CN110966931B - Femtosecond laser processing morphological parameter time-resolved confocal measurement method and device - Google Patents
Femtosecond laser processing morphological parameter time-resolved confocal measurement method and device Download PDFInfo
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Abstract
The invention relates to a femtosecond laser processing morphological parameter time-resolved confocal measurement method and device, belonging to the field of femtosecond laser processing online detection. The method comprises the steps of carrying out axial accurate positioning on the surface of a material by utilizing a continuous laser confocal light path, processing the material by utilizing femtosecond laser, detecting morphological parameters of the material by utilizing the femtosecond laser with different delay times, detecting femtosecond laser reflection signals with different delay times by utilizing the confocal light path, and demodulating the signals to obtain the axial position. By repeating the processes of continuous laser confocal positioning, femtosecond laser processing and delayed femtosecond laser confocal detection, the variation of the axial removal amount of the material in the femtosecond laser processing along with time can be obtained, the time-resolved measurement of the morphological parameters of the femtosecond laser high-precision processing material is realized, the controllability of the femtosecond laser processing and the processing quality of a sample are improved, and the method has important significance for improving the femtosecond processing precision, the processing quality and the controllability of the processing process.
Description
Technical Field
The invention relates to a femtosecond laser processing morphological parameter time-resolved confocal measurement method and device, belonging to the field of femtosecond laser processing online detection.
Background
The femtosecond laser processing technology utilizes the nonlinear action of the tight focusing focus of laser pulse and materials to induce photophysical and photochemical changes, realizes the processing and manufacturing of the structure of the micro-nano device, and is concerned about because of the remarkable advantages of high processing fineness, wide material adaptability and the like.
When a femtosecond laser removes a material, effective monitoring means for nonlinear effects, scale effects and the like in transient morphological changes of the material are lacked, for example: when the technological parameter scale, the time scale and the space geometric scale of femtosecond processing are reduced, the processing characteristics of the femtosecond processing have larger deviation with a predicted value deduced in proportion, namely scale effect. The improvement of the processing shape precision, the size precision and the surface quality is seriously restricted by the insufficient recognition of the morphological change processes such as the scale effect in the femtosecond laser processing. Therefore, the method has important significance for monitoring the transient morphological change during material removal in femtosecond processing and researching the removal process of the interaction between the femtosecond laser and the material, and revealing the action mechanism and the evolution rule of the femtosecond laser nonlinear processing and improving the controllability of the processing precision of the microstructure femtosecond laser.
However, the femtosecond laser has a very short process of removing the material, so that the current measurement means cannot obtain the instantaneous material form change, and the current measurement means is still based on the traditional measurement technology, such as: based on methods such as axial monitoring, backward coherent chromatography monitoring, optical coherent chromatography monitoring and the like of a laser triangular displacement sensor, the resolving power is in a submicron level; for example, patent CN108286936A discloses an integrated method and device for laser micro-nano machining differential confocal on-line monitoring, which solves the drift problem, high-precision real-time focusing problem and on-line detection problem of femtosecond laser machining sample, but the measurement object of the invention is still in the sample form on the macroscopic time scale, and cannot monitor the transient form change process when the material is removed.
Disclosure of Invention
The invention aims to provide a femtosecond laser processing form parameter time-resolved confocal measurement method and device in order to obtain an instantaneous form parameter change process during material removal in femtosecond processing and improve the controllability of the femtosecond processing process. The femtosecond pulse laser is split into processing light and detection light, and the reflection signal of the detection light is detected and demodulated by utilizing the confocal technology, so that the time resolution measurement of the morphological parameters of the sample in the femtosecond processing is realized.
