CN110335843A - A kind of dedusting cake core sorting device with voltage stabilizing function - Google Patents

Abstract

The invention relates to a dust-removing type chip sorting device with a voltage stabilizing function, which includes a vacuum pump, a suction pipe and a suction nozzle, and also includes a pressure regulating mechanism and a dust removing mechanism. The pressure regulating mechanism includes a cover plate, a drive assembly, a voltage stabilizing tube, Two first transmission rods, two support sleeves, two springs and two connecting blocks, the dust removal mechanism includes a baffle, a collection box, a filter screen, a second air delivery pipe, a first air delivery pipe and a solenoid valve. In the dust-removing type chip sorting equipment with voltage stabilization function, the suction inside the straw can be controlled through the pressure regulating mechanism, which reduces the probability of chip damage due to excessive suction and improves the practicability of the sorting equipment. Compared with the pressure mechanism, the pressure regulation mechanism can adjust the maximum suction force inside the straw by adjusting the length of the spring, which further improves the practicability of the sorting equipment. Not only that, the dust on the chip can be sucked away by the dust removal mechanism, This improves the quality of the chips produced.

Description

A dust-removing type chip sorting device with voltage stabilizing function

technical field

The invention relates to the field of chip sorting equipment, in particular to a dust-removing type chip sorting device with a voltage stabilizing function.

Background technique

The semiconductor chip is to cut wafers of different sizes into predetermined sizes. In order not to mess up the cut semiconductor chips during cutting, the wafer is bonded with an adhesive holding tape on the back side, and the wafer is cut from the front side by a wafer cutting device. , Although the holding tape bonded to the back is cut into a little, it is not cut, and it becomes the state of holding each semiconductor chip. Next, each cut semiconductor chip is picked up from the holding tape by a chip sorter. During the picking process, the chip is first Lift up from the wafer, and then absorb the surface of the chip through the suction nozzle to achieve peeling and transfer.

When the chip sorting equipment in the prior art is in use, if the air pressure for sucking the chips is too high, the chips will be damaged, so the air pressure needs to be adjusted accurately. Not only that, the chips may be adsorbed on the chips between sorting. There is dust, if the dust is not removed in time, it will affect the quality of the chip.

Contents of the invention

The technical problem to be solved by the present invention is to provide a dust-removing type chip sorting device with a voltage stabilizing function in order to overcome the deficiencies of the prior art.

The technical solution adopted by the present invention to solve the technical problem is: a dust-removing type chip sorting device with a voltage stabilizing function, including a vacuum pump, a suction pipe and a suction nozzle, the suction nozzle and the vacuum pump are respectively connected to the two ends of the suction pipe, and It includes a pressure regulating mechanism and a dust removal mechanism, and the pressure regulating mechanism and the dust removal mechanism are respectively arranged on both sides of the suction pipe;

The pressure regulating mechanism includes a cover plate, a driving assembly, a voltage stabilizing tube, two first transmission rods, two supporting sleeves, two springs and two connecting blocks, the stabilizing tube is arranged on one side of the suction pipe, The axis of the voltage stabilizing tube is perpendicular to and intersects the axis of the suction pipe, the axis of the supporting sleeve is parallel to the axis of the stabilizing tube, the supporting sleeve is arranged on one side of the stabilizing tube, and the first transmission rod Set coaxially with the support sleeve, the first transmission rod passes through the support sleeve, the first transmission rod is slidably connected with the support sleeve, the cover plate is arranged inside the straw, and the cover plate covers the stable At the pressure tube, both ends of the cover plate are provided with connection holes, the first transmission rod passes through the cover plate, the cover plate is slidably connected with the first transmission rod, and the driving assembly is arranged on one side of the suction pipe , the drive assembly is connected to one end of the first transmission rod, the connection block is fixedly connected to the other end of the first transmission rod, the spring is sleeved on the first transmission rod, and the connection block is connected to the cover plate through the spring fixedly connected, the spring is in a compressed state;

The dust removal mechanism includes a baffle plate, a collection box, a filter screen, a second air delivery pipe, a first air delivery pipe and a solenoid valve. The collection box is arranged on one side of the suction pipe, and the filter screen is arranged inside the collection box. The baffle is arranged inside the suction pipe, the electromagnetic valve is arranged on the baffle, the two ends of the collection box are respectively connected to the suction pipe through the first air delivery pipe and the second air delivery pipe, and the first air delivery pipe and the second air delivery pipe The joints of the air pipe and the suction pipe are respectively located on both sides of the baffle.

