CN110202266A - A kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape - Google Patents
A kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape Download PDFInfo
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- CN110202266A CN110202266A CN201910400836.3A CN201910400836A CN110202266A CN 110202266 A CN110202266 A CN 110202266A CN 201910400836 A CN201910400836 A CN 201910400836A CN 110202266 A CN110202266 A CN 110202266A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
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Abstract
The present invention discloses a kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape, including step, cleans to diamond surface；Build optical path；The laser parameter of the output laser of femto-second laser is set；The diamond is fixed on the processing stations of moving stage；The femtosecond laser parameter in the optical path is adjusted, and carries out microflute processing；Post-process treatment；The processing of nearly rectangular section microflute is carried out by the first width direction feeding laser processing stroke mode that depth direction is fed again；The present invention can obtain process flow and the technological parameter of the nearly rectangular section microflute of femtosecond laser processing high-aspect-ratio, and so as to process satisfactory fluid channel, the significantly heat dissipation for the very high electronic chip of integrated level provides guarantee.
Description
Technical field
The present invention relates to laser micro/nano manufacturing technology fields, and in particular to a kind of femtosecond laser processing diamond microflute section
The regulation method of shape.
Background technique
In recent years, as the rapid development of electronics industry, the characteristic size of electronic chip are constantly reducing, integrated level but exists
It is continuously improved.A large amount of heat can be generated when the very high miniature electronic chip operation of integrated level, if removing not in time, gently influences to set
Standby performance, it is heavy then cause accident.Therefore, the thermal management technology of chip-scale becomes research hotspot.Studies have shown that based on MEMS's
Micropump drives the heat sink cooling system of individual event fluid circulation microflute, can be using complicated but advantage of lower cost micro Process, can
The advantages such as compound material compatibility and high heat transfer potential are the preferred plan for realizing high heat flux density transmission, in effective translator
There is splendid work prospect in terms of part heat and precision control part temperature.
Currently, microflute is heat sink higher to material requirements, diamond is compared to the oxygen-free copper, glass and polymerization applied at present
The materials such as object, outside the excellent characteristics that itself volume dilatation is low, thermal conductivity is high, but also with microflute High Efficiency Thermal extended capability, quilt
It is considered the ideal material of the heat sink cooling system of microflute of new generation.However, diamond superhard wear, processing and forming are very difficult.
Traditional microfabrication means: the means such as conventional laser, etching, LIGA, micro-milling, cannot in terms of processing diamond microflute
Meet the requirement such as precision, high-aspect-ratio, multidimensional working ability simultaneously.
In view of the above drawbacks, creator of the present invention obtains the present invention by prolonged research and practice finally.
Summary of the invention
To solve above-mentioned technological deficiency, the technical solution adopted by the present invention is, provides a kind of femtosecond laser processing Buddha's warrior attendant
The regulation method of stone microflute cross sectional shape, comprising steps of
S1 cleans diamond surface；
S2 builds optical path；
The laser parameter of the output laser of femto-second laser is arranged in S3；
The diamond is fixed on the processing stations of moving stage by S4；
S5 adjusts the femtosecond laser parameter in the optical path, and carries out microflute processing；
S6, post-process treatment；
In the step S5, carried out by the first width direction feeding laser processing stroke mode that depth direction is fed again
The processing of nearly rectangular section microflute.
Preferably, the optical path include femto-second laser, it is the first reflecting mirror, 1/2 wave plate, Amici prism, shutter, second anti-
It penetrates mirror, diaphragm, focus plano-convex lens, the output laser of the femto-second laser rotates optical path by first reflecting mirror
90 °, reflected light successively pass through 1/2 wave plate, the Amici prism, the shutter, second reflecting mirror, the diaphragm,
The focusing plano-convex lens vertical irradiation is on the processing stations of the moving stage.
