CN110010693B - 一种高压深沟槽型超结mosfet的结构及其制作方法 - Google Patents
一种高压深沟槽型超结mosfet的结构及其制作方法 Download PDFInfo
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- CN110010693B CN110010693B CN201910373790.0A CN201910373790A CN110010693B CN 110010693 B CN110010693 B CN 110010693B CN 201910373790 A CN201910373790 A CN 201910373790A CN 110010693 B CN110010693 B CN 110010693B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 210000000746 body region Anatomy 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 13
- 230000000149 penetrating effect Effects 0.000 claims abstract description 11
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 22
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 16
- 229920005591 polysilicon Polymers 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 9
- 238000001259 photo etching Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201910373790.0A CN110010693B (zh) | 2019-05-07 | 2019-05-07 | 一种高压深沟槽型超结mosfet的结构及其制作方法 |
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CN201910373790.0A CN110010693B (zh) | 2019-05-07 | 2019-05-07 | 一种高压深沟槽型超结mosfet的结构及其制作方法 |
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Publication Number | Publication Date |
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CN110010693A CN110010693A (zh) | 2019-07-12 |
CN110010693B true CN110010693B (zh) | 2024-03-12 |
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CN201910373790.0A Active CN110010693B (zh) | 2019-05-07 | 2019-05-07 | 一种高压深沟槽型超结mosfet的结构及其制作方法 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN204375758U (zh) * | 2015-01-28 | 2015-06-03 | 无锡新洁能股份有限公司 | 具有超高元胞密度的深沟槽功率mos器件 |
US9293527B1 (en) * | 2014-12-03 | 2016-03-22 | Force Mos Technology Co., Ltd. | Super-junction trench MOSFET structure |
CN107342326A (zh) * | 2017-07-04 | 2017-11-10 | 无锡新洁能股份有限公司 | 一种降低导通电阻的功率半导体器件及制造方法 |
CN107799419A (zh) * | 2016-08-31 | 2018-03-13 | 无锡华润华晶微电子有限公司 | 超级结功率器件及其制备方法 |
CN109686781A (zh) * | 2018-12-14 | 2019-04-26 | 无锡紫光微电子有限公司 | 一种多次外延的超结器件制作方法 |
CN209981223U (zh) * | 2019-05-07 | 2020-01-21 | 无锡紫光微电子有限公司 | 一种高压深沟槽型超结mosfet的结构 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7285469B2 (en) * | 2005-09-02 | 2007-10-23 | Intersil Americas | Bipolar method and structure having improved BVCEO/RCS trade-off made with depletable collector columns |
US9099320B2 (en) * | 2013-09-19 | 2015-08-04 | Force Mos Technology Co., Ltd. | Super-junction structures having implanted regions surrounding an N epitaxial layer in deep trench |
-
2019
- 2019-05-07 CN CN201910373790.0A patent/CN110010693B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9293527B1 (en) * | 2014-12-03 | 2016-03-22 | Force Mos Technology Co., Ltd. | Super-junction trench MOSFET structure |
CN204375758U (zh) * | 2015-01-28 | 2015-06-03 | 无锡新洁能股份有限公司 | 具有超高元胞密度的深沟槽功率mos器件 |
CN107799419A (zh) * | 2016-08-31 | 2018-03-13 | 无锡华润华晶微电子有限公司 | 超级结功率器件及其制备方法 |
CN107342326A (zh) * | 2017-07-04 | 2017-11-10 | 无锡新洁能股份有限公司 | 一种降低导通电阻的功率半导体器件及制造方法 |
CN109686781A (zh) * | 2018-12-14 | 2019-04-26 | 无锡紫光微电子有限公司 | 一种多次外延的超结器件制作方法 |
CN209981223U (zh) * | 2019-05-07 | 2020-01-21 | 无锡紫光微电子有限公司 | 一种高压深沟槽型超结mosfet的结构 |
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Effective date of registration: 20240613 Address after: 100000 106A, Floor 1, B-1, Zhongguancun Dongsheng Science Park, 66 Xixiaokou Road, Haidian District, Northern Territory, Beijing Patentee after: ZIGUANG TONGXIN MICROELECTRONICS CO.,LTD. Country or region after: China Address before: 214135 Jiangsu Wuxi New District, 200, Linghu Road, China, four floor, D2 International Innovation Park, China sensor network. Patentee before: WUXI UNIGROUP MICROELECTRONICS CO.,LTD. Country or region before: China |