CN110411925A - A kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques - Google Patents

A kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques Download PDF

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Publication number
CN110411925A
CN110411925A CN201910681280.XA CN201910681280A CN110411925A CN 110411925 A CN110411925 A CN 110411925A CN 201910681280 A CN201910681280 A CN 201910681280A CN 110411925 A CN110411925 A CN 110411925A
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China
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particulate matter
surface acoustic
acoustic wave
superfine particulate
sensor
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CN110411925B (en
Inventor
郭威
郭炜
张栩
农永光
于哲
马永跃
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China Energy Saving Tian Rong Technology Co Ltd
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China Energy Saving Tian Rong Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/34Purifying; Cleaning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40Concentrating samples
    • G01N1/4077Concentrating samples by other techniques involving separation of suspended solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/0606Investigating concentration of particle suspensions by collecting particles on a support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40Concentrating samples
    • G01N1/4077Concentrating samples by other techniques involving separation of suspended solids
    • G01N2001/4088Concentrating samples by other techniques involving separation of suspended solids filtration

Abstract

The present invention discloses a kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques, and the measuring system includes: sample gas disposal unit, for being heated, being filtered to sample gas and control amount, specifically includes heater, filter and sample air-flow amount controller;Particulate matter electrostatic ionization module carries out ionization dilution to superfine particulate matter in sample gas;Specifically include ionisation chamber and dilution chamber;Electrostatic precipitation sampling unit, for collecting superfine particulate matter and acquiring the frequency signal of surface acoustic wave sensor, electrostatic precipitation sampling unit is additionally provided with exhaust outlet and pump, for superfine particulate matter to be discharged;Control and arithmetic element, for according to the electric signal and flow, determining the quality of the superfine particulate matter.Using the superfine particulate matter measuring system and method for the invention based on surface acoustic wave techniques, the concentration of superfine particulate matter in measurement atmosphere that can be fine, and it is able to achieve duplicate measurements.