Preferably, the Amici prism is provided with power meter, the Amici prism and the power meter are used to detect described
Laser power in optical path, 1/2 wave plate are used to adjust the laser power in the optical path, and the shutter is described for controlling
The on-off of optical path, the diaphragm is for controlling spot size, the circular light spot for focusing plano-convex lens and exporting the diaphragm
Laser beam is focused.
Preferably, setting 50.8mm for the distance between the lens centre for focusing plano-convex lens and ablation point, thoroughly
Crossing the ablation circle spot radius that the focusing plano-convex lens obtain is 1.08 μm, and the ablation circle hot spot is focal beam spot.
Preferably, the laser parameter includes optical maser wavelength, repetition and pulsewidth, the optical maser wavelength in the step S3
For 808nm, the repetition is 1kHz, and the pulsewidth is 120fs.
Preferably, microflute process described in the step S5 includes:
S51 rotates 1/2 wave plate, adjusts the femtosecond laser power；
S52 adjusts the diameter of the diaphragm；
S53 establishes coordinate system, and X-axis is width of mini longitudinal channels direction, and Y-axis is microflute length direction, and Z axis is optical path axis direction；
By moving the moving stage along Z axis, the focal beam spot focus for focusing plano-convex lens is irradiated to the Buddha's warrior attendant
Stone surface；
S54, the shutter are opened, and the moving stage moves to form initial microflute along Y-axis positive direction；
S55, when the initial microflute is machined to end, the shutter close, the moving stage is along X-axis positive direction
Feed X0, X0For horizontal feed amount, the moving stage carries out horizontal feed several times along X-axis positive direction and processes；
S56, the moving stage is along X-axis negative direction rollback X0, while Z is fed along Z axis positive direction0, Z0To feed vertically
Amount, the moving stage carry out horizontal feed several times along X-axis negative direction and process；
S57, the moving stage is along X-axis positive direction rollback X0, while Z is fed along Z axis positive direction0, the mobile loading
Platform carries out horizontal feed several times along X-axis positive direction and processes；
S58, repetition step S56 and S57 add until the moving stage carries out vertical feeding several times along Z-direction
After work, it is finally completed the processing of nearly rectangular cross sectional shape microflute.
Preferably, in step S55, the process of the processing of horizontal feed described in single are as follows: the moving stage along X-axis just
Direction feeds X0Afterwards, the shutter is opened, and controlling the moving stage carries out femtosecond laser along the y axis and last phase
The laser processing of opposite direction, when being machined to end, the shutter close, the moving stage is fed along X-axis positive direction again
X0。
Preferably, the femtosecond laser power is 2W, the diameter adjustment of the diaphragm to 7mm.
Preferably, the horizontal feed amount is 0.013mm, the vertical amount of feeding when thickness of diamond is 0.5mm
For 0.07mm, the step S55, the step S56, the horizontal feed processing times in the step S57 are 6 times, institute
Stating the vertical feeding processing times in step S58 is 6 times.
Preferably, the horizontal feed amount is 0.01mm, the vertical amount of feeding when thickness of diamond is 1.6mm
For 0.1mm, the step S55, the step S56, the horizontal feed processing times in the step S57 are 6 times, described
The vertical feeding processing times in step S58 are 10 times.
The beneficial effects of the present invention are: the present invention can obtain femtosecond laser processing high-aspect-ratio compared with the prior art
Nearly rectangular section microflute process flow and technological parameter, so as to process satisfactory fluid channel, be integrated level
The significantly heat dissipation of very high electronic chip provides guarantee.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the optical path；
Fig. 2 is the initial position figure of femtosecond laser and diamond；
Fig. 3 is the machining sketch chart of initial microflute；
Fig. 4 is horizontal feed status diagram；
Fig. 5 is horizontal feed post-processing schematic diagram；
Fig. 6 is the schematic diagram of horizontal feed post-processing several times；
Fig. 7 is vertical feeding status diagram；
Fig. 8 is vertical feeding post-processing schematic diagram；
Fig. 9 is horizontal feed schematic diagram again after vertical feeding；
Figure 10 is that microflute is finally completed figure；
Figure 11 is the processing result figure of the nearly rectangular cross sectional shape microflute of embodiment two；
Figure 12 is the processing result figure of the nearly rectangular cross sectional shape microflute of embodiment three.
