CN109979872A - A kind of pick device with anti-drop function for chip manufacture - Google Patents
A kind of pick device with anti-drop function for chip manufacture Download PDFInfo
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- CN109979872A CN109979872A CN201910238777.4A CN201910238777A CN109979872A CN 109979872 A CN109979872 A CN 109979872A CN 201910238777 A CN201910238777 A CN 201910238777A CN 109979872 A CN109979872 A CN 109979872A
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- fixing pipe
- moving tube
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 230000000712 assembly Effects 0.000 claims abstract description 15
- 238000000429 assembly Methods 0.000 claims abstract description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 4
- 238000005246 galvanizing Methods 0.000 claims description 4
- 239000010687 lubricating oil Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000018199 S phase Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to a kind of pick devices with anti-drop function for chip manufacture, including fixing pipe and suction nozzle, the suction nozzle is mounted on one end of fixing pipe, the fixing pipe is equipped with auxiliary body, the auxiliary body includes moving tube, connecting tube, moving assembly and two clamp assemblies, the moving assembly includes driving unit and two connection units, the connection unit includes fixed block, mobile bar, first spring and link block, the clamp assemblies include electromagnet, magnet block, drive rod, grip block and two support units, the pick device with anti-drop function for being used for chip manufacture reduces deviation of chip during jack-up by auxiliary body, improve the stability of suction chip, moreover, also suction nozzle is avoided to drive in chip moving process by clamp assemblies, chip falls off from suction nozzle , improve reliability.
Description
Technical field
The present invention relates to chip manufacture apparatus field, in particular to it is a kind of for chip manufacture with anti-drop function
Pick device.
Background technique
Semiconductor chip is that various sizes of chip is cut into determined size, in order not to make that cuts off when cutting partly to lead
Body chip is messy, and chip is overleaf bonded the holding band with cementability, cuts off chip from surface side by chip disconnecting device etc.,
At this time, although the holding band for being bonded overleaf is cut into several, but be not cut off, become the shape for keeping each semiconductor chip
State, then, cut-off each semiconductor chip by chip pickup machine from keeping band to pick up, in pick process, chip first from
It is jacked up on wafer, then by suction chip surface, realizes and remove and shift.
For existing chip pickup machine when jacking up chip, chip is by capping in order to prevent, can be there are between suction nozzle and chip
A certain distance, chip, if thimble arrangement is uneven, can make chip position generate deviation, cause suction nozzle can not in the state of jack-up
It adsorbs chip or inhales partially, reduce stability, moreover, suction nozzle is sucked in chip moving process, in order to improve work effect
Rate, shifting speed is general very fast, easily chip is made to fall off with suction nozzle, reduces reliability.
Summary of the invention
The technical problem to be solved by the present invention is for overcome the deficiencies in the prior art, providing a kind of for chip manufacture
The pick device with anti-drop function.
The technical solution adopted by the present invention to solve the technical problems is: a kind of to have anti-dropout function for chip manufacture
The pick device of energy, including fixing pipe and suction nozzle, the suction nozzle are mounted on one end of fixing pipe, and the fixing pipe is equipped with auxiliary
Mechanism；
The auxiliary body includes moving tube, connecting tube, moving assembly and two clamp assemblies, the moving tube and connection
The coaxial arrangement of Guan Junyu fixing pipe, the internal diameter of the moving tube and the outer diameter of fixing pipe are equal, and the moving tube is set in fixation
Guan Shang, the outer diameter of the connecting tube and the internal diameter of moving tube are equal, and one end of the separate suction nozzle of the moving tube is set in connection
Guan Shang, the connecting tube and fixing pipe are slidingly and sealingly connect with moving tube, and the moving assembly is arranged in moving tube, institute
Moving tube is stated to be arranged between two clamp assemblies；
The moving assembly includes driving unit and two connection units, and the moving tube passes through driving unit and connecting tube
Connection, the driving unit driving moving tube is along the axial movement of connecting tube, and the axis of the fixing pipe is positioned at two connections
Between unit；
The connection unit includes fixed block, mobile bar, the first spring and link block, and the mobile bar and fixing pipe are flat
Row, one end of the mobile bar are fixed on one end of the separate suction nozzle of fixing pipe, and the link block is fixed on the another of mobile bar
End, the fixed block are set in mobile bar, and the fixed block is fixed on the inner wall of moving tube, and first spring, which is located at, to be connected
It connects between block and fixed block, the link block is connect by the first spring with fixed block；
The clamp assemblies include electromagnet, magnet block, drive rod, grip block and two support units, the electromagnet
It is fixed in mobile bar, the side of the separate moving tube of electromagnet is arranged in the magnet block, and the magnet block and electromagnet are just
To setting, the support unit is arranged on magnet block, and the magnet block is connect by support unit with moving tube, the electricity
Magnet is located between two support units, and the suction nozzle is located between two grip blocks, and the grip block passes through drive rod and magnetic
Iron block is fixedly connected.
