CN110010571A - 一种大功率射频芯片系统级封装用的水冷沟槽结构及其制作方法 - Google Patents
一种大功率射频芯片系统级封装用的水冷沟槽结构及其制作方法 Download PDFInfo
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- CN110010571A CN110010571A CN201811633992.6A CN201811633992A CN110010571A CN 110010571 A CN110010571 A CN 110010571A CN 201811633992 A CN201811633992 A CN 201811633992A CN 110010571 A CN110010571 A CN 110010571A
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811633992.6A CN110010571A (zh) | 2018-12-29 | 2018-12-29 | 一种大功率射频芯片系统级封装用的水冷沟槽结构及其制作方法 |
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CN201811633992.6A CN110010571A (zh) | 2018-12-29 | 2018-12-29 | 一种大功率射频芯片系统级封装用的水冷沟槽结构及其制作方法 |
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CN110010571A true CN110010571A (zh) | 2019-07-12 |
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CN201811633992.6A Pending CN110010571A (zh) | 2018-12-29 | 2018-12-29 | 一种大功率射频芯片系统级封装用的水冷沟槽结构及其制作方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110739227A (zh) * | 2019-09-27 | 2020-01-31 | 浙江大学 | 一种基于三维散热结构的三维异构射频模组的制作方法 |
CN111653492A (zh) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | 一种三维堆叠射频光模块制作方法 |
CN111653489A (zh) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | 一种基于多层散热结构的三维射频模组制作方法 |
CN113066778A (zh) * | 2021-03-23 | 2021-07-02 | 浙江集迈科微电子有限公司 | 转接板堆叠结构和工艺 |
CN114551385A (zh) * | 2022-04-28 | 2022-05-27 | 之江实验室 | 含有微流道散热结构的三维堆叠封装结构及其封装方法 |
CN115116991A (zh) * | 2022-08-29 | 2022-09-27 | 威海艾迪科电子科技股份有限公司 | 一种传感器及其制造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6548895B1 (en) * | 2001-02-21 | 2003-04-15 | Sandia Corporation | Packaging of electro-microfluidic devices |
CN2922124Y (zh) * | 2006-07-16 | 2007-07-11 | 重庆工学院 | Led液体冷却用冷却结构 |
US20120048596A1 (en) * | 2007-08-28 | 2012-03-01 | Research Triangle Institute | Structure And Process For Electrical Interconnect And Thermal Management |
CN106601704A (zh) * | 2016-11-17 | 2017-04-26 | 云南电网有限责任公司电力科学研究院 | 晶闸管散热装置 |
-
2018
- 2018-12-29 CN CN201811633992.6A patent/CN110010571A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6548895B1 (en) * | 2001-02-21 | 2003-04-15 | Sandia Corporation | Packaging of electro-microfluidic devices |
CN2922124Y (zh) * | 2006-07-16 | 2007-07-11 | 重庆工学院 | Led液体冷却用冷却结构 |
US20120048596A1 (en) * | 2007-08-28 | 2012-03-01 | Research Triangle Institute | Structure And Process For Electrical Interconnect And Thermal Management |
CN106601704A (zh) * | 2016-11-17 | 2017-04-26 | 云南电网有限责任公司电力科学研究院 | 晶闸管散热装置 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111653492A (zh) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | 一种三维堆叠射频光模块制作方法 |
CN111653489A (zh) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | 一种基于多层散热结构的三维射频模组制作方法 |
CN111653492B (zh) * | 2019-09-24 | 2021-10-01 | 浙江集迈科微电子有限公司 | 一种三维堆叠射频光模块制作方法 |
CN110739227A (zh) * | 2019-09-27 | 2020-01-31 | 浙江大学 | 一种基于三维散热结构的三维异构射频模组的制作方法 |
CN110739227B (zh) * | 2019-09-27 | 2021-07-23 | 浙江大学 | 一种基于三维散热结构的三维异构射频模组的制作方法 |
CN113066778A (zh) * | 2021-03-23 | 2021-07-02 | 浙江集迈科微电子有限公司 | 转接板堆叠结构和工艺 |
CN113066778B (zh) * | 2021-03-23 | 2024-02-13 | 浙江集迈科微电子有限公司 | 转接板堆叠结构和工艺 |
CN114551385A (zh) * | 2022-04-28 | 2022-05-27 | 之江实验室 | 含有微流道散热结构的三维堆叠封装结构及其封装方法 |
US11776879B1 (en) | 2022-04-28 | 2023-10-03 | Zhejiang Lab | Three-dimensional stacked package structure with micro-channel heat dissipation structure and packaging method thereof |
CN115116991A (zh) * | 2022-08-29 | 2022-09-27 | 威海艾迪科电子科技股份有限公司 | 一种传感器及其制造方法 |
CN115116991B (zh) * | 2022-08-29 | 2022-11-04 | 威海艾迪科电子科技股份有限公司 | 一种传感器及其制造方法 |
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Inventor after: Feng Guangjian Inventor before: Feng Guangjian Inventor before: Wang Zhiyu Inventor before: Zhang Bing Inventor before: Zhou Qi Inventor before: Zhang Xun Inventor before: Yu Faxin |
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Effective date of registration: 20200804 Address after: 313100 Workshop No. 8, North Park, Second Division of Changxing National University Science and Technology Park, Chenwang Road and Taihu Road Intersection, Changxing County Economic and Technological Development Zone, Huzhou City, Zhejiang Province Applicant after: ZHEJIANG JIMAIKE MICROELECTRONIC Co.,Ltd. Address before: 310030 Building 6, No. 3, Xiyuan Third Road, Sandun Town, Xihu District, Hangzhou City, Zhejiang Province Applicant before: HANGZHOU ZHENLEI MICROWAVE TECHNOLOGY Co.,Ltd. |
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Application publication date: 20190712 |