Digital representation in figure:
1- femto-second laser；The first reflecting mirror of 2-；Wave plate；4- Amici prism；5- power meter；6- shutter；7- second
Reflecting mirror；8- diaphragm；9- focuses plano-convex lens；10- moving stage；11- diamond.
Specific embodiment
Below in conjunction with attached drawing, the forgoing and additional technical features and advantages are described in more detail.
Embodiment one
In the present embodiment, the present invention is using femtosecond laser technology to the processing method of the nearly rectangular section microflute of diamond, tool
Body the following steps are included:
S1 is successively carried out ultrasonic cleaning, and is used to the surface of diamond 11 with acetone, dehydrated alcohol, deionized water
Cold wind drying, obtains clean diamond sample surface；
S2 builds optical path；
S3, the laser parameter of the output laser of setting femto-second laser 1；
The diamond 11 is fixed on the processing stations of moving stage 10 by S4；
S5 adjusts the femtosecond laser parameter in the optical path, and carries out microflute processing；
S6, post-process treatment.
In step s 2, as shown in FIG. 1, FIG. 1 is the structural schematic diagrams of the optical path；The optical path specifically includes femtosecond and swashs
Light device 1,1/2 wave plate 3, Amici prism 4, shutter 6, the second reflecting mirror 7, diaphragm 8, focuses plano-convex lens 9, institute at first reflecting mirror 2
The output laser for stating femto-second laser 1 makes optical path rotate 90 ° by first reflecting mirror 2, and reflected light successively passes through described 1/2
Wave plate 3, the Amici prism 4, the shutter 6, second reflecting mirror 7, the diaphragm 8, the focusing plano-convex lens 9 are vertical
It is radiated on the processing stations of the moving stage 10, the femto-second laser 1, the shutter 6, the moving stage 10
It connects with computer, the diamond 11 is bonded and fixed on the moving stage 10 using double-sided adhesive.The Amici prism 4
It is provided with power meter 5, using the laser power in optical path described in 5 combine detection of the Amici prism 4 and the power meter, is utilized
1/2 wave plate 3 adjusts the laser power in the optical path.Computer controls the on-off of optical path by the shutter 6 simultaneously, described
Second reflecting mirror 7 makes optical path rotate 90 ° again, and the diaphragm 8 controls spot size, is realized using the focusing plano-convex lens 9
The focusing for the circular light spot laser beam that the diaphragm 8 exports.
In step S3, the laser parameter includes optical maser wavelength, repetition and pulsewidth.
As shown in Fig. 2 to Figure 10, Fig. 2 to Figure 10 is the schematic diagram of the process of diamond microflute processing method of the present invention；
Microflute described in the step S5 processing detailed process comprising steps of
S51 rotates 1/2 wave plate 3, adjusts the femtosecond laser power；
S52 adjusts the diameter of the diaphragm 8；
S53 establishes coordinate system, and X-axis is width of mini longitudinal channels direction, and Y-axis is microflute length direction, and Z axis is optical path axis direction；
The moving stage 10 is controlled using computer to move along Z axis, and the focal beam spot focus for focusing plano-convex lens 9 is irradiated to
11 surface of diamond；
S54, the shutter 6 are opened, and the moving stage 10 moves to form initial microflute along Y-axis positive direction；
S55, when the initial microflute is machined to end, the shutter 6 is closed, the moving stage 10 along X-axis just
Direction feeds X0, X0For horizontal feed amount, the moving stage 10 carries out feeding processing several times along X-axis positive direction；
S56, the moving stage 10 is along X-axis negative direction rollback X0, while Z is fed along Z axis positive direction0, Z0For vertically into
To amount, the moving stage 10 carries out feeding processing several times along X-axis negative direction；
S57, the moving stage 10 is along X-axis positive direction rollback X0, while Z is fed along Z axis positive direction0, the mobile load
Object platform 10 carries out feeding processing several times along X-axis positive direction；
S58 repeats step S56 and S57, until the moving stage 10 is after Z-direction feeding several times, it is final complete
At the processing of nearly rectangular cross sectional shape microflute.
