CN108257904B - Assembling structure for connecting suction nozzle - Google Patents
Assembling structure for connecting suction nozzle Download PDFInfo
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- CN108257904B CN108257904B CN201711167153.5A CN201711167153A CN108257904B CN 108257904 B CN108257904 B CN 108257904B CN 201711167153 A CN201711167153 A CN 201711167153A CN 108257904 B CN108257904 B CN 108257904B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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- Mechanical Treatment Of Semiconductor (AREA)
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- Seal Device For Vehicle (AREA)
Abstract
The invention relates to an assembling structure for connecting a suction nozzle, which comprises: the suction nozzle comprises a fixed seat, a suction nozzle base and a suction nozzle, wherein the fixed seat is provided with a conical positioning hole; the suction nozzle base is provided with a positioning column inserted into the conical positioning hole, a sealing element and a magnet, the upper end edge of the sealing element is jointed with the bottom surface of the fixed seat, and the fixed seat and the suction nozzle base are made of metal materials with magnetic conductivity so as to avoid magnetic leakage; the suction nozzle is adhered to the suction nozzle base and is provided with a plurality of circulation holes which penetrate through the top surface to the bottom surface and are communicated with the vacuum channel of the fixed seat; the suction nozzle base and the suction nozzle are adsorbed on the fixed seat by the suction force of the magnet to form a chip collecting and placing device, and the vertical deviation can be automatically adjusted by the adjusting action of the conical positioning hole of the fixed seat, the positioning column of the suction nozzle base and the sealing piece, and meanwhile, the horizontal positioning of the suction nozzle is carried out.
Description
Technical Field
The present invention relates to an assembly structure for connecting a chip suction nozzle, and more particularly, to an assembly structure capable of automatically adjusting the vertical offset and horizontal positioning of the entire structure.
Background
In the semiconductor packaging process, the cut and ground chip is required to be sucked and placed, so a device is provided for completing the sucking and placing treatment, and a fixed seat and a suction nozzle are arranged on the device and contacted with the chip for sucking and placing.
Along with the thickness of the chip is thinner and thinner, the common specification in the market is about 30-50 um, and the thickness is thinner and thinner, the operation of sucking and placing can be caused to generate the phenomenon that the chip cannot be flatly pressed due to the carelessness of a suction nozzle of a human device, or the chip and a contact surface generate air or cannot be completely jointed with primer due to the incapability of uniform force application of the suction nozzle, so that the chip is damaged, the original fixed seat and suction nozzle for sucking and placing can not meet the production requirement, and besides the fixed seat and suction nozzle for solving the thin chip are manufactured on the suction nozzle in a required plane mode, various differences are generated.
The suction nozzle is embedded in the clamping jaw above the fixing seat, so that the suction nozzle is not easy to take out after being installed and embedded, the replacement difficulty is caused, when the suction nozzle is installed, the suction nozzle is difficult to touch a suction crystal face of the suction nozzle, the pollution of the suction nozzle is caused, the suction nozzle is easy to be carelessly and not pushed to the bottom, the suction nozzle is flatly attached to the connecting face of the fixing seat to be inclined, the suction nozzle cannot be ensured to be a plane after being installed, a chip is broken, and the suction nozzle is easy to deform due to the pressure of the clamping jaw, so that the chip is crushed and damaged.
In the existing structure connected and assembled with the suction nozzle, the fixed seat and the corresponding concave structure arranged on the suction nozzle are arranged by the convex structure positioned at the bottom of the vacuum hole, although the suction nozzle is easier to install than the clamping jaw, the suction nozzle is easy to deform in the production process and has the problem of pollution of the suction nozzle when being installed because the corresponding concave structure is additionally arranged on the suction nozzle. In addition, the suction nozzle is made of a material, so that the suction nozzle is easy to have large tolerance during manufacturing, and is easy to slide and deform to cause chip crush damage although the suction nozzle is preset with a corresponding concave-convex structural relation.
The assembly structure of the suction nozzle is fixed by the corresponding close-fit relation, the positioning pin can also be extended below the fixed seat to match with the positioning hole in the suction nozzle, but the suction nozzle is difficult to install and take out due to the close-fit structure between the positioning pin and the suction nozzle, and the suction nozzle and the fixed seat are positioned by close-fit, so that structural adjustment cannot be carried out, and the suction nozzle is polluted by contact when the suction nozzle is installed.
