CN110129882A - A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace - Google Patents
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace Download PDFInfo
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- CN110129882A CN110129882A CN201910465742.4A CN201910465742A CN110129882A CN 110129882 A CN110129882 A CN 110129882A CN 201910465742 A CN201910465742 A CN 201910465742A CN 110129882 A CN110129882 A CN 110129882A
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- furnace body
- lower furnace
- overflow
- fixedly connected
- outer layer
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The present invention relates to polycrystalline silicon ingot or purifying furnace technical fields, and disclose a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including including lower furnace body outer layer, lower furnace body internal layer, overflow cotton pad and lower furnace body lining, lower furnace body outer layer, lower furnace body internal layer, overflow cotton pad and lower furnace body lining are bowl structure, annular slab is fixedly connected at the upper end opening of lower furnace body internal layer, ring block is fixedly connected at the upper end opening of lower furnace body outer layer, it is fixedly connected at the upper end opening of lower furnace body lining with the lower end of ring block, the outside of overflow cotton pad is fixedly connected with the internal layer side of lower furnace body lining, it is fixedly connected on the outside of the other side of overflow cotton pad and lower furnace body internal layer.The overflow isolating device of the polycrystalline silicon ingot or purifying furnace, the polycrystalline silicon liquid of molten condition can be discharged after silica crucible is damaged, and the advantages that being hardly damaged the outer layer of lower furnace body can also be conveniently replaceable the internal layer of lower furnace body, while lower furnace body internal layer is also not easy stress damage.
Description
Technical field
The present invention relates to polycrystalline silicon ingot or purifying furnace technical field, the overflow isolating device of specially a kind of polycrystalline silicon ingot or purifying furnace.
Background technique
Polycrystalline silicon ingot casting is produced using quartz ceramic crucible, and first silicon material is put into quartz ceramic crucible,
Quartz ceramic crucible is put into polycrystalline silicon ingot or purifying furnace again, melting silicon materials are made by heating, since liquid silicon material has preferably
Mobility, ingot casting bottom of furnace body can be flowed to quickly.Since ingot casting furnace body is double layer jacket structure, cooling is connected in collet
Water, and there are weld seam interfaces will lead to furnace body bottom after the high-temperature liquid state silicon material of overflow is contacted with the furnace wall of low temperature for bottom of furnace body
Portion's weld seam joint broken, the cooling water in collet will flow into ingot furnace body, and the cooling water of inflow is by the silicon liquid moment of high temperature
Vaporization, makes the huge increasing of furnace pressure moment, ingot furnace is caused to explode.
Currently, quartz ceramic crucible is mounted in the lower furnace body of polycrystalline silicon ingot or purifying furnace, by carrying out on the outside of lower furnace body
Support, can carry out in use, still quartz ceramic crucible be easier in pan feeding or carrying it is impaired generate slight crack, once
Crucible is damaged, the polycrystalline silicon liquid of molten condition directly with the outer side contacts of lower furnace body and lower furnace body is caused to damage, molten condition
Polycrystalline silicon liquid can flow directly out, cause serious accident to occur.
Summary of the invention
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, has energy
The advantages that enough the polycrystalline silicon liquid of molten condition is discharged after silica crucible is damaged, and is hardly damaged the outer layer of lower furnace body,
Solve the polycrystalline silicon liquid of molten condition directly with the outer side contacts of lower furnace body and lower furnace body is caused to damage, molten condition it is more
The problem of crystal silicon liquid can flow directly out, and serious accident is caused to occur.
(2) technical solution
In order to achieve the above object, the invention provides the following technical scheme: dress is isolated in a kind of overflow of polycrystalline silicon ingot or purifying furnace
Set, including lower furnace body outer layer, lower furnace body internal layer, overflow cotton pad and lower furnace body lining, the lower furnace body outer layer, lower furnace body internal layer,
Overflow cotton pad and lower furnace body lining are bowl structure, are fixedly connected with annular slab at the upper end opening of the lower furnace body internal layer,
Ring block is fixedly connected at the upper end opening of the lower furnace body outer layer, at the upper end opening of the lower furnace body lining and ring block
Lower end be fixedly connected, the outside of the overflow cotton pad is fixedly connected with the internal layer side of lower furnace body lining, the overflow cotton pad
It is fixedly connected on the outside of the other side and lower furnace body internal layer, forms cooling chamber between the lower furnace body lining and lower furnace body outer layer, institute
It states and is fixedly connected with water inlet pipe on the outside of lower furnace body outer layer, one end of the water inlet pipe is connected to cooling chamber, outside the lower furnace body
The lower end of layer is fixedly connected with outlet pipe, is connected at one end nozzle of the outlet pipe with cooling chamber, the upper end of the annular slab
Multiple equally distributed grooves are offered, casing is respectively connected in multiple grooves, is connected with fixed mechanism in described sleeve pipe,
The connection of the upper end of the fixed mechanism and ring block.