Description

A kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques
Technical field
The present invention relates to Atmospheric Grains detection technique fields, more particularly to a kind of super based on surface acoustic wave techniques Fine particle measuring system and method.
Background technique
Traditional detection particle concentration mainly has aerodynamics flight time measurement, light scattering method, β ray method and concussion Sedimentation balance method etc..Such detection means is to be based on large-sized particulate matter kinetic characteristic or weight characteristic, and work as particle size Very little (300nm or less) moves in the irregular and unconspicuous situation of mass accumulation effect, and traditional detection means just fail.
Summary of the invention
The object of the present invention is to provide a kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques, pass through High pressure ionization keeps superfine particulate matter charged, is changed by surface acoustic wave sensor frequency of oscillation by the front and back of superfine particulate matter, And the quality of superfine particulate matter is released by this information, accurately measure the concentration of superfine particulate matter in atmosphere.
To achieve the above object, the superfine particulate matter measuring system based on surface acoustic wave techniques that the present invention provides a kind of, Include:
Sample gas disposal unit, the sample gas disposal unit includes heater, is connected to sample gas air inlet pipeline, what convection current was passed through Sample gas is heated, and the steam in sample gas is removed;Filter, with the heater by pipeline connection, for eliminating water The particulate matter for being greater than detection particulate matter threshold value in the sample gas of vapour is filtered out, and superfine particulate matter is formed;Sample air-flow amount controller, with The filter is by pipeline connection, for controlling the flow of the sample gas including the superfine particulate matter;
Particulate matter electrostatic ionization module, the particulate matter electrostatic ionization module include ionisation chamber and are arranged in the ionization Indoor high-voltage gun, the ionisation chamber and the sample air-flow amount controller are by pipeline connection, and the high-voltage gun is to described Superfine particulate matter is ionized, and charged superfine particulate matter is formed;Dilution chamber, the dilution chamber and the ionisation chamber are connected by pipeline Logical, the dilution chamber is provided with carrier gas passage, and carrier gas is by the carrier gas passage with the charged superfine particulate matter described dilute Release room mixing;
Electrostatic precipitation sampling unit, with the particulate matter electrostatic ionization module by pipeline connection, the electrostatic precipitation is adopted Sample unit includes by the settling chamber of pipeline connection and being separately positioned on the indoor sound surface of deposition with the dilution chamber Wave sensor and sensor signal conditioning unit;The surface acoustic wave sensor is for collecting the charged superfine particulate matter;Institute It states sensor signal conditioning unit to connect with the surface acoustic wave sensor, the sensor signal conditioning unit will be for that will acquire To surface acoustic wave sensor output oscillation frequency signal change into voltage signal;
Control and arithmetic element, connect with the sensor signal conditioning unit and the sample air-flow amount controller respectively, For according to the electric signal and flow, determining the quality of the superfine particulate matter.
Preferably, the surface acoustic wave sensor uses resonator type surface acoustic wave chip.
Preferably, the surface acoustic wave sensor includes:
High-field electrode, ground connection, for attracting the charged superfine particulate matter deposition;
Input terminal interdigital electrode is connect with the high-field electrode and sensor signal conditioning unit respectively, is turned by electroacoustic It changes, generates the sound wave of fixed frequency, sound wave is propagated along the surface of the surface acoustic wave sensor, by sinking on the high-field electrode The long-pending charged superfine particulate matter, frequency of sound wave change;
Output end interdigital electrode is connect with the high-field electrode and sensor signal conditioning unit, passes through institute for receiving Acoustic signals after stating high-field electrode, and converted by acoustic-electric, acoustic signals are converted into the electric oscillation signal of Frequency Synchronization, by The frequency variation of the sensor signal conditioning unit detection electric oscillation signal;
The sensor signal conditioning unit is also used to the variation according to the frequency of sound wave, determines described charged ultra-fine Grain object electric signal.
Preferably, the electrostatic precipitation sampling unit further includes the sensor driving connecting with the surface acoustic wave sensor Unit, the sensor driving unit is for driving the surface acoustic wave sensor to work normally.
Preferably, the settling chamber lower end is provided with exhaust outlet, is provided with pump on the downside of the exhaust outlet, for arranging completely The superfine particulate matter out.
Preferably, it is provided with carrier gas flux controller in the carrier gas passage, is electrically connected with the control with arithmetic element, For controlling the flow of carrier gas under the control and the control of arithmetic element.
Preferably, the carrier gas passage is hollow cylindrical.
Preferably, the high-voltage gun is corresponding with the electrode of the high-field electrode, if the high-voltage gun is positive electrode, Then the high-field electrode is negative electrode, if the high-voltage gun is negative electrode, the high-field electrode is positive electrode.
