CN106012004A - Overflowing isolation device for polysilicon ingot furnace - Google Patents
Overflowing isolation device for polysilicon ingot furnace Download PDFInfo
- Publication number
- CN106012004A CN106012004A CN201610440500.6A CN201610440500A CN106012004A CN 106012004 A CN106012004 A CN 106012004A CN 201610440500 A CN201610440500 A CN 201610440500A CN 106012004 A CN106012004 A CN 106012004A
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- polycrystalline silicon
- silicon ingot
- overflow
- furnace
- overflowing
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses an overflowing isolation device for a polysilicon ingot furnace and solves the problem of safe and effective isolation of a high-temperature overflowing liquid silicon material in the polysilicon ingot furnace from the bottom of the ingot furnace. The bottom of a lower furnace body of the polysilicon ingot furnace is provided with a thermocouple installation bucket-shaped seat (9), the top end of the thermocouple installation bucket-shaped seat (9) is arranged in the lower furnace body of the polysilicon ingot furnace and sleeved with a stainless steel cylindrical barrel (4), the stainless steel cylindrical barrel (4) is sleeved with an inverted umbrella-shaped overflowing cotton supporting frame body (3), the circular umbrella body of the inverted umbrella-shaped overflowing cotton supporting frame body (3) is provided with an annular groove, a first layer of annular overflowing cotton cushion (8) is inserted into the annular groove, and the first layer of annular overflowing cotton cushion (8) is fully laid on the inner side face of the inner wall (2) of the lower furnace body of the polysilicon ingot furnace. The overflowing isolation device guarantees safety of the production process of the polysilicon ingot.
Description
Technical field
The present invention relates to the overflowing protective structure in a kind of polycrystalline silicon ingot or purifying furnace; particularly to a kind of overflow isolating device can isolated by effective and safe after liquid-state silicon material overflows in polycrystalline silicon ingot or purifying furnace from crucible; after preventing liquid-state silicon contacting metal furnace wall, ingot furnace generation explosion accident.
Background technology
At present, polycrystalline silicon ingot casting uses pottery silica crucible to produce, and is first put into by silicon material in pottery silica crucible, then puts in polycrystalline silicon ingot or purifying furnace by pottery silica crucible, makes melting silicon materials by heating.Colliding with in carrying and charging, can make the inside of pottery silica crucible produce hidden slight crack, and these hidden slight cracks are not found.During polycrystalline silicon ingot casting, pottery silica crucible has contained high-temperature liquid state silicon material, if there is hidden slight crack in the inside of silica crucible, the high-temperature liquid state silicon material of fusing will flow out pottery silica crucible from hidden slight crack, owing to liquid-state silicon material has preferable mobility, can quickly flow to ingot casting bottom of furnace body.Owing to ingot casting body of heater is double layer jacket structure, cooling water it is connected with in chuck, and there is weld seam interface in bottom of furnace body, after the high-temperature liquid state silicon material of overflow contacts with the furnace wall of low temperature, can cause bottom of furnace body weld seam joint broken, the cooling water in chuck will flow in ingot furnace body, and the cooling water of inflow is by the silicon liquid instant vaporization of high temperature, make the huge increasing of furnace pressure moment, cause ingot furnace to explode.Additionally, due to a workshop is often provided with tens ingot furnaces, when there being ingot furnace generation problem, in order to ensure safety, all ingot furnaces of regulatory requirements have to enter into pole cold state, can cause great economic loss.
Summary of the invention
The invention provides the overflow isolating device of a kind of polycrystalline silicon ingot or purifying furnace, solve the technical problem of the safely and effectively isolation of high temperature overflow liquid-state silicon material and ingot furnace furnace bottom in polycrystalline silicon ingot or purifying furnace.