In the existing assembly structure, the suction nozzle is fixed in a corresponding close-fitting relationship for improvement, a magnet is embedded on a fixed seat, an iron sheet or a stainless steel sheet for magnetic attraction is additionally arranged on the suction nozzle to replace the assembly structure of the close-fitting structure, although the assembly problem of the close-fitting structure can be improved, other technical problems are caused, the iron sheet or the stainless steel sheet between the fixed seat and the suction nozzle cannot be completely and tightly combined, the possibility of vacuum leakage exists, and the magnetic adsorption structure between the magnet and the suction nozzle does not have a corresponding positioning part, so that the problem of horizontal deviation in the assembly of the suction nozzle can be caused.
Furthermore, the conventional assembly structure for fixing the suction nozzle in a close-fitting relationship is directed to the problem of the flatness of the suction nozzle after assembly, but if the sucked chip has a vertical offset (inclination) which is not in a plane with the suction nozzle, the problem of the vertical offset (inclination) cannot be solved only by the structural improvement of the flatness between the suction nozzle and the fixed seat, and particularly, the influence of the problem becomes more and more obvious when the thickness of the chip becomes thinner.
Disclosure of Invention
In view of this, an improvement is made to the existing structure, and an assembly structure for connecting a suction nozzle is provided, for the suction nozzle to be installed, the assembly structure includes a fixing base, the fixing base has a magnetic conductive body and is provided with at least two positioning portions, the positioning portions are respectively disposed at different sides of the fixing base; the suction nozzle base is provided with a magnetic conductive body and is provided with the suction nozzle, the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted in the positioning part so as to assemble the suction nozzle base to the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base, thereby facilitating the operation and use of the suction nozzle; the suction nozzle base is provided with a concave part and a sealing groove, the concave part is used for arranging a magnet, the sealing groove surrounds the outer side of the concave part and is clamped between the fixed seat and the suction nozzle base, the fixed seat has magnetic conductivity, the fixed seat and the suction nozzle base are combined and connected through magnetic adsorption, magnetic force can be prevented from leaking from the lower end of the suction nozzle, a sealing element is arranged in the sealing groove, the sealing element is made of elastic materials to ensure vacuum tightness, the sealing element is higher than the suction nozzle base and is matched with an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
The upper end surface of the fixed seat is provided with a joint part, the joint part is provided with a vacuum channel, and the magnet is provided with an opening used for being communicated with the suction nozzle base together through the vacuum channel.
And handles are respectively arranged on two sides of the suction nozzle base so as to be convenient to assemble and disassemble.
Another technical means of the present invention is that the assembly structure includes a fixing base, the fixing base has a magnetic conductive body and at least two positioning portions, the positioning portions are respectively disposed at different sides of the fixing base; the suction nozzle base is provided with a magnetic conductive body and is provided with the suction nozzle, the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted in the positioning part so as to assemble the suction nozzle base to the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base, thereby facilitating the operation and use of the suction nozzle; the suction nozzle base is provided with at least one concave part and a sealing groove, the concave part is used for arranging a magnet for the magnetic adsorption and combination connection between the fixed seat and the suction nozzle base, the sealing groove surrounds the outside of the concave part and is clamped between the fixed seat and the suction nozzle base, a sealing part is arranged in the sealing groove, the sealing part is made of elastic materials to ensure the vacuum tightness, the sealing part is higher than the suction nozzle base and is in a height matching with an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
The fixed seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, and the suction nozzle base is provided with a vacuum hole which is communicated with the vacuum channel of the fixed seat.
And handles are respectively arranged on two sides of the suction nozzle base so as to be convenient to assemble and disassemble.
The assembly structure comprises a fixed seat, a magnetic conductive body and at least two positioning parts, wherein the positioning parts are provided with a tapered pore canal with a wide upper part and a narrow lower part, and a lower end hole is formed on the lower end surface of the fixed seat; a suction nozzle base, which is provided with a magnetic conductive body and is provided with the suction nozzle, wherein the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted into the lower end hole so as to assemble the suction nozzle base on the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base; the positioning part is arranged on the lower end hole of the suction nozzle base and is opposite to the hole channel above the lower end hole by the conical hole channel so as to provide a relative displacement space required by the positioning column when the suction nozzle base is inclined, so that the lower end surface of the suction nozzle is attached to the surface of an inclined chip, and the sealing part is utilized to maintain the tightness of the assembly structure of the fixed seat and the suction nozzle base.
The tapered channel has an inclined surface at an angle of 1 to 5 degrees from the vertical, wherein the angle between the inclined surface and the vertical is preferably in the range of 2 to 2.5 degrees.
The positioning parts are respectively arranged at different sides of the fixed seat.
