WO2020211207A1 - Bifacial solar cell and preparation method therefor - Google Patents
Bifacial solar cell and preparation method therefor Download PDFInfo
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- WO2020211207A1 WO2020211207A1 PCT/CN2019/097229 CN2019097229W WO2020211207A1 WO 2020211207 A1 WO2020211207 A1 WO 2020211207A1 CN 2019097229 W CN2019097229 W CN 2019097229W WO 2020211207 A1 WO2020211207 A1 WO 2020211207A1
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- H—ELECTRICITY
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- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/148—Double-emitter photovoltaic cells, e.g. bifacial photovoltaic cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/137—Batch treatment of the devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- This application relates to the technical field of solar cells, in particular to a double-sided solar cell and a preparation method thereof.
- PERT battery Passivated Emitter and Rear Totally-diffused cell, a fully diffused cell on the back surface of the passivated emitter
- PERT battery Passivated Emitter and Rear Totally-diffused cell, a fully diffused cell on the back surface of the passivated emitter
- the photoelectric conversion of the battery is achieved. The efficiency is improved, but the degree of improvement in photoelectric conversion efficiency is limited.
- the purpose of this application is to provide a double-sided solar cell and a preparation method thereof to improve the photoelectric conversion efficiency of the double-sided solar cell.
- this application provides a double-sided solar cell, including:
- a first passivation layer located on the upper surface of the first doped layer
- a second doped layer located on the second surface of the P-type substrate layer, the second doped layer including a second heavily doped region and a second lightly doped region;
- a second passivation layer located on the lower surface of the second doped layer
- a second electrode located on the lower surface of the second passivation layer
- the first surface is opposite to the second surface.
- the second electrode is an electrode formed of silver aluminum paste.
- the first passivation layer includes:
- a first silicon nitride layer located on the upper surface of the first silicon oxide layer.
- the second passivation layer includes:
- a second silicon nitride layer located on the lower surface of the aluminum oxide layer.
- the thickness of the first silicon nitride layer ranges from 65 nm to 90 nm, inclusive.
- the thickness of the aluminum oxide layer ranges from 4 nm to 20 nm, inclusive.
- the thickness of the second silicon nitride layer ranges from 65 nm to 140 nm, inclusive.
- the length of the second heavily doped region in a direction parallel to the second surface of the P-type substrate layer ranges from 100 ⁇ m to 160 ⁇ m, inclusive.
- This application also provides a method for preparing a double-sided solar cell, including:
- first doped layer Forming a first doped layer on the first surface of the P-type substrate layer, the first doped layer including a first heavily doped region and a first lightly doped region surrounding an outer edge of the first heavily doped region;
- the first surface is opposite to the second surface.
- the method further includes:
- the double-sided solar cell and the preparation method thereof provided in the present application include a P-type substrate layer; a first doped layer on the first surface of the P-type substrate layer, and the first doped layer includes a first heavily doped layer Area and a first lightly doped area surrounding the outer edge of the first heavily doped area; a first passivation layer located on the upper surface of the first doped layer; a first passivation layer located on the upper surface of the first passivation layer A first electrode, and the first electrode is in contact with the first heavily doped region; a second doped layer on the second surface of the P-type substrate layer, the second doped layer includes a second heavily doped A miscellaneous region and a second lightly doped region; a second passivation layer located on the lower surface of the second doped layer; a second electrode located on the lower surface of the second passivation layer; wherein, the first surface and The second surface is opposite.
- the bifacial solar cell in the present application has a first doped layer and a second doped layer on the first surface and the second surface of the battery, and the first doped layer includes a first heavily doped region and a surrounding area.
- the second doped layer includes a second heavily doped region and a second lightly doped region, that is, on the first surface and the second surface of the battery All adopt selective emitter technology to reduce the surface recombination of carriers, improve the passivation effect, and reduce the ohmic contact resistance of the metal electrode. Compared with the double-sided solar cell in the prior art, the photoelectric conversion efficiency is further improved.
- FIG. 1 is a schematic structural diagram of a double-sided solar cell provided by an embodiment of the application
- FIG. 2 is a flowchart of a method for manufacturing a double-sided solar cell provided by an embodiment of the application.
- the existing double-sided solar cell uses selective emitter technology on the back of the cell to improve the photoelectric conversion efficiency of the cell, but the improvement of the photoelectric conversion efficiency is limited.
- FIG. 1 is a schematic structural diagram of a double-sided solar cell provided by an embodiment of the application, including:
- the P-type substrate layer 1 is P-type crystalline silicon.
- the first doped layer 2 is located on the first surface of the P-type substrate layer 1.
- the first doped layer 2 includes a first heavily doped region 21 and an outer edge of the first heavily doped region 21 The first lightly doped region 22;
- the first surface is the front side of the double-sided solar cell, that is, the surface facing the sun.
- the doping concentration of the first heavily doped region 21 is higher than that of the first lightly doped region 22, and the first heavily doped region 21 is surrounded by the first lightly doped region 22; the first doped layer 2
- the surface away from the P-type substrate layer 1 is a flat surface. In the direction from the first doped layer 2 to the P-type substrate layer 1, the height of the first heavily doped region 21 is higher than that of the first lightly doped region 22 .
- the first doped layer 2 is a doped layer formed by doping with a group 5A element (such as phosphorus), wherein the square resistance of the first heavily doped region 21 ranges from 60 ohm/ ⁇ to 90 ohm/ ⁇ , including The endpoint value, the square resistance of the first lightly doped region 22 ranges from 100 ohm/ ⁇ to 130 ohm/ ⁇ , including the endpoint value.
- a group 5A element such as phosphorus
- a first passivation layer 3 located on the upper surface of the first doped layer 2;
- the first passivation layer 3 is a first silicon nitride layer, but this embodiment does not limit this.
- the first passivation layer 3 includes The first silicon oxide layer located on the upper surface of the first doped layer 2 and the first silicon nitride layer located on the upper surface of the first silicon oxide layer to enhance the passivation effect of the double-sided solar cell and block current carrying The recombination of particles on the surface of the double-sided solar cell improves the photoelectric conversion efficiency of the double-sided solar cell.
- the first electrode 4 needs to be completely in contact with the first heavily doped region 21, and the first electrode 4 is a silver electrode.
- the first heavily doped region 21 has a high doping concentration, and the resistance of the contact area between the first electrode 4 and the first heavily doped region 21 is small, which is beneficial to improve the photoelectric conversion efficiency of the bifacial solar cell;
- the first lightly doped region 22 is doped
- the low impurity concentration can reduce the surface recombination rate of carriers, which is beneficial to the improvement of the photoelectric conversion efficiency of the double-sided solar cell.
- the second doped layer 5 is a doped layer formed by doping with a group 3A element (such as boron), wherein the square resistance of the second heavily doped region 51 ranges from 60 ohm/ ⁇ to 90 ohm/ ⁇ , including The endpoint value, the square resistance of the second lightly doped region 52 ranges from 100 ohm/ ⁇ to 130 ohm/ ⁇ , including the endpoint value.
- a group 3A element such as boron
- the doping concentration of the second heavily doped region 51 is higher than that of the second lightly doped region 52, and the second heavily doped region 51 is surrounded by the second lightly doped region 52;
- the surface away from the P-type substrate layer 1 is a flat surface. In the direction from the second doped layer 5 to the P-type substrate layer 1, the height of the second heavily doped region 51 is higher than the second lightly doped region 52.
