CN106012004B - A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace - Google Patents

A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace Download PDF

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Publication number
CN106012004B
CN106012004B CN201610440500.6A CN201610440500A CN106012004B CN 106012004 B CN106012004 B CN 106012004B CN 201610440500 A CN201610440500 A CN 201610440500A CN 106012004 B CN106012004 B CN 106012004B
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Prior art keywords
polycrystalline silicon
silicon ingot
overflow
furnace
purifying furnace
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CN106012004A (en
Inventor
周社柱
吴洪坤
王峰
李亚明
杨建�
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SHANXI BRANCH OF NEW ENERGY Co
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SHANXI BRANCH OF NEW ENERGY Co
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00Production of homogeneous polycrystalline material with defined structure
    • C30B28/04Production of homogeneous polycrystalline material with defined structure from liquids
    • C30B28/06Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention discloses a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, solves the problems, such as that polycrystalline silicon ingot or purifying furnace high temperature overflow liquid silicon material is isolated with the safe and effective of ingot furnace furnace bottom.The bottom for being included in polycrystalline silicon ingot or purifying furnace lower furnace body is provided with the barrel-shaped seat of the installation of TC(9), the barrel-shaped seat of the installation of TC(9)Top be provided in polycrystalline silicon ingot or purifying furnace lower furnace body, in the barrel-shaped seat of the installation of TC(9)Top be socketed with stainless steel cylindrical tube(4), in stainless steel cylindrical tube(4)On be socketed with inverted umbrella overflow silk floss supporting frame(3), in inverted umbrella overflow silk floss supporting frame(3)Circular umbrella body on be provided with annular groove, first layer ring-type overflow cotton pad is plugged with annular groove(8), first layer ring-type overflow cotton pad(8)It is to be paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Medial surface on.It ensure that the safety of polycrystalline silicon ingot casting production process.