Preferably, in order to realize the automatic control of the sorting equipment, a processor is provided on one side of the suction pipe, and the processor is electrically connected to the solenoid valve.

Preferably, in order to provide power to the first transmission rod, the drive assembly includes a motor, a screw rod, a drive block and a second transmission rod, the motor is fixed on one side of the straw, and the screw rod is parallel to the first transmission rod , the motor is in transmission connection with the screw rod, the drive block is sleeved on the screw rod, the screw rod is threadedly connected with the drive block, and the drive block is separated from the connection block by the second transmission rod and the first transmission rod. Fixed connection at one end.

Preferably, in order to improve the accuracy of controlling the moving distance of the first transmission rod, the motor is a servo motor.

Preferably, in order to improve the smoothness of the movement of the driving block, the screw rod is coated with grease.

Preferably, in order to detect the pressure between the cover plate and the support sleeve, a pressure sensor is provided between the cover plate and the support sleeve, and the pressure sensor is electrically connected to the processor.

Preferably, in order to improve the stability of the connection between the screw rod and the driving block, a limit block is provided on the end of the screw rod far away from the motor.

Preferably, in order to improve the sealing performance of the support sleeve, a sealing ring is provided at one end of the support sleeve, and the support sleeve is sealingly connected with the first transmission rod through the seal ring.

Preferably, in order to reduce the possibility of dust entering the suction pipe, the inside of the pressure regulator tube is provided with a dust-proof net.

Preferably, in order to improve the sealing performance of the cover plate, a sealing gasket is provided on the side of the cover plate close to the pressure stabilizing tube, and the cover plate is sealed and connected with the stabilizing tube through the sealing gasket.

The beneficial effect of the present invention is that in the dust-removing type chip sorting equipment with voltage stabilizing function, the suction inside the straw can be controlled through the pressure regulating mechanism, which reduces the probability of chip damage due to excessive suction and improves the efficiency of the sorting equipment. Compared with the existing pressure regulating mechanism, the pressure regulating mechanism can adjust the maximum suction force inside the straw by adjusting the length of the spring, which further improves the practicability of the sorting equipment. Not only that, the dust removal mechanism can The dust removal on the chip improves the quality of the produced chip. Compared with the existing dust removal mechanism, the dust removal mechanism has a simple structure, reduces the number of failure points of the mechanism, and reduces the probability of failure of the mechanism.

Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Fig. 1 is the structural representation of the dedusting type chip sorting equipment with voltage stabilizing function of the present invention;

Fig. 2 is a schematic diagram of the internal structure of the dust-removing type chip sorting device with voltage stabilizing function of the present invention;

Fig. 3 is a schematic structural view of the dust removal mechanism of the dust removal type chip sorting device with voltage stabilizing function of the present invention;

Fig. 4 is a structural schematic diagram of the pressure regulating mechanism of the dust-removing type chip sorting equipment with voltage stabilizing function of the present invention;

In the figure: 1. Vacuum pump, 2. First air pipe, 3. Collection box, 4. Suction nozzle, 5. Suction pipe, 6. Filter screen, 7. Solenoid valve, 8. Baffle plate, 9. Second air pipe, 10. Support sleeve, 11. First transmission rod, 12. Second transmission rod, 13. Drive block, 14. Screw rod, 15. Motor, 16. Regulator tube, 17. Connection block, 18. Pressure sensor, 19. gasket, 20. cover plate, 21. spring.

Detailed ways

The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.

As shown in Figure 1, a dust-removing type chip sorting device with a voltage stabilizing function includes a vacuum pump 1, a suction pipe 5 and a suction nozzle 4, and the suction nozzle 4 and the vacuum pump 1 are respectively connected to two ends of the suction pipe 5, and also includes A pressure regulating mechanism and a dust removal mechanism, the pressure regulating mechanism and the dust removal mechanism are respectively arranged on both sides of the suction pipe 5;

Through the pressure regulating mechanism, the suction inside the suction pipe 5 can be controlled, which reduces the probability of chip damage due to excessive suction, and improves the practicability of the sorting equipment. Not only that, the dust on the chip can be sucked away by the dust removal mechanism, then Improved quality of chips produced;