The suction nozzle base is provided with a concave part and a sealing groove, the concave part is used for arranging a magnet, the fixed seat and the suction nozzle base are combined and connected through magnetic adsorption, the magnetic force can be prevented from leaking from the lower end of the suction nozzle, the sealing groove surrounds the outer side of the concave part, the sealing element is arranged in the sealing groove, the upper end face of the fixed seat is provided with a joint part, the joint part is provided with a vacuum channel, the bottom surface of the concave part is provided with a vacuum hole, the magnet is provided with an opening hole for being communicated with the vacuum channel together with the concave part, the sealing element is higher than the suction nozzle base and is an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
The suction nozzle base also has magnetic conductivity, and is provided with at least one concave part and a sealing groove, the concave part is provided with a magnet for the combination connection between the fixed seat and the suction nozzle base by magnetic adsorption, the magnetic force can be prevented from leaking from the lower end of the suction nozzle, the sealing groove surrounds the outer side of the concave part, the sealing element is arranged in the sealing groove, the fixed seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, the suction nozzle base is provided with a vacuum hole for communicating with the vacuum channel of the fixed seat, the sealing element is higher than the suction nozzle base and is matched with an adjusting space reserved between the lower end surface of the fixed seat and the upper end surface of the suction nozzle base, the height of the adjusting space is used for compensating the fall height generated by inclination, and the sealing element is made of elastic material to ensure the vacuum tightness.
And handles are respectively arranged on two sides of the suction nozzle base so as to be convenient to assemble and disassemble.
Compared with the prior art, the invention has the following effects:
according to the assembling structure, the fixing seat utilizes the positioning parts at different sides to be matched with the positioning columns of the suction nozzle base, and the corresponding structural relation of the positioning columns correspondingly inserted into the lower end holes of the positioning parts is used as horizontal positioning of the assembling fixing seat and the suction nozzle base, so that the suction nozzle is free from horizontal displacement.
In addition, because the suction nozzle is directly and flatly attached to the suction nozzle base, the suction nozzle is replaced by a structure which is assembled by tight fit in the prior art, and the problem of deformation of the suction nozzle is avoided.
The suction nozzle base in the assembly structure is provided with a sealing element in the sealing groove, and various unevenness or inclination possibly generated by the relative parts of the fixed base, the suction nozzle base, the chip or an adsorbate thereof can be corrected by utilizing the elasticity of the sealing element, so that the suction nozzle can be flatly adsorbed or flatly attached on the chip or the adsorbate to ensure the flatness.
Because the suction nozzle base in the assembly structure is provided with the magnet, the fixing base with magnetic conductivity and the suction nozzle base are matched, the fixing base and the suction nozzle base can be combined and connected through magnetic adsorption, the magnetic leakage of the face end of the suction nozzle can be avoided, and the suction nozzle base is provided with the handle which is used for operating and assembling the suction nozzle base, so that an operator can quickly and conveniently install the suction nozzle base and the suction nozzle on the fixing base or disassemble the suction nozzle base from the fixing base under the condition of not touching the lower end face of the suction nozzle, the lower end face of the suction nozzle for sucking crystals can not be polluted, and the suction nozzle can be installed or disassembled without the detached fixing base.
Although the temperature of the operating environment has an opportunity to influence the magnetic force of the magnet, the influence of the temperature on the magnetic force before the suction nozzle needs to be replaced is unlikely to influence the suction and placement operation of the chip because the service life of the suction nozzle is short, and the magnet is completely demagnetized due to the curie temperature unless the service life of the suction nozzle is up.
In the fixing seat, the positioning part is provided with a tapered pore passage, and the tapered pore passage is surrounded by an inclined surface to form a tapered structural space with a wide upper part and a narrow lower part, so that when the suction nozzle base is inclined, the position of the fixing seat is unchanged, the relative displacement space required by the positioning column is provided, the suction nozzle base can be matched with the sealing element, and the vertical offset problem possibly generated by integral assembly, a chip or other factors and the like is correspondingly corrected by means of inclination.
The angle between the inclined plane and the vertical line of the tapered hole of the fixing base is designed by considering the maximum inclination of the vertical offset which can be generated by the fixing base, the suction nozzle and the chip, so that the tapered hole is matched with the sealing element when the vertical offset occurs, and the vertical offset is corrected to be flat.
When the base of the suction nozzle inclines, the base and the fixed seat have a height drop due to the inclination, and the sealing element can be used for keeping the tightness between the base and the fixed seat.