- the second passivation layer 6 includes an aluminum oxide layer located on the lower surface of the second doped layer 5 and a second silicon nitride layer located on the lower surface of the aluminum oxide layer.
- the second passivation layer 6 includes a second silicon dioxide layer located on the lower surface of the second doped layer 5, and a second silicon dioxide layer located on the lower surface of the second silicon dioxide layer.
- the aluminum oxide layer and the second silicon nitride layer located on the lower surface of the aluminum oxide layer enhance the passivation effect of the double-sided solar cell, block the recombination of carriers on the surface of the double-sided solar cell, and improve the performance of the double-sided solar cell. Photoelectric conversion efficiency.
- a second electrode 7 located on the lower surface of the second passivation layer 6;
- the second electrode 7 needs to be in full contact with the second heavily doped region 51.
- the first surface is opposite to the second surface.
- the second electrode 7 is an electrode formed of silver-aluminum paste. Because the plasticity of the silver-aluminum paste is better, it can penetrate the silicon nitride layer and does not need to be on both sides. The laser opening on the back of the solar cell has a simpler process, and the contact resistance between the second electrode 7 and the second heavily doped region 51 is lower, which is beneficial to improve the photoelectric conversion efficiency.
- the double-sided solar cell includes a P-type substrate layer 1; a first doped layer 2 on the first surface of the P-type substrate layer 1, and the first doped layer 2 includes a first heavily doped layer The impurity region 21 and the first lightly doped region 22 surrounding the outer edge of the first heavily doped region 21; the first passivation layer 3 located on the upper surface of the first doped layer 2; The first electrode 4 on the upper surface of the passivation layer 3, and the first electrode 4 is in contact with the first heavily doped region 21; the second doped layer 5 on the second surface of the P-type substrate layer 1,
- the second doped layer 5 includes a second heavily doped region 51 and a second lightly doped region 52; a second passivation layer 6 located on the lower surface of the second doped layer 5; The second electrode 7 on the lower surface of the chemical layer 6; wherein, the first surface is opposite to the second surface.
- the double-sided solar cell in this embodiment has a first doped layer 2 and a second doped layer 5 on the first surface and the second surface of the battery, and the first doped layer 2 includes the first heavily doped The impurity region 21 and the first lightly doped region 22 surrounding the outer edge of the first heavily doped region 21, the second doped layer 5 includes a second heavily doped region 51 and a second lightly doped region 52, namely The selective emitter technology is adopted on both the first surface and the second surface of the battery. Compared with the double-sided solar cell in the prior art, the photoelectric conversion efficiency is further improved.
- the P-type substrate layer 1 is P-type crystalline silicon, that is, the bifacial solar cell is a P-type PERT cell, which improves the photoelectric conversion efficiency of the P-type PERT cell, and at the same time broadens the research of the P-type PERT cell, making the application range of the P-type PERT cell More extensive.
- the thickness of the first silicon nitride layer ranges from 65 nm to 90 nm, inclusive. Avoid that the thickness of the first silicon nitride layer is too small to prevent the recombination of carriers on the front side of the double-sided solar cell, so that the photoelectric conversion efficiency of the double-sided solar cell is low, and the first silicon nitride layer is avoided at the same time. If the thickness is too large, the manufacturing cost will increase, the process time will be prolonged, and the manufacturing efficiency of the double-sided solar cell will be reduced.
- the thickness of the aluminum oxide layer ranges from 4 nm to 20 nm, inclusive. Avoid the thickness of the aluminum oxide layer is too small, the passivation effect is poor, resulting in low photoelectric conversion efficiency of the double-sided solar cell, while avoiding the thickness of the aluminum oxide layer is too large, on the one hand, increase the cost of the double-sided solar cell, on the other hand, The production time of double-sided solar cells is prolonged and the production efficiency is reduced.
- the thickness of the first silicon oxide layer ranges from 1 nm to 3 nm, inclusive.
- the thickness of the second silicon dioxide layer ranges from 1 nm to 3 nm, inclusive.
- the thickness of the second silicon nitride layer ranges from 65 nm to 140 nm, inclusive. Avoid excessively small thickness of the second silicon nitride layer, resulting in poor passivation on the back of the double-sided solar cell, resulting in low photoelectric conversion efficiency of the double-sided solar cell, and avoiding the thickness of the second silicon nitride layer from being too large, resulting in manufacturing costs Increase and extend the process time at the same time, reduce the production efficiency of double-sided solar cells.
- the length of the second heavily doped region 51 in a direction parallel to the second surface of the P-type substrate layer 1 ranges from 100 ⁇ m to 160 ⁇ m, including endpoints . Avoid that the length of the second heavily doped region 51 in the direction parallel to the second surface of the P-type substrate layer 1 is too small.
- the second electrode 7 Since the second electrode 7 needs to be in contact with the second heavily doped region 51, if the length is too small, It is not conducive to the complete contact of the second electrode 7 with the second heavily doped region 51, which increases the difficulty of aligning the second electrode 7 with the second heavily doped region 51; at the same time, avoid excessive length, that is, avoid the second heavily doped region The area of 51 is too large, so that the carrier surface recombination rate increases, thereby reducing the photoelectric conversion efficiency.
- FIG. 2 is a flowchart of a method for preparing a double-sided solar cell provided by an embodiment of the application, including:
- Step S101 A first doped layer is formed on the first surface of the P-type substrate layer.
- the first doped layer includes a first heavily doped region and a first lightly doped layer surrounding the outer edge of the first heavily doped region. Miscellaneous area
- P-type crystalline silicon can be selected for the P-type substrate layer.
- the P-type substrate layer is placed in an alkaline solution for texturing, so that the thickness of the P-type substrate layer is between 0.3 g and 0.8 g.
- a pyramid structure is formed on the surface of the P-type substrate layer to increase the light trapping effect of the P-type substrate layer; further, the second surface of the P-type substrate layer is etched and polished to a depth of 3 ⁇ m to 8 ⁇ m, so that the second surface The reflectivity is above 40%.
- the first doped layer is formed by an ion implantation method, and the doping concentration of the first heavily doped region is higher than that of the first lightly doped region, which facilitates the control of doping concentration and doping accuracy, and the operation is simple.
- the formed first doped layer is a doped layer formed by doping with a group 5A element (such as phosphorus), and the square resistance of the first heavily doped region is controlled to range from 60ohm/ ⁇ to 90ohm/ ⁇ , including the endpoint value, control
- the square resistance of the first lightly doped region ranges from 100 ohm/ ⁇ to 130 ohm/ ⁇ , including the endpoint value.
- Step S102 forming a first passivation layer on the upper surface of the first doped layer
- a first silicon nitride layer is formed on the upper surface of the first doped layer.
- the method before forming the first silicon nitride layer on the upper surface of the first doped layer, the method further comprises: forming a first silicon oxide layer on the upper surface of the first doped layer by annealing and oxidation at 600°C to 800°C, correspondingly Yes, a first silicon nitride layer is formed on the upper surface of the first silicon oxide layer to enhance the passivation effect of the double-sided solar cell, block the recombination of carriers on the surface of the double-sided solar cell, and improve the photoelectric conversion of the double-sided solar cell effectiveness. Further, the thickness of the first silicon oxide layer is controlled to be between 1 nm and 3 nm, including the endpoint value.
- the method for forming the first passivation layer is not specifically limited in this embodiment, and it depends on the situation. For example, chemical vapor deposition method, sputtering method, etc.