In step S56, single feeding processing mainly comprises the processes of the moving stage 10 and feeds X along X-axis positive direction0
Afterwards, the shutter 6 is opened, and controlling the moving stage carries out femtosecond laser along the y axis and last opposite direction
Laser processing, when being machined to end, the shutter 6 is closed, and the moving stage 10 feeds X along X-axis positive direction again0。X0's
Feeding processing is traditionally arranged to be 6 times, to form the machining path of " oneself " font.
The post-process treatment, which is specifically included that, is respectively placed in acetone soln, ethyl alcohol for diamond print after processing is completed
Ultrasonic cleaning 15min is carried out in solution and deionized water, it is therefore intended that be adhered to inside sample surface and microflute after removal processing
Deposit etc., reduce to the influence in the subsequent use process of exemplar, and using scanning electron microscope to microflute table after processing
It is detected in face.
The present invention processes diamond using first width direction feeding " oneself " font processing method that depth direction is fed again
The microflute of nearly rectangular cross sectional shape adds to grasp the series of process parameter of the nearly rectangle micro-groove of femtosecond laser processing diamond
Work goes out satisfactory fluid channel, improves heat dissipation of electronic chip ability.
Embodiment two
Nearly rectangular section microflute is processed on the diamond of 0.5mm thickness using processing method of the invention in the present embodiment,
Specifically includes the following steps:
S1 successively carries out ultrasonic cleaning with acetone, dehydrated alcohol, deionized water to the surface of the diamond 11, so
Drying up to obtain clean using cold wind afterwards is 11 surface of diamond；
S2 builds optical path, and the optical path includes the femto-second laser 1, and 1 output light of femto-second laser passes through first
Reflecting mirror 2 make optical path rotate 90 °, the reflected light successively pass through 1/2 wave plate 3, Amici prism 4, shutter 6, the second reflecting mirror 7,
Diaphragm 8 focuses 9 vertical irradiation of plano-convex lens on the processing stations of moving stage 10, the femto-second laser 1, described fast
Door 6, the moving stage 10 are connected with computer, and the diamond 11 is bonded in the moving stage 10 using double-sided adhesive
On.
Using 5 combine detection optical path laser power of the Amici prism 4 and power meter, light is adjusted using 1/2 wave plate 3
Road laser power.Computer controls the on-off of optical path by the shutter 6 simultaneously, and second reflecting mirror 7 rotates optical path again
90 °, the diaphragm 8 controls spot size, and focal length is used to swash the circular light spot in optical path for the focusing plano-convex lens 9 of 50.8mm
Light beam is focused, and finally sets 50.8mm for the distance between the lens centre for focusing plano-convex lens 9 and ablation point,
The ablation circle spot radius obtained through the focusing plano-convex lens 9 is 1.08 μm, and the ablation circle hot spot is focal beam spot.
S3, adjusting 1 Output of laser wavelength of femto-second laser using computer is 808nm, repetition 1kHz, and pulsewidth is
120fs；
The diamond 11 is fixed on 10 processing stations of moving stage by S4；
S5 adjusts the femtosecond laser parameter in the optical path, and carries out microflute processing；
S6, post-process treatment: by diamond print after processing is completed be respectively placed in acetone soln, ethanol solution and go from
Ultrasonic cleaning 15min is carried out in sub- water, it is therefore intended that the deposit etc. being adhered to after removal processing inside sample surface and microflute,
Reduction detects microchanneled surface after processing to the influence in the subsequent use process of exemplar, and using scanning electron microscope.