Preferably, multiple equally distributed overflow launders are offered on the inside of the overflow cotton pad, multiple overflow launders are in
Annular spread, wherein offering diversion trench between two adjacent overflow launders, the inside lower end of the overflow cotton pad is opened
Equipped with cylinder groove, overflow pipe is fixedly connected at the slot bottom of the cylinder groove, lower furnace body lining is run through in the lower end of the overflow pipe
With the side wall of lower furnace body outer layer and extend to the outside of lower furnace body outer layer.
Preferably, the baffle of helicoidal structure, side and the lower furnace body lining of the baffle are equipped in the cooling chamber
Outside is fixedly connected, and is fixedly connected on the inside of the other side of the baffle and lower furnace body outer layer, the lower furnace body lining, baffle and
Lower furnace body outer layer collectively constitutes the cooling duct of helicoidal structure, and one end of the cooling duct is connected by cooling chamber and water inlet pipe
Logical, the other end of the cooling duct at cooling chamber and the nozzle of outlet pipe by being connected to.
Preferably, the lower furnace body outer layer is fixedly connected with connecting tube far from the side of water inlet pipe, and the one of the connecting tube
End is run through the side wall of lower furnace body outer layer and is connected to cooling chamber, and interior edge, which is fixedly connected with, at the other end nozzle of the connecting tube lets out
Pressure valve.
Preferably, the fixed mechanism includes the collar stop for being fixed on edge in lower end opening, the annular gear
Spring is fixedly connected on the upside of block, the spring is fixedly connected with bushing, the side of the bushing far from one end of collar stop
Wall is uniformly fixedly connected with the elastic piece of multiple arcs structure, and movable sleeve is connected to bolt, the side wall of the bolt in described sleeve pipe
It is fixedly connected with ring limit block, the downside of the ring limit block and the side of bushing connect, and the groove is far from slot
Side at mouthful offers circular hole, and the side of the ring block offers threaded hole, and one end of the bolt is from top to bottom successively
It is threadedly coupled across bushing, spring and circular hole and with threaded hole.
Preferably, the inner wall of described sleeve pipe offers multiple strip grooves, and the side of multiple elastic pieces extends respectively to
It is connected in multiple strip grooves and with the side of strip groove.
Preferably, multiple equally distributed support columns are fixed on the outside of the lower furnace body outer layer.
Preferably, the material of the overflow cotton pad is alumina fibre, and the material of the lower furnace body internal layer is quartz-ceramics.
(3) beneficial effect
Compared with prior art, the present invention provides a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, having following has
Beneficial effect:
1, the overflow isolating device of the polycrystalline silicon ingot or purifying furnace, by the overflow cotton pad being equipped with, when the rupture of lower furnace body internal layer,
The polycrystalline silicon liquid of molten condition enters in overflow launder, and the polycrystalline silicon liquid in overflow launder enters in diversion trench and cylinder groove
And be discharged out of overflow pipe, overflow pipe keeps being connected to external collection device, so as to damage in polycrystalline silicon ingot or purifying furnace
Polycrystalline silicon liquid is quickly discharged in bad when, avoids serious accident and occurs, reduces loss.
2, the overflow isolating device of the polycrystalline silicon ingot or purifying furnace turns bolt with spanner by the bolt being arranged in casing,
Bolt and threaded hole interact so that ring limit block squeezes bushing, and bushing coining spring keeps collar stop mobile, annular gear
Block is mobile to be driven casing to squeeze annular slab to contact with ring block, so as to the lower furnace body of damage easy to repair, and lower furnace body
With the space of movable expanding when internal layer stress, it is effectively reduced the probability of silica crucible stress damage, increases polycrystalline
Safety when silicon ingot furnace uses is passed through cooling water out of water inlet pipe, and cooling water is in cooling chamber and cooling duct in vortex
Shape circulation, and be discharged out of outlet pipe, so as to effectively cool down to polycrystalline silicon ingot or purifying furnace.