The present invention is to solve above technical problem by the following technical programs:
nullA kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace,Including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot or purifying furnace lower furnace body inwall,It is provided with cooling water channel between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot or purifying furnace lower furnace body inwall,Recirculated cooling water it is provided with in cooling water channel,The barrel-shaped seat of the installation of TC it is provided with in the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body,The top of the barrel-shaped seat of the installation of TC is provided in polycrystalline silicon ingot or purifying furnace lower furnace body,It is socketed with rustless steel cylindrical tube on the top of the barrel-shaped seat of the installation of TC,Rustless steel cylindrical tube is socketed with inverted umbrella overflow cotton supporting frame,The circular umbrella body of inverted umbrella overflow cotton supporting frame is provided with annular groove,Ground floor ring-type overflow cotton pad it is plugged with in annular groove,Ground floor ring-type overflow cotton pad is to be paved with on the medial surface of polycrystalline silicon ingot or purifying furnace lower furnace body inwall.
The second cannelure and the 3rd cannelure it is disposed with from bottom to top in circular umbrella body above ground floor ring-type overflow cotton pad, the second layer ring-type overflow cotton pad it is plugged with in the second cannelure, in the 3rd cannelure, it is plugged with third layer ring-type overflow cotton pad, in the circular parachute body of inverted umbrella overflow cotton supporting frame, is provided with the 4th layer of ring-type overflow cotton pad on side.
The material of inverted umbrella overflow cotton supporting frame is the soft felt of alumina fibre.
The present invention is by polycrystalline silicon casting ingot process process analysis, by inverted umbrella overflow cotton supporting frame structure, furnace bottom interlock superposition lay isolation spillwag chute bed course, it is achieved that the high-temperature liquid state silicon material of overflow is completely isolated with the furnace wall of low temperature, it is ensured that the safety of polycrystalline silicon ingot casting production process.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Detailed description of the invention
The present invention is described in detail below in conjunction with the accompanying drawings:
nullA kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace,Including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polycrystalline silicon ingot or purifying furnace lower furnace body inwall 2,It is provided with cooling water channel between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polycrystalline silicon ingot or purifying furnace lower furnace body inwall 2,Recirculated cooling water it is provided with in cooling water channel,The barrel-shaped seat of the installation of TC 9 it is provided with in the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body,The top of the barrel-shaped seat of the installation of TC 9 is provided in polycrystalline silicon ingot or purifying furnace lower furnace body,It is socketed with rustless steel cylindrical tube 4 on the top of the barrel-shaped seat of the installation of TC 9,Rustless steel cylindrical tube 4 is socketed with inverted umbrella overflow cotton supporting frame 3,The circular umbrella body of inverted umbrella overflow cotton supporting frame 3 is provided with annular groove,Ground floor ring-type overflow cotton pad 8 it is plugged with in annular groove,Ground floor ring-type overflow cotton pad 8 is to be paved with on the medial surface of polycrystalline silicon ingot or purifying furnace lower furnace body inwall 2.
The second annular groove and the 3rd annular groove it is disposed with from bottom to top in circular umbrella body above ground floor ring-type overflow cotton pad 8, the second layer ring-type overflow cotton pad 7 it is plugged with in the second annular groove, in the 3rd annular groove, it is plugged with third layer ring-type overflow cotton pad 6, in the circular parachute body of inverted umbrella overflow cotton supporting frame 3, is provided with the 4th layer of ring-type overflow cotton pad 5 on side.
The material of inverted umbrella overflow cotton supporting frame 3 is the soft felt of alumina fibre.The present invention is inside the lower furnace chamber of existing ingot furnace, devise a kind of new overflow cotton isolation structure, inverted umbrella overflow cotton supporting frame 3 is global formation, without interface, again by superposing laying with replacing of multilamellar overflow cotton pad, increase the length that liquid-state silicon flows through along gap, the high-temperature liquid state silicon material of overflow and contacting of metal furnace wall can be effectively isolated.