- the thickness of the first silicon nitride layer is controlled to be between 65 nm and 90 nm, including the endpoint value. Avoid that the thickness of the first silicon nitride layer is too small to prevent the recombination of carriers on the front side of the double-sided solar cell, so that the photoelectric conversion efficiency of the double-sided solar cell is low, and the first silicon nitride layer is avoided at the same time. If the thickness is too large, the manufacturing cost will increase, the process time will be prolonged, and the manufacturing efficiency of the double-sided solar cell will be reduced.
- Step S103 forming a first electrode on the upper surface of the first passivation layer, and the first electrode is in contact with the first heavily doped region;
- a silver electrode is formed on the upper surface of the first passivation layer by using a screen printing technology, and the silver electrode is in complete contact with the first heavily doped region.
- Step S104 forming a second doped layer on the second surface of the P-type substrate layer, the second doped layer including a second heavily doped region and a second lightly doped region;
- an ion implantation method is used to form the second doped layer, and the doping concentration of the second heavily doped region is higher than that of the second lightly doped region, which facilitates the control of doping concentration and doping accuracy, and the operation is simple.
- the second doped layer is a doped layer formed by doping with a group 3A element (such as boron).
- the square resistance of the second heavily doped area is controlled to be between 60ohm/ ⁇ and 90ohm/ ⁇ , including the endpoint value, and the first The square resistance of the two lightly doped regions ranges from 100 ohm/ ⁇ to 130 ohm/ ⁇ , including the endpoint value.
- the doping concentration of the second heavily doped region is higher than that of the second lightly doped region, which is surrounded by the second lightly doped region; the second doped layer is far away from the P-type substrate layer
- the surface of is a flat surface, and in the direction from the second doped layer to the P-type substrate layer, the height of the second heavily doped region is higher than the second lightly doped region.
- the length of the second heavily doped region in a direction parallel to the second surface of the P-type substrate layer is controlled to have a value ranging from 100 ⁇ m to 160 ⁇ m, inclusive. Avoid that the length of the second heavily doped region in the direction parallel to the second surface of the P-type substrate layer is too small.
- the second electrode Since the second electrode needs to be in contact with the second heavily doped region, if the length is too small, it is not conducive to the second The electrode is in complete contact with the second heavily doped region, which increases the difficulty of aligning the second electrode with the second heavily doped region; at the same time, avoid excessive length, that is, avoid the area of the second heavily doped region from being too large, causing current carrying The sub-surface recombination rate increases, thereby reducing the photoelectric conversion efficiency.
- Step S105 forming a second passivation layer on the lower surface of the second doped layer
- an aluminum oxide layer is formed on the lower surface of the second doped layer; a second silicon nitride layer is formed on the lower surface of the aluminum oxide layer.
- the method before forming the aluminum oxide layer on the lower surface of the second doped layer, the method further includes: forming a second silicon dioxide layer on the lower surface of the second doped layer by annealing and oxidation at 600°C to 800°C.
- a second silicon dioxide layer is controlled to be between 1 nm and 3 nm, including the endpoint value.
- the method for forming the second passivation layer is not limited in this embodiment, and it depends on the situation, for example, chemical vapor deposition method, magnetron sputtering method, etc.
- the thickness of the controlled aluminum oxide layer is between 4 nm and 20 nm, including the endpoint value. Avoid the thickness of the aluminum oxide layer is too small, the passivation effect is poor, resulting in low photoelectric conversion efficiency of the double-sided solar cell, while avoiding the thickness of the aluminum oxide layer is too large, on the one hand, increase the cost of the double-sided solar cell, on the other hand, The production time of double-sided solar cells is prolonged and the production efficiency is reduced.
- the thickness of the second silicon nitride layer is controlled to be between 65 nm and 140 nm, including the endpoint value. Avoid excessively small thickness of the second silicon nitride layer, resulting in poor passivation on the back of the double-sided solar cell, resulting in low photoelectric conversion efficiency of the double-sided solar cell, and avoiding the thickness of the second silicon nitride layer from being too large, resulting in manufacturing costs Increase and extend the process time at the same time, reduce the production efficiency of double-sided solar cells.
- Step S106 forming a second electrode on the lower surface of the second passivation layer
- a silver-aluminum electrode is formed on the lower surface of the second passivation layer by using a screen printing method. Since the plasticity of the silver-aluminum paste is better, it can penetrate the silicon nitride layer and does not require laser opening on the back of the double-sided solar cell. Hole, the process is simpler, and the contact resistance between the second electrode and the second heavily doped region is lower, which is beneficial to improve the photoelectric conversion efficiency.
- the first surface is opposite to the second surface.
- the method further includes:
- Anti-light decay treatment to improve the stability of the output power of the double-sided solar cell.
- the method of anti-light decay treatment in this embodiment is not limited. Electric injection can be used for anti-light decay treatment, and light injection can also be used for anti-light decay treatment.
- the double-sided solar cell produced by the double-sided solar cell manufacturing method provided in this embodiment includes a P-type substrate layer; a first doped layer on the first surface of the P-type substrate layer, and the first doped layer includes A first heavily doped region and a first lightly doped region surrounding the outer edge of the first heavily doped region; a first passivation layer located on the upper surface of the first doped layer; located on the first passivation layer The first electrode on the upper surface of the chemical layer, and the first electrode is in contact with the first heavily doped region; the second doped layer on the second surface of the P-type substrate layer, the second doped layer It includes a second heavily doped region and a second lightly doped region; a second passivation layer located on the lower surface of the second doped layer; a second electrode located on the lower surface of the second passivation layer; wherein The first surface is opposite to the second surface.
- the double-sided solar cell manufactured in this embodiment has a first doped layer and a second doped layer on the first surface and the second surface of the battery, and the first doped layer includes a first heavily doped region And the first lightly doped region surrounding the outer edge of the first heavily doped region, the second doped layer includes a second heavily doped region and a second lightly doped region, that is, on the first surface and the first surface of the battery Both surfaces adopt selective emitter technology. Compared with the double-sided solar cell in the prior art, the photoelectric conversion efficiency is further improved.
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Abstract
Description
本申请要求于2019年04月18日提交中国专利局、申请号为201910313303.1、发明名称为“一种双面太阳能电池及其制备方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of a Chinese patent application filed with the Chinese Patent Office on April 18, 2019, the application number is 201910313303.1, and the invention title is "a double-sided solar cell and its preparation method", the entire content of which is incorporated by reference In this application.
本申请涉及太阳能电池技术领域,特别是涉及一种双面太阳能电池及其制备方法。This application relates to the technical field of solar cells, in particular to a double-sided solar cell and a preparation method thereof.
随着社会的发展,能源消耗急剧增加,能源危机是世界各国关注的焦点问题。为了缓解能源危机,充分利用可再生能源是一种有效措施。太阳能是一种绿色环保,储量无限,不会产生任何废水、废渣等污染物的可再生能源,因此,近几年光伏行业迅速发展。With the development of society, energy consumption has increased sharply, and the energy crisis is the focus of attention of all countries in the world. In order to alleviate the energy crisis, making full use of renewable energy is an effective measure. Solar energy is a kind of green and environmentally friendly renewable energy with unlimited reserves and will not produce any pollutants such as waste water and waste residue. Therefore, the photovoltaic industry has developed rapidly in recent years.