The femtosecond laser processing morphological parameter time-resolved confocal measurement method provided by the invention has the advantages that the material surface is accurately positioned in the axial direction by using a continuous laser confocal light path, the material is processed by using femtosecond laser, morphological parameters of the material are detected by using the femtosecond laser with different delay times, reflected signals of the femtosecond laser with different delay times are detected by using a confocal light path, and the signals are demodulated to obtain the axial position. The process of 'continuous laser confocal positioning, femtosecond laser processing and delayed femtosecond laser confocal detection' is repeated, so that the variation of the axial removal amount of the material in the femtosecond laser processing along with time can be obtained, the time-resolved measurement of the morphological parameters of the femtosecond laser high-precision processing material is realized, and the controllability of the femtosecond laser processing and the processing quality of a sample are improved.
The invention relates to a femtosecond laser processing morphological parameter time-resolved confocal measuring device which comprises a femtosecond pulse laser and an A spectroscope positioned in the emergent direction of the femtosecond pulse laser, wherein an A shutter, an A reflector, a B reflector, a C reflector, a D reflector, a frequency modulator and a dichroic mirror are sequentially arranged in the transmission direction of a reflected light beam of the A spectroscope, the B reflector and the C reflector are positioned on an A linear motion module, and the B reflector and the C reflector are installed to ensure that the incident direction of the light beam of the B reflector, the emergent direction of the light beam of the C reflector and the motion direction of the A linear motion module are parallel.
A shutter B, an E reflector, an F reflector, a G reflector and a B spectroscope are sequentially arranged in the transmission beam propagation direction of the spectroscope A, wherein the E reflector and the F reflector are positioned on the linear motion module B, and the installation ensures that the beam incident direction of the E reflector, the beam emergent direction of the F reflector and the motion direction of the linear motion module B are parallel.
The reflected light beams of the dichroic mirror and the B spectroscope are coaxial and spread along the same direction, an objective lens, a sample and a three-dimensional precise displacement platform are arranged in the spread direction of the reflected light beams, the optical axis of the objective lens is coaxial with the reflected light beams of the dichroic mirror and the B spectroscope, and the sample is arranged on the three-dimensional precise displacement platform.
And the continuous light laser is coaxial with the reflected light beams of the dichroic mirror and the B spectroscope, and the light beams are converged at the same focus through the objective lens.
A C spectroscope is arranged between the collimating mirror and the B spectroscope, and a collecting lens, a pinhole and a photoelectric detector are sequentially arranged in the direction of a reflected light beam of the C spectroscope. The pinhole is located the focus of collecting lens department, and photoelectric detector's mounted position must guarantee that it can collect the whole light intensity that sees through the pinhole to constitute confocal detection module.
The computer is used for controlling the femtosecond laser to emit pulse laser, synchronously controlling the A shutter and the B shutter and controlling the B linear motion module to perform optical path delay. Meanwhile, the computer controls the precise displacement table to perform three-dimensional motion, the continuous laser is controlled to emit continuous laser, and a light intensity signal of the photoelectric detector enters the computer.
The measuring steps of the device are as follows:
the method comprises the following steps: a sample to be processed is placed on a three-dimensional precise displacement platform, a computer controls a continuous laser emitted by a continuous light laser to be collimated by a collimating mirror and then converged on the surface of the sample to be processed by an objective lens, reflected light passes through a C spectroscope and is subjected to axial position detection by a confocal detection module, and the computer controls the three-dimensional precise displacement platform to adjust the sample according to position feedback of the confocal detection module so as to ensure the accuracy of the axial position processed by the femtosecond laser.
The computer controls the precision displacement table to scan the axial position of a sample, synchronously acquires signals of the photoelectric detectors to obtain a confocal axial response curve, and fits the confocal axial response curve to obtain a peak point so as to perform axial positioning.
Step two: and turning off the continuous light laser, enabling the femtosecond laser to emit high-power femtosecond processing laser to remove and process the sample, using time-delayed low-power femtosecond detection laser to perform time-resolved detection on the axial position of the removed sample surface, and enabling the femtosecond detection laser reflected light to still perform axial position measurement through the confocal detection module after being reflected by the C beam splitter.
