CN109405887A - A kind of surface acoustic wave sensor and detection method measuring torque and temperature - Google Patents
A kind of surface acoustic wave sensor and detection method measuring torque and temperature Download PDFInfo
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- CN109405887A CN109405887A CN201811494520.7A CN201811494520A CN109405887A CN 109405887 A CN109405887 A CN 109405887A CN 201811494520 A CN201811494520 A CN 201811494520A CN 109405887 A CN109405887 A CN 109405887A
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 40
- 238000001514 detection method Methods 0.000 title abstract description 10
- 238000010521 absorption reaction Methods 0.000 claims abstract description 53
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000011787 zinc oxide Substances 0.000 claims abstract description 21
- 230000009102 absorption Effects 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 4
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000009719 polyimide resin Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 230000000644 propagated effect Effects 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 30
- 238000009434 installation Methods 0.000 abstract description 3
- 238000005086 pumping Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000002463 transducing effect Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
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- 238000004458 analytical method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
A kind of measurement torque and the surface acoustic wave sensor and detection method of temperature belong to surface acoustic wave sensor field；Temperature is installed and torque sensor is cumbersome and time consuming；Left side upper surface including sensor base is provided with zinc oxide films film layer, zinc oxide films film layer upper surface is provided with left side interdigital transducer, first reflecting grating, second reflecting grating and the first sound absorption item, first reflecting grating and the second reflecting grating are separately positioned on the two sides of left side interdigital transducer, the outside of the first reflecting grating or the second reflecting grating is arranged in first sound absorption item, the right side upper surface of sensor base is provided with right side interdigital transducer, third reflecting grating, 4th reflecting grating and the second sound absorption article, third reflecting grating and the 4th reflecting grating are separately positioned on the two sides of right side interdigital transducer, the outside of third reflecting grating or the 4th reflecting grating is arranged in second sound absorption article；The sensor that temperature is able to detect torque again can either be detected by realizing one kind, save time and the manpower of installation.
Description
Technical field
The invention belongs to the surface acoustic wave sensings of surface acoustic wave sensor field more particularly to a kind of measurement torque and temperature
Device and detection method.
Background technique
In industrial production, scientific research, daily life, the demand of torque measurement is very universal, wherein with indefinite revolving speed
The torque measurement of rotary shaft is most commonly seen.It is small to arrive torque spanner, in arrive generator, motor, greatly arrive automobile, aircraft, steamer
Transmission shaft, to solve the torque measurement demand under all kinds of different conditions, be seen everywhere in the market based on different measuring principles and
The torque-measuring apparatus of different sensitive materials.
The invention of torque sensor can be related in the torque measurement of generator earliest, but this kind of torque measurement can only
Static torque is measured, the torque of dynamic or time-varying as internal combustion engine one kind cannot be then applicable in.The 1830's, phase
Differential torque-measuring apparatus can achieve ± 4% in European patent success, measurement accuracy at that time.The fifties in 19th century, first
A high reliablity, the strain gauge that can be applicable in for a long time is invented successfully, after the commercialization of a period of time, hundreds of millions of strain gauges
Torque measurement applied to various occasions.The eighties in 19th century, a kind of new-type torque sensor --- Rotary transformer type are turned round
Square sensor quietly rises.It realizes the contactless biography of the energy and signal by the special annular rotary transformer of two groups of band gaps
It passs, which realizes the non-cpntact measurement of torque for the first time.If Rotary transformer type torque sensor has solved
Line measures the technical problem of wireless measurement, then surface acoustic wave torque sensor is then further by torque sensor from active band
The passive epoch are entered.Into the last century 90's, with the development and progress of material technology, American invention has gone out using ferromagnetic
The magnetically elastic torque measuring device of material Magnetostrictive Properties, the measurement accuracy of this kind of method is ± 1% or so, and low cost
It is honest and clean, to temperature-insensitive, long working life.
In conclusion general torque measurement techniques experienced the development less than 100 years, but occur revolutionary for several times
Innovation.
Torque sensor is not independently to use in many cases, generally also needs to cooperate a set of temperature sensor
Torque sensor is constantly demarcated, to eliminate influence of the temperature to measuring system, measurement accuracy is improved, but installs two
A sensor is cumbersome and time consuming.
