JP5932457B2 - Chuck table and processing apparatus including the chuck table - Google Patents

Chuck table and processing apparatus including the chuck table Download PDF

Info

Publication number
JP5932457B2
JP5932457B2 JP2012098649A JP2012098649A JP5932457B2 JP 5932457 B2 JP5932457 B2 JP 5932457B2 JP 2012098649 A JP2012098649 A JP 2012098649A JP 2012098649 A JP2012098649 A JP 2012098649A JP 5932457 B2 JP5932457 B2 JP 5932457B2
Authority
JP
Japan
Prior art keywords
suction
plate
workpiece
communication hole
chuck table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012098649A
Other languages
Japanese (ja)
Other versions
JP2013226607A (en
Inventor
進 野宮
進 野宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Priority to JP2012098649A priority Critical patent/JP5932457B2/en
Publication of JP2013226607A publication Critical patent/JP2013226607A/en
Application granted granted Critical
Publication of JP5932457B2 publication Critical patent/JP5932457B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

本発明は、被加工物である板状ワークを吸引保持するチャックテーブル及びチャックテーブルに吸引保持された板状ワークに加工を施す加工装置に関する。   The present invention relates to a chuck table that sucks and holds a plate-shaped workpiece, which is a workpiece, and a processing apparatus that processes the plate-shaped workpiece sucked and held by the chuck table.

加工装置においては、チャックテーブルにおいて板状ワークを吸引保持し、加工具によって板状ワークを所定の厚みに加工している。チャックテーブルとしては、板状ワークを吸引保持する保持面を有する保持板と、該保持面に吸引力を伝達するための領域を有し保持板を支持する基台と、を備えているものがある（例えば、下記の特許文献１を参照）。   In the processing apparatus, a plate-like workpiece is sucked and held on a chuck table, and the plate-like workpiece is processed to a predetermined thickness by a processing tool. The chuck table includes a holding plate having a holding surface for sucking and holding a plate-like workpiece, and a base having a region for transmitting suction force to the holding surface and supporting the holding plate. (For example, see the following Patent Document 1).

特開２００４−１４９３９号公報JP 2004-14939 A

しかしながら、上記のようなチャックテーブルにおいて、例えば四角形の板状ワークを吸引保持しようとしても、チャックテーブルの保持面が円形に形成されていることから、該保持面の一部分が露出し、当該一部分においてエアが漏洩して四角形の板状ワークをチャックテーブルに吸引保持することが困難となっている。したがって、四角形の板状ワークを吸引保持する際には、当該板状ワークの形状に合わせてチャックテーブルを交換して対応している。   However, in the chuck table as described above, for example, even if an attempt is made to suck and hold a square plate-shaped workpiece, the holding surface of the chuck table is formed in a circular shape. Air leaks, making it difficult to suck and hold the rectangular plate-shaped workpiece on the chuck table. Therefore, when sucking and holding a quadrangular plate-shaped workpiece, the chuck table is exchanged in accordance with the shape of the plate-shaped workpiece.

また、円形の板状ワークには、結晶方位識別のためのオリエンテーションフラットが形成されたものと形成されていないものとがあり、オリエンテーションフラットについても、その大きさは板状ワークの種類によって異なる。そのため、オリエンテーションフラットの大きさによっては、保持面の一部分が露出し、当該一部分においてエアが漏洩してしまうという問題がある。   In addition, there are circular plate-shaped workpieces with and without orientation flats for identifying crystal orientation, and the size of the orientation flats varies depending on the type of plate-shaped workpiece. Therefore, depending on the size of the orientation flat, there is a problem that a part of the holding surface is exposed and air leaks in the part.

本発明は、上記の事情にかんがみてなされたものであり、形状の異なる板状ワークをチャックテーブルの保持面に吸引保持できるようにすることに発明の解決すべき課題がある。   The present invention has been made in view of the above circumstances, and there is a problem to be solved by allowing the plate-like workpieces having different shapes to be sucked and held on the holding surface of the chuck table.

本発明は、吸引源に連通する吸引部の保持面において板状ワークを吸引保持するチャックテーブルであって、該吸引部は、中央部分に配設され四角形の保持面を有する第１の吸引部と、該第１の吸引部の外側に配設された４つの第２の吸引部と、により構成され、該４つの第２の吸引部の外周によって囲まれた領域は、円形の外周部分にオリエンテーションフラットを有する板状ワークと相似形でかつ該板状ワークと同じ大きさか該板状ワークより小さく、該吸引部の側面を封鎖する封鎖部を備え、該封鎖部によって隣接する該第１の吸引部と該第２の吸引部とが隔てられており、該第１の吸引部を該吸引源に連通させる第１の連通孔と、該第２の吸引部を該吸引源に連通させる第２の連通孔と、を備え、該第１の吸引部では四角形の板状ワークを吸引保持し、該第１の吸引部及び該第２の吸引部ではオリエンテーションフラットを有する板状ワークを吸引保持する。 The present invention relates to a chuck table that sucks and holds a plate-like workpiece on a holding surface of a suction portion that communicates with a suction source, and the suction portion is a first suction portion that is disposed in a central portion and has a square holding surface. And four second suction parts disposed outside the first suction part, and the region surrounded by the outer circumferences of the four second suction parts is a circular outer peripheral part. A first portion that is similar to a plate-like workpiece having an orientation flat and has the same size as the plate-like workpiece or smaller than the plate-like workpiece and has a blocking portion that seals a side surface of the suction portion , and is adjacent to the first blocking portion A suction part and the second suction part are separated from each other, a first communication hole that communicates the first suction part with the suction source, and a first communication hole that communicates the second suction part with the suction source. It includes a second communication hole, a square plate-like follower in the first suction portion Suction-holding the click, the suction portion of the first and the second suction portion for sucking and holding a plate-like workpiece having an orientation flat.

