CN110108394A - Large area array separate type pressure sensor and preparation method thereof, waterborne conductive slurry and preparation method thereof - Google Patents
Large area array separate type pressure sensor and preparation method thereof, waterborne conductive slurry and preparation method thereof Download PDFInfo
- Publication number
- CN110108394A CN110108394A CN201910418081.XA CN201910418081A CN110108394A CN 110108394 A CN110108394 A CN 110108394A CN 201910418081 A CN201910418081 A CN 201910418081A CN 110108394 A CN110108394 A CN 110108394A
- Authority
- CN
- China
- Prior art keywords
- layer
- electrode
- array
- array unit
- large area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/24—Conductive material dispersed in non-conductive organic material the conductive material comprising carbon-silicon compounds, carbon or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of large area array separate type pressure sensors, by the way that wall is arranged between electrode layer and varistor layer, so that each realizing separate structure by the pressure sensitive unit that electrod-array unit and pressure sensitive array unit are constituted；And electron tunneling layer is provided in varistor layer and/or electrode layer surface, so that invention pressure sensor only when be under pressure act on when, the corresponding electrod-array unit of pressure sensitive array unit ability is in contact by the hollow out position on wall, and pressure sensitive array unit is then separated with electrod-array unit when not being under pressure, infinite at this time, the problem of effectively avoiding ranks cross-coupling in sensor array, so that stable structure is reliable, and response quickly；And assembly of thin films is used, printing technology can be used, be easy to large-scale industrial production.Correspondingly, the present invention also provides the preparation methods of a kind of waterborne conductive slurry and preparation method thereof and the large area array separate type pressure sensor.
Description
Technical field
The present invention relates to a kind of flexible sensors, more particularly to a kind of large area array separate type pressure sensor and its preparation
Method, waterborne conductive slurry and preparation method thereof.
Background technique
Array pressure sensor can show the stress condition of contacted object, can speculate from pressure distribution
Some health parameters of testee out, such as from automotive tire pressure distribution it can be seen that the wear condition of tire；From cushion
Pressure distribution it can be seen that human body sitting posture it is whether correct；From plantar nervous arch it can be seen that the stance of people or posture is on foot
No standard etc..Currently, to be made comparison outstanding for the array pressure sensor of American-European research and development, the sensor by up of three-layer, wherein
Upper layer and lower layer are printed on the strip electrode of vertical and horizontal respectively, and middle layer is pressure sensitive layer.Electrode crossings form one in length and breadth
A sensing unit, each equivalent varistor of sensing unit, with the variation for acting on pressure on sensing unit, resistance
Value can also change, and the width of tape conductor and gap determine the reticular density of entire sensor, the dot matrix of unit area
Density determines the detection resolution of its pressure distribution.
In practical applications, the case where this sensor is when being tested, and is easy to appear ranks signal cross-talk needs
Subsequent processing is carried out to collected signal；Secondly, this sensor is relatively suitble to be distributed detection to the pressure of stationary body,
When carrying out pressure distribution detection and larger pressure to dynamic object, it is easy to make the upper layer and lower layer of sensor to separate, is easily damaged
Sensor.
Summary of the invention
The present invention provides a kind of large area array separate type pressure sensing to solve the problems, such as that the above-mentioned prior art is worked as
Device.
To achieve the above object, the invention adopts the following technical scheme:
A kind of large area array separate type pressure sensor, which is characterized in that successively include flexible base board, wall under upper
And electrode base board, wherein
The lower surface that the flexible base board corresponds to wall is provided with the varistor layer formed by multiple pressure sensitive array units,
Position on the wall corresponding to the pressure sensitive array unit offers hollow out, correspond on the electrode base board it is described between
The upper surface of interlayer is provided with the electrode layer formed by multiple electrodes array element, and the electrod-array unit of the electrode layer with
The position of the hollow out corresponds.
Further, the large area array separate type pressure sensor further includes being arranged in the varistor layer and/or electrode table
The electron tunneling layer in face, the electron tunneling layer are the Gao Jie for being printed on the pressure-sensitive layer surface and/or the electrode layer surface
The polymeric layer of electric constant or the electron tunneling layer are by oxygen treatments applied in the pressure-sensitive layer surface and/or the electricity
The passivation layer that pole layer surface is formed, wherein
The polymer includes silica gel, polyurethane or epoxy resin, 1~10nm of thickness of the polymer；Or, described
Passivation layer is to be carried out by way of high-temperature oxydation or oxygen gas plasma processing to the varistor layer and/or the electrode layer
Processing obtains, with a thickness of 1~5nm.
Wherein, the wall is made of cohesive material, and the flexible base board and electrode base board are bonded simultaneously up and down
It is packaged into the separate type piezoresistive transducer with wall, and space layer made of the cohesive material is 5 μm~200
μm；Wherein, the sticking material of the tool includes that a mode of solid double-sided adhesive glue or adhesive sticker realizes hollow out figure.
Wherein, the flexible base board and/or the electrode base board are made of flexible insulating substrate material, described flexible exhausted
Edge substrate material includes PET, PI, PC, PU or fabric.
Wherein, the pressure sensitive array unit is made of waterborne conductive slurry, and the waterborne conductive material is by aqueous third
Olefin(e) acid ester lotion, aqueous dispersion, aqueous defoamer, conductive black, deionized water, dehydrated alcohol are according to mass ratio 30-50:3-
5:0.5-1:5-20:20-30:0-10 it is equal to be allowed to dispersion after being mixed in such a way that mechanical stirring is combined with ball grinding stirring
It is even, carbon black color paste is obtained, is then again mutually mixed the carbon black color paste and waterborne polyurethane resin with mass ratio 1:1-10, and utilize
Mechanical stirring is allowed to be uniformly mixed and obtain.
Wherein, the electrod-array unit be interdigital electrode, and/or, the pressure sensitive array unit be in for rectangle, circle,
Triangle or other random geometries, and the varistor layer with a thickness of 2-10 μm.