Summary of the invention
The present invention overcomes above-mentioned the deficiencies in the prior art, provide a kind of surface acoustic wave sensor for measuring torque and temperature
And detection method, realize it is a kind of can either detect the sensor that temperature is able to detect torque again, saved time of installation with
Manpower.
Technical solution of the present invention:
It is a kind of measure torque and temperature surface acoustic wave sensor, including left side interdigital transducer, right side interdigital transducer,
Sensor base, zinc oxide films film layer, the first reflecting grating, the second reflecting grating, third reflecting grating, the 4th reflecting grating, the first sound absorption
Item and the second sound absorption item；The area of the zinc oxide films film layer is less than the area of sensor base, and is greater than the interdigital transducing in left side
The area of device and the area of right side interdigital transducer, first reflecting grating, the second reflecting grating, third reflecting grating and/or the 4th
The quantity of reflecting grating in reflecting grating is several；The left side upper surface of the sensor base is provided with zinc oxide films film layer, institute
It states zinc oxide films film layer upper surface and is provided with left side interdigital transducer, the first reflecting grating, the second reflecting grating and the first sound absorption item, institute
It states the first reflecting grating and the second reflecting grating is separately positioned on the two sides of left side interdigital transducer, the first sound absorption article setting is the
The outside side of one reflecting grating or the second reflecting grating, the right side upper surface of the sensor base are provided with the interdigital transducing in right side
Device, third reflecting grating, the 4th reflecting grating and the second sound absorption article, the third reflecting grating and the 4th reflecting grating are separately positioned on right side
The outside side of third reflecting grating or the 4th reflecting grating is arranged in the two sides of interdigital transducer, second sound absorption article.
It further, further include third sound absorption item；The third sound absorption item is arranged in the first reflecting grating or the second reflecting grating
Outside side.
It further, further include the 4th sound absorption article；4th sound absorption article is arranged in third reflecting grating or the 4th reflecting grating
Outside side.
Further, the left side interdigital transducer, sensor base, zinc oxide films film layer, the first reflecting grating, second anti-
Grid and the first sound absorption item are penetrated for detecting temperature；The right side interdigital transducer, sensor base, third reflecting grating, the 4th are instead
Grid and the second sound absorption item are penetrated for detecting torque.
Further, the material of the sensor base is quartz piezoelectric substrate or lead titanate piezoelectric ceramics substrate.
Further, the left side interdigital transducer, right side interdigital transducer, the first reflecting grating, the second reflecting grating, third
The material of reflecting grating and the 4th reflecting grating is aluminium.
Further, the material of the first sound absorption item and the second sound absorption item is polyimide resin.
A kind of detection torque that the surface acoustic wave sensor for a kind of measurement torque and temperature is realized and temperature
Method, comprising the following steps:
Step a, transmitter issues pumping signal；
Step b, left side interdigital transducer and right side interdigital transducer receive pumping signal simultaneously；
Step c, the described left side interdigital transducer and the right side interdigital transducer are based on piezoelectric effect in sensor base
Surface on formed vibration wave respectively to the left and right two sides propagate, the left side interdigital transducer on the surface of sensor base go out
Existing vibration wave is formed under the collective effect that have passed through zinc oxide films film layer；
Step d, the described vibration wave formed in sensor base is encountering the first reflecting grating, the second reflecting grating, third
Start to reflect after reflecting grating and the 4th reflecting grating, and form the first from left right side respectively on the surface of sensor base there is stable vibration
The standing wave of dynamic frequency, the standing wave are surface acoustic wave, and the left and right sides is formed by the resonance frequency of surface acoustic wave and takes respectively
With the relevant information of torque and temperature；
Step e, left side interdigital transducer passes through the frequency signal comprising torque and temperature with right side interdigital transducer
Wireless antenna is transmitted to receiver；
Step f, after receiver is handled signal by processing circuit, electronic control unit, the electronics are transmitted to
Control unit preferentially judges whether torque signal is zero, if so, output temperature signal, if it is not, output torque signal.
