CN109870860B - 像素结构 - Google Patents

像素结构 Download PDF

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CN109870860B
CN109870860B CN201711267191.8A CN201711267191A CN109870860B CN 109870860 B CN109870860 B CN 109870860B CN 201711267191 A CN201711267191 A CN 201711267191A CN 109870860 B CN109870860 B CN 109870860B
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channel region
electrode
insulating layer
oxide
pixel structure
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CN109870860A (zh
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康沐楷
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Hannstar Display Corp
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Hannstar Display Corp
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Abstract

本发明公开了一种像素结构,其包括基板、薄膜晶体管以及共同电极。薄膜晶体管设置在基板上,且薄膜晶体管包括栅极、源极、漏极、栅极绝缘层以及半导体主动层,栅极、源极与漏极分别重叠于一部分的半导体主动层,栅极绝缘层设置在栅极与半导体主动层之间,半导体主动层具有信道区,设置在源极与漏极之间,信道区包括主信道区以及多个次信道区,主信道区位于次信道区之间,主信道区的信道长度小于次信道区的信道长度,且主信道区的信道长度等于信道区的最小信道长度,其中信道长度是指信道区由漏极到源极之间的距离。共同电极设置在薄膜晶体管上,共同电极覆盖至少部分的次信道区,且共同电极具有一开口,暴露出主信道区。

Description

像素结构
技术领域
本发明涉及一种像素结构,特别是涉及一种可降低漏电流的像素结构。
背景技术
液晶显示屏由于具有外型轻薄、耗电量少以及无辐射污染等特性,因此已被广泛地应用在各式电子产品例如笔记本计算机(notebook)、智能型手机(smart phone)、手表以及车用显示屏等,以提供更方便的信息传递与显示。一般而言,显示屏中会具有多个像素,用以提供不同颜色或不同亮度的色光,以作为画面显示的基本单元并达到显示画面的功能。
在像素的结构中,一般会利用薄膜晶体管(thin film transistor,TFT)作为控制像素变换亮度的开关。然而,现有薄膜晶体管在实际操作中会伴随有漏电的情况,进而导致显示屏所显示的画面异常,例如闪烁、串扰(crosstalk),据此,须对像素中的漏电情况进行改善。
发明内容
本发明提供一种像素结构,其透过将透明导电层覆盖至少部分的半导体主动层,并提供适当的电压以降低像素结构中的漏电流。
为解决上述技术问题,本发明提供了一种像素结构,其包括基板、薄膜晶体管以及共同电极。基板具有一表面。薄膜晶体管设置在基板的表面上,且薄膜晶体管包括栅极、源极、漏极、栅极绝缘层以及半导体主动层,栅极、源极与漏极在垂直于表面的方向上分别重叠于一部分的半导体主动层,栅极绝缘层设置在栅极与半导体主动层之间,半导体主动层具有信道区,设置在源极与漏极之间,信道区包括主信道区以及多个次信道区,主信道区位于次信道区之间,主信道区的信道长度小于次信道区的信道长度,且主信道区的信道长度等于信道区的最小信道长度,其中信道长度是指信道区由漏极到源极之间的距离。共同电极设置在薄膜晶体管上,共同电极覆盖至少部分的次信道区,且共同电极具有一开口,暴露出主信道区。
