CN110116117A - A kind of laser composite cleaning system and method - Google Patents
A kind of laser composite cleaning system and method Download PDFInfo
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- CN110116117A CN110116117A CN201910491093.5A CN201910491093A CN110116117A CN 110116117 A CN110116117 A CN 110116117A CN 201910491093 A CN201910491093 A CN 201910491093A CN 110116117 A CN110116117 A CN 110116117A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The present invention provides a kind of laser composite cleaning system and method, belongs to laser cleaning field, and the laser composite cleaning system includes: continuous laser generating device, pulse laser generating device, laser shaping system, the first light combination mirror and focus lamp；Continuous laser is incident to the laser shaping system after continuous laser generating device transmitting, pulse laser is incident to the laser shaping system after pulse laser generating device transmitting, the laser shaping system is incident to the first light combination mirror after carrying out shaping outgoing to the continuous laser and the pulse laser respectively, and the first light combination mirror is suitable for the continuous laser and the pulse laser being integrated into recombination laser；The recombination laser is incident to the focus lamp after the first light combination mirror outgoing, and the focus lamp is suitable for the recombination laser gathering surface to be cleaned.For laser composite cleaning system of the present invention by continuous laser and pulse laser collective effect in surface to be cleaned, cleaning efficiency is high.
Description
Technical field
The present invention relates to laser cleaning fields, and in particular to a kind of laser composite cleaning system and method.
Background technique
Means of the laser cleaning as a kind of common surface treatment at present, have been widely used for aerospace, partly lead
The fields such as body, microelectronics, ship.The surface contamination of mold, automobile and marine surface has become a serious problem, because
It largely reduces service life.Laser cleaning is during the irradiation of sample surfaces short-pulse laser based on goer
The non-planar contact surfaces processing of Physicochemical reaction.Laser cleaning provides non-contact, the environmentally friendly mode of one kind and carrys out clean surface pollution
Object.Surface contaminant specifically includes that paint, rust, oxidation film, coating and particle etc..If only with the dirt of continuous laser clean the surface
Object is contaminated, energy density is excessive to will lead to pollutant vaporization, more than the ablation threshold of matrix surface, so that matrix surface is burnt
Erosion.The too small cleaning threshold that can be unable to reach dirt of energy density, causes pollutant not can be removed completely.Similarly only with receiving
The dirt on second laser cleaning surface, it is at high cost since nanosecond laser cleaning efficiency is relatively low.
Summary of the invention
The problem of problems solved by the invention is laser cleaning low efficiency.
To solve the above problems, the present invention provides a kind of laser composite cleaning system that cleaning efficiency is high, comprising: continuous to swash
Light generating apparatus, pulse laser generating device, laser shaping system, the first light combination mirror and focus lamp；
Continuous laser is incident to the laser shaping system, pulse laser warp after continuous laser generating device transmitting
It is incident to the laser shaping system after the pulse laser generating device transmitting, the laser shaping system is suitable for respectively to institute
It states continuous laser and the pulse laser carries out shaping；
The continuous laser and the pulse laser are incident to described first after the laser shaping system exit respectively
Light combination mirror, the first light combination mirror are suitable for the continuous laser and the pulse laser being integrated into recombination laser；
The recombination laser is incident to the focus lamp after the first light combination mirror outgoing, and the focus lamp is suitable for institute
It states recombination laser and gathers surface to be cleaned.
Therefore, the continuous laser and the pulse laser are integrated into recombination laser by the first light combination mirror, described multiple
It closes laser and is incident to the focus lamp after the first light combination mirror outgoing, the focus lamp is by the recombination laser focussing force
It is cleaned in the surface to be cleaned, the continuous laser in the recombination laser provides stable heat source, the pulse laser
Finely to be cleaned, the recombination laser cleaning efficiency is high, and cleaning effect is good, and it is reliable and stable, it is practical.
Optionally, the laser composite cleaning system further includes galvanometer system, and the recombination laser is through second light combination
After mirror outgoing, the galvanometer system is first incident to before being incident to the focus lamp, the galvanometer system is suitable for adjusting described multiple
Close the outgoing posture of laser.
Therefore, the galvanometer system adjusts the outgoing posture of the recombination laser, so that the recombination laser after focusing
Surface to be cleaned is washed according to default cleaning track is described clearly, cleaning efficiency is high.High degree of automation, whole system long-play
Stability it is high.
Optionally, the laser composite cleaning system further includes energy testing apparatus, and the energy testing apparatus is suitable for inspection
Survey the energy that the recombination laser acts on the surface to be cleaned.
Therefore, can be determined according to the property of surface to be cleaned substance to be cleaned and base material act on it is described to
The highest energy of clean the surface is acted on the energy of the surface to be cleaned by energy testing apparatus detection, selects institute
The emission parameter for stating continuous laser and the pulse laser prevents the substrate material of surface to be cleaned described in the recombination laser ablation
Material.