The present invention has the advantages that compared with the existing technology
The present invention provides a kind of surface acoustic wave sensors and detection method for measuring torque and temperature, have realized one kind both
It is able to detect the sensor that temperature is able to detect torque again, has saved time and the manpower of installation；With following advantage:
1, passive and wireless, the feature of surface acoustic wave sensor maximum are exactly passive and wireless, do not need electricity in the course of work
Source does not need conducting wire connection yet, directly can be carried out the transmitting of signal by antenna；
2, structure is simple, and for the present invention compared with existing torque sensor or temperature sensor, structure is simple, and there are no discuss two
Person combine after comprehensive sensor；
3, low in cost, surface acoustic wave sensor due to its passive and wireless characteristic, so entire sensor-based system does not need
Power supply and data line, reduce costs, in addition to this, the configuration of the present invention is simple, compact and be double physical quantitys detection, so
Cost is more cheap after batch production；
4, temperature and torque can be measured simultaneously, and core of the invention advantage is exactly that a sensor can either measure torque again
Temperature can be measured.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is the method for the present invention flow diagram.
In figure: 1 left side interdigital transducer, 2 right side interdigital transducers, 3 sensor bases, 4 zinc oxide films film layers, 5 first
Reflecting grating, 6 second reflecting gratings, 7 third reflecting gratings, 8 the 4th reflecting gratings, 9 first sound absorptions article, 10 second sound absorptions article, 11 thirds are inhaled
Sound article, 12 the 4th sound absorptions article.
Specific embodiment
Below with reference to attached drawing, the present invention is described in detail.
Specific embodiment one
A kind of surface acoustic wave sensor measuring torque and temperature, as shown in Figure 1, including left side interdigital transducer 1, right side
Interdigital transducer 2, sensor base 3, zinc oxide films film layer 4, the first reflecting grating 5, the second reflecting grating 6, third reflecting grating 7,
Four reflecting gratings 8, first sound absorption item 9 and the second sound absorption item 10；The area of the zinc oxide films film layer 4 is less than sensor base 3
Area, and it is greater than the area of left side interdigital transducer 1 and the area of right side interdigital transducer 2, first reflecting grating 7, second
The quantity of reflecting grating 8, third reflecting grating 7 and/or the reflecting grating in the 4th reflecting grating 8 is several；A left side for the sensor base 3
Side upper surface is provided with zinc oxide films film layer 4, and 4 upper surface of zinc oxide films film layer is provided with left side interdigital transducer 1, first
Reflecting grating 5, the second reflecting grating 6 and the first sound absorption item 9, first reflecting grating 5 and the second reflecting grating 6 are separately positioned on left side fork
The outside side of the first reflecting grating 5 or the second reflecting grating 6, institute is arranged in the two sides of finger transducer 1, the first sound absorption item 9
The right side upper surface for stating sensor base 3 is provided with right side interdigital transducer 2, third reflecting grating 7, the 4th reflecting grating 8 and second
Absorb sound item 10, and the third reflecting grating 7 and the 4th reflecting grating 8 are separately positioned on the two sides of right side interdigital transducer 2, and described second
The outside side of third reflecting grating 7 or the 4th reflecting grating 8 is arranged in sound absorption article 10.
It specifically, further include third sound absorption item 11；Third sound absorption item 11 setting is in the first reflecting grating 5 or the second reflection
The outside side of grid 6.
It specifically, further include the 4th sound absorption article 12；4th sound absorption article, 12 setting is reflected in third reflecting grating 7 or the 4th
The outside side of grid 8.
Specifically, the left side interdigital transducer 1, sensor base 3, zinc oxide films film layer 4, the first reflecting grating 5, second
Reflecting grating 6 and the first sound absorption item 9 are for detecting temperature；The right side interdigital transducer 2, sensor base 3, third reflecting grating 7,
4th reflecting grating 8 and the second sound absorption article 10 are for detecting torque.
Specifically, the material of the sensor base 3 is quartz piezoelectric substrate or lead titanate piezoelectric ceramics substrate, institute
Stating zinc oxide films film layer 4 is temperature-sensitive material.
Specifically, the left side interdigital transducer 1, right side interdigital transducer 2, the first reflecting grating 5, the second reflecting grating 6,
The material of three reflecting gratings 7 and the 4th reflecting grating 8 is aluminium.
Specifically, the material of 9, second sound absorption article 10 of the first sound absorption article, third sound absorption article 11 and the 4th sound absorption article 12
For polyimide resin.
