CN208489172U - It is a kind of to move epitaxial system certainly - Google Patents
It is a kind of to move epitaxial system certainly Download PDFInfo
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- CN208489172U CN208489172U CN201820309523.8U CN201820309523U CN208489172U CN 208489172 U CN208489172 U CN 208489172U CN 201820309523 U CN201820309523 U CN 201820309523U CN 208489172 U CN208489172 U CN 208489172U
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Abstract
The utility model is suitable for automated production field, provides one kind and moves epitaxial system certainly, comprising: including taking epitaxial shift mechanism, epitaxial elevating mechanism, epitaxial recovering mechanism and rotation epitaxial mechanism.Take epitaxial shift mechanism, the epitaxial with chip can be taken away from epitaxial elevating mechanism, and it transfers to rotation epitaxial mechanism and takes epitaxial shift mechanism again to take the epitaxial of internal non-wafer away after rotating the chip that epitaxial mechanism picks up in epitaxial and be put into epitaxial recovering mechanism.The utility model moves epitaxial system certainly, realizes the automation of upper and lower epitaxial, it is no longer necessary to replace epitaxial by manually, substantially increase the working efficiency of bonder, to improve production efficiency.
Description
Technical field
The utility model belongs to automatic producing technology field, more particularly to one kind moves epitaxial system certainly.
Background technique
Bonder is widely applied device in semiconductor packaging industry, and traditional bonder needs artificial epitaxial up and down,
Due to the negligible amounts of chip in an epitaxial, epitaxial often need to be manually replaced, inefficiency influences bonder whole efficiency.
Requirement with modern production to bonder speed of production is continuously improved, and traditional bonder has been unable to satisfy needs.
Utility model content
Technical problem to be solved in the utility model is to provide one kind to move epitaxial system certainly, it is intended to solve the prior art
In bonder the problem of needing artificial epitaxial up and down.
In order to solve the above technical problems, the utility model is realized in this way, it is a kind of to move epitaxial system certainly, comprising:
Take epitaxial shift mechanism, epitaxial elevating mechanism, epitaxial recovering mechanism and rotation epitaxial mechanism；
It is described take epitaxial shift mechanism include mounting base, telescopic rod, first control motor, second control motor, two gas
Cylinder and two epitaxial suction means；
The first control motor is arranged in the mounting base, and the mounting base is provided with guide rail along its length,
The output shaft of the first control motor is connect by the first transmission component with the telescopic rod, and the telescopic rod is mounted on described
In guide rail, and stretching motion can be done in the guide rail under the control of the first control motor；
The extension end of the telescopic rod is equipped with the second control motor, and the two sides of the second control motor are separately installed with
Two cylinders, the second control motor can control two cylinders and rotate in the horizontal direction, two cylinders
Output shaft is respectively connected with the epitaxial suction means, and can control the epitaxial suction means and be movable in a vertical direction；
The epitaxial elevating mechanism includes pedestal, third control motor and epitaxial lifting platform；
The output shaft of the third control motor is connect with the epitaxial lifting platform by the second transmission component, and can control
The epitaxial lifting platform moves in vertical direction.
Further, the pedestal periphery of pedestal is equipped with several first limited posts in the epitaxial elevating mechanism.
Further, the periphery of the pedestal of the epitaxial recovering mechanism is equipped with several second limited posts.
Further, one end in the mounting base for taking epitaxial shift mechanism far from epitaxial suction means is equipped with first and passes
Sensor.
Further, second is equipped with close to one end of epitaxial suction means in the mounting base for taking epitaxial shift mechanism to pass
Sensor.
Further, the side plate of pedestal is equipped with 3rd sensor and the 4th sensor in the epitaxial elevating mechanism,
Described in 3rd sensor horizontal position be higher than the 4th sensor.
Further, the 5th sensor is provided on the first limited post of the epitaxial elevating mechanism.
Further, the 6th sensor is provided on the second limited post of the epitaxial recovering mechanism.
Compared with prior art, beneficial effect is the utility model: the utility model moves epitaxial system certainly, including
Take epitaxial shift mechanism, epitaxial elevating mechanism, epitaxial recovering mechanism and rotation epitaxial mechanism.Take epitaxial shift mechanism, Neng Goucong
It takes the epitaxial with chip in epitaxial elevating mechanism away, and transfers to rotation epitaxial mechanism, epitaxial mechanism to be rotated picks up crystalline substance
After chip in film, takes epitaxial shift mechanism again to take the epitaxial of internal non-wafer away and be put into epitaxial recovering mechanism.This reality
Move epitaxial system certainly with novel, realizes the automation of upper and lower epitaxial, it is no longer necessary to replace epitaxial by manually, significantly
The working efficiency of bonder is improved, to improve production efficiency.
Detailed description of the invention
Fig. 1 is provided by the embodiment of the utility model from the structural schematic diagram for moving epitaxial system.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
As shown in Figure 1, move epitaxial system certainly for one kind provided by the embodiment of the utility model, including
Take epitaxial shift mechanism 1, epitaxial elevating mechanism 2, epitaxial recovering mechanism 3 and rotation epitaxial mechanism 4.
Taking epitaxial shift mechanism 1 includes mounting base 11, the control control motor 14, two of motor 13, second of telescopic rod 12, first
A cylinder 15 and two epitaxial suction means 16.
First control motor 13 is arranged in mounting base 11, and mounting base 11 is provided with guide rail, the first control along its length
The output shaft of motor 13 processed is connect by the first transmission component (not shown) with telescopic rod 12, and telescopic rod 12 is mounted on guide rail
In, and stretching motion can be done in guide rail under the control of the first control motor 13.Wherein, the first transmission component can with but it is unlimited
In including: screw rod or rack gear.
The extension end of telescopic rod 12 is equipped with the second control motor 14, and the two sides of the second control motor 14 are separately installed with two
A cylinder 15, the second control motor 14 can control two cylinders 15 and rotate in the horizontal direction, and the output shaft of two cylinders 15 respectively connects
It is connected to an epitaxial suction means 16, and can control epitaxial suction means 16 and be movable in a vertical direction.Wherein, epitaxial is used herein
Suction means 16 can make mechanism be suitable for the epitaxial of various sizes.
Epitaxial elevating mechanism 2 includes pedestal 21, third control motor 22 and epitaxial lifting platform 23.
The output shaft of third control motor 22 is connect with epitaxial lifting platform 23 by the second transmission component 24, and can control crystalline substance
Film lifting platform moves in vertical direction.Second transmission component 24 can be screw rod.
The pedestal periphery of pedestal 21 is equipped with several first limited posts 25, epitaxial recycling machine in above-mentioned epitaxial elevating mechanism 2
The periphery of the pedestal 31 of structure 3 is equipped with several second limited posts 32.The effect of first limited post 25 and the second limited post 32 is
Epitaxial is protected, prevents epitaxial from dropping out.
One end in the above-mentioned mounting base 11 for taking epitaxial shift mechanism 1 far from epitaxial suction means 16 is equipped with first sensor
17, second sensor 18 is equipped with close to one end of epitaxial suction means 16 in mounting base 11.Wherein, first sensor 17 is for auxiliary
Help telescopic rod to return to preset origin position, second sensor 18 for obtain epitaxial elevating mechanism 2, epitaxial recovering mechanism 3 and
The position for rotating epitaxial mechanism 4, enables that epitaxial shift mechanism 1 is taken to send epitaxial to target position.
The side plate of pedestal 21 is equipped with 3rd sensor 26 and the 4th sensor 27 in epitaxial elevating mechanism 2, wherein third
The horizontal position of sensor 26 is higher than the 4th sensor 27.3rd sensor 26 and the 4th sensor 27 are for limiting epitaxial lifting
The upper limit and lower limit that epitaxial is stored in mechanism 2, when the extreme higher position of epitaxial in epitaxial elevating mechanism 2 is more than 3rd sensor 26
When, epitaxial elevating mechanism 2 issues warning information, when the extreme lower position of epitaxial in epitaxial elevating mechanism 2 is lower than the 4th sensor 27
When, epitaxial elevating mechanism 2 issues warning information.
It is provided with the 5th sensor 28 on first limited post 25 of epitaxial elevating mechanism 2, when epitaxial in epitaxial lifting platform 23
Height reach the 5th sensor 28 position when, epitaxial elevating mechanism 2 to takes epitaxial shift mechanism 1 issue signal, take epitaxial
Shift mechanism 1 controls epitaxial suction means 16 by cylinder 15 and declines according to the signal, and controls epitaxial suction means 16 and take away
The a piece of epitaxial in the top stacked in epitaxial lifting platform 23.
It is provided with the 6th sensor 33 on second limited post 32 of epitaxial recovering mechanism 3, for limiting the epitaxial recycled
The upper limit, when the height of the epitaxial of recycling reaches the 6th 33 position of sensor, epitaxial recovering mechanism 3 issues information, notice
Staff takes the epitaxial in epitaxial recovering mechanism 3 away.
Move epitaxial system certainly in the present embodiment, epitaxial elevating mechanism 2 and epitaxial recovering mechanism 3 are placed side by side, automatically
Change the workflow of epitaxial system are as follows:
1. epitaxial shift mechanism 1 is taken to determine the position of epitaxial elevating mechanism 2 and epitaxial recovering mechanism 3 by second sensor 18
It sets, and telescopic rod 12 is controlled by the first control motor 13 and is stretched out, two epitaxial suction means 16 is made to rest on epitaxial liter respectively
The surface of descending mechanism 2 and epitaxial recovering mechanism 3；
2. epitaxial elevating mechanism 2 controls motor 22 by third and controls the rising of epitaxial lifting platform 23, when the 5th sensor 28
When detecting that the height of epitaxial in epitaxial lifting platform 23 reaches the position of the 5th sensor 28, epitaxial elevating mechanism 2 is taken epitaxial
Shift mechanism 1 issues signal, and epitaxial shift mechanism 1 is taken to draw dress by the epitaxial that cylinder 15 controls 2 top of epitaxial elevating mechanism
16 positions for dropping to the 5th sensor 28 are set, epitaxial suction means 16 takes the one of the top layer stacked in epitaxial lifting platform 23 away
Piece epitaxial；
3. cylinder 15 drives epitaxial suction means 16 to rise, telescopic rod 12 is withdrawn, and it is brilliant that the epitaxial of acquirement is passed to rotation
Film mechanism 4；
4. epitaxial suction means 16 again takes epitaxial away after rotation epitaxial mechanism 4 picks up the chip in epitaxial；
5. telescopic rod 12 extend out to the surface of epitaxial elevating mechanism 2 and epitaxial recovering mechanism 3, the second control motor again
14 control epitaxial suction means 16 rotate horizontally 180 degree, and inhale is the epitaxial suction means 16 of free epitaxial to be in epitaxial recycling at this time
The surface of mechanism 3；
6. driving epitaxial suction means 16 to drop in epitaxial recovering mechanism 3 by cylinder 15, epitaxial suction means 16 unclamps
Sucker is put into negative crystal film in epitaxial recovering mechanism 3, such circulate operation, can be achieved with the automatic replacement of epitaxial.
Move epitaxial system certainly in the present embodiment, including takes epitaxial shift mechanism, epitaxial elevating mechanism, epitaxial recycling machine
Structure and rotation epitaxial mechanism.Epitaxial shift mechanism is taken, the epitaxial with chip can be taken away from epitaxial elevating mechanism, and transfer
To rotation, epitaxial mechanism takes epitaxial shift mechanism again by inside without crystalline substance after rotating the chip that epitaxial mechanism picks up in epitaxial
The epitaxial of piece is taken away and is put into epitaxial recovering mechanism.The utility model moves epitaxial system certainly, realizes upper and lower epitaxial
Automation, it is no longer necessary to replace epitaxial by manually, substantially increase the working efficiency of bonder, to improve production effect
Rate.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (8)
1. a kind of from moving epitaxial system, which is characterized in that described to include: from moving epitaxial system
Take epitaxial shift mechanism, epitaxial elevating mechanism, epitaxial recovering mechanism and rotation epitaxial mechanism；
It is described take epitaxial shift mechanism include mounting base, telescopic rod, first control motor, second control motor, two cylinders and
Two epitaxial suction means；
The first control motor is arranged in the mounting base, and the mounting base is provided with guide rail along its length, described
The output shaft of first control motor is connect by the first transmission component with the telescopic rod, and the telescopic rod is mounted on the guide rail
In, and stretching motion can be done in the guide rail under the control of the first control motor；
The extension end of the telescopic rod is equipped with the second control motor, and the two sides of the second control motor are separately installed with two
The cylinder, the second control motor can control two cylinders and rotate in the horizontal direction, the output of two cylinders
Axis is respectively connected with the epitaxial suction means, and can control the epitaxial suction means and be movable in a vertical direction；
The epitaxial elevating mechanism includes pedestal, third control motor and epitaxial lifting platform；
The output shaft of the third control motor is connect with the epitaxial lifting platform by the second transmission component, and can control described
Epitaxial lifting platform moves in vertical direction.
2. as described in claim 1 move epitaxial system certainly, which is characterized in that the pedestal of pedestal in the epitaxial elevating mechanism
Periphery is equipped with several first limited posts.
3. as described in claim 1 move epitaxial system certainly, which is characterized in that the periphery of the pedestal of the epitaxial recovering mechanism
It is equipped with several second limited posts.
4. as described in claim 1 move epitaxial system certainly, which is characterized in that in the mounting base for taking epitaxial shift mechanism
One end far from epitaxial suction means is equipped with first sensor.
5. as described in claim 1 move epitaxial system certainly, which is characterized in that in the mounting base for taking epitaxial shift mechanism
Second sensor is equipped with close to one end of epitaxial suction means.
6. as described in claim 1 move epitaxial system certainly, which is characterized in that the side plate of pedestal in the epitaxial elevating mechanism
It is equipped with 3rd sensor and the 4th sensor, wherein the horizontal position of the 3rd sensor is higher than the 4th sensor.
7. as described in claim 1 move epitaxial system certainly, which is characterized in that the first limited post of the epitaxial elevating mechanism
On be provided with the 5th sensor.
8. as described in any one of claim 1 to 7 move epitaxial system certainly, which is characterized in that the epitaxial recovering mechanism
The 6th sensor is provided on second limited post.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820309523.8U CN208489172U (en) | 2018-03-06 | 2018-03-06 | It is a kind of to move epitaxial system certainly |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820309523.8U CN208489172U (en) | 2018-03-06 | 2018-03-06 | It is a kind of to move epitaxial system certainly |
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| Publication Number | Publication Date |
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| CN208489172U true CN208489172U (en) | 2019-02-12 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109879043A (en) * | 2019-03-05 | 2019-06-14 | 上海爵企电子科技有限公司 | A kind of epitaxial residual film automatic collecting device |
-
2018
- 2018-03-06 CN CN201820309523.8U patent/CN208489172U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109879043A (en) * | 2019-03-05 | 2019-06-14 | 上海爵企电子科技有限公司 | A kind of epitaxial residual film automatic collecting device |
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