CN110202603B - Vacuum sucker and manufacturing method of sucker body - Google Patents
Vacuum sucker and manufacturing method of sucker body Download PDFInfo
- Publication number
- CN110202603B CN110202603B CN201910585404.4A CN201910585404A CN110202603B CN 110202603 B CN110202603 B CN 110202603B CN 201910585404 A CN201910585404 A CN 201910585404A CN 110202603 B CN110202603 B CN 110202603B
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- adsorption
- sucker
- adsorption surface
- perpendicular bisector
- negative pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0625—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with a valve
- B25J15/0633—Air-flow-actuated valves
Abstract
The invention provides a vacuum sucker and a manufacturing method of a sucker body, wherein the vacuum sucker comprises a sucker rod and a sucker body; the sucker rod comprises a first end part and a second end part and is used for extracting gas from the first end part to the second end part through a hollow pipeline inside the sucker rod, one end of the sucker body is formed into a concave end, and the concave end of the sucker body is matched with the first end part of the sucker rod in an installing mode to form a negative pressure cavity; one end of the sucker body opposite to the concave end forms an adsorption surface arranged on a plane, wherein a plurality of adsorption ports are formed on the adsorption surface, the adsorption ports lead to the negative pressure cavity to form a plurality of air passages, the air passages are symmetrically distributed around a perpendicular bisector of the adsorption surface, and at least part of the air passages are obliquely arranged relative to the perpendicular bisector. The invention also provides a manufacturing method of the sucker body, and by using the device and the method, the suction object can be uniformly stressed when being sucked by the vacuum sucker, so that the damage of the suction object is avoided.
Description
Technical Field
The invention belongs to the field of mechanical equipment, and particularly relates to a vacuum sucker and a manufacturing method of a sucker body.
Background
This section is intended to provide a background or context to the embodiments of the invention that are recited in the claims. The description herein is not admitted to be prior art by inclusion in this section.
In industrial production, a vacuum chuck is generally installed at the end of a robot arm, and a product is sucked by using a negative pressure at the vacuum chuck to perform loading and unloading of the product. However, when the holding object is a product which is thin in thickness and easily damaged, for example: in the ultra-thin type cash, the vacuum chuck provided in the prior art can cause damage to the holding object due to uneven stress because of difficulty in providing uniform and dispersed vacuum pressure.
Disclosure of Invention
In order to solve the problem that the vacuum sucker in the prior art cannot be applied to products which are thin in thickness and easy to damage, the vacuum sucker and the manufacturing method of the sucker body are provided.
In a first aspect of the invention, a vacuum chuck is provided, which is characterized by comprising a hollow chuck rod and a cylindrical chuck body arranged at the tail end of the chuck rod; the sucker rod comprises a first end part and a second end part and is used for extracting gas from the first end part to the second end part through a hollow pipeline inside the sucker rod, one end of the sucker body is formed into a concave end, and the concave end of the sucker body is matched with the first end part of the sucker rod in an installing mode to form a negative pressure cavity; one end of the sucker body opposite to the concave end forms an adsorption surface arranged on a plane, wherein a plurality of adsorption ports are formed on the adsorption surface, the adsorption ports lead to the negative pressure cavity to form a plurality of air passages, the air passages are symmetrically distributed around a perpendicular bisector of the adsorption surface, and at least part of the air passages are obliquely arranged relative to the perpendicular bisector.
Preferably, in the hollow pipe of the suction cup rod, a plurality of flow dividing passages communicated with the negative pressure cavity are formed from the inner side wall of the pipe to the first end part of the suction cup rod, and the flow dividing passages are symmetrically arranged relative to the midperpendicular of the adsorption surface.
Preferably, the caliber of the adsorption port is 0.1 mm-0.2 mm.
Preferably, the plurality of branch pipes are formed with a plurality of openings on the first end portion of the suction cup rod, and a plurality of symmetrically distributed partition plates are vertically disposed on the first end portion for disposing the plurality of openings to be spaced apart from each other.
Preferably, a plurality of first adsorption ports distributed in an annular array are formed in the central area of the adsorption surface, and a first air passage formed by leading the first adsorption ports to the negative pressure cavity is arranged perpendicular to the adsorption surface; a plurality of second adsorption ports distributed in an annular array are formed in an annular area on the outer side of the central area of the adsorption surface, a plurality of second air passages formed by leading the second adsorption ports to the negative pressure cavity are obliquely arranged relative to a perpendicular bisector of the adsorption surface, and the central lines of the second air passages tend to gather together towards the negative pressure cavity from the adsorption surface.