Drawings
FIG. 1 is a perspective view of a first embodiment of the present invention;
FIG. 2 is a bottom perspective view of a first embodiment of the present invention;
FIG. 3 is an exploded view of a first embodiment of the present invention;
FIG. 4 is a cross-sectional view of a first embodiment of the present invention;
FIG. 5 is a schematic view of a suction chip according to a first embodiment of the present invention;
FIG. 5A is a partial enlarged view of FIG. 5;
FIG. 6 is a schematic view of a vertical adjustment according to the first embodiment of the present invention;
FIG. 6A is a partial enlarged view of FIG. 6;
FIG. 7 is a perspective view of a second embodiment of the present invention;
FIG. 8 is a bottom perspective view of a second embodiment of the present invention;
FIG. 9 is an exploded view of a second embodiment of the present invention;
FIG. 10 is a cross-sectional view of a second embodiment of the present invention;
FIG. 11 is a schematic view of a suction chip according to a second embodiment of the present invention;
FIG. 12 is a schematic view of a vertical adjustment according to a second embodiment of the present invention;
FIG. 13 is a perspective view of a third embodiment of the present invention;
FIG. 14 is a bottom perspective view of a third embodiment of the present invention;
FIG. 15 is an exploded view of a third embodiment of the present invention;
FIG. 16 is a cross-sectional view of a third embodiment of the present invention;
FIG. 17 is a schematic view of a suction chip according to a third embodiment of the present invention;
FIG. 18 is a schematic view of a vertical adjustment according to a third embodiment of the present invention.
Detailed Description
Referring to fig. 1 to 3, which are perspective and exploded views of a first embodiment of the present invention, an assembly structure of an assembly structure for connecting a nozzle of the present invention includes a fixing base 10 and a nozzle base 20, and a nozzle 30 is mounted on the nozzle base 20, and the nozzle 30 absorbs a chip 40 on a lower end surface thereof.
The fixing base 10 has a metal body and an upper end surface thereof is provided with a joint portion 11 for engaging a vacuum aspirator (not shown), and the joint portion 11 has a vacuum passage 111, and the vacuum passage 111 penetrates through the joint portion 11 and the fixing base 10 below.
As shown in fig. 5A, the fixing base 10 is provided with two positioning portions 12, the positioning portions 12 being respectively provided at different sides of the fixing base 10. The positioning portion 12 penetrates the fixing base 10 and has a tapered hole 120 with a wide top and a narrow bottom, so that an upper end hole 121 and a lower end hole 122 are formed on the upper end surface and the lower end surface of the fixing base 10, respectively, and the tapered hole 120 of the positioning portion 12 has an inclined surface with an angle of 1 to 5 degrees with the vertical line.
According to the actual requirement, the included angle θ between the inclined plane of the tapered channel 120 and the vertical line may be 2 degrees, 2.5 degrees, 3 degrees, 3.5 degrees, 4 degrees or 4.5 degrees, and the preferred range of the included angle θ is between 2 degrees and 2.5 degrees.
The fixing base 10 can optionally add a top cover (not shown) at the upper end hole 121 of the positioning portion 12 to prevent dust or impurities from falling into the positioning portion 12 and affecting its function, and if necessary, the number of the positioning portions 12 can be increased.
In addition, the tapered hole 120 of the positioning portion 12 of the fixing base 10 of the present embodiment may only penetrate through the lower end surface of the fixing base 10, and only the lower end hole 122 is formed.
The nozzle base 20 has a positioning column 21 and a vacuum hole 22 for communicating with the vacuum channel 111 at the upper end corresponding to each positioning portion 12 of the fixing base 10, and the nozzle base 20 has a vacuum space 25 communicating with the vacuum hole 22 and a fixing recess 26 at the lower end, and the fixing recess 26 is used for adhering, sealing and fixing the nozzle 30. Since the suction nozzle 30 is flatly fixed below the suction nozzle base 20, the flatness of the suction nozzle 30 can be ensured.
On the upper end surface of the nozzle base 20, the positioning column 21 is inserted into the lower end hole 122 of the fixing base 10 correspondingly, so as to assemble the nozzle base 20 below the fixing base 10, and the horizontal displacement on the assembly structure of the fixing base 10 and the nozzle base 20 is limited by the structure inserted between the positioning portion 12 and the positioning column 21, so that the relative position of the two is limited and cannot move left and right, thereby facilitating the operation and use of the nozzle 30 under vacuum.