Further, the battle array of the sensing unit formed by the pressure sensitive array unit (2) and the electrod-array unit (6)
Column number is 1~128 × 1~128, and the sensing unit is having a size of 1mm~50mm × 1mm~50mm；And/or the pressure
The duty ratio (area ratio of the gross areas of i.e. all pressure sensitive array units and flexible base board lower surface) of photosensitive layer is 50%~
85%, the maximum pressure working range of device is 10g~100kg, and specific range be by varistor layer resistance, spacer height,
Unit component area and electron tunneling layer codetermine.
The present invention is combined by wall with electron tunneling layer, and the ranks train of signal of array device can be effectively reduced
It disturbs, so that only when the corresponding electrod-array unit of the pressure-sensitive unit ability in the sensing unit being under pressure passes through bonding
Pressure-sensitive unit is then separated with electrod-array unit in the sensing unit that the hollow out position of layer is in contact, and ought not be under pressure,
Infinite at this time, the problem of effectively avoiding ranks cross-coupling, so that stable structure is reliable, and response quickly；
And assembly of thin films is used, printing technology can be used, be easy to large-scale industrial production.
Based on above-mentioned large area array separate type pressure sensor, the present invention also provides the large area array separate type pressure sensings
The preparation method of device comprising following steps:
Step 1: production has the flexible electrode substrate of electrode layer, wherein the electrode layer is by multiple electrodes array element
It is formed；Specifically, the flexible electrode substrate of electrod-array is had according to the production of geomery required by practical application；
Step 2: corresponding water soluble acrylic acid is weighed respectively with mass ratio 30-50:3-5:0.5-1:5-20:20-30:0-10
Ester lotion, aqueous dispersion, aqueous defoamer, conductive black, deionized water, dehydrated alcohol are stirred to obtain carbon black color paste,
Then carbon black color paste is weighed respectively with mass ratio 1:1-10 and waterborne polyurethane resin is stirred mixing, obtain waterborne conductive slurry
Material；
Step 3: previously prepared flexible base board being placed on the print station of screen process press, being prepared into step 2
To waterborne conductive slurry be poured on the halftone corresponding to the printed patterns of electrod-array and printed, thus in the flexible base
The 2-10 μ m-thick varistor layer with pressure sensitive array is formed on plate；
Step 4: according to the electrode layer or the varistor layer, using laser engraving machine on wall corresponding position into
Row engraves cavitation process, or directlys adopt the mode of silk-screen printing and carry out hollow processing to jointing material, obtains between hollow out
Interlayer；
Step 5: wall is aligned with flexible electrode substrate, and is affixed on the flexible electrode substrate, then
The flexible substrates for being printed on varistor layer are aligned with flexible electrode substrate, are pasted on wall, so that pressure sensitive array unit corresponds to
Hollow out on the wall, to obtain large area array high density distributed pressure sensor.
Further, after obtaining varistor layer and/or electrode layer, the preparation method is further comprised the steps of: described pressure-sensitive
The polymeric layer that layer perhaps prints high dielectric constant in interdigital electrode can also carry out oxygen to the varistor layer or interdigital electrode
Change obtains passivation layer, to obtain the electron tunneling layer being located in pressure-sensitive layer surface.Wherein polymer includes, silica gel, polyurethane,
Epoxy resin etc., 1~10nm of thickness；Passivation layer can be obtained by the modes such as high-temperature oxydation or oxygen gas plasma processing,
With a thickness of 1~5nm.
Wherein, the electrod-array unit is interdigital electrode, and/or, the pressure sensitive array unit is in rectangle, circle, three
Angular or other random geometries, and the varistor layer with a thickness of 2-10 μm.
On the other hand, the present invention also provides a kind of preparation methods of waterborne conductive slurry comprising step:
Water-and acrylate lotion, water are weighed respectively according to mass ratio 30-50:3-5:0.5-1:5-20:20-30:0-10
Property dispersing agent, aqueous defoamer, conductive black, deionized water, dehydrated alcohol, and combined by mechanical stirring with ball grinding stirring
Mode be allowed to be uniformly dispersed, obtain carbon black color paste；
Carbon black color paste is weighed respectively according to mass ratio 1:1-10 mutually to be mixed with waterborne polyurethane resin, and is stirred using machinery
It mixes and is allowed to uniformly mixed, obtain waterborne conductive slurry.Preferably, the specific gravity control of conductive black is 0.5~10%, to obtain face
Resistance is the varistor layer of 5M Ω~20k Ω.
Further, by carbon black color paste and waterborne polyurethane resin whipping process, the defoaming of 0.5%-2% is added
Agent.
Correspondingly, the present invention also provides the waterborne conductive slurries obtained using above-mentioned preparation method.
Beneficial effect is:
1, the present invention between electrode layer and varistor layer by being arranged wall, so that each by electrod-array unit and pressure
The pressure sensitive unit that quick unit is constituted realizes separate structure；Further, electricity is provided in varistor layer or electrode surface
Sub- tunnel layer, so that only when the corresponding electrod-array unit of the pressure-sensitive unit ability in the sensing unit being under pressure passes through
Pressure-sensitive unit then divides with electrod-array unit in the sensing unit that the hollow out position of adhesive layer is in contact, and ought not be under pressure
From infinite, effectively avoids the ranks Cross-coupling issues in sensor array at this time.
2, the present invention utilizes two equipotential originals of input terminal of operational amplifier by terminating operational amplifier in output
Reason, efficiently solves the ranks Cross-coupling issues in multi-point sampler, while also reducing power consumption, referring to Fig. 3 and Fig. 5.
3, the present invention prints pressure-sensitive cell array using printing technology on a flexible substrate, and simple process is easy to extensive
Industrialized production.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described.In all the appended drawings, similar element
Or part is generally identified by similar appended drawing reference.In attached drawing, each element or part might not be drawn according to actual ratio.
Fig. 1 is a kind of structural schematic diagram of an embodiment of large area array separate type pressure sensor of the invention；
Fig. 2 is the schematic equivalent circuit of each sensing unit of large area array separate type pressure sensor in Fig. 1；
Fig. 3 is the back-end processing circuit schematic diagram of large area array separate type pressure sensor in Fig. 1；
Fig. 4 be Fig. 1 in large area array separate type pressure sensor application in imaging pressure system schematic diagram；
Fig. 5 is electrod-array unit is electrically connected in a kind of reaction large area array separate type pressure sensor of the invention one
The schematic diagram of embodiment；
Fig. 6 is the imaging effect of large area array separate type pressure sensor application of the invention in pressure sensing imaging system
With the performance comparison table between existing U.S. SPI imaging effect.
Appended drawing reference: wherein 1 is flexible substrates, and 2 be pressure-sensitive unit, and 3 be wall, and 4 be the hollow out on wall, and 5 are
Flexible electrode substrate, 6 be the interdigital electrode pair on flexible electrode substrate.
Specific embodiment
Below with reference to embodiment, the present invention is further illustrated.
Although specific embodiments of the present invention have been described above, it will be appreciated by those of skill in the art that these
It is merely illustrative of, protection scope of the present invention is defined by the appended claims.Those skilled in the art is not carrying on the back
Under the premise of from the principle and substance of the present invention, various changes or modifications can be made to these embodiments, but these are changed
Protection scope of the present invention is each fallen with modification.
The present invention between flexible base board and electrode base board by being arranged wall, thus by the pressure of flexible base board lower surface
It is separated between photosensitive layer and electrode base board upper electrode layer, obtains having the large area array separate type pressure resistance type of certain intervals to sense
Device, and varistor layer is separated with electrode layer when no pressure effect, this structure is very fast to force response rate ratio, high sensitivity；Into
One step, by the way that electron tunneling layer is arranged in varistor layer and/or electrode layer surface, combines it with separate type wall, make
It obtains only when being under pressure, pressure sensitive array unit can pass through the electricity of hollow out corresponding on wall position and corresponding position
Pole array element is in contact, and when not being under pressure, pressure sensitive array unit is then separated with electrod-array unit, at this time resistance
Infinity effectively avoids the ranks Cross-coupling issues in sensor array.
On the other hand, the pressure sensitive array unit in the large area array separate type pressure sensor of the invention uses printing-type water
Property electrocondution slurry system, pressure sensitive array unit is printed on a flexible substrate using printing technology, forms 2-10 μm of varistor layer,
Cost of manufacture is not only reduced, Mass production is also conducive to.
In the present invention, the flexible base board 1 and electrode base board 5 can be used flexible insulating substrate material and be made, as PET, PI,
PC, PU or fabric, so that the large area array separate type pressure sensor can be further used for preparing various flexible electronics and set
It is standby.
The present invention, varistor layer on the flexible base board 1 with a thickness of 2-10nm, for by silk-screen printing will it is previously prepared must
To waterborne conductive slurry be graphically printed on what above-mentioned flexible base board 1 obtained, and the waterborne conductive slurry be using mill base+
The arrangements of blender obtain, to improve the printing adaptability and resistance control of power photosensitive layer, wherein the electricity of the power photosensitive layer
Resistance modification scope is 10M Ω -10k Ω.
In the present invention, which is to be made using the sticking material of tool such as solid double-sided adhesive glue or adhesive sticker
One with hollow out 5 μm~200 μ m-thicks adhesive layer, so as to which flexible base board 1 and about 5 electrode base board to be bonded and encapsulate
The separate type piezoresistance sensor with wall (i.e. the adhesive layer of cohesive material formation) is formed, i.e., is acted in no pressure
Under, due to the isolation of wall and tunnel layer, pressure sensitive array unit and the separation of electrod-array unit realize pressure sensing list
The separate structure of member, only under pressure, the corresponding electrod-array unit of pressure sensitive array unit ability pass through interval
Hollow out on layer is in contact, so that faster to force response rate, sensitivity is also higher, and can be by regulating and controlling the interval
The thickness of layer regulates and controls sensitivity and the range of device, so that the flexibility of device is higher, adaptation range is also wider.
In the present invention, above-mentioned electronics tunnel layer is by printing 1~10nm in pressure-sensitive layer surface and/or electrode layer surface
The polymer of thick high dielectric constant, such as perhaps silica gel or epoxy resin etc. obtain polyurethane material；Alternatively, passing through oxygen
Processing (as high-temperature oxydation or oxygen gas plasma are handled) is pressure-sensitive layer surface and/or electrode layer surface form 1~5nm thickness
What passivation layer obtained.
The present invention between varistor layer and electrode layer by being arranged wall and electron tunneling layer, so that each by electrode array
The pressure sensitive unit that column unit and pressure-sensitive unit are constituted realizes separate structure, and since pressure sensitive array unit is using special
The waterborne conductive slurry of system is made, so that the measurement range of large area array separate type pressure sensor either pressure of the invention,
Or measurement accuracy is all further enhanced, but also the performance of the various electronic equipments of application pressure sensor of the present invention obtains
To raising, referring to fig. 4 in sensor of the invention be applied to pressure sensing imaging system in imaging effect, and its with existing beauty
Performance comparison table between state SPI, referring to Fig. 6.
Large area array separate type pressure sensor of the invention is carried out specifically with attached drawing combined with specific embodiments below
It is bright.
Embodiment one
It is a kind of structural schematic diagram of an embodiment of large area array separate type pressure sensor of the invention, tool referring to Fig. 1
Body, with sensing unit (i.e. array element is formed by pressure sensitive array unit and electrod-array unit) matrix number for 8 × 8
Large area array separate type pressure sensor for, array cell sizes be 1mm × 1mm, varistor layer duty ratio be 85%, device
Maximum pressure working range be 100g, the large area array separate type pressure sensor of the present embodiment successively includes: from top to bottom
Flexible substrates 1, wall 3 and flexible electrode substrate 5, wherein the flexible substrates 1 correspond to the following table of wall 3
Face is provided with the varistor layer formed by multiple pressure sensitive array units 2, and the upper surface on the wall 3 corresponding to wall 3 is also set
It is equipped with the electrode layer formed by multiple electrodes array element 6, and the hollow out 4 on each electrod-array unit 6 and wall 3 is one by one
Corresponding namely each electrod-array unit 6 is corresponded with each pressure sensitive array unit 2 by hollow out 4, i.e., in the present embodiment,
Each pressure sensitive array unit 2 of varistor layer and each electrod-array unit 6 of electrode layer are separated by the wall 3,
To realize the separate structure of varistor layer and electrode layer, thus when no pressure, between the positive and negative electrode of electrod-array unit 6
Infinite；And when there is pressure to act on corresponding on pressure sensitive array unit 2, the pressure sensitive array unit 2 of corresponding position is logical
Corresponding hollow out 4 is crossed to be in contact with electrod-array unit 6 below so that the positive and negative electrode of electric resistance array unit 6 it
Between resistance change, and resistance reduces with the increase of pressure.
In the present embodiment, which is made of PET, and electrode base board 5 then uses FPC array circuit, and should
Each electrod-array unit 6 in FPC array circuit is all made of interdigital electrode (to).Certainly, flexibility FPC array circuit is big
Small, electrod-array cell size, interdigital electrode electrode can be according to practical application request to the interdigital gap of density, interdigital electrode
Design, and the electric connection mode of each electrod-array unit is shown in Figure 5.
In the present embodiment, which is obtained using the OCA glue of 5 μ m-thick of laser engraving hollow out, then utilizes alignment fitting
Wall is directed at fitting with the varistor layer on flexible siding 1 by equipment；Finally, being directed at abutted equipment for above-mentioned preparation using CCD
And the electrode layer and varistor layer handled well are bonded wall by OCA and carry out contraposition encapsulation, obtain separate type pressure sensor battle array
Column.Certainly, the mode which can also be used silk-screen printing adhesive sticker realizes hollow out figure.
In the present embodiment, which is by silk-screen printing by previously prepared obtained waterborne conductive slurry figure
Shape is printed in PET flexible substrate, and then 80 DEG C solidification 1 hour in constant temperature oven, obtains 10 μ m-thicks on PET substrate
Varistor layer, surface resistance are 20k Ω.
In one embodiment, in order to obtain the waterborne conductive slurry of good dispersion, it is aqueous that this is carried out using two-step method
The configuration of electrocondution slurry: firstly, by water-and acrylate lotion, aqueous dispersion, aqueous defoamer, conductive black, deionization
The side that water, dehydrated alcohol (weight ratio/mass ratio is 45:5:0.5:20:30:10) are combined by mechanical stirring with ball grinding stirring
Formula is allowed to be uniformly dispersed, and obtains carbon black color paste；Then, before printing, by carbon black color paste and waterborne polyurethane resin with the ratio of 1:1
It is mutually mixed again, mechanical stirring is allowed to uniformly mixed.In the present embodiment, pressure sensitive array list is prepared using power waterborne conductive slurry
First (power sensitive array unit), not only environmentally protective, low cost, and due to configuring water using mill base+blender scheme
Property electrocondution slurry improve varistor layer printing adaptability and resistance control.
Further, in order to avoid mutually mix during bubble generation, 0.5% defoaming can be added in the process
Agent.
Certainly, shape, thickness and the size of the pressure sensitive array unit on flexible base board 1 can be carried out according to practical application request
Design, if the shape of the pressure sensitive array unit can be rectangle, circle, triangle or other random geometries, and the varistor layer
Thickness can also be 2 μm or 10 μm.
It is described in detail below with reference to sensing unit of the equivalent circuit diagram to the present embodiment.
It referring to fig. 2, is sensing unit each in the present embodiment (including pressure sensitive array unit and electrod-array unit/interdigital
Electrode) equivalent circuit diagram, specifically, according to the two of operational amplifier equipotential principles of input terminal, each sensing unit
Resistance be calculated by formula once:
Wherein, R is the equivalent resistance of pressure sensitive array unit, VccTo be added in swashing for large area array separate type pressure sensor one end
Encourage voltage, RfFor the feedback resistance of operational amplifier, VoutFor the output voltage of operational amplifier.
Based on above-mentioned equivalent circuit, the back-end processing circuit of large area array separate type pressure sensor of the invention is referring to figure
3, wherein each row of the large area array separate type pressure sensor connects digital simulation switch, and column output end is connected with operational amplifier,
Then single-chip microcontroller (i.e. MCU comprising ADC) is accessed, by being switched on or switched off for single-chip microcontroller control digital simulation switch, to realize row
Column selection；Then column output signal passes through the ADC for being amplified into single-chip microcontroller of operational amplifier, passes through serial ports after converted
It is sent to PC, storage, processing and the display of data are realized by the upper computer software on PC.Wherein, the times magnification of operational amplifier
Several and number of stages of amplification (such as two-stage or three-level) can carry out flexible design according to practical application request.
Embodiment two
The present invention also provides another large area array separate type pressure sensors comprising each in above-described embodiment one
A component, unlike, in order to further decrease the ranks signal cross-talk of array device, the large area array separate type pressure of the present embodiment
Force snesor is provided with an electron tunneling layer also between the varistor layer and electrode layer.
In the present embodiment, by the PDMS (dimethyl silicone polymer) for printing 5nm thickness in pressure-sensitive layer surface/electrode layer surface
As polymer-electronics tunnel layer.Certainly, it also can print 3nm or 8nm or the PDMS (dimethyl silicone polymer) of 10nm thickness make
For polymer-electronics tunnel layer.
In another embodiment, using high-temperature oxydation or oxygen gas plasma processing by the way of to varistor layer and/
Or electrode layer carries out oxidation processes in the passivation layer of varistor layer and/or the 3nm or 5nm of electrode layer surface formation as electronics tunnel
Layer.
In the present embodiment, by the way that the electron tunneling layer of 1~10nm thickness is arranged in pressure-sensitive layer surface, so as to avoid unloaded short
Road.
Embodiment three
The large area array separate type pressure sensor of the present embodiment includes all parts in above-described embodiment two, different
It is:
The matrix number of the present embodiment is 32 × 32, and array cell sizes are 5mm × 5mm, the duty ratio of pressure sensitive regions
75%, the maximum pressure working range of device is 10kg.
In the present embodiment, which is made of PI, and flexible electrode substrate 5 then uses PET substrate, and passes through silk
Wire mark brush silver paste interdigital electrode obtains.
Certainly, the electrod-array cell size, electrod-array unit electrode can to the interdigital gap of density, interdigital electrode
It is designed according to practical application request；Correspondingly, shape, thickness and the size of the pressure sensitive array unit on PI film can be according to reality
Application demand is designed.
In the present embodiment, wall 3 is using thick 25 μm of the adhesive sticker of silk-screen printing to realize hollow out wall, then
The wall is directed at fitting with the varistor layer on PI using CCD alignment abutted equipment.
In the present embodiment, which is the method using printing in pressure-sensitive layer surface/electrode layer surface, that is, is being pressed
Sensitive array cell surface/interdigital electrode layer surface printing thickness 7nm polyurethane obtains.
In the present embodiment, which is by silk-screen printing that previously prepared waterborne conductive slurry is graphical
It is printed in PI flexible substrate, then 80 DEG C solidification 1 hour in constant temperature oven, obtains 7 μm of varistor layers on PI substrate, face
Resistance is 100k Ω, and the configuration method for preparing the waterborne conductive slurry of the pressure sensitive array unit includes: firstly, by water soluble acrylic acid
Ester lotion, aqueous dispersion, aqueous defoamer, conductive black, deionized water, dehydrated alcohol (mass ratio/weight ratio be 50:3:
It 0.5:15:20:10) is allowed to be uniformly dispersed in such a way that mechanical stirring is combined with ball grinding stirring, obtains carbon black color paste；So
Afterwards, before printing, carbon black color paste and waterborne polyurethane resin are mutually mixed with the specific gravity of 1:2, it is equal that mechanical stirring is allowed to mixing
It is even.
Further, in order to avoid mutually mix during bubble generation, 0.5% defoaming can be added in the process
Agent.
Example IV
The large area array separate type pressure sensor of the present embodiment includes all parts in above-described embodiment two, different
It is:
The matrix number of the present embodiment is 64 × 8, and array cell sizes are 2mm × 3mm, the duty ratio of pressure sensitive regions
60%, the maximum pressure working range of device is 20kg.
In the present embodiment, which is to utilize the method for plasma oxidation by the varistor layer on flexible base board 1
Processing is passivated to obtain, passivation layer with a thickness of 2nm.
In the present embodiment, wall is obtained using the adhesive sticker of 50 μ m-thick of silk-screen printing, then utilizes alignment fitting
Equipment realizes that wall is directed at fitting with varistor layer.
In the present embodiment, which is by the way that waterborne conductive slurry is graphically printed on PET flexible substrate
On, solidify 1 hour for 80 DEG C in constant temperature oven, obtain the varistor layer of 5 μ m-thicks on PET substrate, surface resistance is 400k Ω.Wherein,
The waterborne conductive slurry carries out slurry configuration using two-step method: firstly, by water-and acrylate lotion, aqueous dispersion, aqueous
Defoaming agent, conductive black, deionized water, dehydrated alcohol (specific gravity 30:5:0.5:5:30:10) are stirred by mechanical stirring and ball milling
It mixes the mode combined to be allowed to be uniformly dispersed, obtains carbon black color paste；Then, before printing, by carbon black color paste and aqueous polyurethane
Resin is mutually mixed with the specific gravity of 1:5, and mechanical stirring is allowed to uniformly mixed.In order to avoid mutually mix during bubble generation, can
0.5% defoaming agent to be added in the process.
Embodiment five
The large area array separate type pressure sensor of the present embodiment includes all parts in above-described embodiment two, different
It is:
The matrix number of the present embodiment is 128 × 128, and array cell sizes are 2mm × 2mm, the duty ratio of pressure sensitive regions
50%, the maximum pressure working range of device is 50kg.
In the present embodiment, which is that interdigital electrode layer is passivated place using the method for plasma oxidation
Reason, obtains the passivation layer with a thickness of 5nm.
In the present embodiment, which is to obtain the wall of hollow out using the adhesive sticker of 100 μ m-thick of silk-screen printing, so
Realize that wall is directed at fitting with varistor layer using alignment abutted equipment afterwards.
In the present embodiment, which is that waterborne conductive slurry is graphically printed on PET by silk-screen printing
In flexible substrate, solidifies 1 hour for 80 DEG C in constant temperature oven, obtain 2 μ m-thick varistor layers on PET substrate, surface resistance 1000k
Ω.Wherein, which carries out slurry configuration using two-step method: firstly, by water-and acrylate lotion, aqueous dispersion
Agent, aqueous defoamer, conductive black, deionized water, dehydrated alcohol (specific gravity 40:5:1:10:30:0) by mechanical stirring with
The mode that ball grinding stirring combines is allowed to be uniformly dispersed, and obtains carbon black color paste.Then, before printing, by carbon black color paste with it is aqueous
Polyurethane resin is mutually mixed with the specific gravity of 1:10, and mechanical stirring is allowed to uniformly mixed.In order to avoid bubble during mutually mixing
It generates, 2% defoaming agent can be added in the process.
Embodiment six
It is in embodiment any one in above-described embodiment one to five the present invention also provides a kind of waterborne conductive slurry
The preparation method of documented waterborne conductive slurry, i.e., with mass ratio 30-50:3-5:0.5-1:5-20:20-30:0-10 by water
Property acrylic acid ester emulsion, aqueous dispersion, aqueous defoamer, conductive black, deionized water, dehydrated alcohol by mechanical stirring with
The mode that ball grinding stirring combines is allowed to be uniformly dispersed, and obtains carbon black color paste；It then is 1:1-10 by carbon black color paste with mass ratio
It with waterborne polyurethane resin mutually to mix, and is allowed to uniformly mixed using mechanical stirring, obtains waterborne conductive slurry.
Further, in carbon black color paste and waterborne polyurethane resin whipping process, the defoaming agent of 0.5%-2% is added.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (12)
1. a kind of large area array separate type pressure sensor, which is characterized in that successively include flexible base board (1), interval under upper
Layer (3) and electrode base board (5), wherein
The lower surface that the flexible base board (1) corresponds to wall (3) is provided with the pressure formed by multiple pressure sensitive array units (2)
Photosensitive layer, the position that the pressure sensitive array unit (2) is corresponded on the wall (3) offer hollow out (4), the electrode base board
(5) upper surface on corresponding to the wall (3) is provided with the electrode layer formed by multiple electrodes array element (6), and institute
The position for stating electrod-array unit (6) and the hollow out (4) corresponds.
2. large area array separate type pressure sensor according to claim 1, which is characterized in that further include being arranged in the pressure
The electron tunneling layer of photosensitive layer surface and/or the electrode layer surface, the electron tunneling layer are to be printed on the pressure-sensitive layer surface
And/or the high dielectric constant of the electrode layer surface polymeric layer or the electron tunneling layer be exist by oxygen treatments applied
The passivation layer that the pressure-sensitive layer surface and/or the electrode layer surface are formed, wherein
The polymer includes silica gel, polyurethane or epoxy resin, 1~10nm of thickness of the polymer；Or, the passivation
Layer is to be handled by way of high-temperature oxydation or oxygen gas plasma processing the varistor layer and/or the electrode layer
It obtains, with a thickness of 1~5nm.
3. large area array separate type pressure sensor according to claim 1, which is characterized in that the wall is using viscosity
Material is made, and the flexible base board (1) and electrode base board (5) are bonded up and down and are packaged into the separate type pressure with wall
Resistive sensor, and space layer made of the cohesive material is 5 μm~200 μm；Wherein, the sticking material of tool
A mode including solid double-sided adhesive glue or adhesive sticker realizes hollow out figure；And/or
The flexible base board (1) and/or the electrode base board (5) are made of flexible insulating substrate material, the flexible insulation
Substrate material includes PET, PI, PC, PU or fabric.
4. large area array separate type pressure sensor according to claim 2, which is characterized in that the pressure sensitive array unit
(2) for made of waterborne conductive slurry, the waterborne conductive slurry is by water-and acrylate lotion, aqueous dispersion, aqueous
It is equal that defoaming agent, conductive black, deionized water, dehydrated alcohol are allowed to dispersion in such a way that mechanical stirring is combined with ball grinding stirring
It is even, after obtaining carbon black color paste, then the carbon black color paste and waterborne polyurethane resin mutually mixed with certain proportion, and stirred using machinery
It mixes to be allowed to be uniformly mixed and obtain.
5. large area array separate type pressure sensor as claimed in any of claims 1 to 4, which is characterized in that described
Electrod-array unit (6) is interdigital electrode, and/or, the pressure sensitive array unit (2) is in for rectangle, circle, triangle or other
Random geometry, and the varistor layer with a thickness of 2-10 μm.
6. large area array separate type pressure sensor as claimed in any of claims 1 to 4, which is characterized in that by institute
The matrix number for stating the sensing unit that pressure sensitive array unit (2) and the electrod-array unit (6) are formed is 1~128 × 1~
128, and the sensing unit is having a size of 1mm~50mm × 1mm~50mm；And/or the duty ratio of the varistor layer be 50%~
85%.
7. the preparation method of large area array separate type pressure sensor according to claims 1 to 6, which is characterized in that including
Following steps:
Step 1: production has the flexible electrode substrate of electrode layer, wherein the electrode layer is formed by multiple electrodes array element；
Step 2: corresponding water-and acrylate cream is weighed respectively with mass ratio 30-50:3-5:0.5-1:5-20:20-30:0-10
Liquid, aqueous dispersion, aqueous defoamer, conductive black, deionized water, dehydrated alcohol are stirred to obtain carbon black color paste, then
Carbon black color paste is weighed respectively with mass ratio 1:1-10 and waterborne polyurethane resin is stirred mixing, obtains waterborne conductive slurry；
Step 3: previously prepared flexible base board being placed on the print station of screen process press, the waterborne conductive in step 2
Slurry, which is poured on halftone, to be printed, and the printed patterns on the halftone are opposite with electrod-array unit each in the electrode layer
Answer, thus on the flexible base board formed have multiple pressure sensitive array units varistor layer, and the varistor layer with a thickness of
2-10μm；
Step 4: according to the electrode layer or the varistor layer, jointing material is carried out using laser engraving machine to engrave cavitation process,
Or the mode for directlying adopt silk-screen printing obtains the wall of hollow out to jointing material progress hollow processing；
Step 5: the wall that step 4 is prepared being aligned with the flexible electrode substrate in step 1, and it is soft to be affixed to this
Property electrode base board on, then the flexible substrates of varistor layer and be pasted with the flexible electrode substrate pair of wall being printed in step 3
Together, it and is pasted on wall, so that pressure sensitive array unit corresponds to the hollow out on the wall, obtains large area array high density
Distributed pressure sensor.
8. preparation method according to claim 7, which is characterized in that obtain varistor layer or electrode layer further includes step later
It is rapid:
The polymeric layer of high dielectric constant is printed on the varistor layer and/or the electrode layer；Wherein, the polymer includes
Silica gel, polyurethane, epoxy resin, and the polymeric layer with a thickness of 1~10nm；And/or
Oxidation is carried out to the varistor layer and/or the electrode layer using high-temperature oxydation or oxygen gas plasma and forms passivation
Layer, to obtain the electron tunneling layer in the pressure-sensitive layer surface and/or the electrode layer surface, wherein the passivation layer
With a thickness of 1~5nm.
9. preparation method according to claim 7, which is characterized in that the electrod-array unit is interdigital electrode, and/
Or, the pressure sensitive array unit is in be rectangle, circle, triangle or other random geometries.