Description

A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace
Technical field
The present invention relates to the overflowing protective structure in a kind of polycrystalline silicon ingot or purifying furnace, more particularly to a kind of liquid silicon material of working as is from earthenware The overflow isolating device that can be isolated after being overflowed in crucible in polycrystalline silicon ingot or purifying furnace by effective and safe, to prevent liquid-state silicon contacting metal Behind furnace wall, explosion accident occurs for ingot furnace.
Background technology
At present, polycrystalline silicon ingot casting is produced using ceramic silica crucible, and silicon material first is put into ceramic quartzy earthenware In crucible, then ceramic silica crucible is put into polycrystalline silicon ingot or purifying furnace, melting silicon materials are made by heating.Knocking in carrying and feeding Touch, the inside of ceramic silica crucible can be made to produce hidden slight crack, these hidden slight cracks are not found usually.In polycrystalline silicon ingot casting mistake Cheng Zhong, ceramic silica crucible have contained high-temperature liquid state silicon material, if the inside of silica crucible there are during hidden slight crack, the high temperature of fusing Liquid silicon material will flow out ceramic silica crucible from hidden slight crack, can quickly since liquid silicon material has preferable mobility Flow to ingot casting bottom of furnace body.Since ingot casting furnace body is double layer jacket structure, cooling water is connected with chuck, and bottom of furnace body is deposited In weld seam interface, after the high-temperature liquid state silicon material of overflow is contacted with the furnace wall of low temperature, bottom of furnace body weld seam joint broken can be caused, pressed from both sides Cooling water in set will be flowed into ingot furnace body, and the cooling water of inflow makes furnace pressure wink by the silicon liquid instant vaporization of high temperature Between huge increasing, cause ingot furnace to explode.Further, since a workshop is often provided with tens ingot furnaces, when there is ingot furnace During problem, in order to ensure safety, all ingot furnaces of regulatory requirements have to enter into pole cold state, can cause great economic loss.
The content of the invention
The present invention provides a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, solves polycrystalline silicon ingot or purifying furnace high temperature and overflows The technical problem safely and effectively isolated of flow liquid state silicon material and ingot furnace furnace bottom.
The present invention is to solve above technical problem by the following technical programs:
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot casting Stove lower furnace body inner wall, cooling water is provided between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot or purifying furnace lower furnace body inner wall Road, is provided with recirculated cooling water in cooling water channel, and the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body is provided with the installation of TC bucket Shape seat, the top of the barrel-shaped seat of the installation of TC are provided in polycrystalline silicon ingot or purifying furnace lower furnace body, in the barrel-shaped seat of the installation of TC Top be socketed with stainless steel cylindrical tube, inverted umbrella overflow cotton supporting frame is socketed with stainless steel cylindrical tube, Annular groove is provided with the circular umbrella body of inverted umbrella overflow cotton supporting frame, first layer is plugged with annular groove Ring-type overflow cotton pad, first layer ring-type overflow cotton pad is paved with the medial surface of polycrystalline silicon ingot or purifying furnace lower furnace body inner wall.
It is disposed with the second annular groove and from bottom to top in the circular umbrella body above first layer ring-type overflow cotton pad Three annular grooves, second layer ring-type overflow cotton pad is plugged with the second annular groove, third layer ring is plugged with the 3rd annular groove Shape overflow cotton pad, is provided with the 4th layer of ring-type overflow cotton in the circular parachute body of inverted umbrella overflow cotton supporting frame on side Pad.
The material of inverted umbrella overflow cotton supporting frame is the soft felt of alumina fibre.
The present invention is by polycrystalline silicon casting ingot process process analysis procedure analysis, by inverted umbrella overflow cotton supporting frame structure, Staggeredly be superimposed in furnace bottom and be laid with isolation spillwag chute bed course, realize the high-temperature liquid state silicon material of overflow and the furnace wall of low temperature it is complete every From ensure that the safety of polycrystalline silicon ingot casting production process.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings:
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polysilicon casting Ingot stove lower furnace body inner wall 2, is provided between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polycrystalline silicon ingot or purifying furnace lower furnace body inner wall 2 Cooling water channel, is provided with recirculated cooling water in cooling water channel, and the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body is provided with thermocouple Barrel-shaped seat 9 is installed, the top of the barrel-shaped seat 9 of the installation of TC is provided in polycrystalline silicon ingot or purifying furnace lower furnace body, is pacified in thermocouple The top of barrelling shape seat 9 is socketed with stainless steel cylindrical tube 4, and inverted umbrella overflow is socketed with stainless steel cylindrical tube 4 Cotton supporting frame 3, is provided with annular groove, in annular groove in the circular umbrella body of inverted umbrella overflow cotton supporting frame 3 In be plugged with first layer ring-type overflow cotton pad 8, first layer ring-type overflow cotton pad 8 is paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall On 2 medial surface.
Be disposed with from bottom to top in the circular umbrella body above first layer ring-type overflow cotton pad 8 second annular groove and 3rd annular groove, second layer ring-type overflow cotton pad 7 is plugged with the second annular groove, is plugged with the 3rd annular groove Third layer ring-type overflow cotton pad 6, the 4th layer is provided with the circular parachute body of inverted umbrella overflow cotton supporting frame 3 on side Ring-type overflow cotton pad 5.
The material of inverted umbrella overflow cotton supporting frame 3 is the soft felt of alumina fibre.The present invention is in existing ingot furnace Lower furnace chamber inside, devise a kind of new overflow cotton isolation structure, inverted umbrella overflow cotton supporting frame 3 be integral into Type, no interface, then be laid with by the superposition that replaces with multilayer overflow cotton pad, the length that increase liquid-state silicon is flowed through along gap, can have High-temperature liquid state silicon material contact with metal furnace wall of effect ground isolation overflow.