In addition, the measurement method of the present invention also provides a kind of superfine particulate matter measuring system based on surface acoustic wave techniques, The measurement method includes:
1) sample air-flow amount controller is closed, carrier gas flux controller is opened, acquires carrier gas flux signal, acquires surface acoustic wave Sensor frequency signal;
2) using the surface acoustic wave sensor frequency signal as initial value, ultra-fine grain amount of substance is zero at this time;
3) the sample air-flow amount controller and the carrier gas flux controller are opened;
4) the frequency of sound wave difference of the surface acoustic wave sensor is acquired in setting time t;
5) frequency difference is calculated, obtains the ultra-fine grain amount of substance m;
6) superfine particulate matter content described in sample gas described in unit is calculated.
Preferably, the method also includes closing the sample air-flow amount controller, stopping sample gas and input, described in closing After high-voltage gun and the surface acoustic wave sensor, the charged superfine particulate matter becomes the uncharged superfine particulate matter, The settling chamber is discharged under the collective effect of the carrier gas, the exhaust outlet and the pump, realizes duplicate measurements.
The specific embodiment provided according to the present invention, the invention discloses following technical effects:
The present invention uses filter, filters out, realizes to the particulate matter for being greater than detection particulate matter diameter threshold value in atmosphere Measurement to superfine particulate matter, while using the quality of superfine particulate matter in surface acoustic wave techniques measurement atmosphere, it optimizes ultra-fine The deposition sample mode of particulate matter improves the deposition efficiency of superfine particulate matter, realizes precise measurement.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings Obtain other attached drawings.
Fig. 1 is that the present invention is based on the structure charts of the superfine particulate matter measuring system of surface acoustic wave techniques;
Fig. 2 is that the present invention is based on the structures of surface acoustic wave sensor in the superfine particulate matter measuring system of surface acoustic wave techniques Figure;
Fig. 3 is that the present invention is based on the superfine particulate matter measuring method flow charts of surface acoustic wave techniques.
Symbol description: 1- sample gas disposal unit, 2- particulate matter electrostatic ionization module, 3- electrostatic precipitation sampling unit, 4- control System and arithmetic element, 101- heater, 102- filter, 103- sample air-flow amount controller, 201- ionisation chamber, 202- high-voltage electricity Rifle, 203- dilution chamber, 204- carrier gas passage, 205- carrier gas flux controller, the settling chamber 301-, 302- surface acoustic wave sensor, 303- sensor signal conditioning unit, 304- sensor driving unit, 305- exhaust outlet, 306- pump, the interdigital electricity of 3021- input terminal Pole, 3022- high-field electrode, 3033- output end interdigital electrode.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of superfine particulate matter measuring system and method based on surface acoustic wave techniques are realized The precise measurement and duplicate measurements of superfine particulate matter in atmosphere.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real Applying mode, the present invention is described in further detail.
As shown in Figure 1, the superfine particulate matter measuring system the present invention is based on surface acoustic wave techniques specifically includes sample gas disposal Unit 1, particulate matter electrostatic ionization module 2, electrostatic precipitation sampling unit 3 and control and arithmetic element 4.
Wherein, the sample gas disposal unit 1 includes heater 101, filter 102 and sample air-flow amount controller 103;It is described Heater 101 is connected to sample gas air inlet pipeline, and sample gas of the heater 101 for convection current to be passed through is heated, and removes sample gas In steam, exclude interference of the vapour molecule to measurement;The filter 102 passes through pipeline connection, institute with the heater 101 Filter 102 is stated for being filtered to the sample gas for eliminating steam, charged in the sample gas of steam is eliminated described in removal Grain object, and the particulate matter that will be greater than detection particulate matter diameter threshold value is filtered out, and sample gas only comprising superfine particulate matter is formed; The sample air-flow amount controller 103 is with the filter 102 by pipeline connection, and the sample air-flow amount controller 103 is for controlling Make the flow of the superfine particulate matter sample gas.
The particulate matter electrostatic ionization module 2 includes ionisation chamber 201, dilution chamber 203, high-voltage gun 202, carrier gas passage 204 and carrier gas flux controller 205;The ionisation chamber 201 passes through pipeline connection with the sample air-flow amount controller 103, described High-voltage gun 202 is arranged in the ionisation chamber 201, and the high-voltage gun 202 is using tip corona mode to described ultra-fine Grain object is ionized, and charged superfine particulate matter is formed;The dilution chamber 203 passes through pipeline connection, the load with the ionisation chamber Gas channel 204 is arranged in the dilution chamber, and the carrier gas flux controller 205 is arranged in the carrier gas passage 204, described Carrier gas flux controller 205 is used to control the flow of carrier gas, and carrier gas passes through the carrier gas passage 204 and the charged ultra-fine grain Object mixes in the dilution chamber 203, and the carrier gas of high speed brings the lower superfine particulate matter sample gas of speed into the electrostatic Deposit sampling unit 3.