The computer controls the femtosecond laser to emit femtosecond pulse laser, the femtosecond pulse laser is divided into processing light and detection light through the A spectroscope, the processing light is intercepted into single pulse or limited pulses through the A shutter, optical path delay is realized through the A reflector, the B reflector, the C reflector, the D reflector and the A linear motion module, the frequency of the processing light is reduced through the frequency modulation device, and a sample is processed through the objective lens after being reflected by the dichroic mirror. In the detection light part, a computer controls a shutter B to intercept detection light into a single pulse, an E reflector, an F reflector, a G reflector and a linear motion module B realize optical path delay, the linear motion module A and the linear motion module B controlled by the computer enable the delay time of the detection light relative to processing light to be tau, and the detection light is reflected by a beam splitter B and then a sample is detected through an objective lens.
Step three: and (3) controlling the three-dimensional precision displacement platform by the computer to move the sample, enabling the laser processing position to be positioned at the unprocessed position on the surface of the sample, then performing the first step and the second step, repeating the steps until the photoelectric detector in the confocal detection module obtains enough light intensity signals, and completing axial scanning position measurement under the control of the computer, namely obtaining the morphological parameters of the material processed by the femtosecond pulses and delayed by the time tau.
Step four: and changing the delay time tau, repeating the first step, the second step and the third step, measuring the axial position of the material under different delay times, and obtaining the change process of the morphological parameters of the material along with the time.
Advantageous effects
Compared with the prior art, the invention has the following advantages:
1. the axial position of a sample is measured by adopting femtosecond pulse laser, instantaneous material form parameter change during femtosecond processing is obtained, and the problem of time resolution measurement of instantaneous form parameters during femtosecond processing and removal of the material is solved;
2. the confocal technology is adopted to accurately measure the axial position of the sample, so that the axial measurement precision is improved, and the high-precision measurement of the axial position change of the material is realized;
3. the periodic scanning-femtosecond removing processing-femtosecond delay detection process is carried out on the material, the signal to noise ratio of light intensity detection is improved, and the stable measurement of the instantaneous morphological parameters of the material in the femtosecond processing is realized.
Drawings
FIG. 1 is a schematic view of the present invention.
Fig. 2 is a schematic diagram of the removal processing of a material by a femtosecond laser.
The system comprises a 1-femtosecond laser, a 2-A spectroscope, a 3-A shutter, a 4-A reflector, a 5-A linear motion module, a 6-B reflector, a 7-C reflector, an 8-D reflector, a 9-frequency modulator, a 10-dichroic mirror, an 11-objective lens, a 12-sample, a 13-three-dimensional precision displacement platform, a 14-B shutter, a 15-B linear motion module, a 16-E reflector, a 17-F reflector, an 18-G reflector, a 19-B spectroscope, a 20-C spectroscope, a 21-collecting lens, a 22-pinhole, a 23-photoelectric detector, a 24-continuous light laser, a 25-collimating mirror and a 26-computer.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Examples
As shown in fig. 1, a femtosecond laser processing morphological parameter time-resolved confocal measurement method is implemented, in which a continuous laser confocal light path is used to perform axial accurate positioning on the surface of a material, a femtosecond laser is used to process the material, femtosecond lasers with different delay times are used to detect morphological parameters of the material, a confocal light path is used to detect femtosecond laser reflection signals with different delay times, and the signals are demodulated to obtain an axial position. The process of 'continuous laser confocal positioning, femtosecond laser processing and delayed femtosecond laser confocal detection' is repeated, so that the variation of the axial removal amount of the material in the femtosecond laser processing along with time can be obtained, the time-resolved measurement of the morphological parameters of the femtosecond laser high-precision processing material is realized, and the controllability of the femtosecond laser processing and the processing quality of a sample are improved. As shown in FIG. 2, the femtosecond pulse laser carries out removal processing on a material in time t, and the purpose of the invention is to obtain the transient morphological parameter change process during the material removal in the time t.
