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 3, it is characterised in that:Institute More local oscillator source modules are stated by multiple completely identical in structure phase-locked loop modules and combiner module composition;Wherein, phase-locked loop module Quantity and combiner module input port quantity it is all identical with the quantity of resonator type surface acoustic wave sensor, each lock phase The output end of ring moulds block is connected with each input port of combiner module respectively.
  5. 5. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 4, it is characterised in that:Institute State phase-locked loop module and use program control phase-locked loop chip, each phase-locked loop module has identical reference frequency, passes through Clock Multiplier Factor Difference produce the pumping signal of different frequent points corresponding with the resonant frequency of each resonator type surface acoustic wave sensor.
  6. 6. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 2, it is characterised in that:Institute The frequency band for stating the Anneta module of reader covers the frequency band of all resonator type surface acoustic wave sensors.
  7. 7. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 2, it is characterised in that:Institute Stating the receiving module of reader includes low noise RF amplifier modules, bandpass filter module and the sampling of radiofrequency signal band logical Module;Wherein, radiofrequency signal band logical sampling module directly carries out bandpass sampling to amplification and filtered rf echo signal.
  8. 8. the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 2, it is characterised in that:Institute The signal processing module for stating reader carries out Fu to the echo-signal including all resonator type surface acoustic wave sensors received In leaf transformation, obtain complete echo spectrum information, then search corresponding with resonator type surface acoustic wave number of sensors more Individual spectrum maximum, frequency domain interpolation is carried out respectively near each spectrum maximum afterwards, to obtain each mode of resonance sound The resonant frequency of surface wave sensor.
  9. A kind of 9. measurement side of the wireless measuring system of multinode resonator type surface acoustic wave sensor as claimed in claim 1 Method, it is characterised in that:Job step is as follows:
    Step A, the transmitter module of reader produce the pumping signal for including multiple frequencies by more local oscillator source modules first, then Carry out bandpass filtering and power amplification, after launched through transceiver insulation module by Anneta module;
    Step B, each resonator type surface acoustic wave sensor by sensor antenna receive reader launch include multiple frequencies The pumping signal of point, the surface acoustic wave of corresponding frequencies is produced along piezoelectric substrate by interdigital transducer frequency-selecting and through inverse piezoelectric effect Surface is propagated to both sides, through the multiple coherent reflection of reflecting grating and is superimposed, standing wave is formed in resonator, then pass through interdigital transducer Electromagnetic wave is converted into through direct piezoelectric effect, and the echo of each sensor is transmitted back to reader through sensor antenna, works as reading When the pumping signal of device is modulated to intermittency signal through transceiver insulation module, the echo-signal of each sensor is in the time for amplitude The double-sideband signal of exponential law decay, its carrier frequency are consistent with the sensor resonant frequency with object variation to be measured;
    Step C, reader receive the echo-signal of all the sensors superposition through Anneta module, are entered by transceiver insulation module and connect Module is received, radiofrequency signal bandpass sampling module is entered after low noise amplification, bandpass filtering, obtains echo data signal;
    Step D, echo data signal entering signal processing module, obtained by Fourier transformation and include all mode of resonance sound surfaces The spectrum information of wave sensor resonant frequency, then search multiple frequency spectrums corresponding with resonator type surface acoustic wave number of sensors Maximum, carry out frequency domain interpolation respectively near each spectrum maximum again afterwards, it is humorous more precisely to obtain each The resonant frequency of vibration shape surface acoustic wave sensor;
    Step E, for plain edition node, measured according to the resonant frequency of corresponding resonator type surface acoustic wave sensor at the node Object value to be measured, for differential-type node, surveyed according to the difference of the resonant frequency of two differential-type resonator type surface acoustic wave sensors Obtain the object value to be measured at the node.
CN201710601239.8A 2017-07-21 2017-07-21 wireless measurement system and measurement method of multi-node resonance type surface acoustic wave sensor Active CN107576345B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710601239.8A CN107576345B (en) 2017-07-21 2017-07-21 wireless measurement system and measurement method of multi-node resonance type surface acoustic wave sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710601239.8A CN107576345B (en) 2017-07-21 2017-07-21 wireless measurement system and measurement method of multi-node resonance type surface acoustic wave sensor

Publications (2)

Publication Number Publication Date
CN107576345A true CN107576345A (en) 2018-01-12
CN107576345B CN107576345B (en) 2019-12-06

Family

ID=61033830

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710601239.8A Active CN107576345B (en) 2017-07-21 2017-07-21 wireless measurement system and measurement method of multi-node resonance type surface acoustic wave sensor

Country Status (1)