For step S5, in being specifically configured to for the present embodiment:
S51 rotates 1/2 wave plate, adjusts femtosecond laser power to 2W；
S52, by the diameter adjustment of the diaphragm 8 to 7mm；
S53 establishes coordinate system, and X-axis is width of mini longitudinal channels direction, and Y-axis is microflute length direction, and Z axis is optical path axis direction；
The moving stage 10 is controlled using computer to move along Z axis, and the focal beam spot focus for focusing plano-convex lens 9 is irradiated to
11 surface of diamond；
S54 is opened by shutter 6 described in process control, is continued with computer and is controlled the moving stage 10 along Y-axis just
Direction is mobile, speed 0.1mm/s, sweeps the initial microflute that a root long degree L is 2mm；
S55, when the initial microflute is machined to end, the shutter 6 is closed, the moving stage 10 along X-axis just
Direction feeds horizontal feed amount, and the horizontal feed amount is 0.013mm, and the moving stage 10 carries out 6 times along X-axis positive direction
Feeding processing；
S56, the moving stage 10 along X-axis negative direction rollback 0.013mm, while along Z axis positive direction feeding vertically into
To amount, the vertical amount of feeding is 0.07mm, and the moving stage 10 carries out 6 feedings processing along X-axis negative direction；
S57, the moving stage 10 along X-axis positive direction rollback 0.013mm, while along Z axis positive direction feeding vertically into
To amount, the vertical amount of feeding is 0.07mm, and the moving stage 10 carries out 6 feedings processing along X-axis positive direction；
S58 repeats step S56 and S57, until the moving stage 10 is finally completed after Z-direction feeding 6 times
Depth of mini longitudinal channels is the nearly rectangular cross sectional shape microflute of 0.5mm；Size in the depth of mini longitudinal channels, that is, Z-direction.
As shown in figure 11, Figure 11 be the present embodiment laser power be 2W, scanning speed 0.1mm/s, width direction every time into
Amount 0.013mm is given, is fed 6 times；The each amount of feeding 0.07mm of depth direction, the groove depth for feeding 6 processing is the nearly rectangle of 0.5mm
The result figure of cross sectional shape through slot；
Embodiment three
Nearly rectangular section microflute is processed on the diamond of 1.6mm thickness using processing method of the invention in the present embodiment,
Specifically includes the following steps:
S1 successively carries out ultrasonic cleaning with acetone, dehydrated alcohol, deionized water to the surface of the diamond 11, so
Drying up to obtain clean using cold wind afterwards is 11 surface of diamond；
S2 builds optical path, and the optical path includes the femto-second laser 1, and 1 output light of femto-second laser passes through first
Reflecting mirror 2 make optical path rotate 90 °, the reflected light successively pass through 1/2 wave plate 3, Amici prism 4, shutter 6, the second reflecting mirror 7,
Diaphragm 8 focuses 9 vertical irradiation of plano-convex lens on the processing stations of moving stage 10, the femto-second laser 1, described fast
Door 6, the moving stage 10 are connected with computer, and the diamond 11 is bonded in the moving stage 10 using double-sided adhesive
On.
Using 5 combine detection optical path laser power of the Amici prism 4 and power meter, light is adjusted using 1/2 wave plate 3
Road laser power.Computer controls the on-off of optical path by the shutter 6 simultaneously, and second reflecting mirror 7 rotates optical path again
90 °, the diaphragm 8 controls spot size, and focal length is used to swash the circular light spot in optical path for the focusing plano-convex lens 9 of 50.8mm
Light beam is focused, and finally sets 50.8mm for the distance between the lens centre for focusing plano-convex lens 9 and ablation point,
The ablation circle spot radius obtained through the focusing plano-convex lens 9 is 1.08 μm, and the ablation circle hot spot is focal beam spot.