As shown in FIG. 4 , the pressure regulating mechanism includes a cover plate 20, a driving assembly, a voltage stabilizing tube 16, two first transmission rods 11, two supporting sleeves 10, two springs 21 and two connecting blocks 17, The voltage-stabilizing tube 16 is arranged on one side of the suction pipe 5, the axis of the voltage-stabilizing tube 16 is perpendicular to and intersects the axis of the suction pipe 5, the axis of the supporting sleeve 10 is parallel to the axis of the voltage-stabilizing tube 16, and the The support sleeve 10 is arranged on one side of the voltage stabilizing tube 16, the first transmission rod 11 is arranged coaxially with the support sleeve 10, the first transmission rod 11 passes through the support sleeve 10, and the first transmission rod 11 is slidably connected with the support sleeve 10, the cover plate 20 is arranged inside the suction pipe 5, the cover plate 20 covers the pressure stabilizing tube 16, and the two ends of the cover plate 20 are provided with connecting holes, the The first transmission rod 11 passes through the cover plate 20, the cover plate 20 is slidably connected with the first transmission rod 11, the drive assembly is arranged on one side of the suction pipe 5, and the drive assembly is connected with one end of the first transmission rod 11 , the connection block 17 is fixedly connected with the other end of the first transmission rod 11, the spring 21 is sleeved on the first transmission rod 11, the connection block 17 is fixedly connected with the cover plate 20 through the spring 21, and the spring 21 in compressed state;

The operator controls the sorting equipment, provides power through the drive assembly, drives the first transmission rod 11 to move along the support sleeve 10, and then drives the connection block 17 through the first transmission rod 11, and then the spring 21 can be controlled by the connection block 17. length, under the action of the thrust of the spring 21, the cover plate 20 is covered at the voltage regulator tube 16, since the thrust of the spring 21 to the cover plate 20 is proportional to the length of the spring 21, then by controlling the length of the spring 21, you can Control the pressure of the cover plate 20. When the suction force inside the suction pipe 5 is greater than the thrust of the spring 21 on the cover plate 20, the cover plate 20 is opened, and the external air enters the inside of the suction pipe 5 through the pressure-stabilizing tube 16, thereby realizing the suction of the suction pipe 5. The adjustment of internal suction reduces the probability of chip damage;

As shown in Figure 2-3, the dust removal mechanism includes a baffle plate 8, a collection box 3, a filter screen 6, a second air delivery pipe 9, a first air delivery pipe 2 and a solenoid valve 7, and the collection box 3 is arranged on the suction pipe 5 On one side, the filter screen 6 is arranged inside the collection box 3, the baffle 8 is arranged inside the suction pipe 5, the electromagnetic valve 7 is arranged on the baffle 8, and the two ends of the collection box 3 are respectively The first air delivery pipe 2 and the second air delivery pipe 9 are connected to the suction pipe 5, and the connections between the first air delivery pipe 2 and the second air delivery pipe 9 and the suction pipe 5 are respectively located on both sides of the baffle plate 8;

In fact, the suction nozzle 4 is provided with a distance sensor, through which the distance between the suction nozzle 4 and the chip can be detected, and then the distance sensor sends a signal to the processor, and the processor controls the operation of the solenoid valve 7. 4 In the process of getting close to the chip, the solenoid valve 7 is closed, and the suction pipe 5 is closed through the baffle 8, and under the action of the vacuum pump 1, the airflow on the side of the baffle 8 away from the vacuum pump 1 enters through the second gas delivery pipe 9 Inside the collection box 3, the dust in the air is purified by the filter screen 6, and then the purified air enters the side of the baffle plate 8 near the vacuum pump 1 through the first air pipe 2, and the dust on the chip can be removed. Suction improves the quality of the chip. When the suction nozzle 4 abuts against the chip, the solenoid valve 7 is opened to allow the air flow to flow through the solenoid valve 7, and the chip is sucked up by the suction force generated by the suction tube 5.

As a preference, in order to realize the automatic control of the sorting equipment, a processor is provided on one side of the suction pipe 5, and the processor is electrically connected to the solenoid valve 7;

The processor can control the automatic operation of each device inside the sorting equipment, and then realize the automatic control of the sorting equipment.