Country Link
CN (1) CN107576345B (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108344800A (en) * 2018-01-17 2018-07-31 浙江大学 System for detecting temperature based on wireless passive sonic surface wave sensor and receive-transmit system
CN110068400A (en) * 2019-04-26 2019-07-30 中北大学 Aerospace flight vehicle multi-parameter monitoring system based on surface acoustic wave techniques
CN110208371A (en) * 2019-05-13 2019-09-06 南京航空航天大学 A kind of surface acoustic wave sensor node structure and measurement method measuring soil moisture content
CN110208372A (en) * 2019-05-13 2019-09-06 南京航空航天大学 A kind of soil temperature and humidity three-dimensional map detection system and detection method based on unmanned plane Yu surface acoustic wave sensor node
CN110233638A (en) * 2019-06-24 2019-09-13 上海航天测控通信研究所 A kind of VHF frequency range landing search Radio Beacon
CN112051566A (en) * 2020-08-28 2020-12-08 浙江大学 Moving part parameter measuring method based on SAW wireless passive sensing system
CN112668683A (en) * 2020-12-25 2021-04-16 广州安的电子科技有限公司 Intelligent safety door and detection method thereof
CN113029582A (en) * 2021-03-10 2021-06-25 南京航空航天大学 Aero-engine torque detection system and detection method based on surface acoustic wave label
CN114486008A (en) * 2022-01-26 2022-05-13 中国电子科技集团公司第七研究所 Flexible microstrip line, backscattering touch perception system and measuring method thereof
CN118882547A (en) * 2024-10-08 2024-11-01 合肥通用机械研究院有限公司 A method for measuring wall thickness by air-coupled acoustic resonance based on differential method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007174130A (en) * 2005-12-20 2007-07-05 Teruya:Kk Hybrid-type soft id tag with multi-communication corresponding sensor function
JP2007323555A (en) * 2006-06-05 2007-12-13 Telemidic Ltd Saw type rfid
CN102636204A (en) * 2012-05-08 2012-08-15 中国电子科技集团公司第五十五研究所 Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor
CN103336936A (en) * 2013-06-17 2013-10-02 南京航空航天大学 Acoustic surface wave reader emission link structure and working method thereof
CN103500318A (en) * 2013-10-08 2014-01-08 南京航空航天大学 SAW (Surface Acoustic Wave) reader receiving link circuit structure adopting ZIF (Zero Intermediate Frequency) IQ (In-phase Quadrature) demodulation technology and working method of SAW reader receiving link circuit structure
CN104296782A (en) * 2014-10-08 2015-01-21 南京航空航天大学 System and method for improving intensity of surface acoustic wave sensing signals
CN105608400A (en) * 2016-01-08 2016-05-25 劭行(苏州)智能科技有限公司 Surface-acoustic-wave wireless sensor reader and realization method thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007174130A (en) * 2005-12-20 2007-07-05 Teruya:Kk Hybrid-type soft id tag with multi-communication corresponding sensor function
JP2007323555A (en) * 2006-06-05 2007-12-13 Telemidic Ltd Saw type rfid
CN102636204A (en) * 2012-05-08 2012-08-15 中国电子科技集团公司第五十五研究所 Self-numbering surface acoustic wave (SAW) passive and wireless resonance type sensor
CN103336936A (en) * 2013-06-17 2013-10-02 南京航空航天大学 Acoustic surface wave reader emission link structure and working method thereof
CN103500318A (en) * 2013-10-08 2014-01-08 南京航空航天大学 SAW (Surface Acoustic Wave) reader receiving link circuit structure adopting ZIF (Zero Intermediate Frequency) IQ (In-phase Quadrature) demodulation technology and working method of SAW reader receiving link circuit structure
CN104296782A (en) * 2014-10-08 2015-01-21 南京航空航天大学 System and method for improving intensity of surface acoustic wave sensing signals
CN105608400A (en) * 2016-01-08 2016-05-25 劭行(苏州)智能科技有限公司 Surface-acoustic-wave wireless sensor reader and realization method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
夏前亮: "声表面波传感器测试电路研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 *