Preferably, the driving unit includes driving motor, screw rod, sliding block, two light in order to drive moving tube mobile
Bar and two connecting rods, the driving motor are fixed on the inner wall of connecting tube, and the screw rod is parallel with fixing pipe, the driving electricity
Machine is connect with screw rod transmission, and the sliding block is set on screw rod, and being equipped with the junction of screw rod for the sliding block is matched with screw rod
Screw thread, the axis of the connecting rod and the axis of moving tube are vertical, and the two sides of the sliding block pass through two connecting rods and movement respectively
The inner wall of pipe is fixedly connected, and gap, the polished rod and connecting rod are equipped between one end of the close suction nozzle of the connecting rod and connecting tube
It corresponds, the polished rod is parallel with fixing pipe, and the sliding block is set on polished rod, and one end of the separate suction nozzle of the polished rod is solid
It is scheduled on the inner wall of connecting tube.
Preferably, being coated with lubricating oil on the screw rod to reduce the frictional force between screw rod and sliding block.
Preferably, the accuracy mobile for sliding block, the driving motor is servo motor.
Preferably, the function in order to realize support magnet block, the support unit includes support rod, limited block and second
Spring, the axis of the support rod and the axis of moving tube are vertical and intersect, and the magnet block is set on support rod, the branch
One end of strut is fixedly connected with moving tube, and the limited block is fixed on the other end of support rod, and the second spring is located at limit
Between position block and magnet block, the limited block is connect by second spring with magnet block.
Preferably, in order to improve stability, the side of the close suction nozzle of the grip block is equipped with recess.
Preferably, the making material of the grip block is rubber in order to avoid wafer damage.
Preferably, being coated with stop-leak compound on the inner wall of the moving tube to improve leakproofness.
Preferably, being coated with anticorrosion galvanizing layer in the moving tube to extend the service life of moving tube.
Preferably, detecting whether absorption chip to realize, light sensor and detection system are equipped in the fixing pipe
System, the light sensor are electrically connected with detection system.
The invention has the advantages that the pick device with anti-drop function for being used for chip manufacture passes through auxiliary machine
Structure reduces deviation of chip during jack-up, improves the stability of suction chip, with existing auxiliary body's phase
Than, during chip jacks up, suction nozzle and chip realize synchronizing moving, avoid damage to chip, and reliability is higher for the auxiliary body,
Moreover, also suction nozzle is avoided to drive in chip moving process by clamp assemblies, chip falls off from suction nozzle, improves reliable
Property, compared with existing clamp assemblies, which can adjust electromagnetism by the alive intensity of regulating magnet institute
Attraction between iron and magnet block drives the distance of grip block movement so as to regulating magnet block by drive rod, to
It is applicable in the chip without size, practicability is stronger.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the structural schematic diagram of the pick device with anti-drop function for chip manufacture of the invention；
Fig. 2 is the portion the A enlarged drawing of Fig. 1；
Fig. 3 is the portion the B enlarged drawing of Fig. 1；
Fig. 4 is that the structure of the driving unit of the pick device with anti-drop function for chip manufacture of the invention is shown
It is intended to；
In figure: 1. fixing pipes, 2. suction nozzles, 3. moving tubes, 4. connecting tubes, 5. fixed blocks, 6. mobile bars, 7. first springs,
8. link block, 9. electromagnet, 10. magnet blocks, 11. drive rods, 12. grip blocks, 13. driving motors, 14. screw rods, 15. sliding blocks,
16. polished rod, 17. connecting rods, 18. support rods, 19. limited blocks, 20. second springs, 21. light sensors.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates basic structure of the invention, therefore it only shows the composition relevant to the invention.