提高太阳能电池的光电转换效率一直是光伏行业追求的目标。近年来,通过提升硅片的质量以及浆料的性能,太阳能电池的光电转换效率有了较高的提升,但是,单面太阳能电池的效率提升已经到了瓶颈期。双面太阳能电池的出现进一步提高了太阳能电池的光电转换效率。Improving the photoelectric conversion efficiency of solar cells has always been the goal pursued by the photovoltaic industry. In recent years, by improving the quality of silicon wafers and the performance of the slurry, the photoelectric conversion efficiency of solar cells has been improved. However, the efficiency improvement of single-sided solar cells has reached a bottleneck period. The appearance of double-sided solar cells has further improved the photoelectric conversion efficiency of solar cells.
PERT电池(Passivated Emitter and Rear Totally-diffused cell,钝化发射极背表面全扩散电池),是一种典型的双面太阳能电池,通过在电池的背面利用选择性发射极技术,使电池的光电转换效率得到提升,但是,光电转换效率提升程度有限。PERT battery (Passivated Emitter and Rear Totally-diffused cell, a fully diffused cell on the back surface of the passivated emitter), is a typical double-sided solar cell. By using selective emitter technology on the back of the battery, the photoelectric conversion of the battery is achieved. The efficiency is improved, but the degree of improvement in photoelectric conversion efficiency is limited.
发明内容Summary of the invention
本申请的目的是提供一种双面太阳能电池及其制备方法,以提升双面太阳能电池的光电转换效率。The purpose of this application is to provide a double-sided solar cell and a preparation method thereof to improve the photoelectric conversion efficiency of the double-sided solar cell.
为解决上述技术问题,本申请提供一种双面太阳能电池,包括:To solve the above technical problems, this application provides a double-sided solar cell, including:
P型衬底层;P-type substrate layer;
位于所述P型衬底层第一表面的第一掺杂层,所述第一掺杂层包括第 一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区;A first doped layer located on the first surface of the P-type substrate layer, the first doped layer including a first heavily doped region and a first lightly doped layer surrounding the outer edge of the first heavily doped region Area;
位于所述第一掺杂层上表面的第一钝化层;A first passivation layer located on the upper surface of the first doped layer;
位于所述第一钝化层上表面的第一电极,且所述第一电极与所述第一重掺杂区接触;A first electrode located on the upper surface of the first passivation layer, and the first electrode is in contact with the first heavily doped region;
位于所述P型衬底层第二表面的第二掺杂层,所述第二掺杂层包括第二重掺杂区和第二轻掺杂区;A second doped layer located on the second surface of the P-type substrate layer, the second doped layer including a second heavily doped region and a second lightly doped region;
位于所述第二掺杂层下表面的第二钝化层;A second passivation layer located on the lower surface of the second doped layer;
位于所述第二钝化层下表面的第二电极;A second electrode located on the lower surface of the second passivation layer;
其中,所述第一表面与所述第二表面相对。Wherein, the first surface is opposite to the second surface.
可选的,所述第二电极为银铝浆料形成的电极。Optionally, the second electrode is an electrode formed of silver aluminum paste.
可选的,所述第一钝化层包括:Optionally, the first passivation layer includes:
位于所述第一掺杂层上表面的第一氧化硅层;A first silicon oxide layer located on the upper surface of the first doped layer;
位于所述第一氧化硅层上表面的第一氮化硅层。A first silicon nitride layer located on the upper surface of the first silicon oxide layer.
可选的,所述第二钝化层包括:Optionally, the second passivation layer includes:
位于所述第二掺杂层下表面的第二氧化硅层;A second silicon dioxide layer located on the lower surface of the second doped layer;
位于所述第二氧化硅层下表面的氧化铝层;An aluminum oxide layer located on the lower surface of the second silicon dioxide layer;
位于所述氧化铝层下表面的第二氮化硅层。A second silicon nitride layer located on the lower surface of the aluminum oxide layer.
可选的,所述第一氮化硅层的厚度取值范围为65nm至90nm,包括端点值。Optionally, the thickness of the first silicon nitride layer ranges from 65 nm to 90 nm, inclusive.
可选的,所述氧化铝层的厚度取值范围为4nm至20nm,包括端点值。Optionally, the thickness of the aluminum oxide layer ranges from 4 nm to 20 nm, inclusive.
可选的,所述第二氮化硅层的厚度取值范围为65nm至140nm,包括端点值。Optionally, the thickness of the second silicon nitride layer ranges from 65 nm to 140 nm, inclusive.
可选的,所述第二重掺杂区在平行于所述P型衬底层第二表面的方向上的长度取值范围为100μm至160μm,包括端点值。Optionally, the length of the second heavily doped region in a direction parallel to the second surface of the P-type substrate layer ranges from 100 μm to 160 μm, inclusive.
本申请还提供一种双面太阳能电池制备方法,包括:This application also provides a method for preparing a double-sided solar cell, including:
在P型衬底层第一表面形成第一掺杂层,所述第一掺杂层包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区;Forming a first doped layer on the first surface of the P-type substrate layer, the first doped layer including a first heavily doped region and a first lightly doped region surrounding an outer edge of the first heavily doped region;
在所述第一掺杂层上表面形成第一钝化层;Forming a first passivation layer on the upper surface of the first doped layer;
在所述第一钝化层上表面形成第一电极,且所述第一电极与所述第一 重掺杂区接触;Forming a first electrode on the upper surface of the first passivation layer, and the first electrode is in contact with the first heavily doped region;
在所述P型衬底层第二表面形成第二掺杂层,所述第二掺杂层包括第二重掺杂区和第二轻掺杂区;Forming a second doped layer on the second surface of the P-type substrate layer, the second doped layer including a second heavily doped region and a second lightly doped region;
在所述第二掺杂层下表面形成第二钝化层;Forming a second passivation layer on the lower surface of the second doped layer;
在所述第二钝化层下表面形成第二电极;Forming a second electrode on the lower surface of the second passivation layer;
其中,所述第一表面与所述第二表面相对。Wherein, the first surface is opposite to the second surface.
可选的,在所述第二钝化层下表面形成第二电极之后,还包括:Optionally, after the second electrode is formed on the lower surface of the second passivation layer, the method further includes:
进行抗光衰处理。Carry out anti-light decay treatment.
本申请所提供的双面太阳能电池及其制备方法,包括P型衬底层;位于所述P型衬底层第一表面的第一掺杂层,所述第一掺杂层包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区;位于所述第一掺杂层上表面的第一钝化层;位于所述第一钝化层上表面的第一电极,且所述第一电极与所述第一重掺杂区接触;位于所述P型衬底层第二表面的第二掺杂层,所述第二掺杂层包括第二重掺杂区和第二轻掺杂区;位于所述第二掺杂层下表面的第二钝化层;位于所述第二钝化层下表面的第二电极;其中,所述第一表面与所述第二表面相对。可见,本申请中的双面太阳能电池,在电池的第一表面和第二表面分别具有第一掺杂层和第二掺杂层,且第一掺杂层包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区,第二掺杂层包括第二重掺杂区和第二轻掺杂区,即在电池的第一表面和第二表面均采用选择性发射极技术,减少载流子表面复合,提高钝化效果,减小金属电极的欧姆接触电阻,相较于现有技术中的双面太阳能电池,光电转换效率得到进一步提升。The double-sided solar cell and the preparation method thereof provided in the present application include a P-type substrate layer; a first doped layer on the first surface of the P-type substrate layer, and the first doped layer includes a first heavily doped layer Area and a first lightly doped area surrounding the outer edge of the first heavily doped area; a first passivation layer located on the upper surface of the first doped layer; a first passivation layer located on the upper surface of the first passivation layer A first electrode, and the first electrode is in contact with the first heavily doped region; a second doped layer on the second surface of the P-type substrate layer, the second doped layer includes a second heavily doped A miscellaneous region and a second lightly doped region; a second passivation layer located on the lower surface of the second doped layer; a second electrode located on the lower surface of the second passivation layer; wherein, the first surface and The second surface is opposite. It can be seen that the bifacial solar cell in the present application has a first doped layer and a second doped layer on the first surface and the second surface of the battery, and the first doped layer includes a first heavily doped region and a surrounding area. In the first lightly doped region at the outer edge of the first heavily doped region, the second doped layer includes a second heavily doped region and a second lightly doped region, that is, on the first surface and the second surface of the battery All adopt selective emitter technology to reduce the surface recombination of carriers, improve the passivation effect, and reduce the ohmic contact resistance of the metal electrode. Compared with the double-sided solar cell in the prior art, the photoelectric conversion efficiency is further improved.
为了更清楚的说明本申请实施例或现有技术的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单的介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly describe the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are merely For some of the embodiments of the application, for those of ordinary skill in the art, other drawings may be obtained based on these drawings without creative work.
图1为本申请实施例所提供的一种双面太阳能电池的结构示意图;FIG. 1 is a schematic structural diagram of a double-sided solar cell provided by an embodiment of the application;
图2为本申请实施例所提供的一种双面太阳能电池制备方法流程图。FIG. 2 is a flowchart of a method for manufacturing a double-sided solar cell provided by an embodiment of the application.
为了使本技术领域的人员更好地理解本申请方案,下面结合附图和具体实施方式对本申请作进一步的详细说明。显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to enable those skilled in the art to better understand the solution of the application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.
在下面的描述中阐述了很多具体细节以便于充分理解本发明,但是本发明还可以采用其他不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似推广,因此本发明不受下面公开的具体实施例的限制。In the following description, many specific details are explained in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do so without departing from the connotation of the present invention. Similar promotion, therefore, the present invention is not limited by the specific embodiments disclosed below.
正如背景技术部分所述,现有的双面太阳能电池,在电池的背面利用选择性发射极技术,使电池的光电转换效率得到提升,但是,光电转换效率提升程度有限。As mentioned in the background art section, the existing double-sided solar cell uses selective emitter technology on the back of the cell to improve the photoelectric conversion efficiency of the cell, but the improvement of the photoelectric conversion efficiency is limited.
有鉴于此,本申请提供了一种双面太阳能电池,请参考图1,图1为本申请实施例所提供的一种双面太阳能电池的结构示意图,包括:In view of this, this application provides a double-sided solar cell. Please refer to FIG. 1. FIG. 1 is a schematic structural diagram of a double-sided solar cell provided by an embodiment of the application, including:
P型衬底层1;P-
具体的,P型衬底层1为P型晶体硅。Specifically, the P-
位于所述P型衬底层1第一表面的第一掺杂层2,所述第一掺杂层2包括第一重掺杂区21和环绕在所述第一重掺杂区21外边缘的第一轻掺杂区22;The first doped layer 2 is located on the first surface of the P-
需要指出的是,第一表面为双面太阳能电池的正面,即面对太阳的表面。It should be pointed out that the first surface is the front side of the double-sided solar cell, that is, the surface facing the sun.
还需要指出的是,第一重掺杂区21的掺杂浓度高于第一轻掺杂区22,第一重掺杂区21被第一轻掺杂区22包围;第一掺杂层2的远离P型衬底层1的表面是一个平整的表面,在第一掺杂层2到P型衬底层1的方向上,第一重掺杂区21的高度高于第一轻掺杂区22。It should also be pointed out that the doping concentration of the first heavily doped
具体的,第一掺杂层2为5A族元素(如磷)掺杂形成的掺杂层,其 中,第一重掺杂区21的方阻取值范围为60ohm/□至90ohm/□,包括端点值,第一轻掺杂区22的方阻取值范围为100ohm/□至130ohm/□,包括端点值。Specifically, the first doped layer 2 is a doped layer formed by doping with a group 5A element (such as phosphorus), wherein the square resistance of the first heavily doped
位于所述第一掺杂层2上表面的第一钝化层3;A
在本申请的一个实施例中,第一钝化层3为第一氮化硅层,但是本实施例对此不做限定,在本申请的另一实施例中,第一钝化层3包括位于所述第一掺杂层2上表面的第一氧化硅层和位于所述第一氧化硅层上表面的第一氮化硅层,以增强双面太阳能电池的钝化效果,阻挡载流子在双面太阳能电池表面的复合,提高双面太阳能电池的光电转换效率。In one embodiment of the present application, the
位于所述第一钝化层3上表面的第一电极4,且所述第一电极4与所述第一重掺杂区21接触;A
具体的,第一电极4需要完全与第一重掺杂区21接触,第一电极4为银电极。第一重掺杂区21掺杂浓度高,第一电极4与第一重掺杂区21接触区域的电阻小,有利于提高双面太阳能电池的光电转换效率;第一轻掺杂区22掺杂浓度低,可以降低载流子的表面复合率,从而有利于双面太阳能电池的光电转换效率提高。Specifically, the
位于所述P型衬底层1第二表面的第二掺杂层5,所述第二掺杂层5包括第二重掺杂区51和第二轻掺杂区52;The second
具体的,第二掺杂层5为3A族元素(如硼)掺杂形成的掺杂层,其中,第二重掺杂区51的方阻取值范围为60ohm/□至90ohm/□,包括端点值,第二轻掺杂区52的方阻取值范围为100ohm/□至130ohm/□,包括端点值。Specifically, the second doped
需要指出的是,第二重掺杂区51的掺杂浓度高于第二轻掺杂区52,第二重掺杂区51被第二轻掺杂区52包围;第二掺杂层5的远离P型衬底层1的表面是一个平整的表面,在第二掺杂层5到P型衬底层1的方向上,第二重掺杂区51的高度高于第二轻掺杂区52。It should be noted that the doping concentration of the second heavily doped
位于所述第二掺杂层5下表面的第二钝化层6;A
在本申请的一个实施例中,第二钝化层6包括位于第二掺杂层5下表面的氧化铝层和位于氧化铝层下表面的第二氮化硅层,但是本实施例对此 不做限定,在本申请的另一实施例中,第二钝化层6包括位于所述第二掺杂层5下表面的第二氧化硅层、位于所述第二氧化硅层下表面的氧化铝层、位于所述氧化铝层下表面的第二氮化硅层,以增强双面太阳能电池的钝化效果,阻挡载流子在双面太阳能电池表面的复合,提高双面太阳能电池的光电转换效率。In an embodiment of the present application, the
位于所述第二钝化层6下表面的第二电极7;A
需要指出的是,第二电极7需要完全与第二重掺杂区51接触。It should be noted that the
其中,所述第一表面与所述第二表面相对。Wherein, the first surface is opposite to the second surface.
