CN110187602B - 彩色光刻胶组合物 - Google Patents
彩色光刻胶组合物 Download PDFInfo
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- CN110187602B CN110187602B CN201910397555.7A CN201910397555A CN110187602B CN 110187602 B CN110187602 B CN 110187602B CN 201910397555 A CN201910397555 A CN 201910397555A CN 110187602 B CN110187602 B CN 110187602B
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 38
- 239000000049 pigment Substances 0.000 claims abstract description 34
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000002904 solvent Substances 0.000 claims abstract description 20
- 239000000654 additive Substances 0.000 claims abstract description 7
- 239000011347 resin Substances 0.000 claims abstract description 7
- 229920005989 resin Polymers 0.000 claims abstract description 7
- 239000004925 Acrylic resin Substances 0.000 claims description 18
- 229920000178 Acrylic resin Polymers 0.000 claims description 18
- 239000004593 Epoxy Substances 0.000 claims description 18
- -1 alkyl methacrylate Chemical compound 0.000 claims description 15
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 12
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 11
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 9
- 244000028419 Styrax benzoin Species 0.000 claims description 9
- 235000000126 Styrax benzoin Nutrition 0.000 claims description 9
- 235000008411 Sumatra benzointree Nutrition 0.000 claims description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N dimethylformamide Substances CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 9
- 235000019382 gum benzoic Nutrition 0.000 claims description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 150000008062 acetophenones Chemical class 0.000 claims description 6
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 6
- 229960002130 benzoin Drugs 0.000 claims description 6
- 239000001055 blue pigment Substances 0.000 claims description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 6
- 239000001056 green pigment Substances 0.000 claims description 6
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical class [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 claims description 6
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 claims description 6
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 6
- 150000002910 rare earth metals Chemical class 0.000 claims description 6
- 239000001052 yellow pigment Substances 0.000 claims description 6
- 230000000996 additive effect Effects 0.000 claims description 4
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 150000002894 organic compounds Chemical group 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- GDXHBFHOEYVPED-UHFFFAOYSA-N 1-(2-butoxyethoxy)butane Chemical compound CCCCOCCOCCCC GDXHBFHOEYVPED-UHFFFAOYSA-N 0.000 claims description 3