Preferably, the central line of the second air channel forms an included angle of 15-20 degrees with the perpendicular bisector of the adsorption surface.
Preferably, the sucker body is made of aluminum, and an oxidation protection layer is formed on at least the surface of the adsorption surface.
A method of manufacturing a suction cup body comprising: turning the metal blank to form a cylindrical intermediate piece, wherein two opposite ends of the intermediate piece are respectively formed into an inward concave end and a plane end; drilling a plurality of blind holes from the concave end of the intermediate member to the flat end by using a CNC (computer Numerical Control) reverse machining process, wherein the drilling direction of at least part of the blind holes is obliquely arranged relative to a perpendicular bisector of the flat end; and precision grinding is carried out on the plane end to form the adsorption surface, and the plurality of blind holes form adsorption ports on the adsorption surface after the precision grinding.
Preferably, a plurality of first blind holes are drilled from a central area of the concave end of the intermediate piece to the planar end of the intermediate piece, the first blind holes being symmetrically distributed around a perpendicular bisector of the planar end, the drilling directions of the first blind holes being perpendicular to the planar end; drilling a plurality of second blind holes, which are symmetrically distributed around a perpendicular bisector of the plane end, from an annular region outside the central region of the concave end of the intermediate member, toward the plane end of the intermediate member, the drilling directions of the plurality of second blind holes being obliquely set with respect to the perpendicular bisector.
Preferably, the metal blank is an aluminum material, and the method further comprises: and after the precision grinding, at least carrying out anodic oxidation treatment on the formed adsorption surface.
The embodiment of the application adopts at least one technical scheme which can achieve the following beneficial effects: the suction object is sucked by arranging a plurality of suction ports on the suction surface, so that the condition that the suction object is damaged due to overlarge local stress is avoided. The plurality of adsorption ports are uniformly distributed in an annular array, so that the plurality of adsorption ports can ensure that the adsorption ports are uniformly stressed on a suction object during suction operation, and the stability of the suction operation is ensured; in addition, since the air passage formed by the plurality of suction ports has a part inclined to the perpendicular bisector of the suction surface, the suction area on the suction surface is enlarged, and the pressure applied to the suction object can be further dispersed during the suction operation.
It should be understood that the above description is only an overview of the technical solutions of the present invention, so as to clearly understand the technical means of the present invention, and thus can be implemented according to the content of the description. In order that the manner in which the above recited and other objects, features and advantages of the present invention are obtained will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Drawings
The advantages and benefits described herein, as well as other advantages and benefits, will be apparent to those of ordinary skill in the art upon reading the following detailed description of the exemplary embodiments. The drawings are only for purposes of illustrating exemplary embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like elements throughout. In the drawings:
FIG. 1 is a schematic diagram of a vacuum chuck according to an embodiment of the present invention;
FIG. 2 (a) is a front profile view of the vacuum chuck shown in FIG. 1;
FIG. 2 (b) isbase:Sub>A sectional view of the vacuum chuck shown in FIG. 2 (base:Sub>A) taken along line A-A;
FIG. 3 (a) is a schematic view of the suction cup stem of the vacuum suction cup shown in FIG. 1;
FIG. 3 (b) is a front view of the suction cup lever shown in FIG. 3 (a) facing the first end;
fig. 4 is a schematic view of the suction surface of the vacuum chuck shown in fig. 1.
In the drawings, like or corresponding reference characters designate like or corresponding parts.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
In the present invention, it is to be understood that terms such as "including" or "having," or the like, are intended to indicate the presence of the disclosed features, numbers, steps, behaviors, components, parts, or combinations thereof, and are not intended to preclude the possibility of the presence of one or more other features, numbers, steps, behaviors, components, parts, or combinations thereof.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
The embodiment of the invention provides a vacuum chuck. Fig. 1 isbase:Sub>A perspective view showingbase:Sub>A vacuum chuck 1 according to the present embodiment, fig. 2 (base:Sub>A) isbase:Sub>A front external view of the vacuum chuck shown in fig. 1, fig. 2 (b) isbase:Sub>A sectional view taken alongbase:Sub>A linebase:Sub>A-base:Sub>A of fig. 2 (base:Sub>A), fig. 3 (base:Sub>A) isbase:Sub>A schematic view ofbase:Sub>A chuck bar of the vacuum chuck shown in fig. 1, fig. 3 (b) isbase:Sub>A front view of the chuck bar facingbase:Sub>A first end portion shown in fig. 3 (base:Sub>A), and fig. 4 isbase:Sub>A schematic view ofbase:Sub>A suction surface of the vacuum chuck shown in fig. 1.
