CN110411925B - System and method for measuring ultrafine particles based on surface acoustic wave technology - Google Patents
System and method for measuring ultrafine particles based on surface acoustic wave technology Download PDFInfo
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- CN110411925B CN110411925B CN201910681280.XA CN201910681280A CN110411925B CN 110411925 B CN110411925 B CN 110411925B CN 201910681280 A CN201910681280 A CN 201910681280A CN 110411925 B CN110411925 B CN 110411925B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/34—Purifying; Cleaning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
- G01N2001/4088—Concentrating samples by other techniques involving separation of suspended solids filtration
Abstract
The invention discloses a system and a method for measuring ultrafine particles based on a surface acoustic wave technology, wherein the measuring system comprises: the sample gas processing unit is used for heating, filtering and controlling the amount of sample gas, and specifically comprises a heater, a filter and a sample gas flow controller; the particle electrostatic ionization unit is used for ionizing and diluting ultrafine particles in the sample gas; the device specifically comprises an ionization chamber and a dilution chamber; the electrostatic deposition sampling unit is used for collecting ultrafine particles and collecting frequency signals of the surface acoustic wave sensor, and is also provided with an exhaust port and a pump for exhausting the ultrafine particles; and the control and operation unit is used for determining the mass of the ultrafine particles according to the electric signals and the flow. By adopting the system and the method for measuring the ultrafine particles based on the surface acoustic wave technology, the concentration of the ultrafine particles in the atmosphere can be measured finely, and repeated measurement can be realized.
Description
Technical Field
The invention relates to the technical field of detection of particles in atmosphere, in particular to a system and a method for measuring ultrafine particles based on a surface acoustic wave technology.
Background
The traditional method for detecting the concentration of the particulate matters mainly comprises aerodynamic flight time measurement, a light scattering method, a beta ray method, a vibration balance method and the like. The detection means is based on the movement characteristic or the weight characteristic of the particles with large particle size, and the traditional detection means is invalid under the conditions that the particle size of the particles is small (below 300 nm), the movement is irregular and the mass accumulation effect is not obvious.
Disclosure of Invention
The invention aims to provide a system and a method for measuring ultrafine particles based on a surface acoustic wave technology, which are used for charging the ultrafine particles through high-pressure ionization, deducing the mass of the ultrafine particles through the front-back change of the oscillation frequency of a surface acoustic wave sensor through the ultrafine particles, and accurately measuring the concentration of the ultrafine particles in the atmosphere.
In order to achieve the above object, the present invention provides a system for measuring ultrafine particles based on surface acoustic wave technology, comprising:
the sample gas treatment unit comprises a heater, is communicated with the sample gas inlet pipeline and is used for heating the sample gas passing through the heater to remove water vapor in the sample gas; the filter is communicated with the heater through a pipeline and is used for filtering the particles larger than the threshold value of the detected particles in the sample gas with the water vapor removed to form ultrafine particles; the sample gas flow controller is communicated with the filter through a pipeline and is used for controlling the flow of the sample gas containing the ultrafine particles;
the particle electrostatic ionization unit comprises an ionization chamber and a high-voltage electric gun arranged in the ionization chamber, the ionization chamber is communicated with the sample gas flow controller through a pipeline, and the high-voltage electric gun ionizes the ultrafine particles to form charged ultrafine particles; the diluting chamber is communicated with the ionization chamber through a pipeline, a carrier gas channel is arranged in the diluting chamber, and carrier gas is mixed with the charged ultrafine particles in the diluting chamber through the carrier gas channel;
the electrostatic deposition sampling unit is communicated with the particle electrostatic ionization unit through a pipeline and comprises a deposition chamber communicated with the dilution chamber through a pipeline, and a surface acoustic wave sensor and a sensor signal conditioning unit which are respectively arranged in the deposition chamber; the surface acoustic wave sensor is used for collecting the charged ultrafine particles; the sensor signal conditioning unit is connected with the surface acoustic wave sensor and is used for converting the acquired output oscillation frequency signal of the surface acoustic wave sensor into a voltage signal;
and the control and operation unit is respectively connected with the sensor signal conditioning unit and the sample gas flow controller and is used for determining the quality of the ultrafine particles according to the electric signals and the flow.