As shown in Figure 4, described driving assembly comprises motor 15, screw mandrel 14, driving block 13 and second transmission rod 12, and described motor 15 is fixed on one side of suction pipe 5, and described screw mandrel 14 and first transmission rod 11 parallel, the motor 15 is connected to the screw rod 14 by transmission, the drive block 13 is sleeved on the screw rod 14, the screw rod 14 is screwed to the drive block 13, and the drive block 13 passes through the second transmission rod 12 It is fixedly connected with the end of the first transmission rod 11 away from the connection block 17;

The motor 15 is controlled by the processor, and then the screw mandrel 14 is driven to rotate by the motor 15, then the driving block 13 is driven to move by the screw mandrel 14, and then the first transmission rod 11 is driven by the driving block 13 under the transmission action of the second transmission rod 12 move.

Preferably, in order to improve the accuracy of controlling the moving distance of the first transmission rod 11, the motor 15 is a servo motor.

As a preference, in order to improve the smoothness of the movement of the drive block 13, the screw mandrel 14 is coated with grease;

The friction force between the driving block 13 and the screw mandrel 14 is reduced by the lubricating grease, and the smoothness of the movement of the driving block 13 is improved.

Preferably, in order to detect the pressure between the cover plate 20 and the support sleeve 10, a pressure sensor 18 is provided between the cover plate 20 and the support sleeve 10, and the pressure sensor 18 is electrically connected to the processor;

The pressure between the cover plate 20 and the support sleeve 10 can be detected by the pressure sensor 18, and then the pressure sensor 18 sends a signal to the processor, and then the processor controls the motor 15, and then the motor 15 adjusts the length of the spring 21.

As a preference, in order to improve the stability of the connection between the screw rod 14 and the drive block 13, a limit block is provided on the end of the screw rod 14 away from the motor 15;

The probability of the drive block 13 detaching from the screw rod 14 is reduced by the limit block, and the stability of the connection between the screw rod 14 and the drive block 13 is improved.

Preferably, in order to improve the sealing performance of the support sleeve 10, one end of the support sleeve 10 is provided with a seal ring, and the support sleeve 10 is sealed and connected with the first transmission rod 11 through the seal ring;

The gap between the support sleeve 10 and the first transmission rod 11 is reduced by the sealing ring, which reduces the probability that the outside air enters the inside of the suction pipe 5 from the gap between the support sleeve 10 and the first transmission rod 11, thus improving The sealing performance of the support sleeve 10 is improved.

As preferably, in order to reduce the chance of dust entering the inside of the suction pipe 5, the inside of the regulator tube 16 is provided with a dust-proof net;

The probability of dust entering the inside of the suction pipe 5 from the regulator pipe 16 is reduced by the dust-proof net.

Preferably, in order to improve the sealing performance of the cover plate 20 , a sealing gasket 19 is provided on a side of the cover plate 20 close to the voltage regulator tube 16 , and the cover plate 20 is sealed and connected with the voltage regulator tube 16 through the gasket 19 .

Power is provided by the driving assembly to control the length of the spring 21. Since the thrust of the spring 21 on the cover plate 20 is proportional to the length of the spring 21, the pressure of the cover plate 20 can be controlled by controlling the length of the spring 21. When the inside of the suction pipe 5 When the suction force is greater than the thrust of the spring 21 on the cover plate 20, the cover plate 20 is opened, and the external air enters the inside of the suction pipe 5 through the pressure regulator tube 16, which realizes the adjustment of the internal suction force of the suction pipe 5 and reduces the damage to the chip. When the suction nozzle 4 is close to the chip, the electromagnetic valve 7 is closed, and the suction pipe 5 is closed through the baffle 8, and under the action of the vacuum pump 1, the airflow on the side of the baffle 8 away from the vacuum pump 1 passes through. The second air delivery pipe 9 enters the inside of the collection box 3, and then the dust in the air is purified by the filter screen 6, and then the purified air enters the side of the baffle plate 8 near the vacuum pump 1 through the first air delivery pipe 2, then The dust on the chip can be sucked away, which improves the quality of the chip.

Compared with the prior art, in the dust-removing type chip sorting equipment with voltage stabilizing function, the suction force inside the suction pipe 5 can be controlled through the pressure regulating mechanism, which reduces the probability of chip damage due to excessive suction force and improves the sorting efficiency. The practicability of the equipment, compared with the existing pressure regulating mechanism, the pressure regulating mechanism can adjust the size of the maximum suction force inside the suction pipe 5 by adjusting the length of the spring 21, which further improves the practicability of the sorting equipment, not only that, through The dust removal mechanism can absorb the dust on the chip, which improves the quality of the produced chip. Compared with the existing dust removal mechanism, the dust removal mechanism has a simple structure, reduces the number of failure points of the mechanism, and reduces the probability of failure of the mechanism. .