Another aspect of the present invention also provides a kind of laser compound cleaning method, and the laser compound cleaning method includes:
It obtains continuous laser and continuous laser hot spot is made to gather the surface to be cleaned；
The energy for obtaining and adjusting the continuous laser hot spot meets the energy of the continuous laser hot spot default continuous
Laser energy value；
It obtains pulse laser and the hot spot of the pulse laser is made to be gathered in the continuous laser spot area, obtain compound
Laser facula；
The energy for obtaining the recombination laser hot spot, adjusting the pulse laser keeps the energy of the recombination laser hot spot full
The default recombination laser energy value of foot；
The recombination laser hot spot is kept, is cleaned using the recombination laser.
Therefore, first and the energy of the continuous laser hot spot is adjusted, meets the energy of the continuous laser hot spot pre-
If continuous laser energy value, the energy of the continuous laser hot spot can be made within certain limits, then adjust the recombination laser
The energy of hot spot, adjusting the pulse laser makes the energy of the recombination laser hot spot meet default recombination laser energy value, can
So that the energy of the compound hot spot is within certain limits；When carrying out laser cleaning using recombination laser, cleaning efficiency and cleaning
Effect gets a promotion, and will not damage substrate, and stability is high.
Optionally, the default continuous laser energy value Q1 meets: Q1 < Qb, wherein Qb is the ablation threshold of base material
Value.
Therefore, the energy of the continuous laser hot spot meets default continuous laser energy value, the default continuous laser energy
Magnitude is less than the ablation threshold of base material, and the continuous laser can be less than in next composite cleaning the output of process energy
The efficiency of compound just cleaning can be improved, without damage substrate in the ablation threshold of base material.
Optionally, the default recombination laser energy value Q2 meets: Qa≤Q2 < Qb, Qa are the vaporization threshold value of dirt.
Therefore, recombination laser energy value Q2 is preset to meet: Qa≤Q2 < Qb, then when the energy of the recombination laser hot spot is full
When foot presets recombination laser energy value, then the energy of recombination laser is more than or equal to the vaporization threshold value of region dirt to be cleaned, is less than
The ablation threshold of substrate areas material to be cleaned, therefore, continuous laser and Pulsed Laser Parameters adjustment are completed, and recombination laser can be with
So that the dirt vaporization in region to be cleaned is without ablation substrate, highly-safe, recombination laser cleaning efficiency is high, practical.
Optionally, described to keep the recombination laser hot spot, cleaning, which is carried out, using the recombination laser includes the following steps:
Determine recombination laser in the cleaning path in region to be cleaned and speed；
The recombination laser, which is emitted, according to the path and speed using galvanometer system carries out composite cleaning, the galvanometer system
System is suitable for adjusting the outgoing posture of the recombination laser.
Therefore, the outgoing posture that the recombination laser can be adjusted using the galvanometer system, according to set cleaning road
Diameter and speed are cleaned, and clean range is wide, high degree of automation, complete washing and cleaning operation, controllability is high, practical.
Optionally, the diameter of the pulsed laser spot is less than the diameter of the continuous laser hot spot.
Therefore, when being cleaned using recombination laser, the pulsed laser spot is always positioned at the continuous laser hot spot
Inside, the continuous laser first to the surface to be cleaned carry out single treatment, the pulse laser is again to described to clear
It washes surface and carries out secondary treatment, single treatment provides stable heat source, and secondary treatment is cleaned.
Optionally, the default continuous laser energy value Q1 also meets: Q1 < Qa.
Therefore, the default continuous laser energy value Q1, less than the vaporization threshold value of dirt to be cleaned, then the recombination laser
In continuous laser focussing force in the surface to be cleaned energy be less than dirt to be cleaned vaporization threshold value, be mainly used for mentioning
For stablizing heat source, the pulsed laser energy requirement in recombination laser is reduced, is cleaned mainly complete by the pulse laser in recombination laser
At cleaning effect is good, and cleaning efficiency is higher.
Optionally, the default recombination laser energy value Q2 also meets: Q2≤0.9Qb.
Therefore, higher cleaning efficiency can either be reached, will not also ablation base material, the margin of safety is high, highly reliable.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of laser composite cleaning system one of which embodiment of the present invention；
Fig. 2 is the structural schematic diagram of laser composite cleaning system one of which embodiment of the present invention；
Fig. 3 is the structural schematic diagram of laser composite cleaning system one of which embodiment of the present invention；
Fig. 4 is the structural schematic diagram of laser composite cleaning system one of which embodiment of the present invention；
Fig. 5 is the partial enlarged view in Fig. 4 at A；
Fig. 6 is a kind of stream of laser compound cleaning method cleaned using laser composite cleaning system of the present invention
Journey schematic diagram.