The fixing base 10 and the nozzle base 20 in this embodiment have magnetic permeability, and the nozzle base 20 has a recess 24 below the vacuum channel 111, and the vacuum hole 22 is relatively located at the bottom surface of the recess 24, and a magnet 29 is disposed in the recess 24, so that the fixing base 10 and the nozzle base 20 are combined and connected by magnetic attraction, and since the fixing base 10 and the nozzle base 20 are made of magnetic conductive material, the magnetic force can be prevented from leaking from the lower end of the nozzle 30.
The suction nozzle base 20 is magnetically attracted to the fixing base 10, so that the existing embedded combination structure can be improved, and the problem that the suction nozzle 30 assembled on the suction nozzle base 20 is inclined and the attracted chip 40 is broken during operation is easily caused when the suction nozzle base 20 is inadvertently not pushed to the bottommost part to be flatly attached to the connecting surface of the fixing base 10 during installation.
The magnet 29 is provided with an opening for communicating with the vacuum channel 111 in common with the recess 24.
The nozzle base 20 further has a sealing groove 23 disposed outside the concave portion 24, as shown in fig. 3, the sealing groove 23 surrounds the concave portion 24, a sealing member 28 is disposed in the sealing groove 23 in a sticking and sealing manner, an upper end of the sealing member 28 is joined to a bottom surface of the fixing base 10, and the sealing member is sandwiched between the fixing base 10 and the nozzle base 20 after being assembled. The seal 28 is formed in the same shape as the seal groove 23.
The sealing member 28 is made of an elastic insulating material, so as to ensure the air tightness of the structure between the fixing base 10 and the nozzle base 20 (as shown in fig. 4 and 5), and maintain the vacuum degree therebetween under the vacuum operation, thereby facilitating the operation and use of the nozzle 30 under the vacuum. The elasticity of the sealing member 28 can correct various structural irregularities or inclinations of the holder 10, the nozzle base 20, the nozzle 30 and the chip 40, so that the nozzle 30 can be smoothly attached to or flatly attached to the chip 40.
In fact, the temperature has the opportunity to influence the magnet 29 in the nozzle base 20 and thus the magnetic force thereof, but since the nozzle 30 has a short life span, the influence of the temperature on the magnetic force of the magnet 29 before the nozzle 30 needs to be replaced does not affect the suction and placement operation unless the magnet 29 is completely demagnetized by the curie temperature before the nozzle 30 has reached its life span.
Referring to fig. 4 and 5, a suction nozzle 30 is fixed on the lower end surface of the suction nozzle base 20, a channel 31 and a plurality of circulation holes 32 penetrating through the suction nozzle 30 are formed on the top surface of the suction nozzle 30, the circulation holes 32 are communicated with the vacuum holes 22 and the vacuum space 25 of the suction nozzle base 20 and are mutually communicated with the vacuum channel 111 of the fixing base 10, so that the vacuum channel 111 and the circulation holes 32 form an air flow channel, and the suction nozzle 30 picks up a chip 40 by using a vacuum suction force generated when a vacuum suction machine (not shown) sucks air through the vacuum channel 111. At this time, the chip 40 is attached to the lower end surface 33 of the suction nozzle 30 for sucking the chip 40 after assembly.
Under normal operation, the suction nozzle 30 can be directly attached to the chip 40 by the lower end surface 33 thereof, but under exceptional conditions such as uneven surface of the chip 40 itself or abnormal placement of the chip 40, the surface of the chip 40 is inclined relative to the lower end surface 33 of the suction nozzle 30.
In the above case, in order to attach the lower end surface 33 of the suction nozzle 30 to the surface of the chip 40 inclined relative thereto, the suction nozzle 30 and the nozzle base 20 should be inclined in order to maintain the attachment to the chip 40 without damaging the structure of the chip 40.
As shown in fig. 6 and fig. 6A, the nozzle base 20 is inserted into the lower end hole 122 of the tapered hole channel 120 of the fixing base 10 by the positioning column 21, and the tapered hole channel 120 has a hole channel with a gradually widened hole diameter above the lower end hole 122, which is a tapered structural space with a narrow bottom and a wide top surrounded by the inclined surface of the tapered hole channel 120, and when the nozzle base 20 is inclined, the fixing base 10 is maintained in place, but the tapered hole channel 120 provides a relative displacement space required by the positioning column 21 when the nozzle base 20 is inclined, so that the nozzle base 20 can be vertically adjusted up and down correspondingly according to the inclination direction.
When the nozzle base 20 is tilted, the height of the nozzle base and the fixing base 10 is reduced due to the tilt, and at this time, the sealing member 28 interposed between the fixing base 10 and the nozzle base 20 is used to maintain the tightness therebetween.