前記４つの第２の吸引部の外側に配設された第３の吸引部を備え、該４つの第２の吸引部を前記吸引源に連通させる第２の連通孔と、該第３の吸引部を該吸引源に連通させる第３の連通孔と、を備える。 The includes four third suction portion disposed outside of the second suction unit, a second communication hole for communicating said four second suction unit to the suction source, the suction of the third And a third communication hole for communicating the part with the suction source.

さらに、本発明は、吸引源に連通する吸引部の保持面において板状ワークを吸引保持するチャックテーブルと、該チャックテーブルに吸引保持された板状ワークを加工する加工手段と、を備えた加工装置であって、該チャックテーブルは、中央部分に配設され四角形の保持面を有する第１の吸引部と、該第１の吸引部の外側に配設される少なくとも４つの第２の吸引部と、該第２の吸引部の外側に配設される第３の吸引部と、により構成される吸引部と、該吸引部の側面を封鎖する封鎖部と、該第１の吸引部に連通する該第１の連通孔と、該第２の吸引部に連通する該第２の連通孔と、該第３の吸引部に連通する該第３の連通孔と、により構成され、該加工装置は、該第１の連通孔を該吸引源に接続させる第１の配管と、該第１の配管に配設される第１のバルブと、該第２の連通孔を該吸引源に接続させる第２の配管と、該第２の配管に配設される第２のバルブと、該第３の連通孔を該吸引源に接続させる第３の配管と、該第３の配管に配設される第３のバルブと、を備え、該第１のバルブと該第２のバルブと該第３のバルブとの開閉をそれぞれ切り替えることによって該保持面の面積を変更可能にする。   Furthermore, the present invention provides a processing comprising: a chuck table that sucks and holds a plate-like workpiece on a holding surface of a suction portion that communicates with a suction source; and a processing means that processes the plate-like workpiece sucked and held by the chuck table. The chuck table includes a first suction part having a square holding surface disposed at a central portion, and at least four second suction parts disposed outside the first suction part. And a third suction part disposed outside the second suction part, a sealing part for sealing a side surface of the suction part, and a communication with the first suction part The processing device is configured by the first communication hole, the second communication hole communicating with the second suction portion, and the third communication hole communicating with the third suction portion. A first pipe for connecting the first communication hole to the suction source, and the first pipe. A first valve, a second pipe connecting the second communication hole to the suction source, a second valve disposed in the second pipe, and the third communication hole. A third pipe connected to the suction source; and a third valve disposed in the third pipe; and opening and closing of the first valve, the second valve, and the third valve. By changing each of these, the area of the holding surface can be changed.

本発明は、チャックテーブルにおいて、吸引源に連通する吸引部を備えており、該吸引部は、中央部分に四角形の保持面を有する第１の吸引部と、第１の吸引部の外側に配設された４つの第２の吸引部とにより構成され、４つの第２の吸引部の外周によって囲まれた領域は、円形の外周部分にオリエンテーションフラットを有する板状ワークと相似形でかつ該板状ワークと同じ大きさか該板状ワークより小さく、吸引部の側面を封鎖する封鎖部を備えている。そのため、第１の吸引部と第２の吸引部とは封鎖部によって隔てられるため、第１の吸引部と第２の吸引部とにおける吸引作用を個別に設定することができる。そして、吸引源から発生する吸引力を第１の吸引部ばかりでなく、第２の吸引部にも伝達することができるため、異なる形状の板状ワークを１つのチャックテーブルにおいて吸引保持することができる。 The chuck table includes a suction portion that communicates with a suction source, and the suction portion is disposed outside the first suction portion and a first suction portion having a square holding surface at the center. is composed of the four second suction portion which is set, four regions surrounded by the outer circumference of the second suction portion, a plate-shaped workpiece shape similar having an orientation flat on the outer peripheral portion of the circular and the plate A sealing part that seals the side surface of the suction part that is the same size as or smaller than the plate-like work . Therefore, since the 1st suction part and the 2nd suction part are separated by the blocking part, the suction action in the 1st suction part and the 2nd suction part can be set up individually. Since the suction force generated from the suction source can be transmitted not only to the first suction part but also to the second suction part, plate-shaped workpieces having different shapes can be sucked and held on one chuck table. it can.

上記の第２の吸引部の外側に配設された第３の吸引部を備え、第２の吸引部には、第２の吸引部を吸引源に連通させる第２の連通孔を備え、第３の吸引部には、第３の吸引部を吸引源に連通させる第３の連通孔を備えてあるため、吸引源から発生する吸引力を第１の吸引部、第２の吸引部及び第３の吸引部にも伝達することができ、例えば、四角形の板状ワークや円形の板状ワークなどを１つのチャックテーブルにおいて吸引保持することができる。 Comprises a third suction portion disposed outside of the second suction unit described above, the second suction unit, a second communication hole for communicating the second suction portion to a suction source, the Since the third suction portion is provided with a third communication hole that allows the third suction portion to communicate with the suction source, the suction force generated from the suction source can be generated by the first suction portion, the second suction portion, and the second suction portion. For example, a rectangular plate-shaped workpiece or a circular plate-shaped workpiece can be sucked and held by one chuck table.