Description of symbols:
1- continuous laser generating device, 2- pulse laser generating device, 3- laser shaping system, 310- continuous laser shaping
System, 311- continuous laser beam expanding lens, 312- continuous laser collimating mirror, 313- continuous laser half-wave plate, 314- continuous laser are inclined
Shake light splitting piece, 320- pulse laser shaping system, 321- pulse laser beam expanding lens, 322- pulse laser collimating mirror, 323- pulse
Laser half-wave plate, 324- pulse laser polarization spectro piece, 325- reflecting mirror, 410- the first light combination mirror, 420- recombination laser expand
Mirror, 430- recombination laser collimating mirror, 440- the second light combination mirror, 450- optical gate, 460- focus lamp, 470- galvanometer system, 480- number
Word display generator, 5- energy testing apparatus, 6- mounting base, 7- surface to be cleaned, 8- observation system, 810- light source, 820- half
Anti- pellicle mirror, 830-CCD imaging sensor.
Specific embodiment
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
A kind of laser composite cleaning system, comprising: continuous laser generating device 1, pulse laser generating device 2, laser are whole
Shape system 3, the first light combination mirror 410 and focus lamp 460；
Continuous laser is incident to the laser shaping system 3, pulse laser after the continuous laser generating device 1 transmitting
The laser shaping system is incident to after the pulse laser generating device 2 transmitting, the laser shaping system 3 is suitable for difference
Shaping is carried out to the continuous laser and the pulse laser；
The continuous laser and the pulse laser are incident to described first after the laser shaping system 3 outgoing respectively
Light combination mirror 410, the first light combination mirror 410 are suitable for the continuous laser and the pulse laser being integrated into recombination laser；
The recombination laser is incident to the focus lamp 460, the focus lamp after the first light combination mirror 410 outgoing
460 are suitable for the recombination laser gathering surface to be cleaned 7.
Specifically, as shown in FIG. 1, FIG. 1 is a kind of embodiments of laser composite cleaning system of the present invention, in some implementations
In example, the optical path of the mirror surface of the first light combination mirror 410 and the continuous laser after the laser shaping system 3 outgoing is in the
The setting of one predetermined angle, optical path and the first light combination mirror 410 of the pulse laser after the laser shaping system 3 outgoing
Mirror surface be arranged in the second predetermined angle, and the continuous laser and the pulse laser are respectively from the first light combination mirror 410
Mirror surface two sides be incident to the first light combination mirror 410, in the present embodiment, the continuous laser is through the first light combination mirror
410 transmissions, the pulse laser are reflected through the first light combination mirror 410, close beam finally as recombination laser outgoing；It should be understood that
It is that in further embodiments, the continuous laser is reflected through the first light combination mirror 410, the pulse laser is through described
The transmission of one light combination mirror 410 closes beam finally as recombination laser outgoing.Preferably, first predetermined angle and described second is preset
Angle is 45 °, that is to say, that the light of the continuous laser and the pulse laser after the laser shaping system 3 outgoing
Road is located at crosspoint in 90 ° of intersections, the first light combination mirror 410, and the mirror surface of the first light combination mirror 410 and through the laser
The continuous laser and the pulse laser that orthopedic systems 3 are emitted are in 45 °.It should be understood that in some embodiments,
The focus lamp 460 is located at the first light combination mirror 410 and is emitted in the optical path of the recombination laser.
Therefore, the continuous laser and the pulse laser are integrated into recombination laser by the first light combination mirror 410, described
Recombination laser is incident to the focus lamp 460 after the first light combination mirror 410 outgoing, and the focus lamp 460 will be described compound
Laser focussing force is cleaned in the surface to be cleaned 7, and the continuous laser contained in the recombination laser provides stable
Heat source is consistent recombination laser hot spot zone of action temperature, reduces the energy of required pulse laser when cleaning, improve
Cleaning efficiency is cleaned more stable, fine, high-efficient.
The laser shaping system 3 includes continuous laser orthopedic systems 310, and the continuous laser orthopedic systems 310 include
Continuous laser beam expanding lens 311 and continuous laser collimating mirror 312, the continuous laser are incident to before the first light combination mirror 410
Also successively pass through the continuous laser beam expanding lens 311 and the continuous laser collimating mirror 312.
Specifically, the continuous laser beam expanding lens 311 and the continuous laser collimating mirror 312 have common optical axis, and
The continuous laser is respectively positioned in the optical path after the continuous laser generating device 1 outgoing.Continuous laser is through described continuous sharp
Light generating apparatus 1 is incident to the continuous laser beam expanding lens 311 after emitting, the continuous laser beam expanding lens 311 will be described continuous
Laser beam expanding；The continuous laser is incident to the continuous laser collimating mirror after the continuous laser beam expanding lens 311 outgoing
312, the continuous laser collimating mirror 312 collimates the continuous laser.
Therefore, the continuous laser is made jointly through the continuous laser beam expanding lens 311 and the continuous laser collimating mirror 312
With being adjusted to the directional light that diameter is suitble to the incident first light combination mirror 410.
The laser shaping system 3 further includes pulse laser shaping system 320, and the pulse laser shaping system 320 is wrapped
Include pulse laser beam expanding lens 321 and pulse laser collimating mirror 322, the pulse laser be incident to the first light combination mirror 410 it
It is preceding also successively to pass through the pulse laser beam expanding lens 321 and the pulse laser collimating mirror 322.