As shown in fig. 1, 2 (a), 2 (b), 3 (a), 3 (b) and 4, the vacuum chuck 1 includes at least a hollow chuck shaft 11 and a cylindrical chuck body 10 mounted on a distal end of the chuck shaft.
One end of the suction cup body 10 is formed as a concave end, and the suction cup rod 11 includes a first end portion and a second end portion 112 opposite to each other, wherein the second end portion 112 is in communication with an external suction mechanism, so that the suction cup rod 11 can be used to draw gas from the first end portion to the second end portion 112 through a hollow pipe 113 inside thereof. The first end of the sucker rod 11 and the concave end of the sucker body 10 are respectively provided with a mounting structure which is matched with each other, for example: a thread mounting structure, so that a negative pressure cavity 12 can be formed after the first end part of the sucker rod 11 and the concave end of the sucker body 10 are mounted; further, the end of the suction cup body 10 opposite to the concave end is formed as a suction surface 101 arranged in a plane, wherein a plurality of suction ports 102 leading to the negative pressure chamber 12 are formed on the suction surface 101 and distributed in an annular array for sucking a suction object, which may be an object that is easily deformed, damaged or thin in the present embodiment, and may be a banknote sheet for example. An air passage 103 is formed leading from the suction port 102 to the negative pressure chamber, wherein at least a part of the air passage 103 is disposed obliquely with respect to the perpendicular bisector around the perpendicular bisector of the suction surface 101. Specifically, the included angle between the center line of the obliquely arranged air passages 103 and the perpendicular bisector of the adsorption surface 101 is 15 to 20 degrees, and the center lines of the obliquely arranged air passages 103 tend to converge from the adsorption surface 101 to the negative pressure chamber 12.
The working principle of the vacuum chuck 1 provided by the embodiment of the invention is as follows:
by using the vacuum chuck 1, when the suction object is sucked, when the suction object needs to be sucked, the external air suction mechanism continuously sucks air in the negative pressure cavity 12 through the chuck rod 11, so that the negative pressure cavity 12 is always kept in a negative pressure state relative to the outside (namely the outside of the suction port 102), and further the suction object can be sucked by arranging a plurality of suction ports 102 on the suction surface 101, because the caliber of the suction port 102 is very small, the situation that the suction object is damaged due to overlarge local stress is avoided. The plurality of adsorption ports 102 are uniformly distributed in the annular array, so that the adsorption ports 102 can be uniformly stressed on an adsorption object during the adsorption operation, and the stability of the adsorption operation is ensured; further, since the air passage 103 formed by the plurality of suction ports 102 has the air passage 103 partially inclined with respect to the perpendicular bisector of the suction surface 101, the suction area on the suction surface is enlarged, and the pressure applied to the suction object during the suction operation can be further dispersed.
In some embodiments, referring to fig. 2 (b), a plurality of branch passages 114 communicating with the negative pressure chamber 12 are opened from an inner sidewall of the hollow duct 113 of the suction cup rod 11 toward the first end portion of the suction cup rod 11, and the plurality of branch passages 114 are symmetrically disposed with respect to a perpendicular bisector of the suction surface 101. For example, as shown in fig. 2 (b), a plurality of evenly distributed branch channels 114 are formed from the side wall of the hollow duct 113 to the first end of the suction cup rod 11 in an inclined manner, and the aperture of the channel formed vertically downward from the hollow duct 113 is reduced to be identical or close to the aperture of the branch channel 114. Thereby, the problem of uneven distribution of air pressure in the negative pressure chamber can be avoided, and the adsorption force of the adsorption surface 101 acting on the adsorption object can be kept uniform at each position.