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108344800B (en) * 2018-01-17 2020-04-14 浙江大学 Temperature detection system and transceiver system based on wireless passive surface acoustic wave sensor
CN108344800A (en) * 2018-01-17 2018-07-31 浙江大学 System for detecting temperature based on wireless passive sonic surface wave sensor and receive-transmit system
CN110068400A (en) * 2019-04-26 2019-07-30 中北大学 Aerospace flight vehicle multi-parameter monitoring system based on surface acoustic wave techniques
CN110068400B (en) * 2019-04-26 2020-05-29 中北大学 Aerospace vehicle multi-parameter monitoring system based on surface acoustic wave technology
CN110208372B (en) * 2019-05-13 2021-12-21 南京航空航天大学 Soil temperature and humidity three-dimensional map detection system and detection method based on unmanned aerial vehicle and surface acoustic wave sensor nodes
CN110208371A (en) * 2019-05-13 2019-09-06 南京航空航天大学 A kind of surface acoustic wave sensor node structure and measurement method measuring soil moisture content
CN110208372A (en) * 2019-05-13 2019-09-06 南京航空航天大学 A kind of soil temperature and humidity three-dimensional map detection system and detection method based on unmanned plane Yu surface acoustic wave sensor node
CN110233638A (en) * 2019-06-24 2019-09-13 上海航天测控通信研究所 A kind of VHF frequency range landing search Radio Beacon
CN112051566A (en) * 2020-08-28 2020-12-08 浙江大学 Moving part parameter measuring method based on SAW wireless passive sensing system
CN112051566B (en) * 2020-08-28 2023-01-10 浙江大学 A method for measuring parameters of moving parts based on SAW wireless passive sensing system
CN112668683A (en) * 2020-12-25 2021-04-16 广州安的电子科技有限公司 Intelligent safety door and detection method thereof
CN113029582B (en) * 2021-03-10 2022-04-05 南京航空航天大学 Aero-engine torque detection system and detection method based on surface acoustic wave label
CN113029582A (en) * 2021-03-10 2021-06-25 南京航空航天大学 Aero-engine torque detection system and detection method based on surface acoustic wave label
CN114486008A (en) * 2022-01-26 2022-05-13 中国电子科技集团公司第七研究所 Flexible microstrip line, backscattering touch perception system and measuring method thereof
CN114486008B (en) * 2022-01-26 2023-08-04 中国电子科技集团公司第七研究所 Flexible microstrip line, back scattering touch perception system and measuring method thereof
CN118882547A (en) * 2024-10-08 2024-11-01 合肥通用机械研究院有限公司 A method for measuring wall thickness by air-coupled acoustic resonance based on differential method
CN118882547B (en) * 2024-10-08 2024-12-03 合肥通用机械研究院有限公司 A method for measuring wall thickness by air-coupled acoustic resonance based on differential method

Also Published As

Publication number Publication date
CN107576345B (en) 2019-12-06

Similar Documents

Publication Publication Date Title
CN107576345B (en) wireless measurement system and measurement method of multi-node resonance type surface acoustic wave sensor
US7434989B2 (en) SAW temperature sensor and system
Lurz et al. Reader architectures for wireless surface acoustic wave sensors
US9395392B2 (en) Method of interrogation of a differential sensor of acoustic type having two resonances and device implementing the method of interrogation
US9477857B2 (en) Surface acoustic wave tag-based coherence multiplexing
CN102052986A (en) Wireless passive surface acoustic wave (SAW) impedance load transducer
US12113515B2 (en) Acoustic wave sensor and interrogation of the same
CN107329142B (en) SAW RFID tag ranging method based on multi-frequency phase difference
CN101788671B (en) Multicycle modulation method applied to laser ranging device using chirp amplitude modulation based on heterodyne detection
CN104768113A (en) A Love wave device structure and detection method for liquid multi-parameter sensing
CN104360234B (en) A kind of abnormal independent positioning method of the passive intermodulation of linear frequency hopping noncoherent detection
CN108988817B (en) Multi-environment parameter passive wireless reading device and method
CN111693136B (en) A Frequency Estimation Algorithm for Surface Acoustic Wave Resonators Using Autocorrelation Phase Spectrum of Echo Signals
CN107276638B (en) Acoustic surface wave reader receiving link and working method thereof
CN107346022B (en) High-precision ship measuring radar and speed measuring method based on microwave interferometer
CN104902416A (en) Interdigital parallel lovewave device structure and batch liquid detection method thereof
RU2585487C1 (en) Passive temperature sensor operating on surface acoustic waves
JP2002303645A (en) Frequency measuring apparatus, frequency measuring method and radar system
RU2485676C1 (en) Device for remote measurement of atmospheric parameters
Weigel et al. A fast and precise Six-Port-based IFM technique for wireless resonant SAW sensing
Chen et al. High‐speed data acquisition of the reader of the SAW RFID system
CN106646455B (en) A kind of road surface scattering characteristic measurement method and radar device
RU2311623C2 (en) Device for remote measuring of pressure
Liu et al. A context-aware frequency estimation method for wireless passive resonant SAW sensors
RU2756413C1 (en) Method and device for temperature monitoring based on passive delay lines on surface acoustic waves with anti-collision function

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant