CN101476935A - Three-dimensional light distribution detection apparatus for optical focus area - Google Patents
Three-dimensional light distribution detection apparatus for optical focus area Download PDFInfo
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- CN101476935A CN101476935A CNA2009100954894A CN200910095489A CN101476935A CN 101476935 A CN101476935 A CN 101476935A CN A2009100954894 A CNA2009100954894 A CN A2009100954894A CN 200910095489 A CN200910095489 A CN 200910095489A CN 101476935 A CN101476935 A CN 101476935A
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Abstract
The invention relates to a device for detecting three-dimensional light intensity distribution in an optical focus region. The prior art adopts connection between an adjusting rack and a piezoelectric ceramics scanner, so measurement precision is influenced, and an optical machine has high positioning requirement and large difficulty of device realization. In the invention, a light source is shaped by a light beam shaper and is focused to form a tested focus by a field lens; a one-dimensional movable platform drives the field lens to realize axial movement for testing and coarse positioning; a three-dimensional movable platform drives a fiber probe to carry out three-dimensional scanning in a focus region to realize the detection of the three-dimensional light intensity distribution; a monitoring optical path consisting of a monitoring light source, a spectroscope and an image acquirer is coupled to a tested optical path by a spectrum spectroscope to monitor a device adjusting and testing process; and an analysis and control unit carries out analysis and control coordination on the whole testing process and a result. The device has the characteristics of low requirement on mechanical processing and positioning, simple system composition, low requirement on devices, high measuring precision, convenient use, and the like.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of light distribution detection apparatus, particularly a kind of three-dimensional light distribution detection apparatus for optical focus area.Be mainly used in optical property assessment, optical information Propagation Characteristics, Focused Optical system Characteristics Detection, and fields such as optical storage, photoetching technique, micro-imaging.
Technical background
Optical focus area is carried out the demand that three-dimensional light distribution detects extensively be present in the optical property assessment, optical information Propagation Characteristics, Focused Optical system Characteristics Detection, and fields such as optical storage, photoetching technique, micro-imaging.For example, in optical storage field, the focus characteristics of CD object lens directly influences information storage density and storage quality, to the CD object focal point light distribution study essential, detect the three-dimensional light distribution of focus and can directly provide object lens quality assessment level, the optical storage optical system is made up provides experiment basis.A kind of device that can the optical focus area light distribution is formerly arranged in the technology, (" detect the device of CD object lens small light spot " referring to Chinese invention patent, the patent No.: ZL00127831.2).This detection system has suitable advantage, but, still come with some shortcomings: 1) device focusing objective len in use work can not produce displacement, drive optical fiber probe by piezoelectric scanner and carry out detection scanning, with and require in the Patent right requirement 1 simultaneously object lens to place the object lens focal spot to drop on the position on the probe pinpoint of optical fiber probe, because there is limited sweep limit in piezoelectric scanner, so, above technical scheme causes this pick-up unit scanning position location adjusting difficulty big, and it is not convenient to regulate use; 2) optical fiber probe is to mediate by the manual or electronic adjustment rack that is connected with piezoelectric scanner in the axial location adjusting, two movable parts connect, and, mechanical positioning characteristic manual or electronic adjustment rack is not so good as piezoelectric scanner, when piezoelectric scanner, manual or electronic adjustment rack mechanical positioning characteristic has material impact to measuring accuracy, the scan reference benchmark that is equivalent to the high precision scanning mechanism is to be based upon on the low precision adjustment rack, the measurement device precision is had a significant impact, reduced the luminous intensity distribution measurement precision; 3) this pick-up unit is to the requirement on mechanical processing and positioning height of system architecture, complex structure, the requirement on devices height, for example, in Patent right requirement 1, require spectroscope and LASER Light Source optical axis angle at 45, spectroscope reflecting surface central point and optical fiber probe needle point line are the perpendicular line perpendicular to the LASER Light Source optical axis, the spectroscope that is used to detect is the half-reflection and half-transmission spectroscope, the spectroscopical reflecting surface of half-reflection and half-transmission will with incident ray angle at 45, device will include a series of structural requirements such as the video camera that has monitor and requirement on devices all have been increased pick-up unit and realizes difficulty having limited the detection range of application.