Preferably, the surface acoustic wave sensor employs a resonance type surface acoustic wave chip.
Preferably, the surface acoustic wave sensor includes:
the high-voltage electrode is grounded and is used for attracting the charged ultrafine particles to deposit;
the input end interdigital electrode is respectively connected with the high-voltage electrode and the sensor signal conditioning unit, generates sound waves with fixed frequency through electroacoustic conversion, the sound waves are transmitted along the surface of the surface acoustic wave sensor, and the sound waves change in frequency through the charged ultrafine particles deposited on the high-voltage electrode;
the output end interdigital electrode is connected with the high-voltage electrode and the sensor signal conditioning unit and used for receiving the sound wave signal passing through the high-voltage electrode, converting the sound wave signal into an oscillating electric signal with synchronous frequency through sound-electricity conversion, and detecting the frequency change of the oscillating electric signal by the sensor signal conditioning unit;
the sensor signal conditioning unit is also used for determining the electric signal of the charged ultrafine particles according to the change of the sound wave frequency.
Preferably, the electrostatic deposition sampling unit further comprises a sensor driving unit connected with the surface acoustic wave sensor, and the sensor driving unit is used for driving the surface acoustic wave sensor to work normally.
Preferably, the lower end part of the deposition chamber is provided with an exhaust port, and a pump is arranged below the exhaust port and used for completely exhausting the ultrafine particles.
Preferably, a carrier gas flow controller is arranged on the carrier gas channel, is electrically connected with the control and arithmetic unit, and is used for controlling the flow of the carrier gas under the control of the control and arithmetic unit.
Preferably, the carrier gas passage is hollow cylindrical.
Preferably, the high voltage electric gun corresponds to an electrode of the high voltage electrode, if the high voltage electric gun is a positive electrode, the high voltage electrode is a negative electrode, and if the high voltage electric gun is a negative electrode, the high voltage electrode is a positive electrode.
In addition, the invention also provides a measuring method of the superfine particulate matter measuring system based on the surface acoustic wave technology, and the measuring method comprises the following steps:
1) closing the sample gas flow controller, opening the carrier gas flow controller, collecting a carrier gas flow signal and collecting a surface acoustic wave sensor frequency signal;
2) taking the frequency signal of the surface acoustic wave sensor as an initial value, wherein the mass of the ultrafine particles is zero;
3) opening the sample gas flow controller and the carrier gas flow controller;
4) acquiring a sound wave frequency difference value of the surface acoustic wave sensor at a set time t;
5) calculating the frequency difference to obtain the mass m of the ultrafine particles;
6) and calculating the content of the ultrafine particles in the unit sample gas.
Preferably, the method further comprises turning off the sample gas flow controller, stopping sample gas input, and turning off the high-voltage electric gun and the surface acoustic wave sensor, and then the charged ultrafine particles become non-charged ultrafine particles, and are discharged out of the deposition chamber under the combined action of the carrier gas, the exhaust port, and the pump, so as to realize repeated measurement.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention adopts the filter to filter the particles larger than the diameter threshold of the detected particles in the atmosphere, realizes the measurement of the ultrafine particles, simultaneously adopts the surface acoustic wave technology to measure the quality of the ultrafine particles in the atmosphere, optimizes the deposition sampling mode of the ultrafine particles, improves the deposition efficiency of the ultrafine particles and realizes the accurate measurement.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a structural diagram of an ultra-fine particle measurement system based on the surface acoustic wave technology according to the present invention;
FIG. 2 is a structural diagram of a surface acoustic wave sensor in the ultra-fine particle measurement system based on the surface acoustic wave technology according to the present invention;
FIG. 3 is a flow chart of the method for measuring ultrafine particles based on the surface acoustic wave technology.