As shown in Figs. 1-2, a kind of pick device with anti-drop function for chip manufacture, including 1 He of fixing pipe
Suction nozzle 2, the suction nozzle 2 are mounted on one end of fixing pipe 1, and the fixing pipe 1 is equipped with auxiliary body；
The auxiliary body includes moving tube 3, connecting tube 4, moving assembly and two clamp assemblies, 3 He of moving tube
Connecting tube 4 is coaxially disposed with fixing pipe 1, and the internal diameter of the moving tube 3 is equal with the outer diameter of fixing pipe 1,3 sets of the moving tube
It being located in fixing pipe 1, the outer diameter of the connecting tube 4 is equal with the internal diameter of moving tube 3, and the one of the separate suction nozzle 2 of the moving tube 3
End cap is located in connecting tube 4, and the connecting tube 4 and fixing pipe 1 are slidingly and sealingly connect with moving tube 3, the moving assembly
It is arranged in moving tube 3, the moving tube 3 is arranged between two clamp assemblies；
The moving assembly includes driving unit and two connection units, the moving tube 3 by driving unit with connect
Pipe 4 connects, and the driving unit driving moving tube 3 is along the axial movement of connecting tube 4, and the axis of the fixing pipe 1 is positioned at two
Between a connection unit；
The connection unit includes fixed block 5, mobile bar 6, the first spring 7 and link block 8, the mobile bar 6 with it is fixed
Pipe 1 is parallel, and one end of the mobile bar 6 is fixed on one end of the separate suction nozzle 2 of fixing pipe 1, and the link block 8 is fixed on movement
The other end of bar 6, the fixed block 5 are set in mobile bar 6, and the fixed block 5 is fixed on the inner wall of moving tube 3, described
Between link block 8 and fixed block 5, the link block 8 is connect by the first spring 7 with fixed block 5 first spring 7；
The clamp assemblies include electromagnet 9, magnet block 10, drive rod 11, grip block 12 and two support units, described
Electromagnet 9 is fixed in mobile bar 6, and the side of the separate moving tube 3 of electromagnet 9, the magnet is arranged in the magnet block 10
Block 10 and 9 face of electromagnet are arranged, and the support unit is arranged on magnet block 10, the magnet block 10 by support unit with
It being connect with moving tube 3, the electromagnet 9 is located between two support units, and the suction nozzle 2 is located between two grip blocks 12,
The grip block 12 is fixedly connected by drive rod 11 with magnet block 10.
One end of the separate suction nozzle 2 of connecting tube 4 is connect with external controller, may be implemented to connect by control device
The movement of pipe 4 and the function of extracting air in connecting tube 4 are picked up in chip processes, keep moving tube 3 mobile by control device,
To make the surface of suction nozzle 2 and chip against and towards chip pressuring direction, also, pressure dynamics can control by debugging,
Chip is avoided damage to, so that it is mobile away from 2 direction of suction nozzle so that fixing pipe 1 is driven mobile bar 6, and stretches the first spring 7,
Chip makes suction nozzle 2 towards mobile close to 4 direction of connecting tube during jack-up, by driving unit make moving tube 3 away from
Work as core to make to keep opposing stationary positional relationship between moving tube 3 and suction nozzle 2 with 2 synchronizing moving of suction nozzle in 2 direction of suction nozzle
After piece is jacked up completely, the air in connecting tube 4 is extracted by control device, makes to form negative pressure in connecting tube 4, so as to
So that suction nozzle 2 adsorbs chip, then, driving unit continues to make moving tube 3 towards close to the movement of 4 direction of connecting tube, makes the first bullet
Spring 7 resets, and is located at the chip on suction nozzle 2 between two grip blocks 12, is powered by electromagnet 9, makes electromagnet 9 and magnet
The active force to attract each other is generated between block 10, to make magnet block 10 under the supporting role of support unit towards close to electromagnetism
9 direction of iron is mobile, and the movement of magnet block 10 keeps grip block 12 mobile towards close 2 direction of suction nozzle by drive rod 11, to make
Grip block 12 clamps chip, and when needing to unload chip, electromagnet 9 is powered off, and magnet block 10 is realized by support unit to be resetted, from
And separate grip block 12 with chip, restore the air pressure in connecting tube 4 by control device, so that chip be made to divide with suction nozzle 2
From.
As shown in figure 3, the driving unit includes driving motor 13, screw rod 14,15, two polished rods 16 of sliding block and two companies
Bar 17, the driving motor 13 are fixed on the inner wall of connecting tube 4, and the screw rod 14 is parallel with fixing pipe 1, the driving motor
13 are sequentially connected with screw rod 14, and the sliding block 15 is set on screw rod 14, and the sliding block 15 is equipped with the junction of screw rod 14
With the matched screw thread of screw rod 14, the axis of the connecting rod 17 is vertical with the axis of moving tube 3, and the two sides of the sliding block 15 lead to respectively
It crosses two connecting rods 17 to be fixedly connected with the inner wall of moving tube 3, between one end of the close suction nozzle 2 of the connecting rod 17 and connecting tube 4
Equipped with gap, the polished rod 16 is corresponded with connecting rod 17, and the polished rod 16 is parallel with fixing pipe 1, and the sliding block 15 is set in
On polished rod 16, one end of the separate suction nozzle 2 of the polished rod 16 is fixed on the inner wall of connecting tube 4.
It is run by driving motor 13, rotates screw rod 14, thus move sliding block 15 under the supporting role of polished rod 16,
The movement of sliding block 15 drives moving tube 3 mobile by connecting rod 17.
Preferably, being coated with lubricating oil on the screw rod 14 to reduce the frictional force between screw rod 14 and sliding block 15.
The effect of lubricating oil is the frictional force reduced between screw rod 14 and sliding block 15, improves the mobile fluency of sliding block 15.
Preferably, the accuracy mobile for sliding block 15, the driving motor 13 is servo motor.
As shown in figure 4, the support unit includes support rod 18, limited block 19 and second spring 20, the support rod 18
Axis it is vertical with the axis of moving tube 3 and intersect, the magnet block 10 is set on support rod 18, the one of the support rod 18
End is fixedly connected with moving tube 3, and the limited block 19 is fixed on the other end of support rod 18, and the second spring 20 is located at limit
Between block 19 and magnet block 10, the limited block 19 is connect by second spring 20 with magnet block 10.
When electromagnet 9 is powered, magnet block 10 is mobile towards close 9 direction of electromagnet under the supporting role of support rod 18,
It drives second spring 20 to stretch, when electromagnet 9 powers off, resets magnet block 10 under the elastic reaction of second spring 20.
Preferably, in order to improve stability, the side of the close suction nozzle 2 of the grip block 12 is equipped with recess.
Grip block 12 and chip against when, chip is located in recess, plays the effect of support chip, improves stabilization
Property.
Preferably, the making material of the grip block 12 is rubber in order to avoid wafer damage.
Rubber quality is more soft, has certain buffering and effectiveness in vibration suppression, grip block 12 is avoided to crush chip.
Preferably, being coated with stop-leak compound on the inner wall of the moving tube 3 to improve leakproofness.
The effect of stop-leak compound is to reduce the gap between fixing pipe 1 and connecting tube 4 respectively of moving tube 3, improves sealing
Property.
Preferably, being coated with anticorrosion galvanizing layer in the moving tube 3 to extend the service life of moving tube 3.
The antirust ability of moving tube 3 can be promoted by anticorrosion galvanizing layer, extend the service life of moving tube 3.
Preferably, detecting whether absorption chip to realize, light sensor 21 and detection are equipped in the fixing pipe 1
System, the light sensor 21 are electrically connected with detection system.
In fixing pipe 1 when 2 unadsorbed chip of suction nozzle than suction nozzle 2 adsorb chip when light intensity it is high, therefore, pass through light
The signal that sensor 21 detects passes to detection system, can detecte whether suction nozzle 2 adsorbs chip.
The equipment application method:
One end of the separate suction nozzle 2 of connecting tube 4 is connect with external controller, may be implemented to connect by control device
The movement of pipe 4 and the function of extracting air in connecting tube 4 are picked up in chip processes, keep moving tube 3 mobile by control device,
To make the surface of suction nozzle 2 and chip against and towards chip pressuring direction, also, pressure dynamics can control by debugging,
Chip is avoided damage to, so that it is mobile away from 2 direction of suction nozzle so that fixing pipe 1 is driven mobile bar 6, and stretches the first spring 7,
Chip makes suction nozzle 2 towards close to the movement of 4 direction of connecting tube, is run by driving motor 13, make 14 turns of screw rod during jack-up
Dynamic, so that sliding block 15 be made to move under the supporting role of polished rod 16, the movement of sliding block 15 drives moving tube 3 to move by connecting rod 17
It is dynamic, make moving tube 3 away from 2 direction of suction nozzle and 2 synchronizing moving of suction nozzle, to make to keep opposite between moving tube 3 and suction nozzle 2
Static positional relationship extracts the air in connecting tube 4 by control device, makes in connecting tube 4 when chip is jacked up completely
Negative pressure is formed, so as to which so that suction nozzle 2 adsorbs chip, then, sliding block 15 drives connecting rod 17 to continue to make moving tube 3 towards close to even
4 direction of adapter tube is mobile, resets the first spring 7, and is located at the chip on suction nozzle 2 between two grip blocks 12, passes through electromagnetism
Iron 9 is powered, and makes to generate the active force to attract each other between electromagnet 9 and magnet block 10, to make magnet block 10 in support rod 18
Supporting role under towards mobile close to 9 direction of electromagnet, and stretch second spring 20, the movement of magnet block 10 passes through biography
Lever 11 makes grip block 12 towards mobile close to 2 direction of suction nozzle, so that grip block 12 be made to clamp chip, when needing to unload chip
When, electromagnet 9 powers off, and magnet block 10 is realized by the elastic reaction of second spring 20 to be resetted, to make grip block 12 and chip
Separation, restores the air pressure in connecting tube 4 by control device, so that chip be made to separate with suction nozzle 2；
Here, for chip during the jacking up, suction nozzle 2 generates the pressure away from 4 direction of connecting tube to chip always,
The deviation that can reduce chip generation, prevents suction nozzle 2 from inhaling partially, improves stability, also, when the drive chip movement of suction nozzle 2, leads to
It crosses two grip blocks 12 and abuts against chip, can prevent from falling off from suction nozzle 2 due to chip is fast too fast because moving, improve reliability.
Compared with prior art, which is subtracted by auxiliary body
Small deviation of chip during jack-up improves the stability that suction nozzle 2 adsorbs chip, compared with existing auxiliary body,
During chip jacks up, suction nozzle 2 and chip realize synchronizing moving for the auxiliary body, avoid damage to chip, reliability is higher, no
Only in this way, also avoiding suction nozzle 2 from driving in chip moving process by clamp assemblies, chip falls off from suction nozzle 2, improves reliable
Property, compared with existing clamp assemblies, which can adjust electromagnetism by the 9 alive intensity of institute of regulating magnet
Attraction between iron 9 and magnet block 10 drives the movement of grip block 12 by drive rod 11 so as to regulating magnet block 10
Distance, to be applicable in the chip for not having to size, practicability is stronger.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (10)
1. a kind of pick device with anti-drop function for chip manufacture, including fixing pipe (1) and suction nozzle (2), described
Suction nozzle (2) is mounted on one end of fixing pipe (1), which is characterized in that the fixing pipe (1) is equipped with auxiliary body；
The auxiliary body includes moving tube (3), connecting tube (4), moving assembly and two clamp assemblies, the moving tube (3)
It is coaxially disposed with fixing pipe (1) with connecting tube (4), the internal diameter of the moving tube (3) is equal with the outer diameter of fixing pipe (1), institute
It states moving tube (3) to be set on fixing pipe (1), the outer diameter of the connecting tube (4) is equal with the internal diameter of moving tube (3), the shifting
One end of the separate suction nozzle (2) of dynamic pipe (3) is set on connecting tube (4), the connecting tube (4) and fixing pipe (1) with movement
Pipe (3) slidingly and sealingly connects, and in moving tube (3), moving tube (3) setting is clamped at two for the moving assembly setting
Between component；
The moving assembly includes driving unit and two connection units, and the moving tube (3) passes through driving unit and connecting tube
(4) it connects, axial movement of driving unit driving moving tube (3) along connecting tube (4), the axis of the fixing pipe (1)
Between two connection units；
The connection unit includes fixed block (5), mobile bar (6), the first spring (7) and link block (8), the mobile bar (6)
Parallel with fixing pipe (1), one end of the mobile bar (6) is fixed on one end of the separate suction nozzle (2) of fixing pipe (1), the company
The other end that block (8) is fixed on mobile bar (6) is connect, the fixed block (5) is set on mobile bar (6), and the fixed block (5) is solid
It is scheduled on the inner wall of moving tube (3), first spring (7) is located between link block (8) and fixed block (5), the link block
(8) it is connect by the first spring (7) with fixed block (5)；
The clamp assemblies include electromagnet (9), magnet block (10), drive rod (11), grip block (12) and two support units,
The electromagnet (9) is fixed on mobile bar (6), the separate moving tube (3) of the magnet block (10) setting in electromagnet (9)
Side, the magnet block (10) and electromagnet (9) face are arranged, and the support unit is arranged on magnet block (10), the magnetic
Iron block (10) is connect by support unit with moving tube (3), and the electromagnet (9) is located between two support units, described
Suction nozzle (2) is located between two grip blocks (12), and the grip block (12) connects by the way that drive rod (11) and magnet block (10) are fixed
It connects.
2. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
Driving unit includes driving motor (13), screw rod (14), sliding block (15), two polished rods (16) and two connecting rods (17), the drive
Dynamic motor (13) are fixed on the inner wall of connecting tube (4), and the screw rod (14) is parallel with fixing pipe (1), the driving motor
(13) be sequentially connected with screw rod (14), the sliding block (15) is set on screw rod (14), the sliding block (15) with screw rod (14)
Junction be equipped with screw rod (14) matched screw thread, the axis of the connecting rod (17) is vertical with the axis of moving tube (3), described
The two sides of sliding block (15) pass through two connecting rods (17) respectively and are fixedly connected with the inner wall of moving tube (3), the connecting rod (17) and company
It takes over and is equipped with gap between one end of the close suction nozzle (2) of (4), the polished rod (16) and connecting rod (17) correspond, the light
Bar (16) is parallel with fixing pipe (1), and the sliding block (15) is set on polished rod (16), the separate suction nozzle (2) of the polished rod (16)
One end be fixed on the inner wall of connecting tube (4).
3. being used for the pick device with anti-drop function of chip manufacture as claimed in claim 2, which is characterized in that described
Screw rod is coated with lubricating oil on (14).
4. being used for the pick device with anti-drop function of chip manufacture as claimed in claim 2, which is characterized in that described
Driving motor (13) is servo motor.
5. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
Support unit includes support rod (18), limited block (19) and second spring (20), the axis and moving tube of the support rod (18)
(3) axis is vertical and intersects, and the magnet block (10) is set on support rod (18), one end of the support rod (18) and shifting
Dynamic pipe (3) is fixedly connected, and the limited block (19) is fixed on the other end of support rod (18), and the second spring (20) is located at limit
Between position block (19) and magnet block (10), the limited block (19) is connect by second spring (20) with magnet block (10).
6. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
The side of the close suction nozzle (2) of grip block (12) is equipped with recess.
7. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
The making material of grip block (12) is rubber.
8. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
Stop-leak compound is coated on the inner wall of moving tube (3).
9. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that described
Moving tube is coated with anticorrosion galvanizing layer on (3).