In some embodiments, fig. 3 (a) shows a schematic view of the suction cup rod 11 of the present embodiment, and fig. 3 (b) is a front view of the suction cup rod 11 shown in fig. 3 (a) facing a first end portion, wherein the first end portion is an end of the suction cup rod 11 opposite to the second end portion 112. Referring to fig. 3 (a) and 3 (b), the plurality of branch ducts 114 are formed with a plurality of openings 116 at a first end portion of the sucker rod 11, and a plurality of partition plates 115 are vertically disposed at the first end portion in a symmetrical arrangement, so that the plurality of openings 116 are disposed to be spaced apart from each other. For example, referring to fig. 3 (b), a plurality of partition walls 115 having a thickness may be established perpendicular to the first end portion, the plurality of partition walls 115 divide the first end portion into a plurality of fan-shaped regions, and an opening 116 formed on the first end portion by the flow dividing duct 114 is provided between each two adjacent partition walls 115. Thus, by providing the partition plate 115, the air passages can be further divided, and the problem of imbalance when the air flows into the plurality of branch air passages 114 can be avoided. Further, the arrangement of the partition plate 115 can reinforce the structure of the suction cup rod 11 and the negative pressure chamber 12, and reduce the volume of the negative pressure chamber 12 to make it easier to suck the gas in the negative pressure chamber 12.
Fig. 4 shows a schematic view of the suction surface 101, and the sucker body 10 will be further described in detail below with reference to fig. 4 and fig. 2 (b), or further developed.
In some embodiments, referring to fig. 4 and fig. 2 (B), a plurality of first suction ports 1021 are formed in an annular array in a central area B (a dotted line inner area) of the suction surface 101, the central area B may be a circular area determined by taking the center of the suction surface 101 as a center, and a first air passage formed from the first suction ports 1021 to the negative pressure chamber 12 is arranged perpendicular to the suction surface 101; further, a plurality of second suction ports 1022 are formed in an annular region C (an outer region of a broken line) outside the central region B of the suction surface 101 in an annular array, and a second air passage formed leading from the second suction ports 1022 to the negative pressure chamber 12 is obliquely provided around a perpendicular bisector of the suction surface 101. Here, the air passage structure shown in fig. 2 (b) is exhibited on a plurality of axial cross sections of the adsorption body 10, and a plurality of second air passages located on the outer side are arranged parallel to each other in the direction leading to the negative pressure chamber 12 and are inwardly gathered at the same angle. Through carrying out regional setting of dividing to the air flue that the negative pressure chamber formed to adsorbing the mouth, will be located inboard first air flue and set up perpendicularly, will be located the second air flue of the outside and set up inwards gathering together, can enlarge the working area of adsorption plane, balanced pressure can hold the operation to the suction object more steadily.
In some embodiments, the chuck body 10 is made of aluminum metal, and an oxidation protection layer is formed on at least the surface of the absorption surface 101. It is understood that aluminum metal is a common material in industry, is low in cost and easy to obtain, and can reduce cost and facilitate large-scale application by adopting aluminum metal. And through at least carrying out anodic oxidation to the adsorption face to form the compact oxidation protective layer on the surface of adsorption face and can make the adsorption face surface have higher roughness, avoid the damage problem that causes the suction object during the operation of holding.
In some embodiments, the air passage 103 leading from the suction port 102 to the negative pressure chamber 12 is formed as a cylinder-like hole having a hole diameter of 0.1mm to 0.2mm. Wherein, the angle between the central line of the second air passage formed by the second absorption port 1022 opening to the negative pressure cavity 12 and the perpendicular bisector of the absorption surface is 15-20 °.
Based on the same technical concept, the application also provides a manufacturing method of the sucker body, which at least comprises the following steps:
(1) Turning the metal blank to form a cylindrical intermediate piece, wherein two opposite ends of the intermediate piece are respectively an inward concave end and a plane end; wherein the metal blank is an aluminum material.
(2) Drilling a plurality of blind holes from the concave end of the middle piece to the plane end by using a CNC reverse machining process, wherein the drilling direction of at least part of the blind holes is obliquely arranged relative to the perpendicular bisector of the plane end; specifically, the blind hole is a cylindrical blind hole, and the aperture is 0.1 mm-0.2 mm; specifically, the bottoms of the blind holes are all arranged close to the end face of the plane.