Detailed description of the invention
Fig. 1 is a kind of overflow isolating device structural schematic diagram of polycrystalline silicon ingot or purifying furnace proposed by the present invention；
Fig. 2 is the top view of overflow cotton pad in a kind of overflow isolating device Fig. 1 of polycrystalline silicon ingot or purifying furnace proposed by the present invention；
Fig. 3 is that a kind of internal structure of overflow isolating device Fig. 1 middle sleeve of polycrystalline silicon ingot or purifying furnace proposed by the present invention is shown
It is intended to；
Fig. 4 is lower furnace body outer layer and baffle in a kind of overflow isolating device Fig. 1 of polycrystalline silicon ingot or purifying furnace proposed by the present invention
Top view.
In figure: 1 lower furnace body outer layer, 2 water inlet pipes, 3 casings, 4 annular slabs, 5 ring blocks, 6 connecting tubes, 7 cooling chambers, 8 baffles,
9 overflow pipes, 10 outlet pipes, 11 support columns, 12 overflow cotton pads, 13 lower furnace body internal layers, 14 overflow launders, 15 diversion trenches, 16 annular limits
Position block, 17 elastic pieces, 18 springs, 19 bolts, 20 strip grooves, 21 lower furnace body linings, 22 collar stops, 23 bushings.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1-4, a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including lower furnace body outer layer 1, lower furnace body internal layer
13, overflow cotton pad 12 and lower furnace body lining 21, lower furnace body outer layer 1, lower furnace body internal layer 13, overflow cotton pad 12 and lower furnace body lining 21
It is bowl structure, annular slab 4, the upper end opening of lower furnace body outer layer 1 is fixedly connected at the upper end opening of lower furnace body internal layer 13
Place is fixedly connected with ring block 5, is fixedly connected at the upper end opening of lower furnace body lining 21 with the lower end of ring block 5, overflow cotton pad
12 outside is fixedly connected with the internal layer side of lower furnace body lining 21, the other side of overflow cotton pad 12 and the outside of lower furnace body internal layer 13
It is fixedly connected, forms cooling chamber 7 between lower furnace body lining 21 and lower furnace body outer layer 1, the outside of lower furnace body outer layer 1 is fixedly connected with
One end of water inlet pipe 2, water inlet pipe 2 is connected to cooling chamber 7, and the lower end of lower furnace body outer layer 1 is fixedly connected with outlet pipe 10, outlet pipe
It is connected at 10 one end nozzle with cooling chamber 7, the upper end of annular slab 4 offers multiple equally distributed grooves, in multiple grooves
It is respectively connected with casing 3, fixed mechanism is connected in casing 3, fixed mechanism is connect with the upper end of ring block 5, lower furnace body outer layer 1
Outside is fixed with multiple equally distributed support columns 11, and the material of overflow cotton pad 12 is alumina fibre, lower furnace body internal layer 13
Material be quartz-ceramics.
The inside of overflow cotton pad 12 offers multiple equally distributed overflow launders 14, and multiple overflow launders 14 are distributed in a ring,
Diversion trench 15 is wherein offered between two adjacent overflow launders 14, the inside lower end of overflow cotton pad 12 offers cylinder
Slot, overflow pipe 9 is fixedly connected at the slot bottom of cylinder groove, and lower furnace body lining 21 and lower furnace body outer layer 1 are run through in the lower end of overflow pipe 9
Side wall and extend to the outside of lower furnace body outer layer 1, when lower furnace body internal layer 13 ruptures, the polycrystalline silicon liquid of molten condition enters
Into overflow launder 14, the polycrystalline silicon liquid in overflow launder 14 is entered in diversion trench 15 and cylinder groove and is discharged out of overflow pipe 9,
Overflow pipe 9 keeps being connected to external collection device, so as to which when polycrystalline silicon ingot or purifying furnace is damaged, quickly discharge is more
Crystal silicon liquid avoids serious accident and occurs, and reduces loss, the baffle 8 of helicoidal structure, gear are equipped in cooling chamber 7
The side of plate 8 is fixedly connected with the outside of lower furnace body lining 21, the fixed company in the other side of baffle 8 and the inside of lower furnace body outer layer 1
It connects, lower furnace body lining 21, baffle 8 and lower furnace body outer layer 1 collectively constitute the cooling duct of helicoidal structure, one end of cooling duct
It being connected to by cooling chamber 7 with water inlet pipe 2, the other end of cooling duct passes through to be connected at cooling chamber 7 and the nozzle of outlet pipe 10, under
Furnace body outer layer 1 is fixedly connected with connecting tube 6 far from the side of water inlet pipe 2, and the side of lower furnace body outer layer 1 is run through in one end of connecting tube 6
Wall is simultaneously connected to cooling chamber 7, and interior edge is fixedly connected with relief valve at the other end nozzle of connecting tube 6, higher in lower furnace body temperature
When, convenient for pressure excessively high in excretion cooling chamber 7.