为解决上述技术问题,本发明还提供了另一种像素结构,其包括第一基板、薄膜晶体管、第一透明导电层、第二基板以及液晶层。第一基板具有一表面。薄膜晶体管设置在第一基板的表面上,且薄膜晶体管包括栅极、源极、漏极、栅极绝缘层以及半导体主动层,栅极、源极与漏极在垂直于表面的方向上分别重叠于一部分的半导体主动层,栅极绝缘层设置在栅极与半导体主动层之间,半导体主动层具有信道区,设置在源极与漏极之间,信道区包括主信道区以及多个次信道区,主信道区位于次信道区之间,主信道区的信道长度小于次信道区的信道长度,且主信道区的信道长度等于信道区的最小信道长度,其中信道长度是指信道区由漏极到源极之间的距离。第一透明导电层设置在薄膜晶体管上,第一透明导电层覆盖至少部分的次信道区,且第一透明导电层具有一开口,暴露出主信道区。第二基板设置于第一基板的表面上方。液晶层设置于第一基板和第二基板之间。
本发明的像素结构由于其共同电极具有用以暴露出主信道区的开口,且共同电极覆盖至少部分的次信道区,因此,在此设置下,当共同电极被提供共同电压时,由于共同电极并未覆盖主信道区,因此共同电极并不会大幅影响薄膜晶体管开启时的阻值。另一方面,当薄膜晶体管关闭时,由于共同电极覆盖至少部分的次信道区,因此,对应被共同电极所覆盖的次信道区的背信道区会被共同电压所感应而使得关闭效果提升,借此降低漏电流。
附图说明
图1所示为本发明第一实施例的像素结构的部分俯视示意图。
图2所示为图1的部分放大示意图。
图3所示为沿着图1中AA’与BB’剖线的剖面示意图。
图4所示为沿着图1中CC’与BB’剖线的剖面示意图。
图5所示为本发明一实施例的像素结构的薄膜晶体管的电流-电压特性曲线示意图。
图6所示为本发明第二实施例的像素结构的剖面示意图。
图7所示为本发明第三实施例的像素结构的剖面示意图。
图8所示为本发明第四实施例的像素结构的剖面示意图。
图9所示为本发明第五实施例的像素结构的剖面示意图。
图10所示为本发明第六实施例的像素结构的部分俯视示意图。
图11所示为图10的部分放大示意图。
其中,附图标记说明如下:
100、200、300、400、500、600 像素结构
110 第一基板
110a 表面
120 第一导电层
130 栅极绝缘层
140 半导体主动层
140a 信道区
140b 背信道区
140m 主信道区
140s 次信道区
150 第二导电层
160 像素电极
160b、180b 狭缝
170 第一绝缘层
180 共同电极
180a 开口
190 第二基板
210 第二绝缘层
410 第三透明导电层
510 主动绝缘层
BM 遮蔽层
CF 彩色滤光层
D 漏极
D1 第一方向
D2 第二方向
DL 数据线
G 栅极
H 连接孔
LC 液晶层
PS 间隔单元
S 源极
S1 第一部分
S2 第二部分
SL 扫描线
T 薄膜晶体管
W 距离
具体实施方式
为使本领域技术人员能更进一步了解本发明,以下特列举本发明的实施例,并配合附图详细说明本发明的构成内容及所欲达成的功效。须注意的是,附图均为简化的示意图,因此,仅显示与本发明有关之组件与组合关系,以对本发明的基本架构或实施方法提供更清楚的描述,而实际的组件与布局可能更为复杂。另外,为了方便说明,本发明的各附图中所示之组件并非以实际实施的数目、形状、尺寸做等比例绘制,其详细的比例可依照设计的需求进行调整。