In one embodiment, a circular central area is determined at the concave end of the intermediate piece around the plane end perpendicular bisector, a plurality of first blind holes which are symmetrically distributed around the plane end perpendicular bisector are drilled from the central area of the concave end to the plane end, and the drilling directions of the plurality of first blind holes are perpendicular to the plane end; an annular region is defined outside a central region of the concave end, a plurality of second blind holes which are symmetrically distributed around a perpendicular bisector of the planar end are drilled from the annular region outside the central region of the concave end of the intermediate member to the planar end of the intermediate member, and the drilling directions of the plurality of second blind holes are obliquely arranged relative to the perpendicular bisector. Specifically, the included angle between the drilling direction of the second blind holes and the perpendicular bisector of the plane end is 15-20 degrees, and the drilling directions of the second blind holes tend to spread around the perpendicular bisector of the plane end.
(3) The plane end is precisely polished to form an adsorption surface, and the plurality of blind holes form adsorption ports on the adsorption surface after precision polishing. Specifically, after precision grinding, the bottom portion of the blind hole is ground away, thereby forming a through hole whose opening on the adsorption surface is also referred to as an adsorption port.
In one embodiment, after the precision polishing in the step (3), at least the formed adsorption surface may be subjected to an anodic oxidation treatment.
In this embodiment, through adopting CNC reverse processing technology, drill out a plurality of blind holes to the plane end from the indent end of middleware, carry out the precision again and polish this process step in order to form the adsorption plane to the plane end, guaranteed the required precision of the adsorption plane of the sucking disc body that forms, and then can make this sucking disc body can avoid the damage of holding the object when holding the operation. By arranging at least part of the inclined air channel between the adsorption surface and the concave end, a larger adsorption area can be formed on the adsorption surface of the sucker body, and further the sucker body can apply more balanced pressure to a suction object during suction operation; in addition, through the process step of at least carrying out anodic oxidation on the adsorption surface to form an oxidation protection layer on the surface of the adsorption surface, the flatness of the surface of the adsorption surface is further improved, and the sucker body can be further prevented from being damaged by a sucking object during sucking operation.
Moreover, while the operations of the method of the invention are depicted in the drawings in a particular order, this does not require or imply that the operations must be performed in this particular order, or that all of the illustrated operations must be performed, to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step execution, and/or one step broken down into multiple step executions.
While the spirit and principles of the invention have been described with reference to several particular embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, nor is the division of aspects, which is for convenience only as the features in such aspects cannot be combined to advantage. The invention is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (8)
1. A vacuum sucker is characterized by comprising a hollow sucker rod and a cylindrical sucker body arranged at the tail end of the sucker rod;
the sucker rod comprises a first end part and a second end part which are arranged oppositely and used for extracting gas from the first end part to the second end part through a hollow pipeline inside the sucker rod, one end of the sucker body is formed into a concave end, and the concave end of the sucker body is matched with the first end part of the sucker rod in an installation mode to form a negative pressure cavity;
one end of the sucker body opposite to the concave end is formed into an adsorption surface which is arranged in a plane, wherein a plurality of adsorption ports are formed on the adsorption surface, a plurality of air passages are formed by leading the adsorption ports to the negative pressure cavity, the air passages are symmetrically distributed around a perpendicular bisector of the adsorption surface, and at least part of the air passages are obliquely arranged relative to the perpendicular bisector;
in the cavity pipeline of sucking disc pole, follow the inside wall of cavity pipeline to the first end of sucking disc pole seted up with the communicating a plurality of reposition of redundant personnel passageways of negative pressure cavity, just a plurality of reposition of redundant personnel passageways for the perpendicular bisector of adsorption plane sets up symmetrically, and follows the perpendicular aperture of the passageway that forms downwards of cavity pipeline with the aperture of reposition of redundant personnel passageway keeps unanimously.
2. The vacuum chuck according to claim 1, wherein the aperture of the suction port is 0.1mm to 0.2mm.
3. The vacuum chuck as claimed in claim 1,
the plurality of flow dividing channels are formed with a plurality of openings on the first end portion of the sucker rod, and a plurality of symmetrically distributed partition plates are vertically arranged on the first end portion and used for enabling the plurality of openings to be arranged in a mutually separated mode.
