CN110061072A - TBC solar cell structure and preparation method thereof - Google Patents
TBC solar cell structure and preparation method thereof Download PDFInfo
- Publication number
- CN110061072A CN110061072A CN201910276202.1A CN201910276202A CN110061072A CN 110061072 A CN110061072 A CN 110061072A CN 201910276202 A CN201910276202 A CN 201910276202A CN 110061072 A CN110061072 A CN 110061072A
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- China
- Prior art keywords
- siox
- layer
- sinx
- silicon wafer
- tbc
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- Pending
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- 238000002360 preparation method Methods 0.000 title claims description 14
- 239000011159 matrix material Substances 0.000 claims abstract description 59
- 238000002161 passivation Methods 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 72
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 72
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 64
- 229910052710 silicon Inorganic materials 0.000 claims description 64
- 239000010703 silicon Substances 0.000 claims description 64
- 229910004205 SiNX Inorganic materials 0.000 claims description 56
- 229910017107 AlOx Inorganic materials 0.000 claims description 42
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 29
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 28
- 229920005591 polysilicon Polymers 0.000 claims description 28
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 18
- 238000010276 construction Methods 0.000 claims description 14
- 239000002002 slurry Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 235000008216 herbs Nutrition 0.000 claims description 3
- 229910003465 moissanite Inorganic materials 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 210000002268 wool Anatomy 0.000 claims description 3
- 239000002184 metal Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 2
- 229920006395 saturated elastomer Polymers 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910276202.1A CN110061072A (en) | 2019-04-08 | 2019-04-08 | TBC solar cell structure and preparation method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910276202.1A CN110061072A (en) | 2019-04-08 | 2019-04-08 | TBC solar cell structure and preparation method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110061072A true CN110061072A (en) | 2019-07-26 |
Family
ID=67318418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910276202.1A Pending CN110061072A (en) | 2019-04-08 | 2019-04-08 | TBC solar cell structure and preparation method thereof |
Country Status (1)
Country | Link |
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CN (1) | CN110061072A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110473926A (en) * | 2019-08-22 | 2019-11-19 | 浙江正泰太阳能科技有限公司 | A kind of passivation contact solar cell and preparation method thereof |
CN112466960A (en) * | 2020-11-10 | 2021-03-09 | 浙江晶科能源有限公司 | Solar cell structure and preparation method thereof |
CN114725236A (en) * | 2021-01-05 | 2022-07-08 | 黄河水电西宁太阳能电力有限公司 | Structure and preparation method of passivated contact IBC solar cell |
EP4148809A1 (en) * | 2021-09-10 | 2023-03-15 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell, method for preparing same and solar cell module |
EP4220737A1 (en) * | 2021-08-20 | 2023-08-02 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell and photovoltaic module |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106374009A (en) * | 2016-09-20 | 2017-02-01 | 泰州中来光电科技有限公司 | Passivation contact IBC battery and preparation method thereof, assembly and system |
CN206595264U (en) * | 2017-03-10 | 2017-10-27 | 泰州隆基乐叶光伏科技有限公司 | One kind passivation contact all back-contact electrodes solar battery structure |
CN108649079A (en) * | 2018-07-11 | 2018-10-12 | 泰州隆基乐叶光伏科技有限公司 | Finger-like with passivation contact structures intersects back contacts solar cell and preparation method thereof |
CN109545901A (en) * | 2018-11-28 | 2019-03-29 | 国家电投集团西安太阳能电力有限公司 | Manufacturing method of IBC battery |
-
2019
- 2019-04-08 CN CN201910276202.1A patent/CN110061072A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106374009A (en) * | 2016-09-20 | 2017-02-01 | 泰州中来光电科技有限公司 | Passivation contact IBC battery and preparation method thereof, assembly and system |
CN206595264U (en) * | 2017-03-10 | 2017-10-27 | 泰州隆基乐叶光伏科技有限公司 | One kind passivation contact all back-contact electrodes solar battery structure |
CN108649079A (en) * | 2018-07-11 | 2018-10-12 | 泰州隆基乐叶光伏科技有限公司 | Finger-like with passivation contact structures intersects back contacts solar cell and preparation method thereof |
CN109545901A (en) * | 2018-11-28 | 2019-03-29 | 国家电投集团西安太阳能电力有限公司 | Manufacturing method of IBC battery |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110473926A (en) * | 2019-08-22 | 2019-11-19 | 浙江正泰太阳能科技有限公司 | A kind of passivation contact solar cell and preparation method thereof |
CN112466960A (en) * | 2020-11-10 | 2021-03-09 | 浙江晶科能源有限公司 | Solar cell structure and preparation method thereof |
CN114725236A (en) * | 2021-01-05 | 2022-07-08 | 黄河水电西宁太阳能电力有限公司 | Structure and preparation method of passivated contact IBC solar cell |
EP4220737A1 (en) * | 2021-08-20 | 2023-08-02 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell and photovoltaic module |
EP4394893A1 (en) * | 2021-08-20 | 2024-07-03 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell and photovoltaic module |
EP4148809A1 (en) * | 2021-09-10 | 2023-03-15 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell, method for preparing same and solar cell module |
EP4254518A3 (en) * | 2021-09-10 | 2023-10-18 | Shanghai Jinko Green Energy Enterprise Management Co., Ltd. | Solar cell, method for preparing same and solar cell module |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200820 Address after: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Applicant after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant after: Huanghe hydropower Xining Solar Power Co.,Ltd. Applicant after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Applicant after: Huanghe Hydropower Development Co., Ltd. Address before: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Applicant before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant before: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Applicant before: Huanghe Hydropower Development Co., Ltd. Applicant before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190726 |
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RJ01 | Rejection of invention patent application after publication |