10. being used for the pick device with anti-drop function of chip manufacture as described in claim 1, which is characterized in that institute
It states and is equipped with light sensor (21) and detection system in fixing pipe (1), the light sensor (21) is electrically connected with detection system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910238777.4A CN109979872B (en) | 2019-03-27 | 2019-03-27 | A pick up equipment that is used for chip processing to have an anti-drop function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910238777.4A CN109979872B (en) | 2019-03-27 | 2019-03-27 | A pick up equipment that is used for chip processing to have an anti-drop function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109979872A true CN109979872A (en) | 2019-07-05 |
| CN109979872B CN109979872B (en) | 2020-12-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910238777.4A Active CN109979872B (en) | 2019-03-27 | 2019-03-27 | A pick up equipment that is used for chip processing to have an anti-drop function |
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| Country | Link |
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| CN (1) | CN109979872B (en) |
Cited By (8)
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| CN111315203A (en) * | 2020-04-07 | 2020-06-19 | 孟辉 | Novel chip processing is with subsides dress equipment |
| CN113071050A (en) * | 2021-04-01 | 2021-07-06 | 重庆同力塑料制品有限公司 | Material taking and discharging device used after EPS foam product molding |
| CN113428652A (en) * | 2021-05-25 | 2021-09-24 | 广州纵横同舟科技有限公司 | Protective glass plate processing and manufacturing equipment |
| CN113506761A (en) * | 2021-07-01 | 2021-10-15 | 泉州盈创电子有限公司 | Maintenance STB is ball frock for chip |
| CN114464565A (en) * | 2022-01-25 | 2022-05-10 | 先之科半导体科技(东莞)有限公司 | High-precision adjustable chip diode suction pen structure |
| CN117123981A (en) * | 2023-10-26 | 2023-11-28 | 江苏快克芯装备科技有限公司 | Micro-pressure device of chip suction mechanism and chip welding machine |
| CN118123870A (en) * | 2024-05-07 | 2024-06-04 | 苏州微伏芯芯片科技有限公司 | Adjustable chip overturning mechanical arm and use method |
| CN118483013A (en) * | 2024-06-13 | 2024-08-13 | 芯康检测技术无锡有限公司 | Chip failure analysis slice sample preparation method and device |
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| CN111315203A (en) * | 2020-04-07 | 2020-06-19 | 孟辉 | Novel chip processing is with subsides dress equipment |
| CN111315203B (en) * | 2020-04-07 | 2021-08-27 | 上海裕科实业有限公司 | Novel chip processing is with subsides dress equipment |
| CN113071050A (en) * | 2021-04-01 | 2021-07-06 | 重庆同力塑料制品有限公司 | Material taking and discharging device used after EPS foam product molding |
| CN113428652A (en) * | 2021-05-25 | 2021-09-24 | 广州纵横同舟科技有限公司 | Protective glass plate processing and manufacturing equipment |
| CN113506761A (en) * | 2021-07-01 | 2021-10-15 | 泉州盈创电子有限公司 | Maintenance STB is ball frock for chip |
| CN113506761B (en) * | 2021-07-01 | 2023-09-22 | 泉州盈创电子股份公司 | Ball mounting tool for maintaining set top box chip |
| CN114464565A (en) * | 2022-01-25 | 2022-05-10 | 先之科半导体科技(东莞)有限公司 | High-precision adjustable chip diode suction pen structure |
| CN117123981A (en) * | 2023-10-26 | 2023-11-28 | 江苏快克芯装备科技有限公司 | Micro-pressure device of chip suction mechanism and chip welding machine |
| CN117123981B (en) * | 2023-10-26 | 2024-03-15 | 江苏快克芯装备科技有限公司 | Micro-pressure device of chip suction mechanism and chip welding machine |
| CN118123870A (en) * | 2024-05-07 | 2024-06-04 | 苏州微伏芯芯片科技有限公司 | Adjustable chip overturning mechanical arm and use method |
| CN118123870B (en) * | 2024-05-07 | 2024-08-02 | 苏州微伏芯芯片科技有限公司 | Adjustable chip overturning mechanical arm and use method |
| CN118483013A (en) * | 2024-06-13 | 2024-08-13 | 芯康检测技术无锡有限公司 | Chip failure analysis slice sample preparation method and device |
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