Specifically, the pulse laser beam expanding lens 321 and the pulse laser collimating mirror 322 have common optical axis, and
The pulse laser is respectively positioned in the optical path after the pulse laser generating device 2 outgoing.Pulse laser swashs through the pulse
Light generating apparatus 2 is incident to the pulse laser beam expanding lens 321 after emitting, and the pulse laser beam expanding lens 321 is by the pulse
Laser beam expanding adjusts the diameter of the pulse laser to suitable incidence the first light combination mirror 410；Described in the pulse laser warp
After pulse laser beam expanding lens 321 is emitted, it is incident to the pulse laser collimating mirror 322, the pulse laser collimating mirror 322 is by institute
State pulse laser collimation.
Therefore, the pulse laser is made jointly through the pulse laser beam expanding lens 321 and the pulse laser collimating mirror 322
With being adjusted to the directional light that diameter is suitble to the incident first light combination mirror 410.
The pulse laser shaping system 320 further includes reflecting mirror 325, and being suitable for will be from the pulse laser collimating mirror 322
The pulse laser of outgoing reflexes to the first light combination mirror 410.
Specifically, in some embodiments, the pulse laser is incident after the pulse laser collimating mirror 322 outgoing
It is incident to the reflecting mirror 325, the mirror surface of the reflecting mirror 325 and the pulse first before to the first light combination mirror 410
The pulse laser that laser alignment mirror in cover cylinder on main optical path 322 is emitted is arranged in third predetermined angle, preferably, the third preset angle
Degree is also configured as 45 °, the mirror of optical path and the first light combination mirror 410 of the pulse laser after the reflecting mirror 325 outgoing
Face is arranged at second predetermined angle, it is to be understood that the continuous laser emits through the continuous laser generating device 1
Optical path afterwards is parallel to each other with optical path of the pulse laser after the pulse laser generating device 2 transmitting.In this way, point
Cloth Rational structure is compact.
Therefore, the pulse laser being emitted from the pulse laser collimating mirror 322 is reflexed to described by the reflecting mirror 325
One light combination mirror 410, the corrective action of the reflecting mirror 325 allow the position of the pulse laser generating device 2 according to reality
Border operating condition is adjusted, and the applicability of the laser composite cleaning system is wide, practical.
The laser composite cleaning system further includes recombination laser beam expanding lens 420 and recombination laser collimating mirror 430；It is described multiple
Laser is closed after the first light combination mirror 410 outgoing, is incident to before the focus lamp 460 also successively by the recombination laser
Beam expanding lens 420 and the recombination laser collimating mirror 430.
Specifically, the recombination laser beam expanding lens 420 and the recombination laser collimating mirror 430 have common optical axis, and
The recombination laser is respectively positioned in the optical path after the first light combination mirror 410 outgoing.The recombination laser is closed through described first
After light microscopic 410 is emitted, it is incident to the recombination laser beam expanding lens 420, the recombination laser beam expanding lens 420 is by the recombination laser
It expands, and the diameter of the recombination laser is adjusted to be suitble to the state of the incident focus lamp 460；The recombination laser is through institute
After stating the outgoing of recombination laser beam expanding lens 420, it is incident to the recombination laser collimating mirror 430, the recombination laser collimating mirror 430 will
The recombination laser collimation.
Therefore, the recombination laser is after the first light combination mirror 410 outgoing, through 420 He of recombination laser beam expanding lens
430 collective effect of recombination laser collimating mirror is adjusted to the directional light that diameter is suitble to the incident focus lamp 460, to focus
The focusing of mirror 460 obtains small diameter hot spot and prepares.
In some embodiments, the laser composite cleaning system further includes the second light combination mirror 440, and being suitable for will be from described multiple
It closes the recombination laser that laser alignment mirror in cover cylinder on main optical path 430 is emitted and reflexes to the focus lamp 460.
Specifically, the mirror surface of the second light combination mirror 440 goes out with the recombination laser through the recombination laser collimating mirror 430
Optical path after penetrating is arranged in the 4th predetermined angle, and the recombination laser is emitted in a manner of reflection through the second light combination mirror 440,
And outgoing posture is conveniently incident to the focus lamp 460.In some embodiments, the 4th predetermined angle is set as 45 °, because
The mirror surface of optical path and the second light combination mirror 440 after this outgoing is in 45 °, and is in 90 ° of angles with input path.Such as Fig. 3, Fig. 4
With shown in Fig. 5, the recombination laser through the second light combination mirror 440 outgoing after optical path perpendicular to the surface to be cleaned 7, and
Outgoing downwards, therefore the surface to be cleaned 7 easy to clean.