The effect of first sound absorption article, 9, second sound absorption article 10, third sound absorption article 11 and the 4th sound absorption article 12 is that absorption is more
Remaining surface acoustic wave with reduce energy from be lost and standing wave frequency to be measured is impacted, increase detection torque and temperature it is accurate
Degree.
Working principle: it when surface acoustic wave sensor is as torque sensor, needs on shaft surface and axially in ± 45 ° of positions
Stickup is set, when applying torque, strain is generated on axis, on the basis of not considering slippages, can be generated in sensor base 3 same
The strain of size, the spread speed that will lead to surface acoustic wave at this time change, in addition, sensor base 3 is in surface acoustic wave
When strain on the direction of propagation, the wavelength for also resulting in surface acoustic wave changes, and the variation of the two eventually leads to sound
The resonance frequency shifts of surface wave torque sensor；
Core formulaWherein f is resonance frequency, and ν is velocity of wave, and λ is wavelength.
When surface acoustic wave sensor is as temperature sensor, the spread speed of surface acoustic wave will receive the influence of temperature, wave
It is long by being influenced to ignore, when environment temperature is from T0When changing to T, the velocity of wave of surface acoustic wave is from v (T0) change to v (T)=
v(T0)+a(T-T0)+b(T-T0)2+ ..., when ambient temperature changes to T at this time, SAW Temperature Sensors are exported humorous
Vibration frequency just becomesf(T)-f(T0) it is SAW Temperature Sensors resonance under the conditions of temperature change
The drift value that frequency occurs.
Present embodiment is compared with magnetoelasticity formula torque measurement mode, accuracy of measurement original text, and error is small；With strain-type torque
Measurement method is compared, and anti-interference ability is high, the torque measurement suitable for high speed rotating shaft；Compared with type vibration wire torque measurement mode,
Structure is simple, high sensitivity, the torque measurement suitable for various types shaft；Compared with photo-electric torque measurement mode, structure
Simply, strong antijamming capability is applicable in just starting or the torque measurement of slow-speed of revolution axis；Compared with magneto-electric torque measurement mode, knot
Structure is simple, and the response time is short, and dynamic characteristic is good, the torque measurement suitable for high speed rotating shaft；Compared with capacitor torque measurement method,
The rigidity of structure requires low, to be suitble to shaft oversized torque measurement；Compared with optical fiber type torque measurement mode, not vulnerable to air
In dust, the interference such as aerosol, and debugging simple；Compared with Mageneto-sensitive type torque measurement mode, mechanical structure is simple, to sensitive member
The sensitivity requirement of part is low；Compared with laser-Doppler formula torque measurement mode, at low cost, structure is simple, is suitble to answer on a large scale
With.
Specific embodiment two
A kind of inspection realized for a kind of measurement torque described in specific embodiment one and the surface acoustic wave sensor of temperature
The method for surveying torque and temperature, as shown in Figure 2, comprising the following steps:
Step a, transmitter issues pumping signal；
Step b, left side interdigital transducer 1 and right side interdigital transducer 2 receive pumping signal simultaneously；
Step c, the described left side interdigital transducer 1 is based on piezoelectric effect in sensor base with the right side interdigital transducer 2
Vibration wave is formed on the surface at bottom 3, and two sides are propagated to the left and right respectively, table of the left side interdigital transducer 1 in sensor base 3
The vibration wave occurred on face is formed under the collective effect that have passed through zinc oxide films film layer 4；
Step d, the described vibration wave formed in sensor base 3 is encountering the first reflecting grating 5, the second reflecting grating 6,
Start to reflect after three reflecting gratings 7 and the 4th reflecting grating 8, and form the first from left right side on the surface of sensor base 3 respectively to have
The standing wave of stable vibration frequency, the standing wave are surface acoustic wave, and the left and right sides is formed by the resonance frequency of surface acoustic wave
Carry the relevant information of torque and temperature respectively；
Step e, left side interdigital transducer 1 leads to the frequency signal comprising torque and temperature with right side interdigital transducer 2
It crosses wireless antenna and is transmitted to receiver；
Step f, after receiver is handled signal by processing circuit, electronic control unit, the electronics are transmitted to
Control unit preferentially judges whether torque signal is zero, if so, output temperature signal, if it is not, output torque signal.