The height of the sealing element 28 higher than the upper end surface of the suction nozzle base 20 is matched with an adjusting space 13 reserved between the lower end surface of the fixed seat 10 and the upper end surface of the suction nozzle base 20, the height is set by comprehensively considering the tolerance of the chip 40 and the combination of components required by the suction and placement of the chip 40, and meanwhile, the elasticity of the sealing element 28 is utilized to compensate the vertical height drop caused by relative inclination, so that the air tightness of the whole structure is kept when the suction nozzle base 20 is inclined, and the accumulated vertical tolerance offset caused by assembly can be automatically corrected.
The tapered channel 120 of the positioning portion 12 can cooperate with the sealing member 28 to correct the vertical deviation due to the assembly tolerance, and also can be matched with the adjustment operation when the surface of the chip 40 and the suction nozzle 30 are inclined, and the corresponding structural relationship between the lower end hole 122 of the tapered channel 120 and the positioning post 21 of the suction nozzle base 20 can make the whole assembly structure have no relative horizontal displacement. The angle θ between the inclined surface of the tapered channel 120 and the vertical line is set by considering the maximum inclination of the holder 10, the nozzle base 20, the nozzle 30, and the chip 40 that may generate vertical deviation.
When assembling the assembly structure of the first embodiment, the sealing member 28 is first placed in the sealing groove 23, the magnet 29 is then placed in the recess 24 of the nozzle base 20, the suction nozzle 30 is adhered to the fixing recess 26 of the nozzle base 20, and finally the handles 27 disposed on both sides of the nozzle base 20 are grasped by hands to insert the positioning posts 21 of the nozzle base 20 into the positioning portions 12 of the fixing base 10, so that the nozzle base 20 and the adhered suction nozzle 30 are attracted to the lower side of the fixing base 10 by the attraction of the magnet 29. On the other hand, when detaching the nozzle base 20 and the nozzle 30, the handle 27 of the nozzle base 20 is grasped by a hand and pulled out downward.
By using the handle 27 of the suction nozzle base 20, an operator can directly mount the suction nozzle 30 on the fixing base 10 or take the suction nozzle 30 off from the fixing base 10 without touching the lower end surface 33 of the suction nozzle 30, so that the lower end surface 33 of the suction nozzle 30 is not polluted, and the suction nozzle 30 can be quickly and conveniently mounted on the fixing base 10 without detaching the fixing base 10 on the equipment.
Referring to fig. 7 to 12, which are related drawings of a second embodiment of the present invention, the structure of the second embodiment is mostly the same as that of the first embodiment and has the same function, so for the sake of simplicity, the same symbols are used and the related descriptions are omitted. The fixing base 10A and the suction nozzle 30A of the second embodiment are larger than those of the first embodiment only in size, and the functions of the two are the same.
The nozzle base 20A of the second embodiment has an oval-shaped vacuum hole 22A, and the vacuum hole 22A communicates with the vacuum passage 111. The nozzle base 20A is provided with at least one recess 24A on the upper end surface except the vacuum hole 22A to be respectively provided with a magnet 29A, and is provided with a sealing groove 23A formed in a rectangular shape around the outside of the recess 24A, and the sealing groove 23A is correspondingly provided with a sealing member 28A formed in a rectangular shape.
The number of the recesses 24A in this embodiment is not limited to the number or shape of the magnets as long as the magnets 29A are matched to provide sufficient magnetism for the nozzle base 20A to be attached to the holder 10A. The seal 28A may alternatively surround the outside of all of the recesses 24A or each of them, as desired.
Referring to fig. 13 to 18, which are related drawings of a third embodiment of the present invention, the structure of the third embodiment is mostly the same as the first and second embodiments and has the same function. The fixing base 10B and the suction nozzle 30B of the third embodiment are larger than those of the second embodiment only in size, and the functions of the two are the same.
The nozzle base 20B of the third embodiment has a vacuum hole 22B having an oval shape, and the vacuum hole 22B communicates with the vacuum passage 111. The nozzle base 20B is provided with at least one recess 24B on an upper end surface other than the vacuum hole 22B to be respectively provided with a magnet 29B, and a sealing groove 23B surrounding the outside of the recess 24B in a rectangular shape, and the sealing groove 23B is correspondingly provided with a sealing member 28B in a likewise rectangular shape.
The number of the recesses 24B in this embodiment is not limited to the number or shape of the magnets as long as the magnets 29B are provided to provide sufficient magnetism for the nozzle base 20B to be attached to the holder 10B. The seal 28B may alternatively surround the outside of all of the recesses 24B or each may surround them individually, as desired.