S3, adjusting 1 Output of laser wavelength of femto-second laser using computer is 808nm, repetition 1kHz, and pulsewidth is
120fs；
The diamond 11 is fixed on 10 processing stations of moving stage by S4；
S5 adjusts the femtosecond laser parameter in the optical path, and carries out microflute processing；
S6, post-process treatment: by diamond print after processing is completed be respectively placed in acetone soln, ethanol solution and go from
Ultrasonic cleaning 15min is carried out in sub- water, it is therefore intended that the deposit etc. being adhered to after removal processing inside sample surface and microflute,
Reduction detects microchanneled surface after processing to the influence in the subsequent use process of exemplar, and using scanning electron microscope.
For step S5, in being specifically configured to for the present embodiment:
S51 rotates 1/2 wave plate, adjusts femtosecond laser power to 2W；
S52, by the diameter adjustment of the diaphragm 8 to 7mm；
S53 establishes coordinate system, and X-axis is width of mini longitudinal channels direction, and Y-axis is microflute length direction, and Z axis is optical path axis direction；
The moving stage 10 is controlled using computer to move along Z axis, and the focal beam spot focus for focusing plano-convex lens 9 is irradiated to
11 surface of diamond；
S54 is opened by shutter 6 described in process control, is continued with computer and is controlled the moving stage 10 along Y-axis just
Direction is mobile, speed 0.1mm/s, sweeps the initial microflute that a root long degree is 2mm；
S55, when the initial microflute is machined to end, the shutter 6 is closed, the moving stage 10 along X-axis just
Direction feeds horizontal feed amount, and the horizontal feed amount is 0.01mm, and the moving stage 10 carries out 6 times along X-axis positive direction
Feeding processing；
S56, the moving stage 10 feed vertical feeding along X-axis negative direction rollback 0.01mm, while along Z axis positive direction
Amount, the vertical amount of feeding are 0.1mm, and the moving stage 10 carries out 6 feedings processing along X-axis negative direction；
S57, the moving stage 10 feed vertical feeding along X-axis positive direction rollback 0.01mm, while along Z axis positive direction
Amount, the vertical amount of feeding are 0.1mm, and the moving stage 10 carries out 6 feedings processing along X-axis positive direction；
S58 repeats step S56 and S57, until the moving stage 10 is finally completed after Z-direction feeding 10 times
Depth of mini longitudinal channels is the nearly rectangular cross sectional shape microflute of 1.6mm；Size in the depth of mini longitudinal channels, that is, Z-direction.
As shown in figure 12, Figure 12 be the present embodiment laser power be 2W, scanning speed 0.1mm/s, width direction every time into
Amount 0.01mm is given, is fed 6 times.The each amount of feeding 0.1mm of depth direction, the groove depth for feeding 10 processing is the nearly rectangle of 1.6mm
The result figure of cross sectional shape through slot.
The foregoing is merely presently preferred embodiments of the present invention, is merely illustrative for the purpose of the present invention, and not restrictive
's.Those skilled in the art understand that in the spirit and scope defined by the claims in the present invention many changes can be carried out to it,
It modifies or even equivalent, but falls in protection scope of the present invention.
Claims (10)
1. a kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape, which is characterized in that comprising steps of
S1 cleans diamond surface；
S2 builds optical path；
S3, setting femto-second laser export the laser parameter of laser；
The diamond is fixed on the processing stations of moving stage by S4；
S5 adjusts the femtosecond laser parameter in the optical path, and carries out microflute processing；
S6, post-process treatment；
In the step S5, nearly square is carried out by the first width direction feeding laser processing stroke mode that depth direction is fed again
The processing of tee section microflute.
2. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as described in claim 1, which is characterized in that institute
Optical path is stated to include the femto-second laser, the first reflecting mirror, 1/2 wave plate, Amici prism, shutter, the second reflecting mirror, diaphragm, gather
The output laser of burnt plano-convex lens, the femto-second laser makes optical path rotate 90 ° by first reflecting mirror, and reflected light is successively
It is saturating by 1/2 wave plate, the Amici prism, the shutter, second reflecting mirror, the diaphragm, the focusing plano-convex
Mirror vertical irradiation is on the processing stations of the moving stage.
3. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 2, which is characterized in that institute
It states Amici prism and is provided with power meter, the Amici prism and the power meter are used to detect the laser power in the optical path,
1/2 wave plate is used to adjust the laser power in the optical path, and the shutter is used to control the on-off of the optical path, the light
For controlling spot size, the circular light spot laser beam that the diaphragm exports is focused door screen by the focusing plano-convex lens.
4. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 3, which is characterized in that will
The distance between the lens centre for focusing plano-convex lens and ablation point are set as 50.8mm, through the focusing plano-convex lens
Obtained ablation circle spot radius is 1.08 μm, and the ablation circle hot spot is focal beam spot.
5. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as described in claim 1, which is characterized in that institute
It states in step S3, the laser parameter includes optical maser wavelength, repetition and pulsewidth, and the optical maser wavelength is 808nm, and the repetition is
1kHz, the pulsewidth are 120fs.
6. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 2, which is characterized in that institute
Stating microflute process described in step S5 includes:
S51 rotates 1/2 wave plate, adjusts the femtosecond laser power；
S52 adjusts the diameter of the diaphragm；
S53 establishes coordinate system, and X-axis is width of mini longitudinal channels direction, and Y-axis is microflute length direction, and Z axis is optical path axis direction；Pass through
The moving stage is moved along Z axis, the focal beam spot focus for focusing plano-convex lens is irradiated to the diamond table
Face；
S54, the shutter are opened, and the moving stage moves to form initial microflute along Y-axis positive direction；
S55, when the initial microflute is machined to end, the shutter close, the moving stage is fed along X-axis positive direction
X0, X0For horizontal feed amount, the moving stage carries out horizontal feed several times along X-axis positive direction and processes；
S56, the moving stage is along X-axis negative direction rollback X0, while Z is fed along Z axis positive direction0, Z0For the vertical amount of feeding,
The moving stage carries out horizontal feed several times along X-axis negative direction and processes；
S57, the moving stage is along X-axis positive direction rollback X0, while Z is fed along Z axis positive direction0, the moving stage edge
X-axis positive direction carries out horizontal feed several times and processes；
S58 repeats step S56 and S57, until the moving stage carries out after feeding processing vertically several times along Z-direction,
It is finally completed the processing of nearly rectangular cross sectional shape microflute.
7. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 6, which is characterized in that
In step S55, the process of the processing of horizontal feed described in single are as follows: the moving stage feeds X along X-axis positive direction0Afterwards, described
Shutter is opened, and controlling the moving stage makes femtosecond laser carry out the laser processing with last opposite direction along the y axis,
When being machined to end, the shutter close, the moving stage feeds X along X-axis positive direction again0。
8. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 6, which is characterized in that institute
Stating femtosecond laser power is 2W, the diameter adjustment of the diaphragm to 7mm.
9. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 8, which is characterized in that institute
It states thickness of diamond and is set as 0.5mm, the horizontal feed amount is set as 0.013mm, and the vertical amount of feeding is set as
0.07mm, the step S55, the step S56, the horizontal feed processing times in the step S57 are 6 times, described
The vertical feeding processing times in step S58 are 6 times.
10. the regulation method of femtosecond laser processing diamond microflute cross sectional shape as claimed in claim 8, which is characterized in that
The thickness of diamond is set as 1.6mm, and the horizontal feed amount is set as 0.01mm, and the vertical amount of feeding is set as
0.1mm, the step S55, the step S56, the horizontal feed processing times in the step S57 are 6 times, the step
The vertical feeding processing times in rapid S58 are 10 times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910400836.3A CN110202266A (en) | 2019-05-14 | 2019-05-14 | A kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape |
Applications Claiming Priority (1)
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|---|---|---|---|
| CN201910400836.3A CN110202266A (en) | 2019-05-14 | 2019-05-14 | A kind of regulation method of femtosecond laser processing diamond microflute cross sectional shape |
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| Publication Number | Publication Date |
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