Summary of the invention
The objective of the invention is to deficiency at above-mentioned technology formerly, a kind of three-dimensional light distribution detection apparatus for optical focus area is provided, has three-dimensional light distribution measuring ability, device location scanning difficulty is little, regulate easy-to-use, luminous intensity distribution measurement precision height, structural requirement and requirement on devices are low, device realizes that difficulty is low, and characteristics such as have wide range of applications.
Basic design of the present invention is: form tested focus by object lens focusing after the shaping of light source process beam shaping, the one dimension mobile platform drives object lens and realizes moving axially testing coarse positioning, three-dimensional mobile platform drive optical fiber probe carries out carrying out 3-D scanning at focus area and realizes that three-dimensional light distribution detects, in the tested light path device is regulated and test process monitors by monitoring that monitoring optical path that light source, spectroscope and image acquisition device constitute is coupled to by the spectrum spectroscope, analysis controlling unit carries out analysis and Control to whole test process and result to be coordinated.
Technical solution of the present invention is: comprise system source, beam shaping, spectrum spectroscope, object lens, optical fiber probe, photoelectric sensor, analysis controlling unit, one dimension mobile platform, three-dimensional mobile platform, monitor light source, spectroscope and image acquisition device.Beam shaping, spectrum spectroscope, object lens are successively set on the light path of system source outgoing beam, and the corresponding object lens light beam of the needle tip of optical fiber probe exit direction is provided with, and the luminous energy exit end of optical fiber probe is connected with photoelectric sensor.The one dimension mobile platform is fixedlyed connected with object lens, and three-dimensional mobile platform is connected with the needle tip of optical fiber probe.The outgoing beam direction that monitors light source is provided with spectroscope, the outgoing beam of supervision light source is injected the spectroscopical light splitting surface of spectrum after reflecting through spectroscope, it overlaps in injecting a little with system source injecting on spectrum spectroscope light splitting surface on the spectrum spectroscope light splitting surface, and the spectroscopical light splitting surface of spectrum is arranged on the angular bisector of the light path that monitors the light beam after light source is through the reflection of spectroscope light splitting surface and system source emitting light path.Image acquisition device is arranged on and monitors on the reverse extending line of light source through spectroscope light splitting surface reflection back light beam.One dimension mobile platform, three-dimensional mobile platform, photoelectric sensor, image acquisition device are connected with the analysis controlling unit signal respectively.
Described system source is a kind of in semiconductor laser, solid state laser, gas laser, the liquid laser.
Described spectrum spectroscope to the transmitance of system source outgoing beam greater than 85%, and to the reflectivity that monitors the light source outgoing beam greater than 85%.
Described beam shaping is a kind of in beam expander, Beam Wave-Front reshaper, the light distribution regulator.
Described photoelectric sensor is a kind of in photodiode, snowslide pipe, the photomultiplier.
Described one dimension mobile platform is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
Described three-dimensional mobile platform is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
Described image acquisition device is a kind of of surface array charge-coupled device, face battle array complementary metal-oxide-semiconductor transistor, optics microchannel plate device.
The course of work of apparatus of the present invention is that system source is launched light beam, through beam shaping expand the bundle and shaping after directive spectrum spectroscope, the spectrum spectroscope is for system source outgoing beam high permeability, and party forms tested focus area to the spectroscopical transmitted light beam of spectrum through object lens.The needle point of optical fiber probe is arranged on object lens light beam exit direction one side, luminous energy outgoing one end of optical fiber probe is connected with photoelectric sensor, optical fiber probe is collected needle point place luminous energy and is transferred to photoelectric sensor, realization photoelectricity transforms, form and the corresponding electric signal of optical fiber probe needle point place light intensity, and pass to analysis controlling unit; The one dimension mobile platform is connected with analysis controlling unit with object lens, analysis controlling unit control one dimension mobile platform drives object lens and moves on object lens incident light direction, three-dimensional mobile platform is connected with needle point one end of analysis controlling unit and optical fiber probe, analysis controlling unit is controlled three-dimensional mobile platform drive optical fiber probe needle point and is realized three-dimensional moving, the one dimension mobile platform at first drives object lens and moves during test, when the needle point of optical fiber probe is near the object focal point zone, the one dimension mobile platform stops to move, drive the optical fiber probe needle point by three-dimensional mobile platform and realize three-dimensional motion scan, all detect one and optical fiber probe needle point place light intensity signal on each optical fiber probe tip position, and pass to analysis controlling unit, analysis controlling unit is reconstructed processing to the each point light intensity signal of optical fiber probe 3-D scanning, obtains the three-dimensional light distribution of object lens optical focus area.In measuring process, monitor after the light emitted light beam is through the spectroscope reflection and reflected by the spectrum spectroscope again, shine focus area through object lens focusing, the focus area folded light beam is successively through being received by image acquisition device after object lens, the reflection of spectrum spectroscope, the spectroscope transmission, with the imaging of focus area situation and be transferred to analysis controlling unit, measuring process is monitored in real time, be convenient to device and use.