请参考图1至图4,图1所示为本发明第一实施例的像素结构的部分俯视示意图,图2所示为图1的部分放大示意图,图3所示为沿着图1中AA’与BB’剖线的剖面示意图,图4所示为沿着图1中CC’与BB’剖线的剖面示意图,其中图2将半导体主动层放大绘示,而为了清楚表示半导体主动层内的区域分布,图2的半导体主动层以及第二导电层并未绘示底纹。需先说明的是,本发明的像素结构100可应用于液晶显示屏、触控显示屏或其他适合的显示屏,而下文以液晶显示屏为例进行说明,但显示屏或触控显示屏不以此为限。在显示屏或触控显示屏中,本发明的像素结构100可以一阵列排列的方式设置,且各个像素结构100可作为子像素,并由一个或多个子像素组成一个像素,例如由三个子像素组成一个像素,以作为显示画面的单元。如图1至图4所示,本实施例的像素结构100包括第一基板110、第二基板190、薄膜晶体管T、共同电极(或称为第一透明导电层)180、像素电极(或称为第二透明导电层)160、第一绝缘层170以及液晶层LC。第一基板110用以承载像素结构100中的组件,并具有一表面110a,第二基板190与第一基板110相对设置,亦即第二基板190设置于第一基板110的表面110a上方,其中第一基板110与第二基板190可为硬质基板例如玻璃基板、塑料基板、石英基板或蓝宝石基板,也可为例如包含聚亚酰胺材料(polyimide,PI)或聚对苯二甲酸乙二酯材料(polyethylene terephthalate,PET)的可挠式基板,但不以此为限。
薄膜晶体管T设置在第一基板110的表面110a上,且薄膜晶体管T包含有栅极G、源极S、漏极D、栅极绝缘层130以及半导体主动层140,举例而言,本实施例的像素结构100还可包括第一导电层120以及第二导电层150,其中第一导电层120设置在第一基板110的表面110a上,栅极绝缘层130设置在第一导电层120上,半导体主动层140设置在栅极绝缘层130上,第二导电层150设置在半导体主动层140上,并且,第一导电层120包括薄膜晶体管T的栅极G,第二导电层150包括薄膜晶体管T的源极S与漏极D,且栅极G、源极S与漏极D在垂直于第一基板110的表面110a的方向上分别重叠于一部分的半导体主动层140,而栅极绝缘层130用以分隔栅极G与半导体主动层140,因此本实施例的薄膜晶体管T为底栅型薄膜晶体管(bottom-gate thin film transistor),但不以此为限,薄膜晶体管T亦可为顶栅型薄膜晶体管(top-gate thin film transistor),例如,将包含有栅极G的第一导电层120以及栅极绝缘层130设置在包含有源极S与漏极D的第二导电层150上,且栅极绝缘层130设置在第一导电层120与半导体主动层140之间,半导体主动层140设置在栅极绝缘层130与第二导电层150之间。另外,第一导电层120与第二导电层150可包括导电性良好的导电材料,例如金属材料。半导体主动层140可包括氧化铟镓锌(IGZO)、氧化铟锡锌、氧化铟镓、氧化铟锌、氧化镓、氧化镉、氧化镁、氧化钙、氧化锶、氧化钡、氧化钛、氧化钽、氧化铝、氧化铟、氧化铌、氧化铪、氧化锡、氧化锌、氧化锆、氧化铜、氧化钇、氧化钡钇、氧化钐锡等氧化物半导体材料其一或其任意组合,但不以此为限。此外,举例而言,当半导体主动层140为氧化铟镓锌,且栅极绝缘层130靠近半导体主动层140的位置可包含硅酸盐,但不以此为限。
在本实施例的薄膜晶体管T中,半导体主动层140具有信道区140a,设置在源极S与漏极D之间,其中信道区140a包括主信道区140m以及次信道区140s,其中在图1与图2中举例绘示了三个主信道区140m与四个次信道区140s,主信道区140m与次信道区140s彼此交替设置,且主信道区140m与次信道区140s之间以虚线区隔,但主信道区140m与次信道区140s的数量与设置方式不以此为限。主信道区140m的信道长度小于次信道区140s的信道长度,且主信道区140m的信道长度等于信道区140a的最小信道长度,须说明的是,信道长度是指信道区140a由漏极D到源极S之间的距离,也就是说,由于主信道区140m的信道长度等于信道区140a的最小信道长度,主信道区140m的阻值会小于次信道区140s的阻值,故当薄膜晶体管T开启时,主信道区140m为漏极D与源极S之间的主要导通路径。