Claims (2)

1. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall(1)Cast with polysilicon Ingot stove lower furnace body inner wall(2), in polycrystalline silicon ingot or purifying furnace lower furnace body outer wall(1)With polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Between Cooling water channel is provided with, recirculated cooling water is provided with cooling water channel, is provided with the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body The barrel-shaped seat of the installation of TC(9), the barrel-shaped seat of the installation of TC(9)Top be provided in polycrystalline silicon ingot or purifying furnace lower furnace body, It is characterized in that, in the barrel-shaped seat of the installation of TC(9)Top be socketed with stainless steel cylindrical tube(4), in stainless steel cylinder Cylinder(4)On be socketed with inverted umbrella overflow silk floss supporting frame(3), in inverted umbrella overflow silk floss supporting frame(3)Circle Annular groove is provided with umbrella body, first layer ring-type overflow cotton pad is plugged with annular groove(8), first layer ring-type overflow cotton Pad(8)It is to be paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Medial surface on;In first layer ring-type overflow cotton pad(8)On The second annular groove and the 3rd annular groove are disposed with from bottom to top in the circular umbrella body of side, are connect in the second annular groove It is inserted with second layer ring-type overflow cotton pad(7), third layer ring-type overflow cotton pad is plugged with the 3rd annular groove(6), it is being inverted Umbrella overflow silk floss supporting frame(3)Circular parachute body in be provided with the 4th layer of ring-type overflow cotton pad on side(5).
A kind of 2. overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that inverted umbrella Overflow silk floss supporting frame(3)Material be alumina fibre.
CN201610440500.6A 2016-06-20 2016-06-20 A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace Active CN106012004B (en)

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107805843A (en) * 2017-11-30 2018-03-16 湖南红太阳光电科技有限公司 A kind of polycrystalline silicon ingot or purifying furnace
CN109056060A (en) * 2018-09-06 2018-12-21 正信光电科技股份有限公司 The overflow isolating device of photovoltaic polysilicon ingot furnace
CN110129882A (en) * 2019-05-30 2019-08-16 江苏拓正茂源新能源有限公司 A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace

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CN101158548A (en) * 2007-08-23 2008-04-09 浙江精工科技股份有限公司 Oven shell protecting equipment of polycrystalline silicon ingot furnace
CN101168849A (en) * 2007-08-23 2008-04-30 浙江精工科技股份有限公司 Silicon liquid overflow receiving device for polycrystalline silicon ingot casting furnace
CN203159743U (en) * 2013-01-22 2013-08-28 晶海洋半导体材料(东海)有限公司 Improved overflow protection device for polycrystal ingot furnace
CN203530487U (en) * 2013-11-14 2014-04-09 乐山新天源太阳能科技有限公司 Polycrystalline silicon ingot casting thermal field structure
CN103866384A (en) * 2014-03-23 2014-06-18 山西中电科新能源技术有限公司 Polycrystalline silicon ingot furnace with overflow protection function
CN203683722U (en) * 2014-01-07 2014-07-02 江苏金晖光伏有限公司 Polycrystalline ingot furnace with overflow protecting function
CN204138818U (en) * 2014-07-28 2015-02-04 苏州红恩新材料科技有限公司 A kind of overflow for polycrystalline silicon ingot or purifying furnace is cotton
CN205774925U (en) * 2016-06-20 2016-12-07 山西中电科新能源技术有限公司 A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101158548A (en) * 2007-08-23 2008-04-09 浙江精工科技股份有限公司 Oven shell protecting equipment of polycrystalline silicon ingot furnace
CN101168849A (en) * 2007-08-23 2008-04-30 浙江精工科技股份有限公司 Silicon liquid overflow receiving device for polycrystalline silicon ingot casting furnace
CN203159743U (en) * 2013-01-22 2013-08-28 晶海洋半导体材料(东海)有限公司 Improved overflow protection device for polycrystal ingot furnace
CN203530487U (en) * 2013-11-14 2014-04-09 乐山新天源太阳能科技有限公司 Polycrystalline silicon ingot casting thermal field structure
CN203683722U (en) * 2014-01-07 2014-07-02 江苏金晖光伏有限公司 Polycrystalline ingot furnace with overflow protecting function
CN103866384A (en) * 2014-03-23 2014-06-18 山西中电科新能源技术有限公司 Polycrystalline silicon ingot furnace with overflow protection function
CN204138818U (en) * 2014-07-28 2015-02-04 苏州红恩新材料科技有限公司 A kind of overflow for polycrystalline silicon ingot or purifying furnace is cotton
CN205774925U (en) * 2016-06-20 2016-12-07 山西中电科新能源技术有限公司 A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace

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