As shown in fig. 1, the femtosecond laser processing morphological parameter time-resolved confocal measurement device comprises a femtosecond pulse laser 1 and an a spectroscope 2 located in the emergent direction of the femtosecond pulse laser 1, wherein an a shutter 3, an a reflector 4, a B reflector 6, a C reflector 7, a D reflector 8, a frequency modulator 9 and a dichroic mirror 10 are sequentially arranged in the reflected light beam propagation direction of the a spectroscope 2, wherein the B reflector 6 and the C reflector 7 are located on an a linear motion module 5, and the installation ensures that the incident direction of the light beam of the B reflector 6, the emergent direction of the light beam of the C reflector 7 and the motion direction of the a linear motion module 5 are parallel.
A B shutter 14, an E reflector 16, an F reflector 17, a G reflector 18 and a B spectroscope 19 are sequentially arranged in the transmission light beam transmission direction of the A spectroscope 2, wherein the E reflector 16 and the F reflector 17 are positioned on the B linear motion module 15, and the installation ensures that the light beam incident direction of the E reflector 16, the light beam emergent direction of the F reflector 17 and the motion direction of the B linear motion module 15 are parallel.
The installation of the dichroic mirror 10 and the B spectroscope 19 ensures that the reflected light beams of the dichroic mirror 10 and the B spectroscope 19 are coaxial and spread along the same direction, an objective lens 11, a sample 12 and a three-dimensional precision displacement platform 13 are arranged in the spread direction of the reflected light beams, the optical axis of the objective lens 11 is coaxial with the reflected light beams of the dichroic mirror 10 and the B spectroscope 19, and the sample 12 is installed on the three-dimensional precision displacement platform 13.
And the collimating lens 25 and the continuous light laser 24 are coaxially arranged with the optical axis of the objective lens 11, wherein the light beam of the continuous light laser 24 collimated by the collimating lens 25 is coaxial with the reflected light beams of the dichroic mirror 10 and the B spectroscope 19, and the three beams are converged at the same focus through the objective lens 11.
The computer 26 is used for controlling the femtosecond laser 1 to emit pulse laser, synchronously controlling the A shutter 3 and the B shutter 14, and controlling the B linear motion module 15 to perform optical path delay. Meanwhile, the computer 26 controls the precision displacement table 13 to perform three-dimensional movement, the continuous laser 24 is controlled to emit continuous laser, and the light intensity signal of the photoelectric detector 23 enters the computer 26.
The measurement steps of the device are as follows:
the method comprises the following steps: a sample 12 to be processed is placed on a three-dimensional precise displacement platform 13, a computer 26 controls a continuous laser 24 to emit continuous laser, the continuous laser is collimated by a collimating lens 25 and then is converged on the surface of the sample 12 to be processed by an objective lens 11, reflected light is detected by a confocal detection module through a C spectroscope 20 in an axial position, and the computer 26 controls the three-dimensional precise displacement platform 13 to adjust the sample 12 according to position feedback of the confocal detection module so as to ensure the accuracy of the femtosecond laser processing axial position.
The confocal detection module is composed of a collecting lens 21, a pinhole 22 placed on the focal plane of the collecting lens 21 and a photoelectric detector 23, a computer 26 controls the precision displacement table 13 to carry out axial position scanning on the sample 12, signals of the photoelectric detector 23 are synchronously collected to obtain a confocal axial response curve, and the computer 26 fits the confocal axial response curve to obtain a peak point so as to carry out axial positioning.
Step two: and (3) turning off the continuous light laser 24, enabling the femtosecond laser 1 to emit high-power femtosecond processing laser to remove and process the sample 12, using time-delayed low-power femtosecond detection laser to perform time-resolved detection on the axial position of the removed surface of the sample 12, and enabling the femtosecond detection laser reflected light to be still subjected to axial position measurement by the confocal detection module after being reflected by the C spectroscope 20.
The computer 26 controls the femtosecond laser 1 to emit femtosecond pulse laser, the femtosecond pulse laser is divided into processing light and detection light through the A spectroscope 2, the computer 26 controls the A shutter 3 to intercept the processing light into single pulse or limited pulses in the processing light part, the optical path delay is realized by the A reflector 4, the B reflector 6, the C reflector 7, the D reflector 8 and the A linear motion module 5, the frequency of the processing light is reduced through the frequency modulation device 9, and the sample 12 is processed through the objective lens 11 after being reflected by the dichroic mirror 10. In the detection light part, the computer 26 controls the B shutter 14 to intercept the detection light into a single pulse, the E reflector 16, the F reflector 17, the G reflector 18 and the B linear motion module 15 realize optical path delay, the A linear motion module 5 and the B linear motion module 15 controlled by the computer 26 enable the delay time of the detection light relative to the processing light to be tau, and the detection light is reflected by the B spectroscope 19 and then detects the sample 12 through the objective lens 11.
Step three: the computer 26 controls the three-dimensional precision displacement table 13 to move the sample 12, so that the laser processing position is positioned at the unprocessed position on the surface of the sample 12, the first step and the second step are carried out, the steps are repeated until the photoelectric detector 23 in the confocal detection module obtains enough light intensity signals, the axial scanning position measurement is completed under the control of the computer 26, and the morphological parameters of the material processed by the femtosecond pulses and delayed by the time tau are obtained.
Step four: and changing the delay time tau, repeating the first step, the second step and the third step, measuring the axial position of the material under different delay times, and obtaining the change process of the morphological parameters of the material along with the time.
Claims (3)
1. A femtosecond laser processing morphological parameter time-resolved confocal measurement method is characterized in that:
the method comprises the following steps of carrying out axial accurate positioning on the surface of a material by utilizing a continuous laser confocal light path, processing the material by utilizing femtosecond laser, detecting morphological parameters of the material by utilizing the femtosecond laser with different delay times, detecting femtosecond laser reflection signals with different delay times by utilizing the confocal light path, and demodulating the signals to obtain an axial position;
repeating the processes of 'continuous laser confocal positioning, femtosecond laser processing and delayed femtosecond laser confocal detection', obtaining the variation of the axial removal amount of the material along with time in the femtosecond laser processing, and realizing the time resolution measurement of the morphological parameters of the femtosecond laser high-precision processed material.
2. The confocal measuring device is characterized by comprising a femtosecond pulse laser (1) and an A spectroscope (2) positioned in the emergent direction of the femtosecond pulse laser (1), wherein an A shutter (3), an A reflector (4), a B reflector (6), a C reflector (7), a D reflector (8), a frequency modulator (9) and a dichroic mirror (10) are sequentially arranged in the reflected light beam propagation direction of the A spectroscope (2), wherein the B reflector (6) and the C reflector (7) are positioned on an A linear motion module (5), and the installation ensures that the light beam incident direction of the B reflector (6), the light beam emergent direction of the C reflector (7) and the motion direction of the A linear motion module (5) are parallel;
a B shutter (14), an E reflector (16), an F reflector (17), a G reflector (18) and a B spectroscope (19) are sequentially arranged in the transmission beam propagation direction of the A spectroscope (2), wherein the E reflector (16) and the F reflector (17) are positioned on the B linear motion module (15), and the installation ensures that the beam incidence direction of the E reflector (16), the beam emergence direction of the F reflector (17) and the motion direction of the B linear motion module (15) are parallel;
the device comprises a dichroic mirror (10) and a B spectroscope (19), wherein reflected light beams of the dichroic mirror (10) and the B spectroscope (19) are coaxial and propagate along the same direction, an objective lens (11), a sample (12) and a three-dimensional precise displacement platform (13) are arranged in the propagation direction of the reflected light beams, the optical axis of the objective lens (11) is coaxial with the reflected light beams of the dichroic mirror (10) and the B spectroscope (19), and the sample (12) is arranged on the three-dimensional precise displacement platform (13;
the device comprises a collimating lens (25) and a continuous light laser (24) which are coaxially arranged with the optical axis of an objective lens (11), wherein the light beam of the continuous light laser (24) collimated by the collimating lens (25) is coaxial with the reflected light beams of a dichroic mirror (10) and a B spectroscope (19), and the three light beams are converged at the same focus through the objective lens (11);
a C spectroscope (20) is arranged between the collimating mirror (25) and the B spectroscope (19), and a collecting lens (21), a pinhole (22) and a photoelectric detector (23) are sequentially arranged in the reflected light beam direction of the C spectroscope (20); the pinhole (23) is positioned at the focus of the collecting lens (21), and the mounting position of the photoelectric detector (23) needs to ensure that the photoelectric detector can collect all light intensity penetrating through the pinhole (22) to form a confocal detection module;
the computer (26) is used for controlling the femtosecond laser (1) to emit pulse laser, synchronously controlling the A shutter (3) and the B shutter (14) and controlling the B linear motion module (15) to perform optical path delay; meanwhile, the computer (26) controls the precise displacement table (13) to move in three dimensions, the continuous laser (24) is controlled to emit continuous laser, and a light intensity signal of the photoelectric detector (23) enters the computer (26).