Therefore, the setting of the second light combination mirror 440 is so that the optical path direction of the recombination laser changes, can will
Emitting light path is adjusted to facilitate the recombination laser focussing force in the surface to be cleaned perpendicular to the surface to be cleaned 7
7, the longitudinal direction of the laser composite cleaning system can be highly changed into transverse width by the second light combination mirror 440, be changed
The structure of the composite cleaning system, it is applied widely, it is practical.
The laser composite cleaning system further includes galvanometer system 470, and the recombination laser is through the second light combination mirror 440
After outgoing, the galvanometer system 470 is first incident to before being incident to the focus lamp 460, the galvanometer system 470 is suitable for adjustment
The outgoing posture of the recombination laser.
The galvanometer system 470 changes the direction of emitting light path by multiple eyeglasses and scan module, adjusts described compound
The outgoing posture of laser, and it is emitted to the focus lamp 460, so that the recombination laser after focusing is according to default cleaning track
Clean the surface to be cleaned 7.It should be understood that in further embodiments, the laser composite cleaning system can also be with
Substitute the second light combination mirror 440 using the galvanometer system 470, in this way, the galvanometer system 470 by level inject it is compound
Laser is converted to the laser exported downwards, and still, the accuracy and whole system of the laser positioning of this setup are for a long time
The reliability of operation commutates not as good as the second light combination mirror 440 described first, then the setting exported by the galvanometer system 470
Mode.
Therefore, the galvanometer system 470 adjusts the outgoing posture of the recombination laser, so that described compound sharp after focusing
Light cleans the surface to be cleaned 7 according to default cleaning track, and cleaning efficiency is high.High degree of automation, whole system is for a long time
The stability of operation is high.
The laser composite cleaning system further includes optical gate 450, and the optical gate 450 is located at the galvanometer system 470 and institute
It states between focus lamp 460, the optical gate 450 is suitable for that the recombination laser is stopped to act on the surface to be cleaned 7.
It should be understood that the optical gate also can be set in the second light combination mirror 440 and the galvanometer system 470 it
Between or other positions.
Therefore, the optical gate 450 can stop the recombination laser to act on the surface to be cleaned 7, can be to avoid accidentally
Operation causes recombination laser directly to clean the surface to be cleaned 7,7 base material of surface to be cleaned of burning, the laser
Composite cleaning high system safety, it is practical.
The laser composite cleaning system further includes observation system 8, and the observation system 8 is suitable for observing the table to be cleaned
Face 7.
Specifically, in the present embodiment, the observation system 8 includes light source 810, half-reflecting half mirror 820, ccd image sensing
Device 830 and display device, the ccd image sensor 830 are electrically connected with the display device, the ccd image sensor
830, the half-reflecting half mirror 820 is set in turn in the top of the second light combination mirror 440, and the light source 810 is suitable for entirely
System provides light source, and the illuminating bundle that the light source 810 emits is gone out downwards in a manner of reflection through the half-reflecting half mirror 820
It penetrates, for illuminating the surface to be cleaned 7, the light reflected by the surface to be cleaned 7 is after the half-reflecting half mirror 820 transmission
It is incident to the ccd image sensor 830, incident optical signal conversion is analog current by the ccd image sensor 830
Signal, current signal are transmitted to the display device after the ccd image sensor 830 amplification and analog-to-digital conversion, realize institute
7 image of surface to be cleaned is stated in the reproduction of the display device.
Therefore, the observation system 8 observes the recombination laser and cleans feelings in the focusing of the surface to be cleaned 7
Condition, the cleaning situation that can be arrived according to the observation are in time adjusted the laser composite cleaning system, high reliablity.
The laser composite cleaning system further includes energy testing apparatus 5, and the energy testing apparatus 5 is adapted to detect for described
Recombination laser acts on the energy of the surface to be cleaned 7.
Specifically, the energy testing apparatus 5 can be laser energy meter, power meter, detection laser action in it is described to
The energy of clean the surface 7.
Therefore, it can be determined according to the property of the surface to be cleaned 7 substance to be cleaned and base material described in acting on
The highest energy of surface to be cleaned 7 acts on the energy of the surface to be cleaned 7, choosing by the energy testing apparatus 5 detection
The emission parameter for selecting the continuous laser and the pulse laser prevents surface to be cleaned 7 described in the recombination laser ablation
Base material.
In some embodiments, as further scheme, the continuous laser orthopedic systems 310 further include continuous laser half
Wave plate 313 and continuous laser polarization spectro piece 314, the continuous laser are incident after the continuous laser collimating mirror 312 outgoing
Also successively pass through the continuous laser half-wave plate 313 and the continuous laser polarization spectro before to the first light combination mirror 410
Piece 314, the continuous laser half-wave plate 313 and the continuous laser polarization spectro piece 314 have common optical axis, and are respectively positioned on
The continuous laser is in the optical path after the continuous laser collimating mirror 312 outgoing.The continuous laser is through the continuous laser
After collimating mirror 312 is emitted, it is incident to the continuous laser half-wave plate 313, the continuous laser half-wave plate 313 adjusts described continuous
The polarization direction of laser is conveniently incident to the continuous laser half-wave plate 313, and the continuous laser is through the continuous laser half-wave
After piece 313 is emitted, it is incident to the continuous laser polarization spectro piece 314, the continuous laser polarization spectro piece 314 is by vibration side
To light transmission identical with the continuous laser polarization spectro piece 314 transmission axis direction, the light of other direction of vibration is reflected, it is real
It now filters to laser beam, obtains the consistent continuous laser in polarization direction, and be incident to first light combination after outgoing
Mirror 410.