By analysis controlling unit control one dimension mobile platform, three-dimensional mobile platform, and photoelectric sensor and image acquisition device send to analysis controlling unit with detectable signal and handle in apparatus of the present invention, and these all are mature technologies.Inventive point of the present invention is to provide a kind of light channel structure of three-dimensional light distribution detection apparatus for optical focus area.
Compared with prior art, advantage of the present invention:
1) one dimension mobile platform drive object lens are realized moving axially testing coarse positioning, three-dimensional mobile platform drive optical fiber probe carries out carrying out 3-D scanning at focus area and realizes that three-dimensional light distribution detects, adjusting difficulty in pick-up unit scanning position location is low, regulates easy-to-use;
2) optical fiber probe is to drive object lens by the one dimension mobile platform to realize in the axial location coarse adjustment, the optical fiber probe 3-D scanning is realized by the dimension mobile platform, two movable parts are separated from one another, be independent of each other, so the coarse adjustment of one dimension mobile platform is very little to the influence of measurement device precision, has improved the luminous intensity distribution measurement precision;
3) this pick-up unit is low, simple in structure to the requirement on mechanical processing and positioning of system architecture, requirement on devices is low;
4) by monitoring that the monitoring optical path that light source, spectroscope and image acquisition device constitute is coupled in the tested light path by the spectrum spectroscope, can monitor device adjusting and test process.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
As Fig. 1, three-dimensional light distribution detection apparatus for optical focus area comprises system source 1, beam shaping 2, spectrum spectroscope 3, object lens 4, optical fiber probe 5, photoelectric sensor 6, analysis controlling unit 7, one dimension mobile platform 8, three-dimensional mobile platform 9, monitors light source 10, spectroscope 11 and image acquisition device 12.Beam shaping 2, spectrum spectroscope 3, object lens 4 are successively set on the light path of system source 1 outgoing beam, and the corresponding object lens 4 light beam exit directions of the needle tip of optical fiber probe 5 are provided with, and the luminous energy exit end of optical fiber probe 5 is connected with photoelectric sensor 6.One dimension mobile platform 8 is fixedlyed connected with object lens 4, and three-dimensional mobile platform 9 is connected with the needle tip of optical fiber probe 5.The outgoing beam direction that monitors light source 10 is provided with spectroscope 11, after reflecting through spectroscope 11, the outgoing beam of supervision light source 10 injects the light splitting surface of spectrum spectroscope 3, it overlaps in injecting a little with system source 1 injecting on spectrum spectroscope 3 light splitting surfaces on spectrum spectroscope 3 light splitting surfaces, and the light splitting surface of spectrum spectroscope 3 is arranged on the angular bisector of the light path that monitors the light beam after light source 10 is through the reflection of spectroscopes 11 light splitting surfaces and system source 1 emitting light path.Image acquisition device 12 is arranged on and monitors on the reverse extending line of light source 10 through spectroscope 11 light splitting surfaces reflection back light beam.Analysis controlling unit 7 is connected with one dimension mobile platform 8, three-dimensional mobile platform 9, photoelectric sensor 6, image acquisition device 12 signals.
System source 1 is an argon ion gas laser, beam shaping 2 is to expand the adjustable beam expander optics of bundle multiplying power, analysis controlling unit 7 is an industrial computer, photoelectric sensor 6 is a photomultiplier, optical fiber probe 5 adopts general needless to say tuning fork optical fiber probe on the Near-field Optical Microscope, and image acquisition device 12 is a surface array charge-coupled device, and one dimension mobile platform 8 is a stepper motor, three-dimensional mobile platform 9 is the piezoelectric ceramics shifter, and object lens 4 adopt the usual achromatic objective of Nikon.