さらに、本発明は、上記の第１の吸引部、第２の吸引部及び第３の吸引部を備えるチャックテーブルと、板状ワークを加工する加工手段と、を備えた加工装置であって、加工装置には、第１の連通孔を吸引源に接続させる第１の配管と、第１の配管に配設される第１のバルブと、第２の連通孔を吸引源に接続させる第２の配管と、第２の配管に配設される第２のバルブと、第３の連通孔を吸引源に接続させる第３の配管と、第３の配管に配設される第３のバルブと、を備えるため、第１のバルブと第２のバルブと第３のバルブとの開閉をそれぞれ切り替えて板状ワークが吸引保持される保持面の面積を変更することができる。したがって、形状や大きさの異なる板状ワークであっても、１つのチャックテーブルの保持面において板状ワークを吸引保持することができ、保持面の一部分においてエアが外部に漏洩することはない。また、本発明では、異なる形状の板状ワークに対応するためにチャックテーブルを交換する必要がないため、チャックテーブルの保持面と加工手段の加工具との位置関係が常に維持される。したがって、チャックテーブルの保持面と加工手段の加工具との位置関係を設定するセットアップの作業が不要となり、板状ワークの形状や大きさが変わっても、板状ワークの加工精度を維持することができる。   Furthermore, the present invention is a processing apparatus including a chuck table including the first suction unit, the second suction unit, and the third suction unit, and a processing unit that processes a plate-shaped workpiece, The processing apparatus includes a first pipe that connects the first communication hole to the suction source, a first valve that is disposed in the first pipe, and a second pipe that connects the second communication hole to the suction source. A second valve arranged in the second pipe, a third pipe connecting the third communication hole to the suction source, and a third valve arranged in the third pipe Therefore, the area of the holding surface on which the plate-like workpiece is sucked and held can be changed by switching between opening and closing of the first valve, the second valve, and the third valve. Therefore, even plate-like workpieces having different shapes and sizes can be sucked and held by the holding surface of one chuck table, and air does not leak to the outside at a part of the holding surface. In the present invention, since it is not necessary to replace the chuck table in order to cope with plate-shaped workpieces having different shapes, the positional relationship between the holding surface of the chuck table and the processing tool of the processing means is always maintained. Therefore, setup work to set the positional relationship between the holding surface of the chuck table and the processing tool is not required, and the processing accuracy of the plate workpiece can be maintained even if the shape and size of the plate workpiece change. Can do.

チャックテーブルの構造を示す平面図である。It is a top view which shows the structure of a chuck table. チャックテーブルを備える加工装置の構造を示す断面図である。It is sectional drawing which shows the structure of the processing apparatus provided with a chuck table. 板状ワークの種々の構成を示す平面図である。It is a top view which shows the various structures of a plate-shaped workpiece. チャックテーブルによって、四角形の板状ワークを吸引保持する動作例を示す断面図である。It is sectional drawing which shows the operation example which carries out suction holding | maintenance of a square plate-shaped workpiece | work with a chuck table. 四角形の板状ワークがチャックテーブルに吸引保持された状態を示す平面図である。It is a top view which shows the state by which the square plate-shaped workpiece was attracted | sucked and held by the chuck table. チャックテーブルによって、オリエンテーションフラットが形成された板状ワークを吸引保持する動作例を示す断面図である。It is sectional drawing which shows the operation example which carries out suction holding | maintenance of the plate-shaped workpiece | work in which orientation flat was formed with the chuck table. オリエンテーションフラットが形成された板状ワークがチャックテーブルに吸引保持された状態を示す平面図である。It is a top view which shows the state by which the plate-shaped workpiece | work in which orientation flat was formed was attracted | sucked and held by the chuck table. チャックテーブルによって、円形の板状ワークを吸引保持する動作例を示す断面図である。It is sectional drawing which shows the operation example which carries out suction holding | maintenance of a circular plate-shaped workpiece | work with a chuck table. 円形の板状ワークがチャックテーブルに吸引保持された状態を示す平面図である。It is a top view which shows the state by which the circular plate-shaped workpiece was attracted | sucked and held by the chuck table.

図１に示すチャックテーブル１は、形状の異なる板状ワークを吸引保持することができるチャックテーブルである。チャックテーブル１は、図２に示すように、板状ワークに加工を施す加工手段１５を有する加工装置１００に搭載されている。   A chuck table 1 shown in FIG. 1 is a chuck table capable of sucking and holding plate-like workpieces having different shapes. As shown in FIG. 2, the chuck table 1 is mounted on a processing apparatus 100 having processing means 15 for processing a plate-like workpiece.

図１に示すように、チャックテーブル１は、リング状の枠体１０と、枠体１０の内側に配設された第１の吸引部２、第２の吸引部３ａ及び第２の吸引部３ｂ並びに第３の吸引部４とを備えている。これらの吸引部の構成を説明すると、チャックテーブル１の中央部分には、板状ワークを吸引保持する四角形の保持面２０を有する第１の吸引部２が配設されている。第１の吸引部２の外側には、第１の吸引部２を囲むようにして少なくとも４つの吸引部、すなわち、板状ワークを吸引保持する保持面２１を有する３つの第２の吸引部３ａ及び１つの第２の吸引部３ｂが配設されている。さらに、第２の吸引部３ｂの外側には、板状ワークを吸引保持する保持面２２を有する第３の吸引部４が配設されている。第１の吸引部２と、第２の吸引部３ａと、第２の吸引部３ｂと、第３の吸引部４とで、全体として吸引部２００が構成されている。   As shown in FIG. 1, the chuck table 1 includes a ring-shaped frame body 10, a first suction unit 2, a second suction unit 3 a, and a second suction unit 3 b disposed inside the frame body 10. In addition, a third suction unit 4 is provided. The structure of these suction units will be described. In the center portion of the chuck table 1, a first suction unit 2 having a square holding surface 20 for sucking and holding a plate-like workpiece is disposed. Outside the first suction part 2, there are at least four suction parts surrounding the first suction part 2, that is, three second suction parts 3 a and 1 having a holding surface 21 for sucking and holding a plate-like workpiece. Two second suction portions 3b are provided. Further, a third suction part 4 having a holding surface 22 for sucking and holding the plate-like workpiece is disposed outside the second suction part 3b. The first suction part 2, the second suction part 3 a, the second suction part 3 b, and the third suction part 4 constitute a suction part 200 as a whole.