4. The vacuum chuck as claimed in claim 1,
a plurality of first adsorption ports distributed in an annular array are formed in the central area of the adsorption surface, and a first air channel formed by leading the first adsorption ports to the negative pressure cavity is arranged vertical to the adsorption surface;
a plurality of second adsorption ports distributed in an annular array are formed in an annular area outside a central area of the adsorption surface, the plurality of second adsorption ports lead to a plurality of second air passages formed by the negative pressure cavity are obliquely arranged relative to a perpendicular bisector of the adsorption surface, and the center lines of the plurality of second air passages are drawn from the adsorption surface to the negative pressure cavity and form a gathering trend.
5. The vacuum chuck according to claim 4, wherein the angle between the center line of the second air passage and the perpendicular to the suction surface is 15 ° to 20 °.
6. The vacuum chuck as claimed in claim 1,
the sucker body is made of aluminum, and an oxidation protection layer is formed on at least the surface of the adsorption surface.
7. A method of manufacturing a suction cup body, comprising:
turning the metal blank to form a cylindrical intermediate piece, wherein two opposite ends of the intermediate piece are respectively formed into an inward concave end and a plane end;
drilling a plurality of blind holes from the concave end of the intermediate piece to the plane end by using a CNC reverse machining process, wherein the drilling direction of at least part of the blind holes is obliquely arranged relative to the perpendicular bisector of the plane end; drilling a plurality of first blind holes which are symmetrically distributed around a perpendicular bisector of the plane end from a central area of the concave end of the intermediate piece, wherein the drilling directions of the plurality of first blind holes are perpendicular to the plane end; drilling a plurality of second blind holes, which are symmetrically distributed around a perpendicular bisector of the planar end, from an annular region outside the central region of the concave end of the intermediate piece toward the planar end of the intermediate piece, the drilling directions of the plurality of second blind holes being obliquely arranged with respect to the perpendicular bisector of the planar end;
and precision grinding is carried out on the plane end to form an adsorption surface, and the plurality of blind holes form adsorption ports on the adsorption surface after the precision grinding.
8. The method of manufacturing a suction cup body of claim 7, wherein the metal blank is an aluminum stock, the method further comprising: and after the precision grinding, at least carrying out anodic oxidation treatment on the formed adsorption surface.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910585404.4A CN110202603B (en) | 2019-07-01 | 2019-07-01 | Vacuum sucker and manufacturing method of sucker body |
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| CN201910585404.4A CN110202603B (en) | 2019-07-01 | 2019-07-01 | Vacuum sucker and manufacturing method of sucker body |
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| CN110202603A CN110202603A (en) | 2019-09-06 |
| CN110202603B true CN110202603B (en) | 2022-11-11 |
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| CN110790117A (en) * | 2019-11-15 | 2020-02-14 | 徐州聚本机械科技有限公司 | High-efficient vacuum chuck |
| CN111748768B (en) * | 2020-06-28 | 2022-08-02 | 武汉华星光电半导体显示技术有限公司 | Mask plate cleaning equipment and mask plate cleaning method |
| CN112109022B (en) * | 2020-09-30 | 2022-05-20 | 苏州富强科技有限公司 | A absorb subassembly for adsorbing annular work piece |
| CN116252111A (en) * | 2023-05-15 | 2023-06-13 | 深圳市玉沣科技有限公司 | Precise machining method of semiconductor wafer sucker |
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| CN1157709C (en) * | 2001-08-16 | 2004-07-14 | 瀚宇彩晶股份有限公司 | Sucking device |
| KR20110028833A (en) * | 2009-09-14 | 2011-03-22 | 주식회사 동부하이텍 | Apparatus for chemical mechanical planarization |
| KR101056705B1 (en) * | 2011-05-09 | 2011-08-12 | 한국뉴매틱(주) | Vacuum gripper device |
| CN103904012B (en) * | 2012-12-28 | 2017-06-27 | 上海微电子装备有限公司 | A kind of vacuum cup of TSV silicon chips |
| EP2946890A1 (en) * | 2013-01-15 | 2015-11-25 | Meiko Electronics Co., Ltd. | Reduced pressure adhesion device |
| CN108257904B (en) * | 2016-12-28 | 2021-10-22 | 林彦全 | Assembling structure for connecting suction nozzle |
| US10804133B2 (en) * | 2017-11-21 | 2020-10-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Article transferring method in semiconductor fabrication |
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