此外,半导体主动层140还具有背信道区140b(绘示于图3中),位于源极S与漏极D之间,而信道区140a与背信道区140b分别位于半导体主动层140的两相对侧,并且在第一基板110的表面110a的垂直投影方向彼此重叠,亦即在图3中所示的背信道区140b与信道区140a分别在半导体主动层140的上下两侧,在本实施例中,信道区140a为邻近于栅极G的一侧,背信道区140b位于远离于栅极G的一侧,但不以此为限。在本实施例中,主信道区140m的信道长度可为2.5微米到5.5微米,或可为3微米到5.3微米,或可为3.5微米到4.3微米,亦即信道区140a的最小信道长度位于上述的长度范围内,但不以此为限。如图1所示,本实施例的主信道区140m位于次信道区140s之间,且主信道区140m的数量与次信道区140s的数量可多于一个,举例而言,图1中绘示有三个主信道区140m,但其设置位置与数量不以此为限,可依据实际需求而设计,例如,信道区140a可具有一个主信道区140m与多个次信道区140s。
此外,在本实施例中,像素结构100还可包括扫描线SL与数据线DL,分别用以传输更新画面的控制信号与显示灰阶的控制信号,其中扫描线SL可沿着第一方向D1延伸设置,并电连接薄膜晶体管T的栅极G,数据线DL可沿着第二方向D2延伸设置,并电连接薄膜晶体管T的源极S,其中第一方向D1不平行第二方向D2,而在本实施例中,第一方向D1与第二方向D2彼此垂直,但不以此为限。另外,本实施例的扫描线SL可由第一导电层120所构成,本实施例的数据线DL可由第二导电层150所构成,亦即彼此电连接的扫描线SL与栅极G都设置在第一导电层120中,彼此电连接的数据线DL与源极S都设置在第二导电层150中,但不以此为限。值得一提的是,本实施例的薄膜晶体管T的源极S可具有第一部分S1以及第二部分S2,第一部分S1包含数据线DL邻近于半导体主动层140的一部分,也就是第一部分S1与数据线DL部分重叠,第二部分S2则从数据线DL突出,使源极S具有一钩子形状,藉此增加信道区140a的面积,并同时增加源极S和漏极D之间具有最小距离的区域,也就是增加主信道区140m的区域,以降低薄膜晶体管T开启时的阻值,但源极S的设置方式不以此为限。
像素电极(或称为第二透明导电层)160设置在栅极绝缘层130上,并电连接到薄膜晶体管T的漏极D,使得显示灰阶的控制信号可透过数据线DL与薄膜晶体管T传送至像素电极160。在本实施例中,像素电极160与第二导电层150可直接设置于栅极绝缘层130上,且像素电极160直接接触第二导电层150而互相电连接,也就是说,像素电极160与第二导电层150可不需通过连接孔而直接电连接,但不以此为限。第一绝缘层170设置在像素电极160上,并可设置在薄膜晶体管T上。共同电极(或称为第一透明导电层)180设置在第一绝缘层170与像素电极160上,也就是说,第一绝缘层170设置在共同电极180与像素电极160之间,而共同电极180用以电连接共同电压(common voltage)并绝缘于薄膜晶体管T。液晶层LC设置于第一基板110与第二基板190之间,并设置于共同电极180上,因此,当薄膜晶体管T开启时,像素电极160可接收到数据线DL所传输的显示灰阶的控制信号,而像素电极160可依据显示灰阶的控制信号并搭配共同电极180的耦合电场控制液晶层LC中的液晶分子而显示出画面的显示灰阶。此外,为了达到良好的耦合电场以更准确的控制液晶分子,本实施例的共同电极180可具有多条狭缝180b,但不以此为限。另外,共同电极180与像素电极160可分别包括氧化铟锡(Indium Tin Oxide,ITO)或氧化铟锌(Indium Zinc Oxide,IZO),而第一绝缘层170可包括氧化硅、氮化硅或氮氧化硅等材料,但不以此为限。此外,当半导体主动层140为氧化铟镓锌时,第一绝缘层170靠近半导体主动层140的位置的氧含量可高于第一绝缘层170远离半导体主动层140的位置的氧含量,但不以此为限。
