CN106012004B - A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace - Google Patents
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace Download PDFInfo
- Publication number
- CN106012004B CN106012004B CN201610440500.6A CN201610440500A CN106012004B CN 106012004 B CN106012004 B CN 106012004B CN 201610440500 A CN201610440500 A CN 201610440500A CN 106012004 B CN106012004 B CN 106012004B
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- polycrystalline silicon
- silicon ingot
- overflow
- furnace
- purifying furnace
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, solves the problems, such as that polycrystalline silicon ingot or purifying furnace high temperature overflow liquid silicon material is isolated with the safe and effective of ingot furnace furnace bottom.The bottom for being included in polycrystalline silicon ingot or purifying furnace lower furnace body is provided with the barrel-shaped seat of the installation of TC(9), the barrel-shaped seat of the installation of TC(9)Top be provided in polycrystalline silicon ingot or purifying furnace lower furnace body, in the barrel-shaped seat of the installation of TC(9)Top be socketed with stainless steel cylindrical tube(4), in stainless steel cylindrical tube(4)On be socketed with inverted umbrella overflow silk floss supporting frame(3), in inverted umbrella overflow silk floss supporting frame(3)Circular umbrella body on be provided with annular groove, first layer ring-type overflow cotton pad is plugged with annular groove(8), first layer ring-type overflow cotton pad(8)It is to be paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Medial surface on.It ensure that the safety of polycrystalline silicon ingot casting production process.
Description
Technical field
The present invention relates to the overflowing protective structure in a kind of polycrystalline silicon ingot or purifying furnace, more particularly to a kind of liquid silicon material of working as is from earthenware
The overflow isolating device that can be isolated after being overflowed in crucible in polycrystalline silicon ingot or purifying furnace by effective and safe, to prevent liquid-state silicon contacting metal
Behind furnace wall, explosion accident occurs for ingot furnace.
Background technology
At present, polycrystalline silicon ingot casting is produced using ceramic silica crucible, and silicon material first is put into ceramic quartzy earthenware
In crucible, then ceramic silica crucible is put into polycrystalline silicon ingot or purifying furnace, melting silicon materials are made by heating.Knocking in carrying and feeding
Touch, the inside of ceramic silica crucible can be made to produce hidden slight crack, these hidden slight cracks are not found usually.In polycrystalline silicon ingot casting mistake
Cheng Zhong, ceramic silica crucible have contained high-temperature liquid state silicon material, if the inside of silica crucible there are during hidden slight crack, the high temperature of fusing
Liquid silicon material will flow out ceramic silica crucible from hidden slight crack, can quickly since liquid silicon material has preferable mobility
Flow to ingot casting bottom of furnace body.Since ingot casting furnace body is double layer jacket structure, cooling water is connected with chuck, and bottom of furnace body is deposited
In weld seam interface, after the high-temperature liquid state silicon material of overflow is contacted with the furnace wall of low temperature, bottom of furnace body weld seam joint broken can be caused, pressed from both sides
Cooling water in set will be flowed into ingot furnace body, and the cooling water of inflow makes furnace pressure wink by the silicon liquid instant vaporization of high temperature
Between huge increasing, cause ingot furnace to explode.Further, since a workshop is often provided with tens ingot furnaces, when there is ingot furnace
During problem, in order to ensure safety, all ingot furnaces of regulatory requirements have to enter into pole cold state, can cause great economic loss.
The content of the invention
The present invention provides a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, solves polycrystalline silicon ingot or purifying furnace high temperature and overflows
The technical problem safely and effectively isolated of flow liquid state silicon material and ingot furnace furnace bottom.