Inspired by the above-mentioned ideal embodiment according to the present invention, through the above-mentioned description content, relevant workers can make various changes and modifications within the scope of not departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, but must be determined according to the scope of the claims.

Claims (10)

1. a kind of dedusting cake core sorting device with voltage stabilizing function, including vacuum pump (1), suction pipe (5) and suction nozzle (4), institute It states suction nozzle (4) and vacuum pump (1) is connect with the both ends of suction pipe (5) respectively, which is characterized in that further include pressure regulating device and dust removal machine Structure, the pressure regulating device set the two sides that suction pipe (5) are separately positioned on dedusting mechanism；

The pressure regulating device includes cover board (20), driving assembly, voltage-stabiliser tube (16), two the first drive rods (11), two supports Casing (10), two springs (21) and two link blocks (17), the voltage-stabiliser tube (16) setting are described in the side of suction pipe (5) The axis of voltage-stabiliser tube (16) is vertical with the axis of suction pipe (5) and intersects, the axis of the supporting sleeve (10) and voltage-stabiliser tube (16) Axis it is parallel, the supporting sleeve (10) is arranged in the side of voltage-stabiliser tube (16), first drive rod (11) and support sleeve (10) coaxial arrangement is managed, first drive rod (11) passes through supporting sleeve (10), first drive rod (11) and support sleeve Pipe (10) is slidably connected, and the cover board (20) is arranged in the inside of suction pipe (5), and the cover board (20) is covered on voltage-stabiliser tube (16) Place, the both ends of the cover board (20) are equipped with connecting hole, and first drive rod (11) passes through cover board (20), the cover board (20) It is slidably connected with the first drive rod (11), the driving component setting is passed in the side of suction pipe (5), the driving component with first One end of lever (11) connects, and the link block (17) is fixedly connected with the other end of the first drive rod (11), the spring (21) it is set on the first drive rod (11), the link block (17) is fixedly connected by spring (21) with cover board (20), described Spring (21) is in compressive state；

The dedusting mechanism includes baffle (8), collecting box (3), strainer (6), the second appendix (9), the first appendix (2) and electricity Magnet valve (7), in the side of suction pipe (5), the strainer (6) is arranged in the inside of collecting box (3), institute for collecting box (3) setting Baffle (8) setting is stated in the inside of suction pipe (5), the solenoid valve (7) is arranged on baffle (8), the both ends of the collecting box (3) It is connect respectively by the first appendix (2) and the second appendix (9) with suction pipe (5), first appendix (2) and the second gas transmission The junction of pipe (9) and suction pipe (5) is located at the two sides of baffle (8).

2. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the suction pipe (5) side is equipped with processor, and the processor is electrically connected with solenoid valve (7).

3. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the driving group Part includes motor (15), screw rod (14), drive block (13) and the second drive rod (12), and the motor (15) is fixed on suction pipe (5) Side, the screw rod (14) is parallel with the first drive rod (11), and the motor (15) and screw rod (14) are sequentially connected, the drive Motion block (13) is set on screw rod (14), and the screw rod (14) is threadedly coupled with drive block (13), and the drive block (13) passes through Second drive rod (12) is fixedly connected with one end of the separate link block (17) of the first drive rod (11).

4. as claimed in claim 3 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the motor It (15) is servo motor.

5. as claimed in claim 3 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the screw rod (14) lubricating grease is coated on.

6. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the cover board (20) pressure sensor (18) are equipped between supporting sleeve (10), the pressure sensor (18) is electrically connected with processor.

7. as claimed in claim 3 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the screw rod (14) one end of separate motor (15) is equipped with limited block.

8. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the support sleeve The one end for managing (10) is equipped with sealing ring, and the supporting sleeve (10) is tightly connected by sealing ring and the first drive rod (11).

9. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the voltage-stabiliser tube (16) inside is equipped with Air Filter.

10. as described in claim 1 with the dedusting cake core sorting device of voltage stabilizing function, which is characterized in that the cover board (20) side of close voltage-stabiliser tube (16) is equipped with gasket (19), and the cover board (20) passes through gasket (19) and voltage-stabiliser tube (16) it is tightly connected.