Therefore, the continuous laser is after the continuous laser generating device 1 outgoing, first successively through the continuous laser
Beam expanding lens 311, the continuous laser collimating mirror 312, the continuous laser half-wave plate 313 and the continuous laser polarization spectro piece
314, it reenters and is incident upon the first light combination mirror 410；The continuous laser beam expanding lens 311 and the continuous laser collimating mirror 312 are total
Same-action realizes the beam-expanding collimation to the continuous laser, the continuous laser half-wave plate 313 and continuous laser polarization point
314 collective effect of mating plate, which is realized, to be adjusted and filters to the polarization of the continuous laser, and the continuous laser is being incident to the conjunction
Shaping is adjusted to be suitble to incident state before light microscopic 410.
In some embodiments, as further scheme, the pulse laser shaping system 320 further includes pulse laser half
Wave plate 323 and pulse laser polarization spectro piece 324, the pulse laser are incident after the pulse laser collimating mirror 322 outgoing
Also successively pass through the pulse laser half-wave plate 323 and the pulse laser polarization spectro before to the first light combination mirror 410
Piece 324, the pulse laser half-wave plate 323 and the pulse laser polarization spectro piece 324 have common optical axis, and are respectively positioned on
The pulse laser is in the optical path after the pulse laser collimating mirror 322 outgoing.The pulse laser is through the pulse laser
After collimating mirror 322 is emitted, it is incident to the pulse laser half-wave plate 323, the pulse laser half-wave plate 323 adjusts the pulse
It is inclined to be incident to the pulse laser after the pulse laser half-wave plate 323 outgoing for the polarization direction of laser, the pulse laser
Shake light splitting piece 324, and the pulse laser polarization spectro piece 324 is saturating by direction of vibration and the pulse laser polarization spectro piece 324
The identical light transmission of axis direction is crossed, the light of other direction of vibration is reflected, realization filters to laser beam, obtains polarization direction
Consistent pulse laser, and the first light combination mirror 410 is incident to after outgoing.
Therefore, the pulse laser is after the pulse laser generating device 2 outgoing, first successively through the pulse laser
Beam expanding lens 321, the pulse laser collimating mirror 322, the pulse laser half-wave plate 323 and the pulse laser polarization spectro piece
324, it reenters and is incident upon the first light combination mirror 410；The pulse laser beam expanding lens 321 and the pulse laser collimating mirror 322 are total
Same-action realizes the beam-expanding collimation to the pulse laser, the pulse laser half-wave plate 323 and pulse laser polarization point
324 collective effect of mating plate, which is realized, to be adjusted and filters to the polarization of the pulse laser, and the pulse laser is being incident to the conjunction
Shaping is adjusted to be suitble to incident state before light microscopic 410.
It should be understood that the focus lamp 460 uses transmission-type focus lamp in above-described embodiment, the transmission-type is poly-
Burnt mirror permission light beam has the little deviation of bias etc, and light beam is easy to adjust, and injects lens with allowing light beam bias or angle deviating,
Focusing effect is good.
In the above-described embodiments, the laser composite cleaning system further includes digital display generator 480, and the number is aobvious
Show that generator 480 is electrically connected with the continuous laser generating device 1 and the pulse laser generating device 2, the number is aobvious
Show generator 480 be adapted to detect for the continuous laser generating device 1 and the pulse laser generating device 2 emit respectively it is continuous
The parameter of laser and pulse laser.
In the above-described embodiments, the laser composite cleaning system further includes mounting base 6, and the mounting base 6 is suitable for installation
All parts, it should be appreciated that position of each component in the mounting base 6 should be adjustable.
A kind of recombination laser cleaning method cleaned using above-mentioned laser composite cleaning system, the recombination laser are clear
Washing method includes:
S1: it obtains continuous laser and continuous laser hot spot is made to gather the surface to be cleaned 7；
S2: obtaining and adjusts the energy of the continuous laser hot spot, meets the energy of the continuous laser hot spot default
Continuous laser energy value；
S3: it obtains pulse laser and the hot spot of the pulse laser is made to be gathered in the continuous laser spot area, obtain
Recombination laser hot spot；
S4: obtaining the energy of the recombination laser hot spot, and adjusting the pulse laser makes the energy of the recombination laser hot spot
Amount meets default recombination laser energy value；
S5: the recombination laser hot spot is kept, is cleaned using the recombination laser.