The course of work of apparatus of the present invention is that system source 1 is launched light beam, through beam shaping 2 expand the bundle and shaping after directive spectrum spectroscope 3, spectrum spectroscope 3 is for system source 1 outgoing beam high permeability, and 4 parties form tested focus area to the transmitted light beam of spectrum spectroscope 3 through object lens.The needle point of optical fiber probe 5 is arranged on object lens 4 light beam exit directions one side, luminous energy outgoing one end of optical fiber probe 5 is connected with photoelectric sensor 6, optical fiber probe 5 is collected needle point place luminous energy and is transferred to photoelectric sensor 6, realization photoelectricity transforms, form and the corresponding electric signal of optical fiber probe 5 needle point place light intensity, and pass to analysis controlling unit 7; One dimension mobile platform 8 is connected with analysis controlling unit 7 with object lens 4, analysis controlling unit 7 control one dimension mobile platforms 8 drive object lens 4 and move on object lens 4 incident light directions, three-dimensional mobile platform 9 is connected with needle point one end of analysis controlling unit 7 and optical fiber probe 5, the three-dimensional mobile platform 9 of analysis controlling unit 7 controls drives optical fiber probe pin 5 points and realizes three-dimensional moving, one dimension mobile platform 8 at first drives object lens 4 and moves during test, when the needle point of optical fiber probe 5 is near object lens 4 focus areas, one dimension mobile platform 8 stops to move, drive optical fiber probe 5 needle points by three-dimensional mobile platform 9 and realize three-dimensional motion scan, all detect one and optical fiber probe 5 needle point place light intensity signals on each optical fiber probe 5 tip position, and pass to analysis controlling unit 7, the each point light intensity signal of 7 pairs of optical fiber probe 5 3-D scannings of analysis controlling unit is reconstructed processing, obtains the three-dimensional light distribution of object lens 4 optical focus areas.In measuring process, monitor after light source 10 emission light beams are through spectroscope 11 reflections and reflected by spectrum spectroscope 3 again, 4 focusing shine focus area through object lens, the focus area folded light beam is successively through being received by image acquisition device 12 after object lens 4, spectrum spectroscope reflection 3, spectroscope 11 transmissions, with the imaging of focus area situation and be transferred to analysis controlling unit 7, measuring process is monitored in real time, be convenient to device and use.Present embodiment has successfully realized that to the usual achromatic objective of Nikon the three-dimensional light distribution of optical focus area detects.
Claims (8)
1, three-dimensional light distribution detection apparatus for optical focus area, comprise system source, beam shaping, spectrum spectroscope, object lens, optical fiber probe, photoelectric sensor, analysis controlling unit, one dimension mobile platform, three-dimensional mobile platform, monitor light source, spectroscope and image acquisition device, it is characterized in that: beam shaping, spectrum spectroscope, object lens are successively set on the light path of system source outgoing beam, the corresponding object lens light beam of the needle tip of optical fiber probe exit direction is provided with, and the luminous energy exit end of optical fiber probe is connected with photoelectric sensor; The one dimension mobile platform is fixedlyed connected with object lens, and three-dimensional mobile platform is connected with the needle tip of optical fiber probe; The outgoing beam direction that monitors light source is provided with spectroscope, the outgoing beam of supervision light source is injected the spectroscopical light splitting surface of spectrum after reflecting through spectroscope, it overlaps in injecting a little with system source injecting on spectrum spectroscope light splitting surface on the spectrum spectroscope light splitting surface, and the spectroscopical light splitting surface of spectrum is arranged on the angular bisector of the light path that monitors the light beam after light source is through the reflection of spectroscope light splitting surface and system source emitting light path; Image acquisition device is arranged on and monitors that one dimension mobile platform, three-dimensional mobile platform, photoelectric sensor, image acquisition device are connected with the analysis controlling unit signal respectively on the reverse extending line of light source through spectroscope light splitting surface reflection back light beam.
2, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described system source is a kind of in semiconductor laser, solid state laser, gas laser, the liquid laser.
3, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described spectrum spectroscope to the transmitance of system source outgoing beam greater than 85%, and to the reflectivity that monitors the light source outgoing beam greater than 85%.
4, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described beam shaping is a kind of in beam expander, Beam Wave-Front reshaper, the light distribution regulator.
5, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described photoelectric sensor is a kind of in photodiode, snowslide pipe, the photomultiplier.
6, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described one dimension mobile platform is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
7, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described three-dimensional mobile platform is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
8, three-dimensional light distribution detection apparatus for optical focus area as claimed in claim 1 is characterized in that: described image acquisition device is a kind of of surface array charge-coupled device, face battle array complementary metal-oxide-semiconductor transistor, optics microchannel plate device.
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| CNA2009100954894A CN101476935A (en) | 2009-01-19 | 2009-01-19 | Three-dimensional light distribution detection apparatus for optical focus area |
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Cited By (7)
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| CN103454185A (en) * | 2013-08-22 | 2013-12-18 | 杭州电子科技大学 | Single particle fuel micro-combustion, gasification suspension, ignition, imaging and detection system |
| CN103454278A (en) * | 2013-08-22 | 2013-12-18 | 杭州电子科技大学 | Microparticle swarm fuel micro-combustion system based on digital holographic optical tweezers |
| CN106970049A (en) * | 2017-05-15 | 2017-07-21 | 中国工程物理研究院激光聚变研究中心 | Transmissivity distribution measurement system and method |
| CN107870511A (en) * | 2017-12-04 | 2018-04-03 | 江苏维普光电科技有限公司 | Quick scanning means based on double light path and apply its scan method |
| CN108593102A (en) * | 2018-05-23 | 2018-09-28 | 广州大学 | A kind of light intensity test device |
| CN110161843A (en) * | 2019-06-14 | 2019-08-23 | 广东工业大学 | A kind of control method and relevant apparatus of Piezoelectric Driving nanopositioning stage |
| CN110726919A (en) * | 2019-10-25 | 2020-01-24 | 中国电子科技集团公司第四十四研究所 | Array APD photoelectric parameter testing system |
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2009
- 2009-01-19 CN CNA2009100954894A patent/CN101476935A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103454185A (en) * | 2013-08-22 | 2013-12-18 | 杭州电子科技大学 | Single particle fuel micro-combustion, gasification suspension, ignition, imaging and detection system |
| CN103454278A (en) * | 2013-08-22 | 2013-12-18 | 杭州电子科技大学 | Microparticle swarm fuel micro-combustion system based on digital holographic optical tweezers |
| CN103454185B (en) * | 2013-08-22 | 2015-07-22 | 杭州电子科技大学 | Single particle fuel micro-combustion, gasification suspension, ignition, imaging and detection system |
| CN103454278B (en) * | 2013-08-22 | 2015-12-23 | 杭州电子科技大学 | Based on the microparticle swarm fuel micro-combustion system of digital hologram light tweezer |
| CN106970049A (en) * | 2017-05-15 | 2017-07-21 | 中国工程物理研究院激光聚变研究中心 | Transmissivity distribution measurement system and method |
| CN106970049B (en) * | 2017-05-15 | 2024-01-02 | 中国工程物理研究院激光聚变研究中心 | Transmission distribution measuring system and method |
| CN107870511B (en) * | 2017-12-04 | 2021-07-20 | 江苏维普光电科技有限公司 | Double-optical-path-based rapid scanning device and scanning method using same |
| CN107870511A (en) * | 2017-12-04 | 2018-04-03 | 江苏维普光电科技有限公司 | Quick scanning means based on double light path and apply its scan method |
| CN108593102A (en) * | 2018-05-23 | 2018-09-28 | 广州大学 | A kind of light intensity test device |
| CN108593102B (en) * | 2018-05-23 | 2023-07-07 | 广州大学 | Light intensity detection device |
| CN110161843A (en) * | 2019-06-14 | 2019-08-23 | 广东工业大学 | A kind of control method and relevant apparatus of Piezoelectric Driving nanopositioning stage |
| CN110726919A (en) * | 2019-10-25 | 2020-01-24 | 中国电子科技集团公司第四十四研究所 | Array APD photoelectric parameter testing system |
| CN110726919B (en) * | 2019-10-25 | 2021-10-26 | 中国电子科技集团公司第四十四研究所 | Array APD photoelectric parameter testing system |
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Application publication date: 20090708 |