Fixed mechanism includes the collar stop 22 for being fixed on edge at 3 lower ending opening of casing, and the upside of collar stop 22 is solid
Surely it is connected with spring 18, spring 18 is fixedly connected with bushing 23 far from one end of collar stop 22, and the side wall of bushing 23 is uniformly solid
Surely it is connected with the elastic piece 17 of multiple arcs structure, movable sleeve is connected to bolt 19 in casing 3, and the side wall of bolt 19 is fixedly connected with
Ring limit block 16, the downside of ring limit block 16 and the side of bushing 23 connect, and groove is opened far from the side at notch
Equipped with circular hole, the side of ring block 5 offers threaded hole, and one end of bolt 19 sequentially passes through bushing 23, spring 18 from top to bottom
It is threadedly coupled with circular hole and with threaded hole, the inner wall of casing 3 offers multiple strip grooves 20, the side difference of multiple elastic pieces 17
It extends in multiple strip grooves 20 and is connected with the side of strip groove 20, turn bolt 19, bolt 19 and screw thread with spanner
Hole interacts so that ring limit block 16 squeezes bushing 23, and bushing 23, which squeezes spring 18, keeps collar stop 22 mobile, annular gear
Block 22 is mobile to drive the extruding annular slab 4 of casing 3 to contact with ring block 5, so as to the lower furnace body of damage easy to repair, and under
Space with movable expanding when furnace body 13 stress of internal layer is effectively reduced the probability of silica crucible stress damage.
In conclusion the overflow isolating device of the polycrystalline silicon ingot or purifying furnace, in use, being melted when lower furnace body internal layer 13 ruptures
The polycrystalline silicon liquid for melting state enters in overflow launder 14, and the polycrystalline silicon liquid in overflow launder 14 enters diversion trench 15 and cylinder
It is discharged in slot and out of overflow pipe 9, overflow pipe 9 keeps being connected to external collection device, so as in polycrystalline silicon ingot or purifying furnace
When being damaged, polycrystalline silicon liquid is quickly discharged, avoids serious accident and occurs, reduces loss, when reparation, replaces
New lower furnace body internal layer 13 turns bolt 19 with spanner, and bolt 19 and threaded hole interact so that ring limit block 16 squeezes
Bushing 23, bushing 23, which squeezes spring 18, keeps collar stop 22 mobile, collar stop 22 is mobile drive casing 3 squeeze annular slab 4 with
Ring block 5 contacts, and so as to the lower furnace body of damage easy to repair, and has movable expanding when lower furnace body 13 stress of internal layer
Space, be effectively reduced silica crucible stress damage probability, increase polycrystalline silicon ingot or purifying furnace use when safety, from
Cooling water is passed through in water inlet pipe 2, cooling water circulates in cooling chamber 7 and cooling duct in vortex shape, and arranges out of outlet pipe 10
Out, so as to effectively cooling down to polycrystalline silicon ingot or purifying furnace.
It should be noted that term " includes " or any other variant thereof is intended to cover non-exclusive inclusion, thus
So that the process, method, article or equipment for including a series of elements not only includes those elements, but also including not clear
The other element listed, or further include for elements inherent to such a process, method, article, or device.Do not having more
In the case where more limitations, the element that is limited by sentence "including a ...", it is not excluded that including process, the side of the element
There is also other identical elements in method, article or equipment.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including lower furnace body outer layer (1), lower furnace body internal layer (13), overflow cotton
Pad (12) and lower furnace body lining (21), it is characterised in that: the lower furnace body outer layer (1), lower furnace body internal layer (13), overflow cotton pad
(12) and lower furnace body lining (21) is bowl structure, is fixedly connected with annular at the upper end opening of the lower furnace body internal layer (13)
Plate (4) is fixedly connected with ring block (5) at the upper end opening of the lower furnace body outer layer (1), the lower furnace body lining (21) it is upper
It is fixedly connected at end opening with the lower end of ring block (5), the outside of the overflow cotton pad (12) is interior with lower furnace body lining (21)
Layer side is fixedly connected, and is fixedly connected on the outside of the other side and lower furnace body internal layer (13) of the overflow cotton pad (12), the lower furnace
Cooling chamber (7) are formed between body lining (21) and lower furnace body outer layer (1), are fixedly connected on the outside of the lower furnace body outer layer (1)
One end of water inlet pipe (2), the water inlet pipe (2) is connected to cooling chamber (7), and the lower end of the lower furnace body outer layer (1) is fixedly connected
Have outlet pipe (10), be connected at one end nozzle of the outlet pipe (10) with cooling chamber (7), the upper end of the annular slab (4) is opened
It equipped with multiple equally distributed grooves, is respectively connected in multiple grooves casing (3), is connected with fixation in described sleeve pipe (3)
Mechanism, the fixed mechanism are connect with the upper end of ring block (5).
2. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the overflow cotton
Multiple equally distributed overflow launders (14) are offered on the inside of pad (12), multiple overflow launders (14) are distributed in a ring, wherein
It is offered diversion trench (15) between two adjacent overflow launders (14), the inside lower end of the overflow cotton pad (12) opens up
There is cylinder groove, be fixedly connected at the slot bottom of the cylinder groove overflow pipe (9), lower furnace body is run through in the lower end of the overflow pipe (9)
The side wall of lining (21) and lower furnace body outer layer (1) and the outside for extending to lower furnace body outer layer (1).
3. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the cooling chamber
(7) it is equipped with the baffle (8) of helicoidal structure in, is fixedly connected on the outside of the side and lower furnace body lining (21) of the baffle (8),
Be fixedly connected on the inside of the other side of the baffle (8) and lower furnace body outer layer (1), the lower furnace body lining (21), baffle (8) and
Lower furnace body outer layer (1) collectively constitutes the cooling duct of helicoidal structure, one end of the cooling duct by cooling chamber (7) with into
Water pipe (2) connection, the other end of the cooling duct at cooling chamber (7) and the nozzle of outlet pipe (10) by being connected to.
4. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the lower furnace body
Outer layer (1) is fixedly connected with connecting tube (6) far from the side of water inlet pipe (2), and one end of the connecting tube (6) is outside lower furnace body
The side wall of layer (1) is simultaneously connected to cooling chamber (7), and interior edge is fixedly connected with relief valve at the other end nozzle of the connecting tube (6).
5. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the fixed machine
Structure includes the collar stop (22) for being fixed on edge at casing (3) lower ending opening, and the upside of the collar stop (22) is fixed to be connected
It is connected to spring (18), the spring (18) is fixedly connected with bushing (23), the bushing far from the one end of collar stop (22)
(23) side wall is uniformly fixedly connected with the elastic piece (17) of multiple arcs structure, and described sleeve pipe (3) interior movable sleeve is connected to bolt
(19), the side wall of the bolt (19) is fixedly connected with ring limit block (16), the downside of the ring limit block (16) and lining
The side for covering (23) connects, and the groove offers circular hole far from the side at notch, and the side of the ring block (5) is opened
Equipped with threaded hole, one end of the bolt (19) sequentially passes through bushing (23), spring (18) and circular hole and and screw thread from top to bottom
Hole is threadedly coupled.
6. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 5, it is characterised in that: described sleeve pipe
(3) inner wall offers multiple strip grooves (20), and the side of multiple elastic pieces (17) extends respectively to multiple strip grooves
(20) it is connected in and with the side of strip groove (20).
7. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the lower furnace body
Multiple equally distributed support columns (11) are fixed on the outside of outer layer (1).
8. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that: the overflow cotton
The material for padding (12) is alumina fibre, and the material of the lower furnace body internal layer (13) is quartz-ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910465742.4A CN110129882A (en) | 2019-05-30 | 2019-05-30 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910465742.4A CN110129882A (en) | 2019-05-30 | 2019-05-30 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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| CN110129882A true CN110129882A (en) | 2019-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910465742.4A Pending CN110129882A (en) | 2019-05-30 | 2019-05-30 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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| CN208346307U (en) * | 2018-06-20 | 2019-01-08 | 江苏中立新能源股份有限公司 | High-temperature fibre blanket laying structure in polycrystalline silicon ingot or purifying furnace |
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| US20090175767A1 (en) * | 2008-01-03 | 2009-07-09 | Green Energy Technology Inc. | Crystal-growing furnace having slurry drainage duct structure |
| CN202072799U (en) * | 2011-05-12 | 2011-12-14 | 石金精密科技（深圳）有限公司 | Overflowing protective structure for polycrystalline silicon ingot furnace |
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Application publication date: 20190816 |