优选地,在本申请的一个实施例中,所述第二电极7为银铝浆料形成的电极,由于银铝浆料的塑性更好,可以穿透氮化硅层,不需要在双面太阳能电池的背面激光开孔,工艺更加简单,并且,第二电极7与第二重掺杂区51的接触电阻更低,有利于提升光电转换效率。Preferably, in an embodiment of the present application, the
本实施例所提供的双面太阳能电池,包括P型衬底层1;位于所述P型衬底层1第一表面的第一掺杂层2,所述第一掺杂层2包括第一重掺杂区21和环绕在所述第一重掺杂区21外边缘的第一轻掺杂区22;位于所述第一掺杂层2上表面的第一钝化层3;位于所述第一钝化层3上表面的第一电极4,且所述第一电极4与所述第一重掺杂区21接触;位于所述P型衬底层1第二表面的第二掺杂层5,所述第二掺杂层5包括第二重掺杂区51和第二轻掺杂区52;位于所述第二掺杂层5下表面的第二钝化层6;位于所述第二钝化层6下表面的第二电极7;其中,所述第一表面与所述第二表面相对。可见,本实施例中的双面太阳能电池,在电池的第一表面和第二表面分别具有第一掺杂层2和第二掺杂层5,且第一掺杂层2包括第一重掺杂区21和环绕在所述第一重掺杂区21外边缘的第一轻掺杂区22,第二掺杂层5包括第二重掺杂区51和第二轻掺杂区52,即在电池的第一表面和第二表面均采用选择性发射极技术,相较于现有技术中的双面太阳能电池,光电转换效率得到进一步提升。The double-sided solar cell provided by this embodiment includes a P-
P型衬底层1为P型晶体硅,即双面太阳能电池为P型PERT电池,提高P型PERT电池的光电转换效率,同时拓宽了P型PERT电池的研究,使得P型PERT电池的应用范围更加广泛。The P-
优选地,在本申请的一个实施例中,所述第一氮化硅层的厚度取值范围为65nm至90nm,包括端点值。避免第一氮化硅层的厚度过小,不能很好的阻止载流子在双面太阳能电池正面的复合,从而使得双面太阳能电池的光电转换效率低,同时避免第一氮化硅层的厚度过大,使得制作成本增加,同时延长工艺时间,减低双面太阳能电池的制备效率。Preferably, in an embodiment of the present application, the thickness of the first silicon nitride layer ranges from 65 nm to 90 nm, inclusive. Avoid that the thickness of the first silicon nitride layer is too small to prevent the recombination of carriers on the front side of the double-sided solar cell, so that the photoelectric conversion efficiency of the double-sided solar cell is low, and the first silicon nitride layer is avoided at the same time. If the thickness is too large, the manufacturing cost will increase, the process time will be prolonged, and the manufacturing efficiency of the double-sided solar cell will be reduced.
优选地,在本申请的一个实施例中,所述氧化铝层的厚度取值范围为4nm至20nm,包括端点值。避免氧化铝层的厚度过小,钝化效果差,导致双面太阳能电池的光电转换效率低,同时避免氧化铝层的厚度过大,一方面造成双面太阳能电池的成本增加,另一方面使得双面太阳能电池的制作时间延长,减低制备效率。Preferably, in an embodiment of the present application, the thickness of the aluminum oxide layer ranges from 4 nm to 20 nm, inclusive. Avoid the thickness of the aluminum oxide layer is too small, the passivation effect is poor, resulting in low photoelectric conversion efficiency of the double-sided solar cell, while avoiding the thickness of the aluminum oxide layer is too large, on the one hand, increase the cost of the double-sided solar cell, on the other hand, The production time of double-sided solar cells is prolonged and the production efficiency is reduced.
优选地,第一氧化硅层的厚度取值范围为1nm至3nm,包括端点值。进一步地,第二氧化硅层的厚度取值范围为1nm至3nm,包括端点值。Preferably, the thickness of the first silicon oxide layer ranges from 1 nm to 3 nm, inclusive. Further, the thickness of the second silicon dioxide layer ranges from 1 nm to 3 nm, inclusive.
优选地,在本申请的一个实施例中,所述第二氮化硅层的厚度取值范围为65nm至140nm,包括端点值。避免第二氮化硅层的厚度过小,使得双面太阳能电池背面钝化效果差,导致双面太阳能电池的光电转换效率低,同时避免第二氮化硅层的厚度过大,使得制作成本增加,同时延长工艺时间,减低双面太阳能电池的制备效率。Preferably, in an embodiment of the present application, the thickness of the second silicon nitride layer ranges from 65 nm to 140 nm, inclusive. Avoid excessively small thickness of the second silicon nitride layer, resulting in poor passivation on the back of the double-sided solar cell, resulting in low photoelectric conversion efficiency of the double-sided solar cell, and avoiding the thickness of the second silicon nitride layer from being too large, resulting in manufacturing costs Increase and extend the process time at the same time, reduce the production efficiency of double-sided solar cells.
优选地,在本申请的一个实施例中,所述第二重掺杂区51在平行于所述P型衬底层1第二表面的方向上的长度取值范围为100μm至160μm,包括端点值。避免第二重掺杂区51在平行于所述P型衬底层1第二表面的方向上的长度过小,由于第二电极7需要与第二重掺杂区51接触,如果长度过小,不利于第二电极7与第二重掺杂区51完全接触,即增加第二电极7与第二重掺杂区51对准的难度;同时避免长度过大,即避免第二重掺杂区51的面积过大,使得载流子表面复合率增加,从而降低光电转换效率。Preferably, in an embodiment of the present application, the length of the second heavily doped
本申请还提供一种双面太阳能电池制备方法,请参考图2,图2为本申请实施例所提供的一种双面太阳能电池制备方法流程图,包括:This application also provides a method for preparing a double-sided solar cell. Please refer to FIG. 2. FIG. 2 is a flowchart of a method for preparing a double-sided solar cell provided by an embodiment of the application, including:
步骤S101:在P型衬底层第一表面形成第一掺杂层,所述第一掺杂层 包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区;Step S101: A first doped layer is formed on the first surface of the P-type substrate layer. The first doped layer includes a first heavily doped region and a first lightly doped layer surrounding the outer edge of the first heavily doped region. Miscellaneous area
具体的,P型衬底层可以选用P型晶体硅。Specifically, P-type crystalline silicon can be selected for the P-type substrate layer.
优选地,在P型衬底层第一表面形成第一掺杂层之前,将P型衬底层放置在碱溶液中制绒,使得P型衬底层减薄量在0.3g至0.8g之间,以在P型衬底层的表面形成金字塔结构,增加P型衬底层的陷光作用;进一步地,对P型衬底层的第二表面进行刻蚀抛光处理,腐蚀深度在3μm至8μm,使得第二表面的反射率在40%以上。Preferably, before the first doped layer is formed on the first surface of the P-type substrate layer, the P-type substrate layer is placed in an alkaline solution for texturing, so that the thickness of the P-type substrate layer is between 0.3 g and 0.8 g. A pyramid structure is formed on the surface of the P-type substrate layer to increase the light trapping effect of the P-type substrate layer; further, the second surface of the P-type substrate layer is etched and polished to a depth of 3 μm to 8 μm, so that the second surface The reflectivity is above 40%.
优选地,利用离子注入法形成第一掺杂层,第一重掺杂区的掺杂浓度高于第一轻掺杂区,方便控制掺杂浓度与掺杂精度,且操作简便。形成的第一掺杂层为5A族元素(如磷)掺杂形成的掺杂层,控制第一重掺杂区的方阻取值范围为60ohm/□至90ohm/□,包括端点值,控制第一轻掺杂区的方阻取值范围为100ohm/□至130ohm/□,包括端点值。Preferably, the first doped layer is formed by an ion implantation method, and the doping concentration of the first heavily doped region is higher than that of the first lightly doped region, which facilitates the control of doping concentration and doping accuracy, and the operation is simple. The formed first doped layer is a doped layer formed by doping with a group 5A element (such as phosphorus), and the square resistance of the first heavily doped region is controlled to range from 60ohm/□ to 90ohm/□, including the endpoint value, control The square resistance of the first lightly doped region ranges from 100 ohm/□ to 130 ohm/□, including the endpoint value.
步骤S102:在所述第一掺杂层上表面形成第一钝化层;Step S102: forming a first passivation layer on the upper surface of the first doped layer;
具体的,在第一掺杂层上表面形成第一氮化硅层。Specifically, a first silicon nitride layer is formed on the upper surface of the first doped layer.
优选地,在第一掺杂层上表面形成第一氮化硅层之前还包括:在600℃至800℃条件下,利用退火氧化在第一掺杂层上表面形成第一氧化硅层,相应的,在第一氧化硅层上表面形成第一氮化硅层,以增强双面太阳能电池的钝化效果,阻挡载流子在双面太阳能电池表面的复合,提高双面太阳能电池的光电转换效率。进一步地,控制第一氧化硅层的厚度在1nm至3nm之间,包括端点值。Preferably, before forming the first silicon nitride layer on the upper surface of the first doped layer, the method further comprises: forming a first silicon oxide layer on the upper surface of the first doped layer by annealing and oxidation at 600°C to 800°C, correspondingly Yes, a first silicon nitride layer is formed on the upper surface of the first silicon oxide layer to enhance the passivation effect of the double-sided solar cell, block the recombination of carriers on the surface of the double-sided solar cell, and improve the photoelectric conversion of the double-sided solar cell effectiveness. Further, the thickness of the first silicon oxide layer is controlled to be between 1 nm and 3 nm, including the endpoint value.
需要指出的是,本实施例中对形成第一钝化层的方式不做具体限定,视情况而定。例如,化学气相沉积法、溅射法,等等。It should be pointed out that the method for forming the first passivation layer is not specifically limited in this embodiment, and it depends on the situation. For example, chemical vapor deposition method, sputtering method, etc.
优选地,控制第一氮化硅层的厚度取值在65nm至90nm之间,包括端点值。避免第一氮化硅层的厚度过小,不能很好的阻止载流子在双面太阳能电池正面的复合,从而使得双面太阳能电池的光电转换效率低,同时避免第一氮化硅层的厚度过大,使得制作成本增加,同时延长工艺时间,减低双面太阳能电池的制备效率。Preferably, the thickness of the first silicon nitride layer is controlled to be between 65 nm and 90 nm, including the endpoint value. Avoid that the thickness of the first silicon nitride layer is too small to prevent the recombination of carriers on the front side of the double-sided solar cell, so that the photoelectric conversion efficiency of the double-sided solar cell is low, and the first silicon nitride layer is avoided at the same time. If the thickness is too large, the manufacturing cost will increase, the process time will be prolonged, and the manufacturing efficiency of the double-sided solar cell will be reduced.
步骤S103:在所述第一钝化层上表面形成第一电极,且所述第一电极与所述第一重掺杂区接触;Step S103: forming a first electrode on the upper surface of the first passivation layer, and the first electrode is in contact with the first heavily doped region;
具体的,利用丝网印刷技术在第一钝化层上表面形成银电极,且银电极与第一重掺杂区完全接触。Specifically, a silver electrode is formed on the upper surface of the first passivation layer by using a screen printing technology, and the silver electrode is in complete contact with the first heavily doped region.
步骤S104:在所述P型衬底层第二表面形成第二掺杂层,所述第二掺杂层包括第二重掺杂区和第二轻掺杂区;Step S104: forming a second doped layer on the second surface of the P-type substrate layer, the second doped layer including a second heavily doped region and a second lightly doped region;
优选地,利用离子注入法形成第二掺杂层,第二重掺杂区的掺杂浓度高于第二轻掺杂区,方便控制掺杂浓度与掺杂精度,且操作简便。第二掺杂层为3A族元素(如硼)掺杂形成的掺杂层,控制第二重掺杂区的方阻取值在60ohm/□至90ohm/□之间,包括端点值,控制第二轻掺杂区的方阻取值在100ohm/□至130ohm/□之间,包括端点值。Preferably, an ion implantation method is used to form the second doped layer, and the doping concentration of the second heavily doped region is higher than that of the second lightly doped region, which facilitates the control of doping concentration and doping accuracy, and the operation is simple. The second doped layer is a doped layer formed by doping with a group 3A element (such as boron). The square resistance of the second heavily doped area is controlled to be between 60ohm/□ and 90ohm/□, including the endpoint value, and the first The square resistance of the two lightly doped regions ranges from 100 ohm/□ to 130 ohm/□, including the endpoint value.
需要指出的是,第二重掺杂区的掺杂浓度高于第二轻掺杂区,第二重掺杂区被第二轻掺杂区包围;第二掺杂层的远离P型衬底层的表面是一个平整的表面,在第二掺杂层到P型衬底层的方向上,第二重掺杂区的高度高于第二轻掺杂区。It should be pointed out that the doping concentration of the second heavily doped region is higher than that of the second lightly doped region, which is surrounded by the second lightly doped region; the second doped layer is far away from the P-type substrate layer The surface of is a flat surface, and in the direction from the second doped layer to the P-type substrate layer, the height of the second heavily doped region is higher than the second lightly doped region.
优选地,控制第二重掺杂区在平行于所述P型衬底层第二表面的方向上的长度取值范围为100μm至160μm,包括端点值。避免第二重掺杂区在平行于所述P型衬底层第二表面的方向上的长度过小,由于第二电极需要与第二重掺杂区接触,如果长度过小,不利于第二电极与第二重掺杂区完全接触,即增加第二电极与第二重掺杂区对准的难度;同时避免长度过大,即避免第二重掺杂区的面积过大,使得载流子表面复合率增加,从而降低光电转换效率。Preferably, the length of the second heavily doped region in a direction parallel to the second surface of the P-type substrate layer is controlled to have a value ranging from 100 μm to 160 μm, inclusive. Avoid that the length of the second heavily doped region in the direction parallel to the second surface of the P-type substrate layer is too small. Since the second electrode needs to be in contact with the second heavily doped region, if the length is too small, it is not conducive to the second The electrode is in complete contact with the second heavily doped region, which increases the difficulty of aligning the second electrode with the second heavily doped region; at the same time, avoid excessive length, that is, avoid the area of the second heavily doped region from being too large, causing current carrying The sub-surface recombination rate increases, thereby reducing the photoelectric conversion efficiency.
步骤S105:在所述第二掺杂层下表面形成第二钝化层;Step S105: forming a second passivation layer on the lower surface of the second doped layer;
具体的,在第二掺杂层下表面形成氧化铝层;在氧化铝层下表面形成第二氮化硅层。Specifically, an aluminum oxide layer is formed on the lower surface of the second doped layer; a second silicon nitride layer is formed on the lower surface of the aluminum oxide layer.