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 claims description 3
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 claims description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 claims description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 claims description 3
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 claims description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 3
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052765 Lutetium Inorganic materials 0.000 claims description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 3
- 229910052773 Promethium Inorganic materials 0.000 claims description 3
- WVPPCRCTHUBAKB-UHFFFAOYSA-N S-(4-methylphenyl) 2-methyl-2-morpholin-4-ylpropanethioate Chemical compound CC(C(=O)SC1=CC=C(C=C1)C)(C)N1CCOCC1 WVPPCRCTHUBAKB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052772 Samarium Inorganic materials 0.000 claims description 3
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 3
- 229910052771 Terbium Inorganic materials 0.000 claims description 3
- 229910052775 Thulium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- OBOXTJCIIVUZEN-UHFFFAOYSA-N [C].[O] Chemical group [C].[O] OBOXTJCIIVUZEN-UHFFFAOYSA-N 0.000 claims description 3
- 239000002250 absorbent Substances 0.000 claims description 3
- 230000002745 absorbent Effects 0.000 claims description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims description 3
- 239000002518 antifoaming agent Substances 0.000 claims description 3
- 239000003963 antioxidant agent Substances 0.000 claims description 3
- 230000003078 antioxidant effect Effects 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 3
- WURBFLDFSFBTLW-UHFFFAOYSA-N benzil Chemical compound C=1C=CC=CC=1C(=O)C(=O)C1=CC=CC=C1 WURBFLDFSFBTLW-UHFFFAOYSA-N 0.000 claims description 3
- 239000012965 benzophenone Substances 0.000 claims description 3
- 150000008366 benzophenones Chemical class 0.000 claims description 3
- 229910052794 bromium Inorganic materials 0.000 claims description 3
- JOFCBGYIEPWOCC-UHFFFAOYSA-N butanedioic acid;2-methylprop-2-enoic acid Chemical compound CC(=C)C(O)=O.OC(=O)CCC(O)=O JOFCBGYIEPWOCC-UHFFFAOYSA-N 0.000 claims description 3
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 claims description 3
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 3
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 3
- 125000004185 ester group Chemical group 0.000 claims description 3
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052740 iodine Inorganic materials 0.000 claims description 3
- 150000002576 ketones Chemical class 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims description 3
- 150000002734 metacrylic acid derivatives Chemical class 0.000 claims description 3
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 claims description 3