10. a kind of preparation method of waterborne conductive slurry, which is characterized in that comprising steps of
Water-and acrylate lotion, aqueous point are weighed respectively according to mass ratio 30-50:3-5:0.5-1:5-20:20-30:0-10
Powder, aqueous defoamer, conductive black, deionized water, dehydrated alcohol, and the side combined by mechanical stirring with ball grinding stirring
Formula is allowed to be uniformly dispersed, and obtains carbon black color paste；
According to mass ratio 1:1-10 by carbon black color paste and waterborne polyurethane resin mutually to mix, and mixing is allowed to using mechanical stirring
It is even, obtain waterborne conductive slurry.
11. preparation method according to claim 10, which is characterized in that stirred in carbon black color paste and waterborne polyurethane resin
In the process, the defoaming agent of 0.5%-2% is added.
12. a kind of waterborne conductive slurry that preparation method described in 0 or 11 is prepared according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910418081.XA CN110108394B (en) | 2019-05-20 | 2019-05-20 | Large-area-array separated pressure sensor and preparation method thereof, and aqueous conductive slurry and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910418081.XA CN110108394B (en) | 2019-05-20 | 2019-05-20 | Large-area-array separated pressure sensor and preparation method thereof, and aqueous conductive slurry and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110108394A true CN110108394A (en) | 2019-08-09 |
| CN110108394B CN110108394B (en) | 2021-08-10 |
Family
ID=67491049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910418081.XA Active CN110108394B (en) | 2019-05-20 | 2019-05-20 | Large-area-array separated pressure sensor and preparation method thereof, and aqueous conductive slurry and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110108394B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111289157A (en) * | 2020-05-08 | 2020-06-16 | 山东爱奥智能科技有限公司 | Circuit and method for measuring pressure distribution through piezoresistive sensing array |
| CN111358469A (en) * | 2020-04-15 | 2020-07-03 | 青岛一小步科技有限公司 | Plantar pressure detection device, foot health detection device and detection method |
| CN112645198A (en) * | 2020-12-19 | 2021-04-13 | 重庆威斯特电梯有限公司 | Control system suitable for elevator layer door safety protection |
| CN112747844A (en) * | 2020-12-22 | 2021-05-04 | 北京航空航天大学杭州创新研究院 | Preparation method of sandwich structure touch sensing array |
| CN113028967A (en) * | 2021-03-25 | 2021-06-25 | 广州碳思科技有限公司 | Flexible micro-displacement sensor and flexible micro-displacement sensing device |
| CN113091965A (en) * | 2021-04-25 | 2021-07-09 | 棉捷(北京)网络科技有限公司 | Pressure sensor and pressure sensing system |
| CN113716517A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Full-printed array reading circuit and preparation method thereof |
| CN113720501A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Large-area-array flexible thin film sensor and full-printing preparation method thereof |
| CN113720503A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof |
| CN113820048A (en) * | 2021-09-30 | 2021-12-21 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN116380327A (en) * | 2023-03-23 | 2023-07-04 | 墨现科技(东莞)有限公司 | Film pressure sensor and preparation method thereof |
| CN116656196A (en) * | 2023-06-02 | 2023-08-29 | 浙江欧仁新材料有限公司 | Water-based force-sensitive carbon paste and preparation method and application thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101719392A (en) * | 2009-12-30 | 2010-06-02 | 内蒙古大学 | Preparation method of screen printing water-based conductive paste based on carbon-copper composite packing |
| CN102928137A (en) * | 2012-11-14 | 2013-02-13 | 合肥工业大学 | Four-interdigital-electrode type three-dimensional force contact sensor for artificial skin |
| CN103413787A (en) * | 2013-08-29 | 2013-11-27 | 厦门大学 | Method for preparing step-shaped oxide layer Au/SiO2/Si nanometer rod memory device |
| CN103971784A (en) * | 2013-01-24 | 2014-08-06 | 上海九鹏化工有限公司 | Novel organic/inorganic nano-composite electric conduction slurry and preparing method of novel organic/inorganic nano-composite electric conduction slurry |
| CN106197774A (en) * | 2016-07-20 | 2016-12-07 | 上海交通大学 | Flexible piezoresistive tactile sensor array and preparation method thereof |
| CN106433319A (en) * | 2016-10-14 | 2017-02-22 | 中国科学院山西煤炭化学研究所 | Waterborne environment-friendly conducive carbon paste based on graphene-carbon black composite filler and preparation method |
| CN108458819A (en) * | 2018-06-14 | 2018-08-28 | 王�华 | A kind of large area flexible pressure sensor |
| CN108469321A (en) * | 2018-06-14 | 2018-08-31 | 王�华 | A kind of flexible sensor array |
| CN108801516A (en) * | 2018-06-14 | 2018-11-13 | 杭州电子科技大学 | A kind of preparation method of large area flexible sensor array |
| CN108955994A (en) * | 2018-06-13 | 2018-12-07 | 中国科学院电子学研究所 | Touch sensor and preparation method thereof |
| CN108986985A (en) * | 2018-06-07 | 2018-12-11 | 太仓萃励新能源科技有限公司 | A kind of production method of waterborne conductive slurry |
-
2019
- 2019-05-20 CN CN201910418081.XA patent/CN110108394B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101719392A (en) * | 2009-12-30 | 2010-06-02 | 内蒙古大学 | Preparation method of screen printing water-based conductive paste based on carbon-copper composite packing |
| CN102928137A (en) * | 2012-11-14 | 2013-02-13 | 合肥工业大学 | Four-interdigital-electrode type three-dimensional force contact sensor for artificial skin |
| CN103971784A (en) * | 2013-01-24 | 2014-08-06 | 上海九鹏化工有限公司 | Novel organic/inorganic nano-composite electric conduction slurry and preparing method of novel organic/inorganic nano-composite electric conduction slurry |
| CN103413787A (en) * | 2013-08-29 | 2013-11-27 | 厦门大学 | Method for preparing step-shaped oxide layer Au/SiO2/Si nanometer rod memory device |
| CN106197774A (en) * | 2016-07-20 | 2016-12-07 | 上海交通大学 | Flexible piezoresistive tactile sensor array and preparation method thereof |