3. The femtosecond laser processing morphological parameter time-resolved confocal measurement device as claimed in claim 2, wherein the measurement process comprises the following steps:
the method comprises the following steps: placing a sample (12) to be processed on a three-dimensional precise displacement platform (13), controlling a continuous laser (24) to emit continuous laser under the control of a computer (26), collimating the continuous laser through a collimating mirror (25), converging the continuous laser on the surface of the sample (12) to be processed through an objective lens (11), detecting the axial position of the reflected laser through a C spectroscope (20) by a confocal detection module, and controlling the three-dimensional precise displacement platform (13) to adjust the sample (12) according to the position feedback of the confocal detection module by the computer (26) so as to ensure the accuracy of the axial position of the femtosecond laser processing;
the confocal detection module consists of a collecting lens (21), a pinhole (22) and a photoelectric detector (23), wherein the pinhole (22) and the photoelectric detector are placed on a focal plane of the collecting lens (21), a computer (26) controls a precision displacement platform (13) to carry out axial position scanning on a sample (12), signals of the photoelectric detector (23) are synchronously collected to obtain a confocal axial response curve, and the computer (26) fits the confocal axial response curve to obtain a peak point so as to carry out axial positioning;
step two: the continuous light laser (24) is closed, the femtosecond laser (1) emits femtosecond processing laser to remove and process the sample (12), time-delayed femtosecond detection laser is used to perform time-resolved detection on the axial position of the removed sample (12), and the reflected light of the femtosecond detection laser is reflected by the C spectroscope (20) and then is subjected to axial position measurement by the confocal detection module;
the computer (26) controls the femtosecond laser device (1) to emit femtosecond pulse laser, the femtosecond pulse laser is divided into processing light and detection light through the A spectroscope (2), the processing light is divided into a limited number of pulses through the A spectroscope (2), the computer (26) controls the A shutter (3) to intercept the processing light, optical path delay is achieved through the A reflector (4), the B reflector (6), the C reflector (7), the D reflector (8) and the A linear motion module (5), the frequency of the processing light is reduced through the frequency modulation device (9), and after the processing light is reflected by the dichroic mirror (10), a sample (12) is processed through the objective lens (11); in the detection light part, a computer (26) controls a B shutter (14) to intercept detection light into a single pulse, an E reflector (16), an F reflector (17), a G reflector (18) and a B linear motion module (15) realize optical path delay, the A linear motion module (5) and the B linear motion module (15) controlled by the computer (26) enable the delay time of the detection light relative to processing light to be tau, and the detection light is reflected by a B spectroscope (19) and then is detected on a sample (12) through an objective lens (11);
step three: the computer (26) controls the three-dimensional precise displacement platform (13) to move the sample (12), the laser processing position is positioned at the unprocessed position of the surface of the sample (12), the first step and the second step are carried out again, the steps are repeated until the photoelectric detector (23) in the confocal detection module obtains enough light intensity signals, the axial scanning position measurement is completed under the control of the computer (26), and the material form parameters of which the femtosecond pulse processing delays the time tau are obtained;
step four: and changing the delay time tau, repeating the first step, the second step and the third step, measuring the axial position of the material under different delay times, and obtaining the change process of the morphological parameters of the material along with the time.
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