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 claims description 3
- 125000001624 naphthyl group Chemical group 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 claims description 3
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 3
- VQMWBBYLQSCNPO-UHFFFAOYSA-N promethium atom Chemical compound [Pm] VQMWBBYLQSCNPO-UHFFFAOYSA-N 0.000 claims description 3
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 claims description 3
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052706 scandium Inorganic materials 0.000 claims description 3
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 3
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 3
- FRNOGLGSGLTDKL-UHFFFAOYSA-N thulium atom Chemical compound [Tm] FRNOGLGSGLTDKL-UHFFFAOYSA-N 0.000 claims description 3
- ZBZJXHCVGLJWFG-UHFFFAOYSA-N trichloromethyl(.) Chemical compound Cl[C](Cl)Cl ZBZJXHCVGLJWFG-UHFFFAOYSA-N 0.000 claims description 3
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 3
- 239000003759 ester based solvent Substances 0.000 claims description 2
- 239000004210 ether based solvent Substances 0.000 claims description 2
- 239000003513 alkali Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 239000003086 colorant Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0033—Blends of pigments; Mixtured crystals; Solid solutions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
- C09B47/045—Special non-pigmentary uses, e.g. catalyst, photosensitisers of phthalocyanine dyes or pigments
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
- C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
- C09B47/085—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex substituting the central metal atom
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0033—Blends of pigments; Mixtured crystals; Solid solutions
- C09B67/0034—Mixtures of two or more pigments or dyes of the same type
- C09B67/0035—Mixtures of phthalocyanines
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0071—Process features in the making of dyestuff preparations; Dehydrating agents; Dispersing agents; Dustfree compositions
- C09B67/0084—Dispersions of dyes
- C09B67/0085—Non common dispersing agents
- C09B67/009—Non common dispersing agents polymeric dispersing agent
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
-
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Abstract
本发明提供了一种彩色光刻胶组合物,其特征在于,以所述彩色光刻胶组合物为100重量份为基础,包括:5‑8重量份的颜料;5‑8重量份的碱可溶性树脂;5‑8重量份的酞菁半三明治型染料;0.2‑0.6重量份的光引发剂;70‑85重量份的光刻胶溶剂;以及0.1‑0.2重量份的添加剂。
Description
技术领域
本发明涉及一种彩色光刻胶组合物,尤其涉及一种可缓解光刻胶对光的散射作用的彩色光刻胶组合物。
背景技术
彩色滤光片(Color Filter,CF)是液晶显示器(Liquid Crystal Display) 显示色彩的重要来源;而彩色光刻胶则是彩色滤光片(Color Filter)重要组成部分,可分为红(R)、绿(G)、蓝(B)三种类型。目前的彩色滤光片的光刻胶一般是通过添加不同颜色的颜料(Pigment)来实现其色相,其中,颜料(Pigment)是不溶性物质,通常以高度分散状态加入底物而使底物着色。颜料的分散颗粒对光有严重的散射作用,进而会降低CF的穿透率及对比度。