Description of the symbols: 1-sample gas processing unit, 2-particle electrostatic ionization unit, 3-electrostatic deposition sampling unit, 4-control and operation unit, 101-heater, 102-filter, 103-sample gas flow controller, 201-ionization chamber, 202-high voltage electric gun, 203-dilution chamber, 204-carrier gas channel, 205-carrier gas flow controller, 301-deposition chamber, 302-surface acoustic wave sensor, 303-sensor signal conditioning unit, 304-sensor driving unit, 305-exhaust port, 306-pump, 3021-input terminal interdigital electrode, 3022-high voltage electrode, 3033-output terminal interdigital electrode.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a system and a method for measuring ultrafine particles based on a surface acoustic wave technology, which are used for realizing accurate measurement and repeated measurement of the ultrafine particles in the atmosphere.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1, the system for measuring ultrafine particles based on the surface acoustic wave technology specifically comprises a sample gas processing unit 1, a particle electrostatic ionization unit 2, an electrostatic deposition sampling unit 3 and a control and operation unit 4.
Wherein the sample gas processing unit 1 includes a heater 101, a filter 102, and a sample gas flow controller 103; the heater 101 is communicated with the sample gas inlet pipeline, and the heater 101 is used for heating the sample gas passing through the heater, removing water vapor in the sample gas and eliminating the interference of water vapor molecules on measurement; the filter 102 is communicated with the heater 101 through a pipeline, the filter 102 is used for filtering the sample gas from which the water vapor is removed, removing the charged particles in the sample gas from which the water vapor is removed, and filtering out the particles larger than the diameter threshold of the detected particles to form the sample gas only containing the ultrafine particles; the sample gas flow controller 103 is communicated with the filter 102 through a pipeline, and the sample gas flow controller 103 is used for controlling the flow of the ultrafine particle sample gas.
The electrostatic particle ionization unit 2 comprises an ionization chamber 201, a dilution chamber 203, a high-voltage electric gun 202, a carrier gas channel 204 and a carrier gas flow controller 205; the ionization chamber 201 is communicated with the sample gas flow controller 103 through a pipeline, the high-voltage electric gun 202 is arranged in the ionization chamber 201, and the high-voltage electric gun 202 ionizes the ultrafine particles in a tip corona mode to form charged ultrafine particles; the dilution chamber 203 is communicated with the ionization chamber through a pipeline, the carrier gas channel 204 is arranged on the dilution chamber, the carrier gas flow controller 205 is arranged in the carrier gas channel 204, the carrier gas flow controller 205 is used for controlling the flow of carrier gas, the carrier gas is mixed with the charged ultrafine particles in the dilution chamber 203 through the carrier gas channel 204, and the high-speed carrier gas brings the ultrafine particle sample gas with lower speed into the electrostatic deposition sampling unit 3.
The carrier gas channel 204 is shaped like a hollow disk.
The electrostatic deposition sampling unit 3 comprises a deposition chamber 301, a surface acoustic wave sensor 302, a sensor signal conditioning unit 303, a sensor driving unit 304, an exhaust port 305 and a pump 306.
Wherein, the deposition chamber 301 is communicated with the dilution chamber 203 through a pipeline, and the sensor driving unit 304, the surface acoustic wave sensor 302 and the sensor signal conditioning unit 303 are sequentially arranged in the deposition chamber 301.
The surface acoustic wave sensor 302 includes:
the high-voltage electrode 3022, which is grounded, is used for attracting the charged ultrafine particles to deposit;
the input end interdigital electrode 3021, the input end interdigital electrode 3021 is connected to the high voltage electrode 3022, the input end interdigital electrode 3021 generates a sound wave with a fixed frequency through electro-acoustic conversion, the sound wave propagates along the surface of the surface acoustic wave sensor, and the frequency of the sound wave changes through the charged ultrafine particles on the high voltage electrode 3022;
an output end interdigital electrode 3023 connected to the high voltage electrode 3022 and the sensor signal conditioning unit 303, for receiving the acoustic wave signal passing through the high voltage electrode 3022, converting the acoustic wave signal into an oscillation electric signal with synchronous frequency through acoustoelectric conversion, and detecting a frequency change of the oscillation electric signal by the sensor signal conditioning unit 303; (as shown in fig. 2).
The sensor driving unit 304 is connected to the input end interdigital electrode 3021, and is configured to drive the input end interdigital electrode 3021 to generate an acoustic wave with a fixed frequency, so that the saw sensor 302 operates at the fixed frequency;
the sensor signal conditioning unit 303 is connected to the input end interdigital electrode 3021 and the output end interdigital electrode 3023, respectively, generates a reference oscillation frequency signal and collects the frequency of the output oscillation signal, and converts the frequency difference between the two oscillation signals into a voltage signal.