优选地,在第二掺杂层下表面形成氧化铝层之前还包括:在600℃至800℃条件下,利用退火氧化在第二掺杂层下表面形成第二氧化硅层。以增强双面太阳能电池的钝化效果,阻挡载流子在双面太阳能电池表面的复合,提高双面太阳能电池的光电转换效率。进一步地,控制第二氧化硅层的厚度在1nm至3nm之间,包括端点值。Preferably, before forming the aluminum oxide layer on the lower surface of the second doped layer, the method further includes: forming a second silicon dioxide layer on the lower surface of the second doped layer by annealing and oxidation at 600°C to 800°C. In order to enhance the passivation effect of the double-sided solar cell, block the recombination of carriers on the surface of the double-sided solar cell, and improve the photoelectric conversion efficiency of the double-sided solar cell. Further, the thickness of the second silicon dioxide layer is controlled to be between 1 nm and 3 nm, including the endpoint value.
需要指出的是,本实施例中对形成第二钝化层的方法不做限定,视情 况而定,例如,化学气相沉积法,磁控溅射法,等。It should be pointed out that the method for forming the second passivation layer is not limited in this embodiment, and it depends on the situation, for example, chemical vapor deposition method, magnetron sputtering method, etc.
优选地,控制氧化铝层的厚度取值在4nm至20nm之间,包括端点值。避免氧化铝层的厚度过小,钝化效果差,导致双面太阳能电池的光电转换效率低,同时避免氧化铝层的厚度过大,一方面造成双面太阳能电池的成本增加,另一方面使得双面太阳能电池的制作时间延长,减低制备效率。Preferably, the thickness of the controlled aluminum oxide layer is between 4 nm and 20 nm, including the endpoint value. Avoid the thickness of the aluminum oxide layer is too small, the passivation effect is poor, resulting in low photoelectric conversion efficiency of the double-sided solar cell, while avoiding the thickness of the aluminum oxide layer is too large, on the one hand, increase the cost of the double-sided solar cell, on the other hand, The production time of double-sided solar cells is prolonged and the production efficiency is reduced.
优选地,控制第二氮化硅层的厚度取值在65nm至140nm之间,包括端点值。避免第二氮化硅层的厚度过小,使得双面太阳能电池背面钝化效果差,导致双面太阳能电池的光电转换效率低,同时避免第二氮化硅层的厚度过大,使得制作成本增加,同时延长工艺时间,减低双面太阳能电池的制备效率。Preferably, the thickness of the second silicon nitride layer is controlled to be between 65 nm and 140 nm, including the endpoint value. Avoid excessively small thickness of the second silicon nitride layer, resulting in poor passivation on the back of the double-sided solar cell, resulting in low photoelectric conversion efficiency of the double-sided solar cell, and avoiding the thickness of the second silicon nitride layer from being too large, resulting in manufacturing costs Increase and extend the process time at the same time, reduce the production efficiency of double-sided solar cells.
步骤S106:在所述第二钝化层下表面形成第二电极;Step S106: forming a second electrode on the lower surface of the second passivation layer;
优选地,利用丝网印刷方法在第二钝化层下表面形成银铝电极,由于银铝浆料的塑性更好,可以穿透氮化硅层,不需要在双面太阳能电池的背面激光开孔,工艺更加简单,并且,第二电极与第二重掺杂区的接触电阻更低,有利于提升光电转换效率。Preferably, a silver-aluminum electrode is formed on the lower surface of the second passivation layer by using a screen printing method. Since the plasticity of the silver-aluminum paste is better, it can penetrate the silicon nitride layer and does not require laser opening on the back of the double-sided solar cell. Hole, the process is simpler, and the contact resistance between the second electrode and the second heavily doped region is lower, which is beneficial to improve the photoelectric conversion efficiency.
其中,所述第一表面与所述第二表面相对。Wherein, the first surface is opposite to the second surface.
在上述实施例的基础上,在本申请的一个实施例中,在所述第二钝化层下表面形成第二电极之后,还包括:On the basis of the foregoing embodiment, in an embodiment of the present application, after the second electrode is formed on the lower surface of the second passivation layer, the method further includes:
进行抗光衰处理,以提高双面太阳能电池输出功率的稳定性。Anti-light decay treatment to improve the stability of the output power of the double-sided solar cell.
本实施例中对抗光衰处理的方式不做限定,可以利用电注入进行抗光衰处理,还可以利用光注入抗光衰处理。The method of anti-light decay treatment in this embodiment is not limited. Electric injection can be used for anti-light decay treatment, and light injection can also be used for anti-light decay treatment.
本实施例所提供的双面太阳能电池制备方法制作的双面太阳能电池,包括P型衬底层;位于所述P型衬底层第一表面的第一掺杂层,所述第一掺杂层包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区;位于所述第一掺杂层上表面的第一钝化层;位于所述第一钝化层上表面的第一电极,且所述第一电极与所述第一重掺杂区接触;位于所述P型衬底层第二表面的第二掺杂层,所述第二掺杂层包括第二重掺杂区和第二轻掺杂区;位于所述第二掺杂层下表面的第二钝化层;位于所述第二钝化层下表面的第二电极;其中,所述第一表面与所述第二表面相对。可见, 本实施例中制作的双面太阳能电池,在电池的第一表面和第二表面分别具有第一掺杂层和第二掺杂层,且第一掺杂层包括第一重掺杂区和环绕在所述第一重掺杂区外边缘的第一轻掺杂区,第二掺杂层包括第二重掺杂区和第二轻掺杂区,即在电池的第一表面和第二表面均采用选择性发射极技术,相较于现有技术中的双面太阳能电池,光电转换效率得到进一步提升。The double-sided solar cell produced by the double-sided solar cell manufacturing method provided in this embodiment includes a P-type substrate layer; a first doped layer on the first surface of the P-type substrate layer, and the first doped layer includes A first heavily doped region and a first lightly doped region surrounding the outer edge of the first heavily doped region; a first passivation layer located on the upper surface of the first doped layer; located on the first passivation layer The first electrode on the upper surface of the chemical layer, and the first electrode is in contact with the first heavily doped region; the second doped layer on the second surface of the P-type substrate layer, the second doped layer It includes a second heavily doped region and a second lightly doped region; a second passivation layer located on the lower surface of the second doped layer; a second electrode located on the lower surface of the second passivation layer; wherein The first surface is opposite to the second surface. It can be seen that the double-sided solar cell manufactured in this embodiment has a first doped layer and a second doped layer on the first surface and the second surface of the battery, and the first doped layer includes a first heavily doped region And the first lightly doped region surrounding the outer edge of the first heavily doped region, the second doped layer includes a second heavily doped region and a second lightly doped region, that is, on the first surface and the first surface of the battery Both surfaces adopt selective emitter technology. Compared with the double-sided solar cell in the prior art, the photoelectric conversion efficiency is further improved.
本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其它实施例的不同之处,各个实施例之间相同或相似部分互相参见即可。对于实施例公开的装置而言,由于其与实施例公开的方法相对应,所以描述的比较简单,相关之处参见方法部分说明即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the method part.
以上对本申请所提供的双面太阳能电池及其制备方法进行了详细介绍。本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以对本申请进行若干改进和修饰,这些改进和修饰也落入本申请权利要求的保护范围内。The double-sided solar cell provided by the present application and the preparation method thereof are described in detail above. Specific examples are used in this article to describe the principles and implementation of the application. The description of the above examples is only used to help understand the method and core ideas of the application. It should be pointed out that for those of ordinary skill in the art, without departing from the principles of this application, several improvements and modifications can be made to this application, and these improvements and modifications also fall within the protection scope of the claims of this application.
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CN110021673A (en) * | 2019-04-18 | 2019-07-16 | 苏州腾晖光伏技术有限公司 | A kind of double-sided solar battery and preparation method thereof |
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