一般而言,薄膜晶体管T在关闭时会有少量的电流藉由半导体主动层140的背信道区140b的路径而由源极S流到漏极D或由漏极D流到源极S,此些少量的电流称之为漏电流,而当漏电流的电流过大时,会导致显示屏所显示的画面异常,例如闪烁、串扰(crosstalk)。为了使像素结构100中的薄膜晶体管T在关闭时的漏电流下降,并且不大幅影响薄膜晶体管T开启时的阻值,因此,本发明的像素结构100的共同电极180具有一开口180a,用以暴露出主信道区140m,并且共同电极180覆盖至少部分的次信道区140s,也就是说,共同电极180邻近开口180a的区域会覆盖至少部分的次信道区140s,且共同电极180在第一基板110的表面110a的垂直投影与主信道区140m在第一基板110的表面110a的垂直投影不重叠。在此设置下,当提供共同电压给共同电极180时,由于共同电极180并未覆盖主信道区140m,因此共同电极180并不会影响主信道区140m开启时的路径阻值以及关闭时的断路情形,而因为主信道区140m为漏极D与源极S之间的主要导通路径,故共同电极180被提供共同电压时并不会大幅影响薄膜晶体管T开启时的阻值。另一方面,当薄膜晶体管T关闭时,由于共同电极180覆盖至少部分的次信道区140s,因此,与该至少部分次信道区140s重叠的背信道区140b会被共同电压所感应而使得关闭效果提升,借此降低漏电流。图5为本发明一实施例的像素结构100的薄膜晶体管T的电流-电压特性曲线示意图,其中所绘示的共同电压小于或等于0伏特。如图5所示,当薄膜晶体管T开启时,不论共同电压的值为何,电流并未有明显差异,因此在此共同电极180的设置下,薄膜晶体管T开启时的阻值并不会被大幅影响,另一方面,当薄膜晶体管T关闭时,其漏电流会随着共同电压的负电压增强而降低,因此,为了使本发明有良好的降低漏电流效果,共同电压可小于或等于0伏特,例如可为-1.5伏特到-10伏特,但不以此为限,在某些条件或设计下,共同电压亦可大于0伏特。此外,在本实施例中,为使背信道区140b被共同电极180所覆盖的区域增加,共同电极180的开口180a在第一基板110的表面110a的垂直投影可位于半导体主动层140在第一基板110的表面110a的垂直投影内,也就是共同电极180的开口180a面积可小于半导体主动层140的面积,但不以此为限。除此之外,共同电极180的开口180a可暴露出一部分的次信道区140s,以避免在制造过程中的对位误差而导致共同电极180覆盖到主信道区140m,进而影响薄膜晶体管T开启时的阻值,优选地,主信道区140m在第一基板110的表面110a的垂直投影的边缘与共同电极180的开口180a在第一基板110的表面110a的垂直投影的边缘之间的距离W(如图1所示)小于或等于约2微米,但不以此为限,在变化实施例中,共同电极180亦可完全覆盖次信道区140s。另外,在本实施例中,共同电极180还可覆盖扫描线SL,使得扫描线SL所产生的电场不会影响共同电极180与像素电极160之间的电场,借此避免扫描线SL影响显示画面。
此外,像素结构100还可包括遮蔽层BM与彩色滤光层CF,设置于第一基板110与第二基板190之间。遮蔽层BM可为俗称的黑色矩阵层(black matrix layer),材质例如为黑色树脂、铬或其它适当遮光材料,用以遮蔽薄膜晶体管T、数据线DL、扫描线SL等结构。彩色滤光层CF用以使各像素结构100产生对应色系的光线,举例而言,彩色滤光层CF可包括红色、绿色、蓝色的滤光材料,使得各像素结构100可产生红色光、绿色光、蓝色光的其中一种,再透过灰阶控制与混色而形成彩色的画面,但颜色的种类不以此为限。在本实施例中,遮蔽层BM与彩色滤光层CF都设置在第二基板190与液晶层LC之间,但不以此为限,在其他实施例中,遮蔽层BM及/或彩色滤光层CF也可设置在第一基板110上并位于第一基板110与液晶层LC之间,亦即COA(color filter on array)、BOA(black matrix on array)等结构亦在本发明所属的范畴内。