Therefore, first and the energy of the continuous laser hot spot is adjusted, meets the energy of the continuous laser hot spot pre-
If continuous laser energy value, the energy of the continuous laser hot spot can be made within certain limits, then adjust the recombination laser
The energy of hot spot, adjusting the pulse laser makes the energy of the recombination laser hot spot meet default recombination laser energy value, can
So that the energy of the compound hot spot is within certain limits；When carrying out laser cleaning using recombination laser, cleaning efficiency and cleaning
Effect gets a promotion, and will not damage substrate, and stability is high.
In step s3, the acquisition pulse laser and the hot spot of the pulse laser is made to be gathered in the continuous laser light
Spot region obtains recombination laser hot spot and includes the following steps:
S3.1: unbalanced pulse generating device of laser 2；
S3.2: adjustment laser shaping system 3 will be emitted to the first light combination mirror 410 after pulse laser shaping；
S3.3: the pulse laser is emitted to institute along the emitting light path of the continuous laser by the first light combination mirror 410
State focus lamp 460.
Specifically, the first light combination mirror is emitted the continuous laser in transmission mode, in the present embodiment with reflection
Mode is emitted the pulse laser.
Therefore, the pulse laser and continuous laser have common emitting light path, therefore the hot spot of the pulse laser
It is gathered in the continuous laser spot area.
In step s 2, the default continuous laser energy value Q1 meets: Q1 < Qb, wherein Qb is the burning of base material
Lose threshold value.
It should be understood that Q1 < Qb, then the default continuous laser energy value is less than the ablation threshold of base material, when
When the energy of the continuous laser hot spot meets default continuous laser energy value, the continuous laser will not damage substrate.
In this way, the energy of the continuous laser hot spot meets default continuous laser energy value, the default continuous laser energy
Magnitude is less than the ablation threshold of base material, and it is small that the continuous laser can export energy during next composite cleaning
In the laser of the ablation threshold of base material, the efficiency of compound just cleaning can be improved, without damage substrate.
In step s 4, the default recombination laser energy value Q2 meets: Qa≤Q2 < Qb, Qa are the vaporization threshold of dirt
Value.
It should be appreciated that default recombination laser energy value Q2 meets: Qa≤Q2 < Qb, then when the energy of the recombination laser hot spot
When amount meets default recombination laser energy value, then the energy of recombination laser is more than or equal to the vaporization threshold value of region dirt to be cleaned,
Less than the ablation threshold of substrate areas material to be cleaned, continuous laser and Pulsed Laser Parameters adjustment are completed at this time, recombination laser
The dirt in region to be cleaned can be made to vaporize without ablation substrate, highly-safe, recombination laser cleaning efficiency is high, practicability
By force.
In above-mentioned laser compound cleaning method, the diameter of the pulsed laser spot is less than the continuous laser hot spot
Diameter.
The benefit being arranged in this way is, when recombination laser is cleaned, the pulsed laser spot is always positioned at described continuous
The inside of laser facula, the continuous laser carry out single treatment to the surface to be cleaned 7 first, and the pulse laser is right again
The surface to be cleaned 7 carries out secondary treatment, and single treatment provides stable heat source, and secondary treatment is cleaned.
In step s 5, described to keep the recombination laser hot spot, it includes as follows for carrying out cleaning using the recombination laser
Step:
Determine recombination laser in the cleaning path in region to be cleaned and speed；
The recombination laser, which is emitted, according to the path and speed using galvanometer system 470 carries out composite cleaning, the vibration
Mirror system 470 is suitable for adjusting the outgoing posture of the recombination laser.
In this way, the outgoing posture of the recombination laser can be adjusted using the galvanometer system 470, according to set cleaning
Path and speed are cleaned, and clean range is wide, high degree of automation, complete washing and cleaning operation, controllability is high, practical.
In step s 2, the default continuous laser energy value Q1 also meets: Q1 < Qa.
The benefit being arranged in this way is the default continuous laser energy value Q1, less than the vaporization threshold value of dirt to be cleaned, then
Continuous laser focussing force in the recombination laser is less than the vaporization threshold of dirt to be cleaned in the energy of the surface to be cleaned 7
Value is mainly used for providing stable heat source, reduces the pulsed laser energy requirement in recombination laser, cleans mainly by recombination laser
Pulse laser complete, cleaning effect is good, and cleaning efficiency is higher.
Further, in step s 2, the default continuous laser energy value Q1 also meets: 0.7Qa≤Q1.
The benefit being arranged in this way is the default continuous laser energy value Q1, is in higher level, is capable of providing stabilization
Heat source, and the energy requirement of pulse laser is not also high, it is practical.
In step s 4, the default recombination laser energy value Q2 also meets: Q2≤0.9Qb.
The benefit being arranged in this way is can either to reach higher cleaning efficiency, and the energy of recombination laser is apart from base material
Ablation threshold Qb there are also certain distance (minimum 0.1Qb), will not ablation base material, the margin of safety is high, highly reliable.