为了提高彩色滤光片的穿透率及对比度,亟需一种新的彩色光刻胶组成物,能够有效的缓解光刻胶中颜料颗粒对光的散射作用,进而提高彩色滤光片的穿透率及对比度。
发明内容
有鉴于此,本发明提供一种彩色光刻胶组成物,其中添加了酞菁半三明治化合物作为染料,由于该染料具有较高的热稳定性,以及较高的溶解度,能够有效的缓解光刻胶中颜料颗粒对光的散射作用,进而提高彩色滤光片的穿透率及对比度
据此,依据本发明的一实施例,本发明提供了一种彩色光刻胶组合物,其特征在于,以所述彩色光刻胶组合物为100重量份为基础,包括:5-8重量份的颜料;5-8重量份的碱可溶性树脂;5-8重量份的酞菁半三明治型染料; 0.2-0.6重量份的光引发剂;70-85重量份的光刻胶溶剂;以及0.1-0.2重量份的添加剂。
在本发明的一实施例中,所述酞菁半三明治型染料包括酞菁半三明治型化合物以及染料溶剂,其中所述酞菁半三明治型化合物具有以下化学式1的结构:
在化学式1中,中心配位金属RE为稀土金属元素;
R1系选自下列至少一者:H、脂肪碳链、氧碳链、芳环、卤素、羧基、酯基、氨基、巯基;以及
R2为含有O或N配位原子的有机化合物。
在本发明的一实施例中,所述稀土金属元素包括:镧(La)、铈(Ce)、镨(Pr)、钕(Nd)、钷(Pm)、钐(Sm)、铕(Eu)、钆(Gd)、铽(Tb)、镝(Dy)、钬(Ho)、铒(Er)、铥(Tm)、镱(Yb)、镥(Lu)、钇(Y)、或钪(Sc)。
在本发明的一实施例中,所述R1系选自下列至少一者:H、-C5H12、 -C6H14、-OC4H10、-OC5H12、-OC6H14、-OC8H18、苯环、萘环、F、Cl、Br、I、 -COOH、-COOCH3、-NH2、-N(CH3)2、-SH、以及-SCH3。
在本发明的一实施例中,所述R2系选自下列至少一者:乙酸以及乙酰丙酮。
在本发明的一实施例中,所述染料溶剂系选自下列至少一者:CCl3、CH3COOCH3、二甲基甲酰胺(dimethylformamide,DMF)、以及二甲基亚砜 (dimethyl sulfoxide,DMSO)。
在本发明的一实施例中,所述颜料包括下列至少一者:绿色颜料、蓝色颜料、以及黄色颜料,其中所述绿色颜料包括:卤素取代铜酞菁类颜料;所述蓝色颜料包括:铜酞菁类颜料;以及所述黄色颜料包括:吲哚啉基类颜料、喹酞酮基类颜料、镍复合物类颜料、或其组合。
在本发明的一实施例中,所述碱可溶性树脂系选自下列至少一者:烷基取代丙烯酸类树脂、不饱和基团取代丙烯酸类树脂、以及环氧基团取代丙烯酸类树脂。其中,所述烷基取代丙烯酸类树脂包括:丙烯酸、甲基丙烯酸烷基酯、甲基丙烯酸芳基酯、甲基丙烯酸醇酯、或其组合;所述不饱和基团取代丙烯酸类树脂包括:丁二酸甲基丙烯酸酯;以及所述环氧基团取代丙烯酸类树脂包括:环氧丙烯酸酯、环氧甲基丙烯酸酯、环氧甲基丙烯酸烷基酯、环氧甲基丙烯酸芳基酯、或其组合。
在本发明的一实施例中,所述光引发剂系选自下列至少一者:苯乙酮类、安息香类、双咪唑类、以及二苯甲酮类,其中所述苯乙酮类包括:α,α-二乙氧基苯乙酮、2-羟基-2-甲基-1-苯基-1-丙酮(HMPP)、2-甲基-2-吗啉代-1-(4- 甲基苯硫基)丙烷-1-酮、或其组合;所述安息香类包括:偶苯酰、二苯乙酮醇、苯偶姻醚、及其组合;以及所述双咪唑类包括:六芳基二咪唑类。
在本发明的一实施例中,所述光刻胶溶剂系选自下列至少一者:酯类溶剂以及醚类溶剂,其中所述酯类溶剂包括:乙二醇乙醚醋酸酯、二乙二醇丁醚醋酸酯、丙二醇单甲基醚酯、或其组合;所述醚类溶剂包括:二乙二醇二乙醚、乙二醇二丁醚、或其组合;以及所述酮类溶剂包括:环己酮、异佛尔酮、或其组合。
在本发明的一实施例中,所述添加剂系选自下列至少一者:硅烷偶联剂、抗氧剂、紫外吸收剂、消泡剂、以及流平剂。
具体实施方式
为让本发明的上述内容能更明显易懂,下文特举优选实施例作详细说明。
本发明接下来将会提供许多不同的实施例以实施本发明中不同的特征,然其并非用以限定本发明,任何所属技术领域中具有通常知识者,在不脱离本发明之精神和范围内,当可作任意之更动与润饰。
本发明提供一种彩色光刻胶组成物,其中添加了酞菁半三明治化合物作为染料,由于该染料具有较高的热稳定性,以及较高的溶解度,能够有效的缓解光刻胶中颜料颗粒对光的散射作用,进而提高彩色滤光片的穿透率及对比度。
据此,依据本发明的一实施例,本发明提供了一种彩色光刻胶组合物,其特征在于,以所述彩色光刻胶组合物为100重量份为基础,包括:5-8重量份的颜料;5-8重量份的碱可溶性树脂;5-8重量份的酞菁半三明治型染料;0.2-0.6重量份的光引发剂;70-85重量份的光刻胶溶剂;以及0.1-0.2重量份的添加剂。
在本发明的一实施例中,所述酞菁半三明治型染料包括酞菁半三明治型化合物以及染料溶剂,其中所述酞菁半三明治型化合物具有以下化学式1的结构:
在化学式1中,中心配位金属RE为稀土金属元素;
R1系选自下列至少一者:H、脂肪碳链、氧碳链、芳环、卤素、羧基、酯基、氨基、巯基;以及
R2为含有O或N配位原子的有机化合物。
在本发明的一实施例中,所述稀土金属元素包括:镧(La)、铈(Ce)、镨(Pr)、钕(Nd)、钷(Pm)、钐(Sm)、铕(Eu)、钆(Gd)、铽(Tb)、镝(Dy)、钬(Ho)、铒(Er)、铥(Tm)、镱(Yb)、镥(Lu)、钇(Y)、或钪(Sc)。
在本发明的一实施例中,所述R1系选自下列至少一者:H、-C5H12、 -C6H14、-OC4H10、-OC5H12、-OC6H14、-OC8H18、苯环、萘环、F、Cl、Br、I、 -COOH、-COOCH3、-NH2、-N(CH3)2、-SH、以及-SCH3。
在本发明的一实施例中,所述R2可以选用含有O,N等配位原子且体积较小的有机化合物,例如,可选自下列至少一者:乙酸以及乙酰丙酮。
所述酞菁半三明治型化合物具有化学式1所示之结构,由于此化合物中的中心配位金属(RE)半径较大,位于酞菁面外侧;在其配位作用下,使得酞菁向下弯曲,整个分子形成碗装构型,显着的降低了分子间的π-π作用,故可具有良好的溶解度。
在本发明的一实施例中,所述染料溶剂系选自下列至少一者:CCl3、 CH3COOCH3、二甲基甲酰胺(dimethylformamide,DMF)、以及二甲基亚砜 (dimethyl sulfoxide,DMSO)。
在本发明的一实施例中,所述颜料不作限定,可使用业界已知的各种颜料。举例而言,所述颜料可包括下列至少一者:绿色颜料、蓝色颜料、以及黄色颜料,进一步具体举例,所述绿色颜料可包括:卤素取代铜酞菁类颜料;所述蓝色颜料可包括:铜酞菁类颜料;以及所述黄色颜料可包括:吲哚啉基类颜料、喹酞酮基类颜料、镍复合物类颜料、或其组合。上述颜料可进行不同比例的调配混合,以达到所要求的色度。