The assembly structure of the present invention can be used in three different specifications according to the first to third embodiments, and can also be used by replacing a suitable suction nozzle base according to the size of a chip, and the suction nozzle can also be replaced with different styles and shapes and the same size according to requirements, so as to obtain the same effect.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, so that the present invention is not limited by the description of the present invention and the accompanying drawings.
Claims (15)
1. An assembly structure for connecting a suction nozzle to mount the suction nozzle, comprising:
the fixing seat is provided with a magnetic conduction body and at least two positioning parts, and the positioning parts are respectively arranged at different sides of the fixing seat;
the suction nozzle base is provided with a magnetic conductive body and is provided with the suction nozzle, the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted in the positioning part so as to assemble the suction nozzle base to the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base, thereby facilitating the operation and use of the suction nozzle;
the suction nozzle base is provided with a concave part and a sealing groove, the concave part is used for arranging a magnet, the sealing groove surrounds the outer side of the concave part and is clamped between the fixed seat and the suction nozzle base, the fixed seat has magnetic conductivity, the fixed seat and the suction nozzle base are combined and connected through magnetic adsorption, magnetic force can be prevented from leaking from the lower end of the suction nozzle, a sealing element is arranged in the sealing groove, the sealing element is made of elastic materials to ensure vacuum tightness, the sealing element is higher than the suction nozzle base and is matched with an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
2. The assembling structure of the connection nozzle according to claim 1, wherein: the fixing seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, and the magnet is provided with an opening used for being communicated with the suction nozzle base together through the vacuum channel.
3. An assembly structure for connecting a suction nozzle to mount the suction nozzle, the assembly structure comprising:
the fixing seat is provided with a magnetic conduction body and at least two positioning parts, and the positioning parts are respectively arranged at different sides of the fixing seat;
the suction nozzle base is provided with a magnetic conductive body and is provided with the suction nozzle, the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted in the positioning part so as to assemble the suction nozzle base to the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base, thereby facilitating the operation and use of the suction nozzle;
the suction nozzle base is provided with at least one concave part and a sealing groove, the concave part is used for arranging a magnet for the magnetic adsorption and combination connection between the fixed seat and the suction nozzle base, the sealing groove surrounds the outside of the concave part and is clamped between the fixed seat and the suction nozzle base, a sealing part is arranged in the sealing groove, the sealing part is made of elastic materials to ensure the vacuum tightness, the sealing part is higher than the suction nozzle base and is in a height matching with an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
4. The assembling structure of the connection nozzle according to claim 3, wherein: the fixed seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, and the suction nozzle base is provided with a vacuum hole which is communicated with the vacuum channel of the fixed seat.
5. An assembly structure for connecting a suction nozzle to mount the suction nozzle, comprising:
the fixing seat is provided with a magnetic conductive body and at least two positioning parts, the positioning parts are provided with tapered pore canals which are wide at the upper part and narrow at the lower part, and a lower end hole is formed on the lower end surface of the fixing seat;
a suction nozzle base, which is provided with a magnetic conductive body and is provided with the suction nozzle, wherein the suction nozzle base is respectively provided with a positioning column corresponding to the positioning part, and the positioning column is correspondingly inserted into the lower end hole so as to assemble the suction nozzle base on the fixed seat and limit the horizontal displacement on the assembly structure of the fixed seat and the suction nozzle base;
the positioning part is arranged on the lower end hole of the suction nozzle base and is opposite to the hole channel above the lower end hole by the conical hole channel so as to provide a relative displacement space required by the positioning column when the suction nozzle base is inclined, so that the lower end surface of the suction nozzle is attached to the surface of an inclined chip, and the sealing part is utilized to maintain the tightness of the assembly structure of the fixed seat and the suction nozzle base.
6. The assembling structure of the connection nozzle according to claim 5, wherein: the tapered channel has an inclined surface at an angle of 1 to 5 degrees from the vertical.
7. The assembling structure of the connection nozzle according to claim 6, wherein: the angle θ between the inclined surface and the vertical line is preferably in the range of 2 degrees to 2.5 degrees.
8. The assembling structure of the connection nozzle according to claim 5, wherein: the positioning parts are respectively arranged at different sides of the fixed seat.
9. The assembling structure of the connection nozzle according to claim 5, wherein: the suction nozzle base is provided with a concave part and a sealing groove, the concave part is used for arranging a magnet, the fixed seat and the suction nozzle base are combined and connected through magnetic adsorption, the magnetic force can be prevented from leaking from the lower end of the suction nozzle, the sealing groove surrounds the outer side of the concave part, and the sealing element is arranged in the sealing groove.