図１に示す第１の吸引部２、第２の吸引部３ａ及び第２の吸引部３ｂ、第３の吸引部４は、いずれもポーラス部材により形成されている。   The first suction part 2, the second suction part 3a, the second suction part 3b, and the third suction part 4 shown in FIG. 1 are all formed of a porous member.

図１に示すように、第１の吸引部２の側面には、該第１の吸引部２の側面を封鎖する封鎖部５を備えており、この封鎖部５によって、第１の吸引部２と、第１の吸引部２に隣接する第２の吸引部３ａ及び第２の吸引部３ｂとが隔てられている。また、第２の吸引部３ｂと第３の吸引部４との間にも封鎖部５を備えており、第２の吸引部３ｂと、第３の吸引部４とが隔てられている。したがって、封鎖部５は、第１の吸引部２と、第２の吸引部３ａ及び第２の吸引部３ｂと、第３の吸引部４とにそれぞれ個別に吸引作用を発揮させることができる。   As shown in FIG. 1, a side surface of the first suction unit 2 includes a blocking unit 5 that blocks the side surface of the first suction unit 2, and the first suction unit 2 is sealed by the blocking unit 5. And the second suction part 3a and the second suction part 3b adjacent to the first suction part 2 are separated from each other. Moreover, the sealing part 5 is provided also between the 2nd suction part 3b and the 3rd suction part 4, and the 2nd suction part 3b and the 3rd suction part 4 are separated. Therefore, the blocking part 5 can cause the first suction part 2, the second suction part 3 a, the second suction part 3 b, and the third suction part 4 to exert a suction action individually.

図２に示すように、第１の吸引部２の下端には、第１の吸引部２と吸引源９とを連通させるための第１の連通孔６が形成されている。さらに、この第１の連通孔６と吸引源９とを連通させるために、第１の配管１１の一端が第１の連通孔６に接続され、他端が吸引源９に接続されている。図２に示すように、第１の配管１１は、ロータリジョイントからなる分岐部１４を経由しており、また、第１の配管１１の開閉を制御する第１のバルブ１１０が第１の配管１１に配設されている。第１のバルブ１１０を開くと、吸引源９から発生する吸引力を第１の吸引部２に伝達することができる。   As shown in FIG. 2, a first communication hole 6 for communicating the first suction unit 2 and the suction source 9 is formed at the lower end of the first suction unit 2. Further, in order to connect the first communication hole 6 and the suction source 9, one end of the first pipe 11 is connected to the first communication hole 6 and the other end is connected to the suction source 9. As shown in FIG. 2, the first pipe 11 passes through a branch portion 14 formed of a rotary joint, and the first valve 110 that controls the opening and closing of the first pipe 11 is a first pipe 11. It is arranged. When the first valve 110 is opened, the suction force generated from the suction source 9 can be transmitted to the first suction unit 2.

第２の吸引部３ａ及び第２の吸引部３ｂの下端には、第２の吸引部３ａ及び第２の吸引部３ｂと吸引源９とを連通させるための第２の連通孔７が形成されている。さらに、この第２の連通孔７と吸引源９とを連通させるために、第２の配管１２の一端が第２の連通孔７に接続され、他端が吸引源９に接続されている。第２の配管１２は、分岐部１４を経由しており、第２の配管１２の開閉を制御する第２のバルブ１２０が第２の配管１２に配設されている。第２のバルブ１２０を開くと、吸引源９から発生する吸引力を第２の吸引部３ａ及び第２の吸引部３ｂに伝達することができる。   At the lower ends of the second suction part 3a and the second suction part 3b, a second communication hole 7 for communicating the second suction part 3a and the second suction part 3b with the suction source 9 is formed. ing. Furthermore, in order to connect the second communication hole 7 and the suction source 9, one end of the second pipe 12 is connected to the second communication hole 7 and the other end is connected to the suction source 9. The second pipe 12 passes through the branch portion 14, and a second valve 120 that controls opening and closing of the second pipe 12 is disposed in the second pipe 12. When the second valve 120 is opened, the suction force generated from the suction source 9 can be transmitted to the second suction part 3a and the second suction part 3b.

第３の吸引部４の下端には、第３の吸引部４と吸引源９とを連通させるための第３の連通孔８が形成されている。さらに、この第３の連通孔８と吸引源９とを連通させるために、第３の配管１３の一端が第３の連通孔８に接続され、他端が吸引源９に接続されている。第３の配管１３は、分岐部１４を経由しており、第３の配管１３の開閉を制御する第３のバルブ１３０が第３の配管１３に配設されている。第３のバルブ１３０を開くと、吸引源９から発生する吸引力を第３の吸引部４に伝達することができる。   A third communication hole 8 for communicating the third suction part 4 and the suction source 9 is formed at the lower end of the third suction part 4. Further, in order to make the third communication hole 8 and the suction source 9 communicate with each other, one end of the third pipe 13 is connected to the third communication hole 8 and the other end is connected to the suction source 9. The third pipe 13 passes through the branch portion 14, and a third valve 130 that controls opening and closing of the third pipe 13 is disposed in the third pipe 13. When the third valve 130 is opened, the suction force generated from the suction source 9 can be transmitted to the third suction unit 4.