It should be appreciated that in step S3 and step S4, if known substrate and the material property of dirt be suitble to use it is continuous
Laser parameter then can be first adjusted according to parameter selection again；If the material of substrate and dirt is unknown, can be used from small to large
Mode adjust power, test suitable parameters.
It should be understood that the energy for adjusting the continuous laser hot spot includes adjusting continuously in above-described embodiment
The parameters such as power, the frequency of laser.
Adjusting the pulse laser includes adjusting the parameters such as pulse energy, pulse frequency, pulse width and delay time.
Although the disclosure discloses as above, the protection scope of the disclosure is not limited only to this.Those skilled in the art, not
Under the premise of being detached from spirit and scope of the present disclosure, it can make various changes and modify, these changes will fall into this with modification
The protection scope of invention.
Claims (10)
1. a kind of laser composite cleaning system characterized by comprising continuous laser generating device (1), pulse laser fill
Set (2), laser shaping system (3), the first light combination mirror (410) and focus lamp (460)；
Continuous laser is incident to the laser shaping system (3), pulse laser after the continuous laser generating device (1) emits
It is incident to the laser shaping system after the pulse laser generating device (2) transmitting, the laser shaping system (3) is suitable for
Shaping is carried out to the continuous laser and the pulse laser respectively；
The continuous laser and the pulse laser are incident to described first after the laser shaping system (3) is emitted respectively and close
Light microscopic (410), the first light combination mirror (410) are suitable for the continuous laser and the pulse laser being integrated into recombination laser；
The recombination laser is incident to the focus lamp (460), the focus lamp after the first light combination mirror (410) is emitted
(460) it is suitable for the recombination laser gathering surface to be cleaned (7).
2. laser composite cleaning system according to claim 1, which is characterized in that the laser composite cleaning system is also wrapped
It includes galvanometer system (470), the recombination laser is first incident to the galvanometer system before being incident to the focus lamp (440)
(470), the galvanometer system (470) is suitable for adjusting the outgoing posture of the recombination laser.
3. laser composite cleaning system according to claim 2, which is characterized in that the laser composite cleaning system is also wrapped
It includes energy testing apparatus (5), the energy testing apparatus (5) is adapted to detect for the recombination laser and acts on the surface to be cleaned
(7) energy.
4. a kind of using the recombination laser cleaning method that laser composite cleaning system is cleaned described in claim 3, feature
It is, comprising:
It obtains continuous laser and continuous laser hot spot is made to gather the surface to be cleaned (7)；
The energy for obtaining and adjusting the continuous laser hot spot makes the energy of the continuous laser hot spot meet default continuous laser
Energy value；
It obtains pulse laser and the hot spot of the pulse laser is made to be gathered in the continuous laser spot area, obtain recombination laser
Hot spot；
The energy for obtaining the recombination laser hot spot, adjusting the pulse laser meets the energy of the recombination laser hot spot in advance
If recombination laser energy value；
The recombination laser hot spot is kept, is cleaned using the recombination laser.
5. laser compound cleaning method according to claim 4, which is characterized in that the default continuous laser energy value Q1
Meet: Q1 < Qb, wherein Qb is the ablation threshold of base material.
6. laser compound cleaning method according to claim 5, which is characterized in that the default recombination laser energy value Q2
Meet: Qa≤Q2 < Qb, Qa are the vaporization threshold value of dirt.
7. laser compound cleaning method according to claim 6, which is characterized in that described to keep the recombination laser light
Spot carries out cleaning using the recombination laser and includes the following steps:
Determine recombination laser in the cleaning path in region to be cleaned and speed；
The recombination laser, which is emitted, according to the path and speed using galvanometer system (470) carries out composite cleaning, the galvanometer
System (470) is suitable for adjusting the outgoing posture of the recombination laser.
8. laser compound cleaning method according to claim 7, which is characterized in that the diameter of the pulsed laser spot is small
In the diameter of the continuous laser hot spot.
9. laser compound cleaning method according to claim 8, which is characterized in that the default continuous laser energy value Q1
Also meet: Q1 < Qa.
10. laser compound cleaning method according to claim 9, which is characterized in that the default recombination laser energy value
Q2 also meets: Q2≤0.9Qb.
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| CN111203414A (en) * | 2020-03-17 | 2020-05-29 | 深圳市汇泽激光科技有限公司 | Laser cleaning method suitable for oxide layer |
| CN112359617A (en) * | 2020-11-16 | 2021-02-12 | 五邑大学 | Indigo dye laser washing effect reinforcing agent for jeans and preparation method thereof |
| CN113020129A (en) * | 2021-02-26 | 2021-06-25 | 苏州大学 | Composite laser cleaning optical head and composite laser cleaning method |
| CN113097836A (en) * | 2019-12-23 | 2021-07-09 | 深圳市联赢激光股份有限公司 | Method for removing insulating paint on metal surface |
| CN113210357A (en) * | 2021-04-23 | 2021-08-06 | 浙江工业大学 | Method and device for cleaning micro-nano particles by time-regulated double-beam laser induced shock waves |
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Application publication date: 20190813 |