在本发明的一实施例中,所述碱可溶性树脂系选自下列至少一者:烷基取代丙烯酸类树脂、不饱和基团取代丙烯酸类树脂、以及环氧基团取代丙烯酸类树脂。优选地,所述烷基取代丙烯酸类树脂包括:丙烯酸、甲基丙烯酸烷基酯、甲基丙烯酸芳基酯、甲基丙烯酸醇酯、或其组合;所述不饱和基团取代丙烯酸类树脂包括:丁二酸甲基丙烯酸酯;以及所述环氧基团取代丙烯酸类树脂包括:环氧丙烯酸酯、环氧甲基丙烯酸酯、环氧甲基丙烯酸烷基酯、环氧甲基丙烯酸芳基酯、或其组合。
在本发明的一实施例中,所述光引发剂系选自下列至少一者:苯乙酮类、安息香类、双咪唑类、以及二苯甲酮类。优选地,所述苯乙酮类包括:α,α- 二乙氧基苯乙酮、2-羟基-2-甲基-1-苯基-1-丙酮(HMPP)、2-甲基-2-吗啉代-1- (4-甲基苯硫基)丙烷-1-酮、或其组合;所述安息香类包括:偶苯酰、二苯乙酮醇、苯偶姻醚、及其组合;以及所述双咪唑类包括:六芳基二咪唑类。
在本发明的一实施例中,所述光刻胶溶剂系选自下列至少一者:酯类溶剂以及醚类溶剂。优选地,所述酯类溶剂包括:乙二醇乙醚醋酸酯、二乙二醇丁醚醋酸酯、丙二醇单甲基醚酯、或其组合;所述醚类溶剂包括:二乙二醇二乙醚、乙二醇二丁醚、或其组合;以及所述酮类溶剂包括:环己酮、异佛尔酮、或其组合。
在本发明的一实施例中,所述添加剂系选自下列至少一者:硅烷偶联剂、抗氧剂、紫外吸收剂、消泡剂、以及流平剂。
依据上述实施例,本发明提供一种彩色光刻胶组成物,其中添加了酞菁半三明治化合物作为染料,由于该染料具有较高的热稳定性,以及较高的溶解度,能够有效的缓解光刻胶中颜料颗粒对光的散射作用,进而提高彩色滤光片的穿透率及对比度。
综上所述,虽然本发明已以优选实施例揭露如上,但上述优选实施例并非用以限制本发明,本领域的普通技术人员,在不脱离本发明的精神和范围内,均可作各种更动与润饰,因此本发明的保护范围以权利要求界定的范围为准。
Claims (9)
2.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述稀土金属元素包括:镧(La)、铈(Ce)、镨(Pr)、钕(Nd)、钷(Pm)、钐(Sm)、铕(Eu)、钆(Gd)、铽(Tb)、镝(Dy)、钬(Ho)、铒(Er)、铥(Tm)、镱(Yb)、镥(Lu)、钇(Y)、或钪(Sc)。
3.根据权利要求1所述的彩色光刻胶组合物,其特征在于,
所述R1系选自下列至少一者:H、-C5H12、-C6H14、-OC4H10、-OC5H12、-OC6H14、-OC8H18、苯环、萘环、F、Cl、Br、I、-COOH、-COOCH3、-NH2、-N(CH3)2、-SH、以及-SCH3;以及
所述R2系选自下列至少一者:乙酸以及乙酰丙酮。
4.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述染料溶剂系选自下列至少一者:CCl3、CH3COOCH3、二甲基甲酰胺(dimethylformamide,DMF)、以及二甲基亚砜(dimethyl sulfoxide,DMSO)。
5.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述颜料包括下列至少一者:绿色颜料、蓝色颜料、以及黄色颜料,其中
所述绿色颜料包括:卤素取代铜酞菁类颜料;
所述蓝色颜料包括:铜酞菁类颜料;以及
所述黄色颜料包括:吲哚啉基类颜料、喹酞酮基类颜料、镍复合物类颜料、或其组合。
6.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述碱可溶性树脂系选自下列至少一者:烷基取代丙烯酸类树脂、不饱和基团取代丙烯酸类树脂、以及环氧基团取代丙烯酸类树脂,其中
所述烷基取代丙烯酸类树脂包括:丙烯酸、甲基丙烯酸烷基酯、甲基丙烯酸芳基酯、甲基丙烯酸醇酯、或其组合;
所述不饱和基团取代丙烯酸类树脂包括:丁二酸甲基丙烯酸酯;以及
所述环氧基团取代丙烯酸类树脂包括:环氧丙烯酸酯、环氧甲基丙烯酸酯、环氧甲基丙烯酸烷基酯、环氧甲基丙烯酸芳基酯、或其组合。
7.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述光引发剂系选自下列至少一者:苯乙酮类、安息香类、双咪唑类、以及二苯甲酮类,其中
所述苯乙酮类包括:α,α-二乙氧基苯乙酮、2-羟基-2-甲基-1-苯基-1-丙酮(HMPP)、2-甲基-2-吗啉代-1-(4-甲基苯硫基)丙烷-1-酮、或其组合;
所述安息香类包括:偶苯酰、二苯乙酮醇、苯偶姻醚、及其组合;以及
所述双咪唑类包括:六芳基二咪唑类。
8.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述光刻胶溶剂系选自下列至少一者:酯类溶剂以及醚类溶剂,其中
所述酯类溶剂包括:乙二醇乙醚醋酸酯、二乙二醇丁醚醋酸酯、丙二醇单甲基醚酯、或其组合;
所述醚类溶剂包括:二乙二醇二乙醚、乙二醇二丁醚、或其组合;以及
所述酮类溶剂包括:环己酮、异佛尔酮、或其组合。
9.根据权利要求1所述的彩色光刻胶组合物,其特征在于,所述添加剂系选自下列至少一者:硅烷偶联剂、抗氧剂、紫外吸收剂、消泡剂、以及流平剂。
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JP5836326B2 (ja) | 2012-07-30 | 2015-12-24 | 富士フイルム株式会社 | 着色硬化性組成物およびカラーフィルタ |
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CN103357346B (zh) * | 2013-06-27 | 2015-01-28 | 京东方科技集团股份有限公司 | 颜料分散剂、颜料分散液、彩色光刻胶及其制备和应用 |
CN105732646A (zh) * | 2016-01-29 | 2016-07-06 | 济宁学院 | 具有双光子吸收性质的三明治型酞菁稀土配合物及其制备方法 |
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US20200399475A1 (en) * | 2019-06-24 | 2020-12-24 | Tcl China Star Optoelectronics Technology Co., Ltd. | Color photoresist composition |
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