上記のように構成されるチャックテーブル１では、第１のバルブ１１０、第２のバルブ１２０及び第３のバルブ１３０を個別に開閉することができ、板状ワークを吸引保持する面積を変更することができる。例えば、吸引源９を作動させ第１のバルブ１１０を開くと、第１の吸引部２の保持面２０において板状ワークを吸引保持できる。第１のバルブ１１０に加えて第２のバルブ１２０を開くと、図１に示す保持面２０に加えて隣接する保持面２１まで板状ワークを吸引保持できる面積が広がる。さらに、第３のバルブ１３０を開くと、第２の吸引部３ｂの保持面２１に隣接する保持面２２まで板状ワークを吸引保持できる面積が広がる。   In the chuck table 1 configured as described above, the first valve 110, the second valve 120, and the third valve 130 can be individually opened and closed, and the area for sucking and holding the plate-like workpiece is changed. Can do. For example, when the suction source 9 is operated and the first valve 110 is opened, the plate-like workpiece can be sucked and held on the holding surface 20 of the first suction unit 2. When the second valve 120 is opened in addition to the first valve 110, the area where the plate-like workpiece can be sucked and held up to the holding surface 21 adjacent to the holding surface 20 shown in FIG. Further, when the third valve 130 is opened, the area where the plate-like workpiece can be sucked and held up to the holding surface 22 adjacent to the holding surface 21 of the second suction part 3b is expanded.

加工手段１５は、例えば、研削砥石を備え昇降移動可能となっており、板状ワークを所定の厚みに研削加工することができる。なお、加工手段１５は、特に研削加工を施すものに限定されるものではない。   The processing means 15 includes, for example, a grinding wheel and can move up and down, and can grind a plate-like workpiece to a predetermined thickness. The processing means 15 is not particularly limited to the one that performs grinding.

以下においては、上記のように構成されたチャックテーブル１の動作について図３乃至図９を参照しながら説明する。なお、図３（ａ）に示す板状ワーク３０は、第１の吸引部２と相似形の四角形に形成され、第１の吸引部２と同じ大きさか第１の吸引部２より若干大きく形成された被加工物である。図３（ｂ）に示す板状ワーク３１は、第２の吸引部３ａ及び３ｂの外周と相似形に形成され、当該外周と同じ大きさか当該外周より若干大きく形成され、円形の外周部分にオリエンテーションフラット３１０が形成され第二の被加工物である。図３（ｃ）に示す板状ワーク３２は、第２の吸引部３ａ及び３ｂと第３の吸引部４との外周と相似形に形成され、当該外周と同じ大きさか当該外周より若干大きく形成された円形の被加工物である。   Hereinafter, the operation of the chuck table 1 configured as described above will be described with reference to FIGS. 3 to 9. The plate-like workpiece 30 shown in FIG. 3A is formed in a quadrangular shape similar to the first suction part 2 and is the same size as the first suction part 2 or slightly larger than the first suction part 2. Processed workpiece. The plate-like workpiece 31 shown in FIG. 3B is formed in a similar shape to the outer periphery of the second suction portions 3a and 3b, and is formed to be the same size as the outer periphery or slightly larger than the outer periphery, and is oriented to the circular outer periphery. A flat 310 is formed as a second workpiece. The plate-like workpiece 32 shown in FIG. 3C is formed in a shape similar to the outer periphery of the second suction parts 3a and 3b and the third suction part 4, and is formed to be the same size as the outer periphery or slightly larger than the outer periphery. Circular workpiece.

チャックテーブル１により図３（ａ）に示す板状ワーク３０を吸引保持する動作について説明する。図４に示すように、四角形の板状ワーク３０を第１の吸引部２の保持面２０に載置する。板状ワーク３０が保持面２０に載置されたら、第１のバルブ１１０のみ開くとともに、吸引源９から吸引力を発生させる。   An operation of sucking and holding the plate-like workpiece 30 shown in FIG. 3A by the chuck table 1 will be described. As shown in FIG. 4, a rectangular plate-shaped workpiece 30 is placed on the holding surface 20 of the first suction unit 2. When the plate-like workpiece 30 is placed on the holding surface 20, only the first valve 110 is opened and a suction force is generated from the suction source 9.

第１のバルブ１１０が開かれると、吸引力が、第１の配管１１及び第１の連通孔６を介して第１の吸引部２の保持面２０に伝達される。そして、第１の連通孔６に負圧が発生し板状ワーク３０を下方に引っ張る。これにより、図５に示すように、板状ワーク３０がチャックテーブル１に吸引保持される。次いで、図４に示す加工手段１５を作動させ、板状ワーク３０を所定の厚みに加工する。   When the first valve 110 is opened, the suction force is transmitted to the holding surface 20 of the first suction part 2 through the first pipe 11 and the first communication hole 6. Then, a negative pressure is generated in the first communication hole 6 and the plate-like workpiece 30 is pulled downward. Thereby, as shown in FIG. 5, the plate-like workpiece 30 is sucked and held by the chuck table 1. Next, the processing means 15 shown in FIG. 4 is operated to process the plate workpiece 30 to a predetermined thickness.