| CN106433319A (en) * | 2016-10-14 | 2017-02-22 | 中国科学院山西煤炭化学研究所 | Waterborne environment-friendly conducive carbon paste based on graphene-carbon black composite filler and preparation method |
| CN108986985A (en) * | 2018-06-07 | 2018-12-11 | 太仓萃励新能源科技有限公司 | A kind of production method of waterborne conductive slurry |
| CN108955994A (en) * | 2018-06-13 | 2018-12-07 | 中国科学院电子学研究所 | Touch sensor and preparation method thereof |
| CN108458819A (en) * | 2018-06-14 | 2018-08-28 | 王�华 | A kind of large area flexible pressure sensor |
| CN108469321A (en) * | 2018-06-14 | 2018-08-31 | 王�华 | A kind of flexible sensor array |
| CN108801516A (en) * | 2018-06-14 | 2018-11-13 | 杭州电子科技大学 | A kind of preparation method of large area flexible sensor array |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111358469A (en) * | 2020-04-15 | 2020-07-03 | 青岛一小步科技有限公司 | Plantar pressure detection device, foot health detection device and detection method |
| CN111358469B (en) * | 2020-04-15 | 2024-01-02 | 青岛一小步科技有限公司 | Plantar pressure detection device, foot health detection device and foot health detection method |
| CN111289157A (en) * | 2020-05-08 | 2020-06-16 | 山东爱奥智能科技有限公司 | Circuit and method for measuring pressure distribution through piezoresistive sensing array |
| CN112645198A (en) * | 2020-12-19 | 2021-04-13 | 重庆威斯特电梯有限公司 | Control system suitable for elevator layer door safety protection |
| CN112747844B (en) * | 2020-12-22 | 2022-04-29 | 北京航空航天大学杭州创新研究院 | Preparation method of sandwich structure touch sensing array |
| CN112747844A (en) * | 2020-12-22 | 2021-05-04 | 北京航空航天大学杭州创新研究院 | Preparation method of sandwich structure touch sensing array |
| CN113028967B (en) * | 2021-03-25 | 2023-02-28 | 广州碳思科技有限公司 | Flexible micro-displacement sensor and flexible micro-displacement sensing device |
| CN113028967A (en) * | 2021-03-25 | 2021-06-25 | 广州碳思科技有限公司 | Flexible micro-displacement sensor and flexible micro-displacement sensing device |
| CN113091965B (en) * | 2021-04-25 | 2022-03-18 | 棉捷(北京)网络科技有限公司 | Pressure sensor and pressure sensing system |
| CN113091965A (en) * | 2021-04-25 | 2021-07-09 | 棉捷(北京)网络科技有限公司 | Pressure sensor and pressure sensing system |
| CN113720501A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Large-area-array flexible thin film sensor and full-printing preparation method thereof |
| CN113720503A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof |
| CN113716517A (en) * | 2021-08-18 | 2021-11-30 | 中国科学院重庆绿色智能技术研究院 | Full-printed array reading circuit and preparation method thereof |
| CN113720501B (en) * | 2021-08-18 | 2024-03-26 | 中国科学院重庆绿色智能技术研究院 | Large-area-array flexible film sensor and full-printing preparation method thereof |
| CN113720503B (en) * | 2021-08-18 | 2024-03-26 | 中国科学院重庆绿色智能技术研究院 | Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof |
| CN113820048A (en) * | 2021-09-30 | 2021-12-21 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN113820048B (en) * | 2021-09-30 | 2024-04-26 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN116380327A (en) * | 2023-03-23 | 2023-07-04 | 墨现科技(东莞)有限公司 | Film pressure sensor and preparation method thereof |
| CN116656196A (en) * | 2023-06-02 | 2023-08-29 | 浙江欧仁新材料有限公司 | Water-based force-sensitive carbon paste and preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110108394B (en) | 2021-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110108394A (en) | Large area array separate type pressure sensor and preparation method thereof, waterborne conductive slurry and preparation method thereof | |
| CN110068404B (en) | Resistance-type flexible pressure sensing device, preparation method thereof and sensor array | |
| CN105606270A (en) | Composite capacitor-resistor type full-flexibility touch and pressure sensor | |
| Wan et al. | Graphene oxide as high-performance dielectric materials for capacitive pressure sensors | |
| CN111505065B (en) | Interdigital counter electrode type flexible touch sensor based on super-capacitor sensing principle and preparation method thereof | |
| CN102207415B (en) | Conductive-rubber-based flexible array clip pressure sensor and manufacturing method | |
| CN105136369B (en) | A kind of Grazing condition resistance-type touch-pressure sensation detecting sensor and preparation method thereof | |
| CN110595647B (en) | Multifunctional flexible strain-pressure sensor and preparation method thereof | |
| Yang et al. | A 32× 32 temperature and tactile sensing array using PI-copper films | |
| CN110375895B (en) | Multifunctional fully flexible fingerprint-shaped touch sensor | |
| CN109406012A (en) | A kind of threedimensional haptic sensor array of flexible piezoelectric formula and preparation method thereof | |
| CN209841248U (en) | Flexible array pressure sensor | |
| CN101201277A (en) | Array type ultra-thin submissive force sensor and preparation method thereof | |
| CN109470386B (en) | Force/position touch sensor detection system and detection method | |
| CN110398259A (en) | The flexible sensing device and preparation method of more perceptional functions | |
| WO2010082964A2 (en) | Capacitive tactile tile sensor | |
| CN209117220U (en) | A kind of threedimensional haptic sensor array of flexible piezoelectric formula | |
| CN110105813A (en) | A kind of carbon-based conductive ink preparation method and the usage | |
| US6386051B1 (en) | Load detection sensor unit for bedding with single output line | |
| CN208704923U (en) | High temperature resistant silicon piezoresistive pressure sensing element | |
| CN108822724A (en) | A kind of pressure sensitive composite material suitable for silk-screen printing technique | |
| CN103959028B (en) | load sensor | |
| CN112378552A (en) | Multi-layer electronic skin | |
| CN104884920B (en) | Voltage sensitive sensor | |
| CN116295956A (en) | Touch sense sensing array based on iron-cobalt-vanadium and epoxy resin |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |