CN109879043A - A kind of epitaxial residual film automatic collecting device - Google Patents
A kind of epitaxial residual film automatic collecting device Download PDFInfo
- Publication number
- CN109879043A CN109879043A CN201910165511.1A CN201910165511A CN109879043A CN 109879043 A CN109879043 A CN 109879043A CN 201910165511 A CN201910165511 A CN 201910165511A CN 109879043 A CN109879043 A CN 109879043A
- Authority
- CN
- China
- Prior art keywords
- epitaxial
- residual film
- microscope carrier
- automatic collecting
- collecting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention discloses a kind of epitaxial residual film automatic collecting device, including rack, epitaxial microscope carrier mechanism is fixed in rack, epitaxial residual film collection device is fixed in a side frame of epitaxial microscope carrier mechanism, epitaxial residual film fetching device is fixed in the top bay of epitaxial microscope carrier mechanism, epitaxial residual film fetching device obtains the epitaxial residual film in epitaxial microscope carrier mechanism, and epitaxial residual film is placed into epitaxial residual film collection device.Epitaxial residual film automatic collecting device of the present invention, epitaxial residual film collection can be carried out automatically, realize epitaxial residual film ordered stacks, improve operating efficiency, the hand for eliminating operator is heated the risk of mechanism scald, subsequent personal management operation is also reduced simultaneously, greatly reduces personal management cost.
Description
Technical field
The invention belongs to epitaxials to include brilliant equipment technical field, and in particular to a kind of epitaxial residual film automatic collecting device.
Background technique
In today of social economy's high speed development, the energy crisis occurred therewith is also presented in face of us, as the modern times
Industry, business, civilian lifeblood, " severe power shortage " that various regions take place frequently in recent years have resulted in no small loss.Country, which also takes, accordingly to be helped
Hold the policy of energy-saving and emission-reduction, and the appearance of LED light, largely achieve the purpose that energy-saving and environmental protection.
The production of LED light needs a large amount of chip.In the production process of existing LED wafer, LED wafer is complete in scribing process
At the crystal grain that rear shape is arranged into an array, the crystal grain of array arrangement is attached on epitaxial.Crystal grain on epitaxial arranges closely, no
Conducive to the operation of subsequent die bond process.Therefore the epitaxial for serving as LED grain carrier must be expanded in LED production process
, so that being attached to the crystal grain uniform expansion that array arranges on epitaxial, this is the function of realizing needed for expanding brilliant machine manually at present.
Expand brilliant machine needs manually and completes each operating procedure by manually.Epitaxial residual film after for including crystalline substance, behaviour
Make personnel generally directly to be picked up with hand, includes the heating mechanism for thermally resecting epitaxial residual film due to including brilliant machine manually also, slightly
Accidentally, just will appear operator's hand to be burned.And the epitaxial residual film picked up is typically all arbitrarily to be stacked, and is not concentrated
Management, this not only affects the environment of factory, and makes the management difficulty in later period big, and labor management is at high cost.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of epitaxial residual film automatic collecting devices, solve existing skill
Epitaxial residual film arbitrarily stacks the technical problem for leading to that management difficulty is big, labor management is at high cost in art.
In order to solve the above technical problems, the technical solution adopted by the present invention: a kind of epitaxial residual film automatic collecting device, including
Rack, it is characterised in that: be fixed with the epitaxial microscope carrier mechanism for placing epitaxial in the rack, be located at the epitaxial microscope carrier machine
Epitaxial residual film collection device is fixed in rack described in the side of structure, in the top rack of epitaxial microscope carrier mechanism
It is fixed with epitaxial residual film fetching device, the epitaxial residual film fetching device obtains the epitaxial residual film in epitaxial microscope carrier mechanism,
And epitaxial residual film is placed into the epitaxial residual film collection device.
Preferably, epitaxial microscope carrier mechanism includes that the epitaxial microscope carrier for being provided with operation position and the driving epitaxial carry
The epitaxial stage driving of platform rotation.
Preferably, the operation position in the epitaxial microscope carrier is at least provided with two.
Preferably, the epitaxial residual film fetching device include for drawing the suction nozzle of epitaxial, the suction nozzle for installing suction nozzle
Mounting plate, the longitudinal driving device for driving the suction nozzle mounting plate elevating movement, and for driving the zigzag tread patterns
The lateral driver device that device moves in horizontal plane.
Preferably, the longitudinal driving device and lateral driver device are cylinder.
Preferably, the lateral driver device is fixed on the top of rack by cylinder mounting plate.
Preferably, guide rod is provided in the cylinder mounting plate, the guide rod is fixed on the side on the cylinder mounting plate
It is consistent to the driving direction with the lateral driver device, the longitudinal driving device slides axially along guide rod.
Beneficial effects of the present invention: the present invention discloses a kind of epitaxial residual film automatic collecting device, and epitaxial microscope carrier mechanism is used for
Epitaxial is placed, epitaxial residual film fetching device is for picking up the epitaxial residual film in epitaxial microscope carrier mechanism and epitaxial residual film being placed into crystalline substance
In film residual film collection device.Epitaxial residual film automatic collecting device of the present invention can carry out epitaxial residual film collection automatically, realize
Epitaxial residual film ordered stacks, improve operating efficiency, and the hand for eliminating operator is heated the risk of mechanism scald, simultaneously also
Subsequent personal management operation is reduced, personal management cost is greatly reduced.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of epitaxial residual film automatic collecting device；
Fig. 2 is the structural schematic diagram of epitaxial residual film fetching device in epitaxial residual film automatic collecting device；
Appended drawing reference in figure, 1- rack；2- epitaxial microscope carrier mechanism, 2.1- epitaxial microscope carrier, the operation position 2.1.1-, 2.2- rotation
Rotating motor, 2.3- shaft coupling；3- epitaxial residual film collection device；4- epitaxial residual film fetching device, 4.1- suction nozzle, the installation of 4.2- suction nozzle
Plate, 4.3- longitudinal driving device, 4.4- lateral driver device, 4.5- cylinder mounting plate, 4.6- air cylinder fixed plate, 4.7- guide rod.
Specific embodiment
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
Embodiment 1:
A kind of epitaxial residual film automatic collecting device, as shown in Figure 1, including rack 1, the inside of rack 1 includes for placing
The epitaxial microscope carrier mechanism 2 of epitaxial, the epitaxial residual film collection device 3 for collecting epitaxial residual film and for picking up epitaxial residual film
Epitaxial residual film fetching device 4.Epitaxial microscope carrier mechanism 2 includes the epitaxial microscope carrier 2.1 and driving epitaxial for being provided with operation position
The epitaxial stage driving 2.2 of microscope carrier rotation.Operation position 2.1.1 in epitaxial microscope carrier 2.1 is at least provided with two.This reality
It applies in example, epitaxial microscope carrier 2.1 is plate-like structure, and there are two the operation position settings in epitaxial microscope carrier, two operation positions
2.1.1 at the right position of a first from left of tabular epitaxial microscope carrier 2.1.It waits picking up for epitaxial residual film in one of operation position
It takes, another operation position is used for epitaxial crystalline substance to be included, i.e., when epitaxial residual film fetching device picks up the epitaxial in an operation position
During residual film to epitaxial residual film collection device, the epitaxial wait include brilliant is transferred in another operation position, the operation position
Bottom be provided with and include brilliant equipment, therefore can be realized in the operation position and include brilliant technique.It includes brilliant operation and belongs to the prior art,
In the present embodiment, repeated no more for including brilliant equipment and including brilliant technique.Operating efficiency can be improved in this kind design, reduces production
Beat.Epitaxial stage driving 2.2 is specially rotating electric machine.Rotating electric machine 2.2 is fixed on the bottom of rack.Rotating electric machine
2.2 output end drives tabular epitaxial microscope carrier by connecting at shaft coupling 2.3 and 2.1 medium position of tabular epitaxial microscope carrier
Rotate horizontally 180 °.
Epitaxial residual film fetching device 4 is used to obtain the epitaxial residual film in epitaxial microscope carrier mechanism, and epitaxial residual film is placed into
In epitaxial residual film collection device.As shown in Fig. 2, epitaxial residual film fetching device 4 includes for drawing the suction nozzle 4.1 of epitaxial, being used for
Suction nozzle mounting plate 4.2, the longitudinal driving device 4.3 for driving suction nozzle mounting plate elevating movement of suction nozzle are installed, and are used for
The lateral driver device 4.4 that driving longitudinal driving device moves in horizontal plane.In the present embodiment, longitudinal driving device 4.3
And lateral driver device 4.4 is cylinder.Lateral driver device 4.4 is fixed on the top of rack 1 by cylinder mounting plate 4.5
Portion.The output end of lateral driver device 4.4 is fixed with air cylinder fixed plate 4.6, and longitudinal driving device 4.3 is fixed on air cylinder fixed plate
On 4.6.One end of suction nozzle mounting plate 4.2 is connect with the output end of longitudinal driving device 4.3, and there are two the settings of suction nozzle 4.1, respectively
Positioned at the two sides of suction nozzle mounting plate 4.2, two suction nozzles are used to be sucked the both sides of epitaxial residual film.In the present embodiment, laterally driven dress
It sets and longitudinal driving device is driven to move along the front-rear direction of rack, longitudinal driving device drives suction nozzle mounting plate along rack
Up and down direction is mobile.Epitaxial residual film collection device 3 is fixed on 1 bottom of rack, and epitaxial residual film collection device is located at epitaxial microscope carrier
In for epitaxial residual film to be picked up operation position front.
Longitudinal driving device is driven to move along the front-rear direction of rack for the ease of lateral driver device, the present embodiment
In, two guide rods 4.7 are provided in cylinder mounting plate 4.5, guide rod is fixed on direction and laterally driven dress on cylinder mounting plate
The driving direction set is consistent.Air cylinder fixed plate 4.6 is slidably connected with two guide rods 4.7.
The operating process of epitaxial residual film automatic collecting device of the present invention is as follows: crystalline substance, which included, to epitaxial finishes, electric rotating
Machine drives epitaxial microscope carrier to rotate horizontally 180 °, so that the operation position containing epitaxial residual film is located under epitaxial residual film fetching device
Side.Longitudinal driving device internal ventilation, and suction nozzle leads to negative pressure, two suction nozzles being mounted on suction nozzle mounting plate are filled in zigzag tread patterns
It is moved downward under the driving set, and is drawn to epitaxial residual film, at this point, longitudinal driving device is vented, be adsorbed with the suction of epitaxial residual film
Head and suction nozzle mounting plate move upwards under the driving of zigzag tread patterns cylinder, and epitaxial residual film is detached from epitaxial microscope carrier at this time.Then horizontal
It ventilates to driving device, lateral driver device driving longitudinal driving device is moved to the direction of epitaxial residual film collection device, until
Positioned at the top of epitaxial residual film collection device, suction nozzle breaks negative pressure, and epitaxial residual film falls to epitaxial residual film under self gravitation effect
In collection device, lateral driver device exhaust, lateral driver device driving longitudinal driving device is back to original position, at this time electric rotating
Machine driving epitaxial microscope carrier rotates horizontally 180 ° again, so that new epitaxial residual film turns to the lower section of epitaxial residual film fetching device.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (7)
1. a kind of epitaxial residual film automatic collecting device, including rack, it is characterised in that: be fixed in the rack for placing crystalline substance
The epitaxial microscope carrier mechanism of film, is fixed with epitaxial residual film collection device in rack described in the side of epitaxial microscope carrier mechanism,
Epitaxial residual film fetching device, the epitaxial residual film pick-and-place machine are fixed in the top rack of epitaxial microscope carrier mechanism
Structure obtains the epitaxial residual film in epitaxial microscope carrier mechanism, and epitaxial residual film is placed into the epitaxial residual film collection device.
2. a kind of epitaxial residual film automatic collecting device according to claim 1, it is characterised in that: epitaxial microscope carrier mechanism packet
Include the epitaxial stage driving of the epitaxial microscope carrier for being provided with operation position and the driving epitaxial microscope carrier rotation.
3. a kind of epitaxial residual film automatic collecting device according to claim 2, it is characterised in that: the behaviour in the epitaxial microscope carrier
Make station at least provided with two.
4. a kind of epitaxial residual film automatic collecting device according to claim 1, it is characterised in that: the epitaxial residual film pick-and-place machine
Structure includes suction nozzle mounting plate for drawing the suction nozzle of epitaxial, for installing suction nozzle, for driving the suction nozzle mounting plate to go up and down
The longitudinal driving device of movement, and the laterally driven dress for driving the longitudinal driving device to move in horizontal plane
It sets.
5. a kind of epitaxial residual film automatic collecting device according to claim 4, it is characterised in that: the longitudinal driving device with
And lateral driver device is cylinder.
6. a kind of epitaxial residual film automatic collecting device according to claim 5, it is characterised in that: the lateral driver device is logical
Cross the top that cylinder mounting plate is fixed on rack.
7. a kind of epitaxial residual film automatic collecting device according to claim 6, it is characterised in that: set in the cylinder mounting plate
It is equipped with guide rod, the driving direction that the guide rod is fixed on direction and the lateral driver device on the cylinder mounting plate is kept
Unanimously, the longitudinal driving device slides axially along guide rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910165511.1A CN109879043A (en) | 2019-03-05 | 2019-03-05 | A kind of epitaxial residual film automatic collecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910165511.1A CN109879043A (en) | 2019-03-05 | 2019-03-05 | A kind of epitaxial residual film automatic collecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109879043A true CN109879043A (en) | 2019-06-14 |
Family
ID=66930807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910165511.1A Pending CN109879043A (en) | 2019-03-05 | 2019-03-05 | A kind of epitaxial residual film automatic collecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109879043A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201058765Y (en) * | 2007-06-01 | 2008-05-14 | 深圳市大族激光科技股份有限公司 | Material pushing device |
| CN205582903U (en) * | 2016-05-05 | 2016-09-14 | 先进光电器材（深圳）有限公司 | Device is put to automatic getting of wafer ring |
| KR101740220B1 (en) * | 2012-10-18 | 2017-05-25 | 디앤에이 주식회사 | Apparatus for loading a substrate applicable to laser lift off device |
| CN107146839A (en) * | 2017-05-04 | 2017-09-08 | 厦门大学 | A kind of continuous crystal solidifying apparatus of LED and its die-bonding method |
| CN206758411U (en) * | 2017-04-25 | 2017-12-15 | 中山英达思迅智能科技有限公司 | Brilliant machine is expanded in a kind of intelligent management and control |
| CN109087872A (en) * | 2018-08-04 | 2018-12-25 | 戴先富 | LED expands brilliant machine |
| CN208489172U (en) * | 2018-03-06 | 2019-02-12 | 深圳市微恒自动化设备有限公司 | It is a kind of to move epitaxial system certainly |
-
2019
- 2019-03-05 CN CN201910165511.1A patent/CN109879043A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201058765Y (en) * | 2007-06-01 | 2008-05-14 | 深圳市大族激光科技股份有限公司 | Material pushing device |
| KR101740220B1 (en) * | 2012-10-18 | 2017-05-25 | 디앤에이 주식회사 | Apparatus for loading a substrate applicable to laser lift off device |
| CN205582903U (en) * | 2016-05-05 | 2016-09-14 | 先进光电器材（深圳）有限公司 | Device is put to automatic getting of wafer ring |
| CN206758411U (en) * | 2017-04-25 | 2017-12-15 | 中山英达思迅智能科技有限公司 | Brilliant machine is expanded in a kind of intelligent management and control |
| CN107146839A (en) * | 2017-05-04 | 2017-09-08 | 厦门大学 | A kind of continuous crystal solidifying apparatus of LED and its die-bonding method |
| CN208489172U (en) * | 2018-03-06 | 2019-02-12 | 深圳市微恒自动化设备有限公司 | It is a kind of to move epitaxial system certainly |
| CN109087872A (en) * | 2018-08-04 | 2018-12-25 | 戴先富 | LED expands brilliant machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102380264A (en) | Automatic powder recovery device | |
| CN210553559U (en) | Solar cell screen printing device and printing system | |
| CN103447915B (en) | The aggregation type auxiliary machine of crystal polishing system | |
| CN206116369U (en) | Piece positioning system is arranged to CV line of battery silicon chip | |
| CN103480537A (en) | Automatic dispenser | |
| CN109879043A (en) | A kind of epitaxial residual film automatic collecting device | |
| CN207061297U (en) | A kind of automatic plate putting machine | |
| CN109435437A (en) | A kind of full-automatic screen printer and its working method | |
| CN104749895B (en) | A kind of double air supporting large substrate transmitting devices | |
| CN206067223U (en) | A kind of program control type novel digital printing machine | |
| CN207952747U (en) | It is a kind of can automatic loading/unloading CNC milling machine | |
| CN208162994U (en) | Motor shaft flat key automatic installation apparatus | |
| CN109571234A (en) | Full-automatic grinding production line | |
| CN208644540U (en) | A kind of automatic charging kludge | |
| CN209467842U (en) | Sheet material automatic charging device | |
| CN205061040U (en) | Circuit board testing system | |
| CN207154181U (en) | A kind of fingerprint module test machine | |
| CN113479389A (en) | Film tearing structure for full-automatic film tearing machine | |
| CN109130477B (en) | Printing machine with automatic paper feeding and taking functions and capable of reducing dust pollution | |
| CN208759719U (en) | Cutting machine a kind of energy-efficient and with machine vision | |
| CN209600036U (en) | A kind of full-automatic screen printer | |
| CN208068687U (en) | A kind of shoemaking vaccum environmental protection vulcanizing machine | |
| CN109573619A (en) | Sheet material automatic charging device | |
| CN217114347U (en) | High-speed composing equipment for photovoltaic modules | |
| CN221311738U (en) | Electronic product dust collector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190614 |
|
| RJ01 | Rejection of invention patent application after publication |