Wherein, the shape of the carrier gas passage 204 is hollow discoid.
The electrostatic precipitation sampling unit 3 includes settling chamber 301, surface acoustic wave sensor 302, sensor signal conditioning list Member 303, sensor driving unit 304, exhaust outlet 305, pump 306.
Wherein, the settling chamber 301 and the dilution chamber 203 be by pipeline connection, the sensor driving unit 304, The surface acoustic wave sensor 302 and the sensor signal conditioning unit 303 are successively set in the settling chamber 301.
The surface acoustic wave sensor 302 includes:
High-field electrode 3022, the high-field electrode 3022 are grounded, for attracting the charged superfine particulate matter deposition;
Input terminal interdigital electrode 3021, the input terminal interdigital electrode 3021 is connect with the high-field electrode 3022, described Input terminal interdigital electrode 3021 is converted by electroacoustic, generates the sound wave of fixed frequency, sound wave is along the surface acoustic wave sensor Surface is propagated, and by the charged superfine particulate matter on the high-field electrode 3022, frequency of sound wave changes;
Output end interdigital electrode 3023 connect with the high-field electrode 3022 and sensor signal conditioning unit 303, is used for It receives through the acoustic signals after the high-field electrode 3022, and is converted by acoustic-electric, acoustic signals are converted into Frequency Synchronization Electric oscillation signal, by the sensor signal conditioning unit 303 detection electric oscillation signal frequency change;(as shown in Figure 2).
The sensor driving unit 304 is connect with the input terminal interdigital electrode 3021, for driving the input terminal Interdigital electrode 3021 generates the sound wave of fixed frequency, makes the work of surface acoustic wave sensor 302 in fixed frequency;
The sensor signal conditioning unit 303 is interdigital with the input terminal interdigital electrode 3021 and the output end respectively Electrode 3023 connects, and the frequency of reference oscillating frequency signal and acquisition output oscillator signal is generated, by the frequency of two oscillator signals Rate difference is converted into voltage signal.
Wherein the surface acoustic wave sensor uses resonator type surface acoustic wave chip;The exhaust outlet 305 is arranged described The lower end of settling chamber 301, the pump 306 is provided on the downside of the exhaust outlet 305, and institute's exhaust outlet 305 and the pump 306 are common The superfine particulate matter is completely exhausted out by effect.
The control is controlled with the heater 101, the filter 102, the sample throughput respectively with arithmetic element 4 Device 103, the high-voltage gun 202, the carrier gas flux controller 205, the sensor driving unit 304, the sensor Signal conditioning unit 303,306 connection of the pump;
The control is with arithmetic element 4 for controlling the heater 101, the filter 102, the high-voltage gun 202, the start and stop of the sensor driving unit 304, the sensor signal conditioning unit 303 and the pump 306;
The control controls the sample air-flow amount controller 103 and the carrier gas flux controller 205 with arithmetic element 4 Working condition, i.e., by the sample air-flow amount controller 103 and the carrier gas flux controller 205 control respectively the sample gas and The flow of the carrier gas;From the sample air-flow amount controller 103 obtain the sample throughput information simultaneously and from the sensor Signal conditioning unit 303 obtains the electric signal and calculates the superfine particulate matter quality information, to calculate in sample gas The volumetric concentration or mass concentration of the superfine particulate matter.
As shown in figure 3, the present invention is based on the measurement methods of the superfine particulate matter measuring system of surface acoustic wave techniques specifically to walk Suddenly are as follows:
1) the sample air-flow amount controller 103, the opening carrier gas flux controller 205, acquisition carrier gas flux letter are closed Number, 302 frequency signal of surface acoustic wave sensor;
2) using 302 frequency signal of surface acoustic wave sensor as initial value, the ultra-fine grain amount of substance is at this time Zero;
3) the sample air-flow amount controller 103 and the carrier gas flux controller 205 are opened;
4) the frequency of sound wave difference of the surface acoustic wave sensor 302 is acquired in setting time t;
5) frequency difference is calculated, obtains the ultra-fine grain amount of substance m;
6) superfine particulate matter content described in unit sample gas is calculated.
7) the sample air-flow amount controller 103 is closed, stops the input of sample gas, closes the high-voltage gun 202 and the sound Surface wave sensor 302, the charged superfine particulate matter described at this time become the uncharged superfine particulate matter, the carrier gas, It is completely exhausted out the settling chamber 301 under the collective effect of the exhaust outlet 305 and the pump 306, realizes duplicate measurements.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For method disclosed in embodiment For, since it is corresponding with system disclosed in embodiment, so being described relatively simple, related place is defended oneself referring to Account Dept It is bright.
Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said It is bright to be merely used to help understand method and its core concept of the invention;At the same time, for those skilled in the art, foundation Thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not It is interpreted as limitation of the present invention.