Claims (3)
- null1. the overflow isolating device of a polycrystalline silicon ingot or purifying furnace,Including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall (1) and polycrystalline silicon ingot or purifying furnace lower furnace body inwall (2),It is provided with cooling water channel between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall (1) and polycrystalline silicon ingot or purifying furnace lower furnace body inwall (2),Recirculated cooling water it is provided with in cooling water channel,The barrel-shaped seat of the installation of TC (9) it is provided with in the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body,The top of the barrel-shaped seat of the installation of TC (9) is provided in polycrystalline silicon ingot or purifying furnace lower furnace body,It is characterized in that,It is socketed with rustless steel cylindrical tube (4) on the top of the barrel-shaped seat of the installation of TC (9),Rustless steel cylindrical tube (4) is socketed with inverted umbrella overflow silk floss supporting frame (3),The circular umbrella body of inverted umbrella overflow silk floss supporting frame (3) is provided with annular groove,Ground floor ring-type overflow cotton pad (8) it is plugged with in annular groove,Ground floor ring-type overflow cotton pad (8) is to be paved with on the medial surface of polycrystalline silicon ingot or purifying furnace lower furnace body inwall (2).
- The overflow isolating device of a kind of polycrystalline silicon ingot or purifying furnace the most according to claim 1, it is characterized in that, the circular umbrella body of ground floor ring-type overflow cotton pad (8) top is disposed with the second annular groove and the 3rd annular groove from bottom to top, the second layer ring-type overflow cotton pad (7) it is plugged with in the second annular groove, in the 3rd annular groove, it is plugged with third layer ring-type overflow cotton pad (6), in the circular parachute body of inverted umbrella overflow silk floss supporting frame (3), on side, is provided with the 4th layer of ring-type overflow cotton pad (5).
- The overflow isolating device of a kind of polycrystalline silicon ingot or purifying furnace the most according to claim 1, it is characterised in that the material of inverted umbrella overflow silk floss supporting frame (3) is alumina fibre.
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CN201610440500.6A CN106012004B (en) | 2016-06-20 | 2016-06-20 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN201610440500.6A CN106012004B (en) | 2016-06-20 | 2016-06-20 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN106012004B CN106012004B (en) | 2018-05-04 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107805843A (en) * | 2017-11-30 | 2018-03-16 | 湖南红太阳光电科技有限公司 | A kind of polycrystalline silicon ingot or purifying furnace |
CN109056060A (en) * | 2018-09-06 | 2018-12-21 | 正信光电科技股份有限公司 | The overflow isolating device of photovoltaic polysilicon ingot furnace |
CN110129882A (en) * | 2019-05-30 | 2019-08-16 | 江苏拓正茂源新能源有限公司 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN204138818U (en) * | 2014-07-28 | 2015-02-04 | 苏州红恩新材料科技有限公司 | A kind of overflow for polycrystalline silicon ingot or purifying furnace is cotton |
CN205774925U (en) * | 2016-06-20 | 2016-12-07 | 山西中电科新能源技术有限公司 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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2016
- 2016-06-20 CN CN201610440500.6A patent/CN106012004B/en active Active
Patent Citations (8)
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CN101158548A (en) * | 2007-08-23 | 2008-04-09 | 浙江精工科技股份有限公司 | Oven shell protecting equipment of polycrystalline silicon ingot furnace |
CN101168849A (en) * | 2007-08-23 | 2008-04-30 | 浙江精工科技股份有限公司 | Silicon liquid overflow receiving device for polycrystalline silicon ingot casting furnace |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN107805843A (en) * | 2017-11-30 | 2018-03-16 | 湖南红太阳光电科技有限公司 | A kind of polycrystalline silicon ingot or purifying furnace |
CN109056060A (en) * | 2018-09-06 | 2018-12-21 | 正信光电科技股份有限公司 | The overflow isolating device of photovoltaic polysilicon ingot furnace |
CN110129882A (en) * | 2019-05-30 | 2019-08-16 | 江苏拓正茂源新能源有限公司 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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