次に、チャックテーブル１により図３（ｂ）に示す板状ワーク３１を吸引保持する動作について説明する。図６に示す板状ワーク３１を第１の吸引部２の保持面２０並びに第２の吸引部３ａ及び第２の吸引部３ｂの保持面２１に載置する。次いで、図６に示すように、第１のバルブ１１０及び第２のバルブ１２０を開くとともに、吸引源９から吸引力を発生させる。   Next, the operation of sucking and holding the plate-like workpiece 31 shown in FIG. The plate-like workpiece 31 shown in FIG. 6 is placed on the holding surface 20 of the first suction unit 2 and the holding surfaces 21 of the second suction unit 3a and the second suction unit 3b. Next, as shown in FIG. 6, the first valve 110 and the second valve 120 are opened, and a suction force is generated from the suction source 9.

第１のバルブ１１０が開かれると、吸引力が、第１の配管１１及び第１の連通孔を介して第１の吸引部２の保持面２０に伝達され、第２のバルブ１２０が開かれると、吸引力が、第２の配管１２及び第２の連通孔７を介して第２の吸引部３ａ及び第３の吸引部３ｂの保持面２１に伝達される。その結果、板状ワーク３１を吸引保持する面積が保持面２０に隣接する保持面２１まで広がり、板状ワーク３１は、第１の吸引部２だけでなく、第１の吸引部２に隣接する第２の吸引部３ａ及び第２の吸引部３ｂの保持面２１においても吸引保持され、図７に示すように、板状ワーク３１の全面がチャックテーブル１に吸引保持される。次いで、図６に示す加工手段１５を作動させ、板状ワーク３１を所定の厚みに加工する。   When the first valve 110 is opened, the suction force is transmitted to the holding surface 20 of the first suction unit 2 via the first pipe 11 and the first communication hole, and the second valve 120 is opened. Then, the suction force is transmitted to the holding surfaces 21 of the second suction part 3a and the third suction part 3b through the second pipe 12 and the second communication hole 7. As a result, the area for sucking and holding the plate-like workpiece 31 extends to the holding surface 21 adjacent to the holding surface 20, and the plate-like workpiece 31 is adjacent not only to the first suction portion 2 but also to the first suction portion 2. The holding surfaces 21 of the second suction unit 3a and the second suction unit 3b are also sucked and held, and the entire surface of the plate-like workpiece 31 is sucked and held by the chuck table 1 as shown in FIG. Next, the processing means 15 shown in FIG. 6 is operated to process the plate workpiece 31 to a predetermined thickness.

次に、チャックテーブル１により図３（ｃ）に示した板状ワーク３２を吸引保持する動作について説明する。図８に示す板状ワーク３２を第１の吸引部２の保持面２０、第２の吸引部３ａ及び第２の吸引部３ｂの保持面２１並びに第３の吸引部４の保持面２２に載置する。次いで、図８に示すように、第１のバルブ１１０、第２のバルブ１２０及び第３のバルブ１３０を開くとともに、吸引源９から吸引力を発生させる。   Next, the operation of sucking and holding the plate-like workpiece 32 shown in FIG. 8 is mounted on the holding surface 20 of the first suction unit 2, the holding surface 21 of the second suction unit 3a and the second suction unit 3b, and the holding surface 22 of the third suction unit 4. Put. Next, as shown in FIG. 8, the first valve 110, the second valve 120, and the third valve 130 are opened, and a suction force is generated from the suction source 9.

第１のバルブ１１０及び第２のバルブ１２０が開かれると、吸引力が、それぞれ第１の吸引部２の保持面２０と第２の吸引部３ａ及び第２の吸引部３ｂの保持面２１とに伝達され、第３のバルブ１３０が開かれると、吸引力が、第３の配管１３及び第３の連通孔８を介して第３の吸引部４の保持面２２に伝達される。その結果、板状ワーク３２を吸引保持する面積が保持面２１に隣接する保持面２２まで広がり、板状ワーク３２は、第１の吸引部２、第２の吸引部３ａ及び第２の吸引部３ｂだけでなく、第２の吸引部３ｂの外側に配設された第３の吸引部４の保持面２２においても吸引保持され、図９に示すように、板状ワーク３２がチャックテーブル１に吸引保持される。次いで、加工手段１５を作動させ、板状ワーク３２を所定の厚みに加工する。   When the first valve 110 and the second valve 120 are opened, the suction force is applied to the holding surface 20 of the first suction unit 2 and the holding surface 21 of the second suction unit 3a and the second suction unit 3b, respectively. When the third valve 130 is opened, the suction force is transmitted to the holding surface 22 of the third suction portion 4 through the third pipe 13 and the third communication hole 8. As a result, the area for sucking and holding the plate-like workpiece 32 extends to the holding surface 22 adjacent to the holding surface 21, and the plate-like workpiece 32 includes the first suction portion 2, the second suction portion 3a, and the second suction portion. As shown in FIG. 9, the plate-like workpiece 32 is attached to the chuck table 1 as well as the holding surface 22 of the third suction portion 4 disposed outside the second suction portion 3 b. Suction hold. Next, the processing means 15 is actuated to process the plate workpiece 32 to a predetermined thickness.

なお、実施形態に示した四角形の板状ワーク３０としては、例えば、フェライト基板や生セラミクス基板がある。   Examples of the rectangular plate-like workpiece 30 shown in the embodiment include a ferrite substrate and a raw ceramic substrate.