The present invention is to solve above technical problem by the following technical programs:
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot casting
Stove lower furnace body inner wall, cooling water is provided between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall and polycrystalline silicon ingot or purifying furnace lower furnace body inner wall
Road, is provided with recirculated cooling water in cooling water channel, and the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body is provided with the installation of TC bucket
Shape seat, the top of the barrel-shaped seat of the installation of TC are provided in polycrystalline silicon ingot or purifying furnace lower furnace body, in the barrel-shaped seat of the installation of TC
Top be socketed with stainless steel cylindrical tube, inverted umbrella overflow cotton supporting frame is socketed with stainless steel cylindrical tube,
Annular groove is provided with the circular umbrella body of inverted umbrella overflow cotton supporting frame, first layer is plugged with annular groove
Ring-type overflow cotton pad, first layer ring-type overflow cotton pad is paved with the medial surface of polycrystalline silicon ingot or purifying furnace lower furnace body inner wall.
It is disposed with the second annular groove and from bottom to top in the circular umbrella body above first layer ring-type overflow cotton pad
Three annular grooves, second layer ring-type overflow cotton pad is plugged with the second annular groove, third layer ring is plugged with the 3rd annular groove
Shape overflow cotton pad, is provided with the 4th layer of ring-type overflow cotton in the circular parachute body of inverted umbrella overflow cotton supporting frame on side
Pad.
The material of inverted umbrella overflow cotton supporting frame is the soft felt of alumina fibre.
The present invention is by polycrystalline silicon casting ingot process process analysis procedure analysis, by inverted umbrella overflow cotton supporting frame structure,
Staggeredly be superimposed in furnace bottom and be laid with isolation spillwag chute bed course, realize the high-temperature liquid state silicon material of overflow and the furnace wall of low temperature it is complete every
From ensure that the safety of polycrystalline silicon ingot casting production process.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings:
A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polysilicon casting
Ingot stove lower furnace body inner wall 2, is provided between polycrystalline silicon ingot or purifying furnace lower furnace body outer wall 1 and polycrystalline silicon ingot or purifying furnace lower furnace body inner wall 2
Cooling water channel, is provided with recirculated cooling water in cooling water channel, and the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body is provided with thermocouple
Barrel-shaped seat 9 is installed, the top of the barrel-shaped seat 9 of the installation of TC is provided in polycrystalline silicon ingot or purifying furnace lower furnace body, is pacified in thermocouple
The top of barrelling shape seat 9 is socketed with stainless steel cylindrical tube 4, and inverted umbrella overflow is socketed with stainless steel cylindrical tube 4
Cotton supporting frame 3, is provided with annular groove, in annular groove in the circular umbrella body of inverted umbrella overflow cotton supporting frame 3
In be plugged with first layer ring-type overflow cotton pad 8, first layer ring-type overflow cotton pad 8 is paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall
On 2 medial surface.
Be disposed with from bottom to top in the circular umbrella body above first layer ring-type overflow cotton pad 8 second annular groove and
3rd annular groove, second layer ring-type overflow cotton pad 7 is plugged with the second annular groove, is plugged with the 3rd annular groove
Third layer ring-type overflow cotton pad 6, the 4th layer is provided with the circular parachute body of inverted umbrella overflow cotton supporting frame 3 on side
Ring-type overflow cotton pad 5.
The material of inverted umbrella overflow cotton supporting frame 3 is the soft felt of alumina fibre.The present invention is in existing ingot furnace
Lower furnace chamber inside, devise a kind of new overflow cotton isolation structure, inverted umbrella overflow cotton supporting frame 3 be integral into
Type, no interface, then be laid with by the superposition that replaces with multilayer overflow cotton pad, the length that increase liquid-state silicon is flowed through along gap, can have
High-temperature liquid state silicon material contact with metal furnace wall of effect ground isolation overflow.