The surface acoustic wave sensor adopts a resonant surface acoustic wave chip; the exhaust port 305 is disposed at the lower end of the deposition chamber 301, the pump 306 is disposed under the exhaust port 305, and the exhaust port 305 and the pump 306 work together to completely exhaust the ultrafine particles.
The control and arithmetic unit 4 is connected to the heater 101, the filter 102, the sample gas flow controller 103, the high voltage torch 202, the carrier gas flow controller 205, the sensor driving unit 304, the sensor signal conditioning unit 303, and the pump 306, respectively;
the control and operation unit 4 is used for controlling the start and stop of the heater 101, the filter 102, the high-voltage electric gun 202, the sensor driving unit 304, the sensor signal conditioning unit 303 and the pump 306;
the control and operation unit 4 controls the working states of the sample gas flow controller 103 and the carrier gas flow controller 205, that is, the flow rates of the sample gas and the carrier gas are controlled by the sample gas flow controller 103 and the carrier gas flow controller 205 respectively; and simultaneously, the sample gas flow information is acquired from the sample gas flow controller 103, the electric signal is acquired from the sensor signal conditioning unit 303, and the superfine particulate matter mass information is calculated, so that the volume concentration or the mass concentration of the superfine particulate matter in the sample gas is calculated.
As shown in fig. 3, the measuring method of the system for measuring ultrafine particles based on the surface acoustic wave technology of the present invention comprises the following specific steps:
1) closing the sample gas flow controller 103, opening the carrier gas flow controller 205, and acquiring a carrier gas flow signal and a frequency signal of the surface acoustic wave sensor 302;
2) taking the frequency signal of the acoustic surface wave sensor 302 as an initial value, wherein the mass of the ultrafine particle is zero;
3) opening the sample gas flow controller 103 and the carrier gas flow controller 205;
4) acquiring a sound wave frequency difference value of the surface acoustic wave sensor 302 at a set time t;
5) calculating a frequency difference value to obtain the mass m of the ultrafine particles;
6) and calculating the content of the ultrafine particles in unit sample gas.
7) And closing the sample gas flow controller 103, stopping sample gas input, closing the high-voltage electric gun 202 and the surface acoustic wave sensor 302, wherein the charged ultrafine particles become non-charged ultrafine particles and are completely discharged out of the deposition chamber 301 under the combined action of the carrier gas, the exhaust port 305 and the pump 306, so that repeated measurement is realized.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The method disclosed by the embodiment corresponds to the system disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the system part for description.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. The utility model provides an ultrafine particle measurement system based on surface acoustic wave technique which characterized in that includes:
the sample gas treatment unit comprises a heater, is communicated with the sample gas inlet pipeline and is used for heating the sample gas passing through the heater to remove water vapor in the sample gas; the filter is communicated with the heater through a pipeline and is used for filtering the particles larger than the threshold value of the detected particles in the sample gas with the water vapor removed to form ultrafine particles; the sample gas flow controller is communicated with the filter through a pipeline and is used for controlling the flow of the sample gas containing the ultrafine particles;
the particle electrostatic ionization unit comprises an ionization chamber and a high-voltage electric gun arranged in the ionization chamber, the ionization chamber is communicated with the sample gas flow controller through a pipeline, and the high-voltage electric gun ionizes the ultrafine particles to form charged ultrafine particles; the diluting chamber is communicated with the ionization chamber through a pipeline, a carrier gas channel is arranged in the diluting chamber, and carrier gas is mixed with the charged ultrafine particles in the diluting chamber through the carrier gas channel;
the electrostatic deposition sampling unit is communicated with the particle electrostatic ionization unit through a pipeline and comprises a deposition chamber communicated with the dilution chamber through a pipeline, and a surface acoustic wave sensor and a sensor signal conditioning unit which are respectively arranged in the deposition chamber; the surface acoustic wave sensor is used for collecting the charged ultrafine particles; the sensor signal conditioning unit is connected with the surface acoustic wave sensor and is used for converting the acquired output oscillation frequency signal of the surface acoustic wave sensor into a voltage signal;
the surface acoustic wave sensor includes: the high-voltage electrode, the input end interdigital electrode and the output end interdigital electrode;
the sensor signal conditioning unit is respectively connected with the input end interdigital electrode and the output end interdigital electrode, generates a reference oscillation frequency signal and collects the frequency of an output oscillation signal, and converts the frequency difference of the two oscillation signals into a voltage signal;
and the control and operation unit is respectively connected with the sensor signal conditioning unit and the sample gas flow controller and is used for determining the quality of the ultrafine particles according to the electric signals and the flow.