実施形態に示したチャックテーブル１には、四角形の板状ワーク３０を吸引保持できる第１の吸引部２と、オリエンテーションフラットが形成された円形の板状ワーク３１を吸引保持できる第２の吸引部３ａ，３ｂと、略円形の板状ワーク３２を吸引保持できる第３の吸引部４とを備え、これらの吸引部のそれぞれに第１の連通孔６、第２の連通孔７及び第３の連通孔８を備えている。チャックテーブル１を備えた加工装置１００には、それぞれの連通孔を吸引源９に接続させる第１の配管１１、第２の配管１２及び第３の配管１３と、これらに第１のバルブ１１０、第２のバルブ１２０及び第３のバルブ１３０がそれぞれ配設されている。そのため、板状ワークの形状や大きさに合わせて第１のバルブ１１０と第２のバルブ１２０と第３のバルブ１３０とを切り替えて板状ワークが吸引保持される保持面の面積を変更することができる。このように、チャックテーブルに吸引保持される被加工物が形状の異なる板状ワークであっても、チャックテーブルの保持面に板状ワークを吸引保持することができ、保持面の一部分が露出して、一部分におけるエアが外部に漏洩することはない。   The chuck table 1 shown in the embodiment includes a first suction unit 2 that can suck and hold a square plate-shaped workpiece 30 and a second suction unit that can suck and hold a circular plate-shaped workpiece 31 formed with an orientation flat. 3a and 3b, and a third suction part 4 capable of sucking and holding the substantially circular plate-like workpiece 32, and the first communication hole 6, the second communication hole 7 and the third suction hole are provided in each of these suction parts. A communication hole 8 is provided. The machining apparatus 100 including the chuck table 1 includes a first pipe 11, a second pipe 12, and a third pipe 13 that connect the respective communication holes to the suction source 9, and a first valve 110, A second valve 120 and a third valve 130 are provided. Therefore, the area of the holding surface on which the plate-like workpiece is sucked and held is changed by switching the first valve 110, the second valve 120, and the third valve 130 according to the shape and size of the plate-like workpiece. Can do. In this way, even if the workpiece to be sucked and held on the chuck table is a plate-like workpiece having a different shape, the plate-like workpiece can be sucked and held on the holding surface of the chuck table, and a part of the holding surface is exposed. Thus, air in a part does not leak to the outside.

１：チャックテーブル １０：枠体 １００：加工装置
２００：吸引部
２：第１の吸引部 ３ａ，３ｂ：第２の吸引部 ４：第３の吸引部
５：封鎖部
６：第１の連通孔 ７：第２の連通孔 ８：第３の連通孔
９：吸引源
１１：第１の配管 １１０：第１のバルブ
１２：第２の配管 １２０：第２のバルブ
１３：第３の配管 １３０：第３のバルブ
１４：分岐部 １５：加工手段
２０，２１，２２：保持面
３０，３１，３２：板状ワーク ３１０：オリエンテーションフラット 1: Chuck table 10: Frame body 100: Processing device 200: Suction unit 2: First suction unit 3a, 3b: Second suction unit 4: Third suction unit 5: Sealing unit 6: First communication hole 7: 2nd communicating hole 8: 3rd communicating hole 9: Suction source 11: 1st piping 110: 1st valve 12: 2nd piping 120: 2nd valve 13: 3rd piping 130: 3rd valve | bulb 14: Branch part 15: Processing means 20, 21, 22: Holding surface 30, 31, 32: Plate-shaped workpiece | work 310: Orientation flat

Claims (3)

吸引源に連通する吸引部の保持面において板状ワークを吸引保持するチャックテーブルであって、
該吸引部は、中央部分に配設され四角形の保持面を有する第１の吸引部と、
該第１の吸引部の外側に配設された４つの第２の吸引部と、により構成され、
該４つの第２の吸引部の外周によって囲まれた領域は、円形の外周部分にオリエンテーションフラットを有する板状ワークと相似形でかつ該板状ワークと同じ大きさか該板状ワークより小さく、
該吸引部の側面を封鎖する封鎖部を備え、該封鎖部によって隣接する該第１の吸引部と該第２の吸引部とが隔てられており、
該第１の吸引部を該吸引源に連通させる第１の連通孔と、
該第２の吸引部を該吸引源に連通させる第２の連通孔と、を備え、
該第１の吸引部では四角形の板状ワークを吸引保持し、該第１の吸引部及び該第２の吸引部ではオリエンテーションフラットを有する板状ワークを吸引保持する
チャックテーブル。 A chuck table for sucking and holding a plate-like workpiece on a holding surface of a suction portion communicating with a suction source,
The suction part is a first suction part disposed in the central portion and having a rectangular holding surface;
And four second suction parts arranged outside the first suction part,
The region surrounded by the outer circumferences of the four second suction parts is similar to a plate-like workpiece having an orientation flat in a circular outer circumferential portion, and is the same size as the plate-like workpiece or smaller than the plate-like workpiece,
A sealing part that seals a side surface of the suction part; the first suction part and the second suction part adjacent to each other are separated by the sealing part;
A first communication hole for communicating the first suction part with the suction source;
A second communication hole for communicating the second suction part with the suction source ,
A chuck table for holding and holding a rectangular plate-shaped workpiece by the first suction section, and for holding and holding a plate-shaped workpiece having an orientation flat by the first suction section and the second suction section . 前記４つの第２の吸引部の外側に配設された第３の吸引部を備え、
該４つの第２の吸引部を前記吸引源に連通させる第２の連通孔と、
該第３の吸引部を該吸引源に連通させる第３の連通孔と、を備える請求項１記載のチャックテーブル。 Comprises a third suction portion disposed outside of said four second suction portion,
A second communication hole for communicating the four second suction portions with the suction source;
The chuck table according to claim 1, further comprising: a third communication hole that allows the third suction portion to communicate with the suction source. 吸引源に連通する吸引部の保持面において板状ワークを吸引保持するチャックテーブルと、該チャックテーブルに吸引保持された板状ワークを加工する加工手段と、を備えた加工装置であって、
該チャックテーブルは、中央部分に配設され四角形の保持面を有する第１の吸引部と、該第１の吸引部の外側に配設される少なくとも４つの第２の吸引部と、該第２の吸引部の外側に配設される第３の吸引部と、により構成される吸引部と、
該吸引部の側面を封鎖する封鎖部と、
該第１の吸引部に連通する該第１の連通孔と、
該第２の吸引部に連通する該第２の連通孔と、
該第３の吸引部に連通する該第３の連通孔と、により構成され、
該加工装置は、該第１の連通孔を該吸引源に接続させる第１の配管と、該第１の配管に配設される第１のバルブと、
該第２の連通孔を該吸引源に接続させる第２の配管と、該第２の配管に配設される第２のバルブと、
該第３の連通孔を該吸引源に接続させる第３の配管と、該第３の配管に配設される第３のバルブと、を備え、
該第１のバルブと該第２のバルブと該第３のバルブとの開閉をそれぞれ切り替えることによって該保持面の面積を変更可能にする加工装置。 A processing apparatus comprising: a chuck table that sucks and holds a plate-like workpiece on a holding surface of a suction portion that communicates with a suction source; and a processing means that processes the plate-like workpiece sucked and held by the chuck table,
The chuck table includes a first suction part disposed at a central portion and having a rectangular holding surface, at least four second suction parts disposed outside the first suction part, and the second A suction part constituted by a third suction part disposed outside the suction part;
A blocking part for blocking the side surface of the suction part;
The first communication hole communicating with the first suction portion;
The second communication hole communicating with the second suction portion;
The third communication hole communicating with the third suction portion, and
The processing apparatus includes: a first pipe that connects the first communication hole to the suction source; a first valve that is disposed in the first pipe;
A second pipe connecting the second communication hole to the suction source; a second valve disposed in the second pipe;
A third pipe connecting the third communication hole to the suction source, and a third valve disposed in the third pipe,
A processing apparatus that makes it possible to change the area of the holding surface by switching between opening and closing of the first valve, the second valve, and the third valve.
JP2012098649A 2012-04-24 2012-04-24 Chuck table and processing apparatus including the chuck table Active JP5932457B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012098649A JP5932457B2 (en) 2012-04-24 2012-04-24 Chuck table and processing apparatus including the chuck table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012098649A JP5932457B2 (en) 2012-04-24 2012-04-24 Chuck table and processing apparatus including the chuck table