Claims (2)
1. a kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace, including polycrystalline silicon ingot or purifying furnace lower furnace body outer wall(1)Cast with polysilicon
Ingot stove lower furnace body inner wall(2), in polycrystalline silicon ingot or purifying furnace lower furnace body outer wall(1)With polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Between
Cooling water channel is provided with, recirculated cooling water is provided with cooling water channel, is provided with the bottom of polycrystalline silicon ingot or purifying furnace lower furnace body
The barrel-shaped seat of the installation of TC(9), the barrel-shaped seat of the installation of TC(9)Top be provided in polycrystalline silicon ingot or purifying furnace lower furnace body,
It is characterized in that, in the barrel-shaped seat of the installation of TC(9)Top be socketed with stainless steel cylindrical tube(4), in stainless steel cylinder
Cylinder(4)On be socketed with inverted umbrella overflow silk floss supporting frame(3), in inverted umbrella overflow silk floss supporting frame(3)Circle
Annular groove is provided with umbrella body, first layer ring-type overflow cotton pad is plugged with annular groove(8), first layer ring-type overflow cotton
Pad(8)It is to be paved with polycrystalline silicon ingot or purifying furnace lower furnace body inner wall(2)Medial surface on;In first layer ring-type overflow cotton pad(8)On
The second annular groove and the 3rd annular groove are disposed with from bottom to top in the circular umbrella body of side, are connect in the second annular groove
It is inserted with second layer ring-type overflow cotton pad(7), third layer ring-type overflow cotton pad is plugged with the 3rd annular groove(6), it is being inverted
Umbrella overflow silk floss supporting frame(3)Circular parachute body in be provided with the 4th layer of ring-type overflow cotton pad on side(5).
A kind of 2. overflow isolating device of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that inverted umbrella
Overflow silk floss supporting frame(3)Material be alumina fibre.
Priority Applications (1)
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CN201610440500.6A CN106012004B (en) | 2016-06-20 | 2016-06-20 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN201610440500.6A CN106012004B (en) | 2016-06-20 | 2016-06-20 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN106012004B true CN106012004B (en) | 2018-05-04 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107805843A (en) * | 2017-11-30 | 2018-03-16 | 湖南红太阳光电科技有限公司 | A kind of polycrystalline silicon ingot or purifying furnace |
CN109056060A (en) * | 2018-09-06 | 2018-12-21 | 正信光电科技股份有限公司 | The overflow isolating device of photovoltaic polysilicon ingot furnace |
CN110129882A (en) * | 2019-05-30 | 2019-08-16 | 江苏拓正茂源新能源有限公司 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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CN101158548A (en) * | 2007-08-23 | 2008-04-09 | 浙江精工科技股份有限公司 | Oven shell protecting equipment of polycrystalline silicon ingot furnace |
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CN103866384A (en) * | 2014-03-23 | 2014-06-18 | 山西中电科新能源技术有限公司 | Polycrystalline silicon ingot furnace with overflow protection function |
CN203683722U (en) * | 2014-01-07 | 2014-07-02 | 江苏金晖光伏有限公司 | Polycrystalline ingot furnace with overflow protecting function |
CN204138818U (en) * | 2014-07-28 | 2015-02-04 | 苏州红恩新材料科技有限公司 | A kind of overflow for polycrystalline silicon ingot or purifying furnace is cotton |
CN205774925U (en) * | 2016-06-20 | 2016-12-07 | 山西中电科新能源技术有限公司 | A kind of overflow isolating device of polycrystalline silicon ingot or purifying furnace |
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2016
- 2016-06-20 CN CN201610440500.6A patent/CN106012004B/en active Active
Patent Citations (8)
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CN101158548A (en) * | 2007-08-23 | 2008-04-09 | 浙江精工科技股份有限公司 | Oven shell protecting equipment of polycrystalline silicon ingot furnace |
CN101168849A (en) * | 2007-08-23 | 2008-04-30 | 浙江精工科技股份有限公司 | Silicon liquid overflow receiving device for polycrystalline silicon ingot casting furnace |
CN203159743U (en) * | 2013-01-22 | 2013-08-28 | 晶海洋半导体材料(东海)有限公司 | Improved overflow protection device for polycrystal ingot furnace |
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CN203683722U (en) * | 2014-01-07 | 2014-07-02 | 江苏金晖光伏有限公司 | Polycrystalline ingot furnace with overflow protecting function |
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