Claims (10)

1. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques characterized by comprising
Sample gas disposal unit, the sample gas disposal unit includes heater, is connected to sample gas air inlet pipeline, the sample gas that convection current is passed through It is heated, removes the steam in sample gas;Filter, with the heater by pipeline connection, for eliminating steam The particulate matter for being greater than detection particulate matter threshold value in sample gas is filtered out, and superfine particulate matter is formed;Sample air-flow amount controller, and it is described Filter is by pipeline connection, for controlling the flow of the sample gas including the superfine particulate matter;
Particulate matter electrostatic ionization module, the particulate matter electrostatic ionization module include ionisation chamber and are arranged in the ionisation chamber High-voltage gun, the ionisation chamber and the sample air-flow amount controller are by pipeline connection, and the high-voltage gun is to described ultra-fine Particulate matter is ionized, and charged superfine particulate matter is formed;Dilution chamber, the dilution chamber and the ionisation chamber pass through pipeline connection, The dilution chamber is provided with carrier gas passage, and carrier gas is by the carrier gas passage and the charged superfine particulate matter in the dilution chamber Mixing;
Electrostatic precipitation sampling unit, with the particulate matter electrostatic ionization module by pipeline connection, the electrostatic precipitation sampling is single Member includes passing through the settling chamber of pipeline connection with the dilution chamber and being separately positioned on the indoor surface acoustic wave of deposition to pass Sensor and sensor signal conditioning unit;The surface acoustic wave sensor is for collecting the charged superfine particulate matter;The biography Sensor signal conditioning unit is connect with the surface acoustic wave sensor, and the sensor signal conditioning unit is used for will be collected Surface acoustic wave sensor output oscillation frequency signal changes into voltage signal;
Control and arithmetic element, connect with the sensor signal conditioning unit and the sample air-flow amount controller respectively, are used for According to the electric signal and flow, the quality of the superfine particulate matter is determined.
2. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that The surface acoustic wave sensor uses resonator type surface acoustic wave chip.
3. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that The surface acoustic wave sensor includes:
High-field electrode, ground connection, for attracting the charged superfine particulate matter deposition;
Input terminal interdigital electrode connect with the high-field electrode and sensor signal conditioning unit respectively, is converted by electroacoustic, produces The sound wave of raw fixed frequency, sound wave is propagated along the surface of the surface acoustic wave sensor, by what is deposited on the high-field electrode The charged superfine particulate matter, frequency of sound wave change;
Output end interdigital electrode is connect with the high-field electrode and sensor signal conditioning unit, passes through the height for receiving Piezoelectricity extremely after acoustic signals, and by acoustic-electric convert, acoustic signals are converted into the electric oscillation signal of Frequency Synchronization, by described Sensor signal conditioning unit detects the frequency variation of electric oscillation signal;
The sensor signal conditioning unit is also used to the variation according to the frequency of sound wave, determines the charged superfine particulate matter Electric signal.
4. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that The electrostatic precipitation sampling unit further includes the sensor driving unit connecting with the surface acoustic wave sensor, the sensor Driving unit is for driving the surface acoustic wave sensor to work normally.
5. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that The settling chamber lower end is provided with exhaust outlet, pump is provided on the downside of the exhaust outlet, for being completely exhausted out the ultra-fine grain Object.
6. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that It is provided with carrier gas flux controller in the carrier gas passage, is electrically connected with the control with arithmetic element, in the control Under the control of arithmetic element, the flow of carrier gas is controlled.
7. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 1, which is characterized in that The carrier gas passage is hollow cylindrical.
8. a kind of superfine particulate matter measuring system based on surface acoustic wave techniques according to claim 3, which is characterized in that The high-voltage gun is corresponding with the electrode of the high-field electrode, if the high-voltage gun is positive electrode, the high-field electrode For negative electrode, if the high-voltage gun is negative electrode, the high-field electrode is positive electrode.
9. a kind of survey of superfine particulate matter measuring system described in any one of -8 based on surface acoustic wave techniques according to claim 1 Amount method, which is characterized in that the measurement method includes:
1) sample air-flow amount controller is closed, carrier gas flux controller is opened, acquires carrier gas flux signal, acquisition surface acoustic wave sensing Device frequency signal;
2) using the surface acoustic wave sensor frequency signal as initial value, ultra-fine grain amount of substance is zero at this time;
3) the sample air-flow amount controller and the carrier gas flux controller are opened;
4) the frequency of sound wave difference of the surface acoustic wave sensor is acquired in setting time t;
5) frequency difference is calculated, obtains the ultra-fine grain amount of substance m;
6) superfine particulate matter content described in sample gas described in unit is calculated.
10. a kind of superfine particulate matter measurement method based on surface acoustic wave techniques according to claim 9, feature exist In the method also includes closing the sample air-flow amount controller, stopping the input of sample gas, close the high-voltage gun and institute After stating surface acoustic wave sensor, the charged superfine particulate matter becomes the uncharged superfine particulate matter, in the carrier gas, institute It states and the settling chamber is discharged under the collective effect of exhaust outlet and the pump, realize duplicate measurements.
CN201910681280.XA 2019-07-26 2019-07-26 System and method for measuring ultrafine particles based on surface acoustic wave technology Active CN110411925B (en)

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CN112504923A (en) * 2020-11-20 2021-03-16 扬州大学 Atmospheric particulate concentration and particle size distribution measuring method based on multi-frequency SAW array

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