10. The assembling structure of the connection nozzle according to claim 9, wherein: the fixing seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, the bottom surface of the concave part is provided with a vacuum hole, and the magnet is provided with an opening which is used for being communicated with the vacuum channel together with the concave part.
11. The assembling structure of the connection nozzle according to claim 5, wherein: the suction nozzle base is provided with at least one concave part and a sealing groove, the concave part is provided with a magnet for the combined connection between the fixed seat and the suction nozzle base through magnetic adsorption, the magnetic force can be prevented from leaking from the lower end of the suction nozzle, the sealing groove surrounds the outer side of the concave part, and the sealing element is arranged in the sealing groove.
12. The assembling structure of the connection nozzle according to claim 11, wherein: the fixed seat is provided with a joint part on the upper end surface, the joint part is provided with a vacuum channel, and the suction nozzle base is provided with a vacuum hole which is communicated with the vacuum channel of the fixed seat.
13. The assembling structure of the connection nozzle according to claim 9 or 11, wherein: the sealing element is higher than the suction nozzle base and the height of the sealing element is matched with an adjusting space reserved between the lower end face of the fixed seat and the upper end face of the suction nozzle base, and the height of the adjusting space is used for compensating height drop caused by inclination.
14. The assembling structure of the connection nozzle according to claim 9 or 11, wherein: the sealing element is made of elastic material to ensure vacuum tightness.
15. The assembling structure of the connection nozzle according to claim 1, 2, 3, 4, 5, 9, 11, or 12, wherein: a handle is respectively arranged on two sides of the suction nozzle base so as to be convenient to assemble and disassemble.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105143608 | 2016-12-28 | ||
| TW105143608A TWI605995B (en) | 2016-12-28 | 2016-12-28 | Connection nozzle assembly structure (a) |
| TW105219833 | 2016-12-28 | ||
| TW105219833U TWM543858U (en) | 2016-12-28 | 2016-12-28 | Assembly structure of suction nozzle connection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108257904A CN108257904A (en) | 2018-07-06 |
| CN108257904B true CN108257904B (en) | 2021-10-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711167153.5A Active CN108257904B (en) | 2016-12-28 | 2017-11-21 | Assembling structure for connecting suction nozzle |
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| Country | Link |
|---|---|
| JP (1) | JP7055339B2 (en) |
| KR (1) | KR102440282B1 (en) |
| CN (1) | CN108257904B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108247661B (en) * | 2016-12-28 | 2022-08-30 | 林彦全 | Assembling structure for connecting suction nozzle |
| CN109300832A (en) * | 2018-08-28 | 2019-02-01 | 湖州景盛新能源有限公司 | Suction means is used in a kind of production of solar battery sheet |
| CN110202603B (en) * | 2019-07-01 | 2022-11-11 | 深圳市周大福珠宝制造有限公司 | Vacuum sucker and manufacturing method of sucker body |
| CN110482211A (en) * | 2019-08-13 | 2019-11-22 | 苏州富强科技有限公司 | A kind of suction nozzle rotating mechanism |
| CN111015193A (en) * | 2019-12-26 | 2020-04-17 | 东莞东聚电子电讯制品有限公司 | Rotating wheel type multi-station screw suction device |
| CN112499245B (en) * | 2020-12-08 | 2022-08-16 | 苏州富强科技有限公司 | Rubber-coated suction nozzle component |
| US11693197B2 (en) | 2021-06-25 | 2023-07-04 | Google Llc | Fixture and method for attaching fibers to V-grooves of photonic integrated circuit |
| CN113732671B (en) * | 2021-10-26 | 2023-03-14 | 无锡隆盛科技股份有限公司 | Novel pressure equipment device of natural gas flow nozzle shell |
| CN114890135A (en) * | 2022-05-27 | 2022-08-12 | 杭州长川科技股份有限公司 | Floating suction nozzle mechanism, floating suction nozzle device and auxiliary detection system |
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- 2017-11-21 CN CN201711167153.5A patent/CN108257904B/en active Active
- 2017-12-21 JP JP2017245536A patent/JP7055339B2/en active Active
- 2017-12-28 KR KR1020170181918A patent/KR102440282B1/en active IP Right Grant
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108257904A (en) | 2018-07-06 |
| JP7055339B2 (en) | 2022-04-18 |
| KR102440282B1 (en) | 2022-09-02 |
| JP2018110224A (en) | 2018-07-12 |
| KR20190032158A (en) | 2019-03-27 |
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