2. The system of claim 1, wherein the saw sensor is a resonant type saw chip.
3. The surface acoustic wave technology-based ultrafine particle measurement system according to claim 1, wherein the surface acoustic wave sensor comprises:
the high-voltage electrode is grounded and is used for attracting the charged ultrafine particles to deposit;
the input end interdigital electrode is respectively connected with the high-voltage electrode and the sensor signal conditioning unit, generates sound waves with fixed frequency through electroacoustic conversion, the sound waves are transmitted along the surface of the surface acoustic wave sensor, and the sound waves change in frequency through the charged ultrafine particles deposited on the high-voltage electrode;
the output end interdigital electrode is connected with the high-voltage electrode and the sensor signal conditioning unit and used for receiving the sound wave signal passing through the high-voltage electrode, converting the sound wave signal into an oscillating electric signal with synchronous frequency through sound-electricity conversion, and detecting the frequency change of the oscillating electric signal by the sensor signal conditioning unit;
the sensor signal conditioning unit is also used for determining the electric signal of the charged ultrafine particles according to the change of the sound wave frequency.
4. The surface acoustic wave technology-based ultrafine particle measurement system according to claim 1, wherein the electrostatic deposition sampling unit further comprises a sensor driving unit connected to the surface acoustic wave sensor, and the sensor driving unit is configured to drive the surface acoustic wave sensor to operate normally.
5. A surface acoustic wave technology-based ultrafine particle measurement system as set forth in claim 1, wherein an exhaust port is provided at a lower end portion of said deposition chamber, and a pump is provided below said exhaust port for completely discharging the ultrafine particles.
6. A surface acoustic wave technology-based ultrafine particle measurement system as set forth in claim 1, characterized in that a carrier gas flow controller is disposed on said carrier gas channel, electrically connected to said control and arithmetic unit, for controlling the flow of carrier gas under the control of said control and arithmetic unit.
7. A surface acoustic wave technology-based ultrafine particle measurement system as set forth in claim 1, wherein said carrier gas channel is hollow cylindrical.
8. The surface acoustic wave technology-based ultrafine particle measurement system according to claim 3, wherein the high voltage electric gun corresponds to an electrode of the high voltage electrode, and if the high voltage electric gun is a positive electrode, the high voltage electrode is a negative electrode, and if the high voltage electric gun is a negative electrode, the high voltage electrode is a positive electrode.
9. A measuring method of the surface acoustic wave technology-based ultrafine particle measuring system according to any one of claims 1 to 8, characterized in that the measuring method comprises:
1) closing the sample gas flow controller, opening the carrier gas flow controller, collecting a carrier gas flow signal and collecting a surface acoustic wave sensor frequency signal;
2) taking the frequency signal of the surface acoustic wave sensor as an initial value, wherein the mass of the ultrafine particles is zero;
3) opening the sample gas flow controller and the carrier gas flow controller;
4) acquiring a sound wave frequency difference value of the surface acoustic wave sensor at a set time t;
5) calculating the frequency difference, converting the frequency difference of the two oscillation signals into a voltage signal, and obtaining the mass m of the ultrafine particles according to an electric signal and the flow of the sample gas containing the ultrafine particles;
6) and calculating the content of the ultrafine particles in the unit sample gas.
10. The method of claim 9, further comprising, after turning off the sample gas flow controller, stopping the input of the sample gas, and turning off the high voltage gun and the saw sensor, the charged ultrafine particles become non-charged ultrafine particles, and are discharged out of the deposition chamber under the combined action of the carrier gas, the exhaust port, and the pump, thereby achieving repeated measurements.
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