Publications (2)

Publication Number Publication Date
JP2013226607A JP2013226607A (en) 2013-11-07
JP5932457B2 true JP5932457B2 (en) 2016-06-08

Family

ID=49674846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012098649A Active JP5932457B2 (en) 2012-04-24 2012-04-24 Chuck table and processing apparatus including the chuck table

Country Status (1)

Country Link
JP (1) JP5932457B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6654850B2 (en) * 2015-10-13 2020-02-26 株式会社ディスコ Processing equipment
JP7250485B2 (en) * 2018-11-14 2023-04-03 リンテック株式会社 Holding device and holding method
JP2023114618A (en) 2022-02-07 2023-08-18 株式会社ディスコ Substrate processing device, and substrate processing method
JP2024027259A (en) 2022-08-17 2024-03-01 株式会社ディスコ Chuck table manufacturing method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839376A (en) * 1994-07-29 1996-02-13 Ckd Corp Adsorbing plate of vacuum chuck and manufacture of vacuum chuck and adsorbing plate
JP3469999B2 (en) * 1996-10-30 2003-11-25 京セラ株式会社 Adsorber manufacturing method
JP2002324831A (en) * 2001-04-26 2002-11-08 Takatori Corp Vacuum suction table
JP4908263B2 (en) * 2007-02-27 2012-04-04 太平洋セメント株式会社 Vacuum adsorption apparatus and method for manufacturing the same
JP5244548B2 (en) * 2008-11-12 2013-07-24 株式会社ディスコ Holding table and processing device

Also Published As

Publication number Publication date
JP2013226607A (en) 2013-11-07

Similar Documents

Publication Publication Date Title
JP5512052B2 (en) Non-contact suction board
JP5932457B2 (en) Chuck table and processing apparatus including the chuck table
KR101242420B1 (en) Suction table
TWI540089B (en) Working machine and a vacuum adsorption carrier means thereof
KR101313016B1 (en) Suction table
JP2016097496A (en) Suction holding device
KR101722360B1 (en) Pneumatic jig for fixing work piece
JP4671841B2 (en) Degassing method and degassing apparatus between objects
JP6154173B2 (en) Vacuum suction device and suction plate
KR20150106162A (en) Table assembly for supporting semiconductor packages
CN104227471A (en) Auxiliary air circuit tool
CN104103568A (en) Chuck Workbench
JP5493919B2 (en) Chuck table device and semiconductor device manufacturing method using the same
JP2010260318A (en) Suction stage
JPH09174364A (en) Universal chuck table for semiconductor wafer
KR20160146041A (en) vacuum chuck for cutting of a name plate
JPH06260409A (en) Heat-treating device
JP2014083622A (en) Vacuum pad device and suction conveyance method
JP2014184502A (en) Suction pad and workpiece processing device
KR20090102568A (en) Ceramic ball panel type air vacuum tight
CN105234860A (en) Crystal processing jig
CN217200771U (en) Vacuum adsorption assembly and binding equipment
JP2010171172A (en) Component holding tool, and negative pressure sucking device using the component holding tool
JP2015208938A (en) Method and apparatus for transporting brittle material substrate
KR101496041B1 (en) Table assembly for supporting semiconductor packages

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150325

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20150427

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160120

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160121

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160317

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160405

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160428

R150 Certificate of patent or registration of utility model

Ref document number: 5932457

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250