Left side interdigital transducer 1 and right side interdigital transducer 2 can receive and emit radiofrequency signal, when the interdigital transducing in left side
Device 1 or right side interdigital transducer 2 utilize piezoelectric effect to form surface acoustic wave simultaneously in sensor base 3 after receiving radiofrequency signal
It blazes abroad to two sides, forms standing wave in sensor base after surface acoustic wave encounters the reflecting grating of two sides, the frequency of the standing wave
Rate is converted into emission of radio frequency signals by left side interdigital transducer 1 or right side interdigital transducer 2 and goes out, and present embodiment can be quick
Accurate detection temperature and torque.
Transmitter is used to emit pumping signal, and receiver is used to receiving sensor echo-signal, is realized using RF switch
Signal transmitting and received isolation.
Signal source generates the resting period property high frequency sinusoidal pumping signal of certain duty ratio, is amplified to by power amplifier
After specified power by RF switch, be connected to antenna and be transmitted to sensor；On the other hand, pass through antenna receiving sensor
Echo-signal.Echo-signal follows pumping signal closely, exponentially decays, when having certain due to echo-signal and transmitting pumping signal
Prolong sequence i.e. chronological order, so the radio-frequency receiving-transmitting disconnecting switch by single-pole double throw can isolate echo-signal.
After receiver receives, echo-signal carries out following operation by processing circuit:
Low-noise amplifier is first passed through, then is sent after carrying out bandpass filtering treatment by filter to frequency mixer progress down coversion
Reason.Receiver uses nearly zero intermediate frequency scheme, is f using signal source transmitting reference frequencyExcitationPumping signal, with sensor frequency
For fEchoEcho-signal mixing after obtain difference frequency signal output, i.e., down-conversion signal is converted into intermediate-freuqncy signal.What is done so is excellent
Point is the sampling frequency that can be effectively improved the quality of mixting circuit intermediate-freuqncy signal, while can also reduce analog to digital conversion circuit
Rate.IF output signal after frequency conversion by the amplification of difference amplifier, conditioning, want by the input for making signal meet analog to digital conversion circuit
It asks, then is sampled by analog to digital conversion circuit, then sampled data is handled by electronic control unit, that is, control processor
Analysis and judgement.
The present embodiment surface acoustic wave sensor different using two resonance frequencies, so needing successively to inquire
Each resonance frequency.In normal working temperature environment, when not applying torque, the resonance frequency of sensor output is respectively f11,
F12 represents torque signal and temperature signal under current state, humorous in the torque and range of temperature inner sensor of setting
Vibration frequency variation is no more than ± Δ f ', and the resonance frequency for applying two sensors after torque changes with ambient temperature becomes f11 ',
f12′.By emitting a frequency signal, so that two sensors have response, it can use Fourier transformation and find out two frequencies respectively
Rate.The resonance frequency of each sensor can be measured repeatedly and averaged, missed with improving accuracy of measurement, reducing measurement
Difference.
Finally again by calculating frequency drift amount, i.e. Δ f11=f11 '-f11, Δ f12=f12 '-f12, and by the drift
It measures and is compared in advance in the truth table that processor memory has stored up, it will be able to find out the temperature value and torque under current state
Value.
Claims (8)
1. a kind of surface acoustic wave sensor for measuring torque and temperature, which is characterized in that including left side interdigital transducer (1), the right side
Side interdigital transducer (2), sensor base (3), zinc oxide films film layer (4), the first reflecting grating (5), the second reflecting grating (6),
Three reflecting gratings (7), the 4th reflecting grating (8), the first sound absorption article (9) and the second sound absorption article (10)；The zinc oxide films film layer (4)
Area is less than the area of sensor base (3), and is greater than the area and right side interdigital transducer (2) of left side interdigital transducer (1)
Area, it is anti-in first reflecting grating (7), the second reflecting grating (8), third reflecting grating (7) and/or the 4th reflecting grating (8)
It is several for penetrating the quantity of grid；The left side upper surface of the sensor base (3) is provided with zinc oxide films film layer (4), the oxidation
Zinc film layer (4) upper surface is provided with left side interdigital transducer (1), the first reflecting grating (5), the second reflecting grating (6) and first and inhales
Sound item (9), first reflecting grating (5) and the second reflecting grating (6) are separately positioned on the two sides of left side interdigital transducer (1), institute
The first sound absorption item (9) is stated to be arranged in the outside side of the first reflecting grating (5) or the second reflecting grating (6), the sensor base
(3) right side upper surface is provided with right side interdigital transducer (2), third reflecting grating (7), the 4th reflecting grating (8) and the second sound absorption
Item (10), the third reflecting grating (7) and the 4th reflecting grating (8) are separately positioned on the two sides of right side interdigital transducer (2), described
Second sound absorption article (10) is arranged in the outside side of third reflecting grating (7) or the 4th reflecting grating (8).
2. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that further include the
Three sound absorptions item (11)；Outside one of third sound absorption item (11) setting in the first reflecting grating (5) or the second reflecting grating (6)
Side.
3. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that further include the
Four sound absorptions item (12)；Outside one of 4th sound absorption article (12) setting in third reflecting grating (7) or the 4th reflecting grating (8)
Side.
4. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that the left side
Interdigital transducer (1), sensor base (3), zinc oxide films film layer (4), the first reflecting grating (5), the second reflecting grating (6) and first
Sound absorption item (9) is for detecting temperature；The right side interdigital transducer (2), sensor base (3), third reflecting grating (7), the 4th
Reflecting grating (8) and the second sound absorption item (10) are for detecting torque.
5. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that the sensing
The material of device substrate (3) is quartz piezoelectric substrate or lead titanate piezoelectric ceramics substrate.
6. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that the left side
Interdigital transducer (1), right side interdigital transducer (2), the first reflecting grating (5), the second reflecting grating (6), third reflecting grating (7) and
The material of four reflecting gratings (8) is aluminium.
7. a kind of surface acoustic wave sensor for measuring torque and temperature according to claim 1, which is characterized in that described first
It absorbs sound item (9) and the material of the second sound absorption item (10) is polyimide resin.
8. a kind of for a kind of any inspection for the surface acoustic wave sensor realization for measuring torque and temperature of claim 1 to 7
The method for surveying torque and temperature, which comprises the following steps:
Step a, transmitter issues request signal；
Step b, left side interdigital transducer (1) and right side interdigital transducer (2) receive request signal simultaneously；
Step c, the described left side interdigital transducer (1) and the right side interdigital transducer (2) are based on piezoelectric effect in sensor base
Vibration wave is formed on the surface at bottom (3), and two sides are propagated to the left and right respectively, and the left side interdigital transducer (1) is in sensor base
(3) vibration wave occurred on surface is formed under the collective effect that have passed through zinc oxide films film layer (4)；
Step d, the described vibration wave formed on sensor base (3) encounter the first reflecting grating (5), the second reflecting grating (6),
Start to reflect after third reflecting grating (7) and the 4th reflecting grating (8), and forms the first from left right side on the surface of sensor base (3)
Respectively with the standing wave of stable vibration frequency, the standing wave is surface acoustic wave, and the left and right sides is formed by the humorous of surface acoustic wave
The relevant information of torque and temperature is carry in vibration frequency respectively；
Step e, left side interdigital transducer (1) leads to the frequency signal comprising torque and temperature with right side interdigital transducer (2)
It crosses wireless antenna and is transmitted to receiver；
Step f, after receiver is handled signal by processing circuit, electronic control unit, the electronic control are transmitted to
Unit preferentially judges whether torque signal is zero, if so, output temperature signal, if it is not, output torque signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811494520.7A CN109405887A (en) | 2018-12-07 | 2018-12-07 | A kind of surface acoustic wave sensor and detection method measuring torque and temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811494520.7A CN109405887A (en) | 2018-12-07 | 2018-12-07 | A kind of surface acoustic wave sensor and detection method measuring torque and temperature |
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| Publication Number | Publication Date |
|---|---|
| CN109405887A true CN109405887A (en) | 2019-03-01 |
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| CN201811494520.7A Pending CN109405887A (en) | 2018-12-07 | 2018-12-07 | A kind of surface acoustic wave sensor and detection method measuring torque and temperature |
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| CN116086546A (en) * | 2023-03-07 | 2023-05-09 | 中北大学 | Device and method for real-time in-situ simultaneous measurement of temperature and mechanical parameters |
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