本发明的像素结构并不以上述实施例为限。下文将继续揭示本发明的其它实施例或变化形,然为了简化说明并突显各实施例或变化形之间的差异,下文中使用相同标号标注相同组件,并不再对重复部分作赘述。
请参考图6,图6所示为本发明第二实施例的像素结构的剖面示意图,其剖面位置对应于图3位置。如图6所示,相较于第一实施例,本实施例的像素结构200还具有第二绝缘层210,设置在像素电极160与栅极绝缘层130之间,并设置在共同电极180与栅极绝缘层130之间,也就是说,在本实施例中,像素电极160设置在第一绝缘层170与第二绝缘层210之间,共同电极180设置在第一绝缘层170与像素电极160上,亦即第二绝缘层210、像素电极160、第一绝缘层170与共同电极180依序堆叠于栅极绝缘层130上,而像素电极160可透过第二绝缘层210中的连接孔H与漏极D连接。此外,在本实施例中,第一绝缘层170与第二绝缘层210可分别包括氧化硅、氮化硅或氮氧化硅等材料,也就是说,第一绝缘层170与第二绝缘层210可为无机绝缘材料所构成的单层膜层,但不以此为限。在变化实施例中,第二绝缘层210可为多层的膜层结构,举例而言,第二绝缘层210可为两层的膜层结构,其中一层可包括氧化硅、氮化硅或氮氧化硅等无机绝缘材料,另一层可包括有机绝缘材料,例如压克力树脂(举例为聚甲基丙烯酸甲酯(polymethyl methacrylate,PMMA)),且包含有有机绝缘材料的膜层设置在包含有无机绝缘材料的膜层上,但不以此为限。在本实施例中,由于像素结构200中设置有第一绝缘层170与第二绝缘层210,因此在膜层厚度的设计上会较为弹性,并较容易调变像素电极160与共同电极180之间的距离。
请参考图7,图7所示为本发明第三实施例的像素结构的剖面示意图,其剖面位置对应于图3位置。如图7所示,相较于第二实施例,本实施例的像素结构300的像素电极160与共同电极180的膜层位置交换,也就是说,共同电极180设置在第一绝缘层170与第二绝缘层210之间,像素电极160设置在第一绝缘层170与共同电极180上,亦即第二绝缘层210、共同电极180、第一绝缘层170与像素电极160依序堆叠于栅极绝缘层130上。此外,在本实施例中,由于像素电极160相较于共同电极180较邻近液晶层LC,因此本实施例的像素电极160可具有多条狭缝160b,且共同电极180可不具有狭缝。而有关于第二绝缘层210的描述可参酌第二实施例的说明,在此不再赘述。
请参考图8,图8所示为本发明第四实施例的像素结构的剖面示意图。如图8所示,相较于第三实施例,本实施例的像素结构400还包括第三透明导电层410,设置在第二基板190与液晶层LC之间,且第三透明导电层410连接共同电压,借此使得由第四实施例的像素结构400所形成的显示屏可为扭转式向列型(twisted nematic,TN)显示屏。值得说明的是,在本实施例中,共同电极180只用来覆盖至少部分的次信道区140s,并不施以共同电压,因此,在本实施例,系利用像素电极160以及第三透明导电层410所产生的电场控制液晶层LC中的液晶分子而显示出画面的显示灰阶。此外,图8有额外绘示用以间隔与支撑第一基板110与第二基板190的间隔单元PS,在本实施例中,间隔单元PS设置在第一绝缘层170上。再者,本实施例的第二绝缘层210举例包括有机绝缘材料,其具有平坦化的功能,厚度较大于图6与图7所绘示的第二绝缘层210。须说明的是,在本发明中,其他实施例以及其变化实施例的像素结构所形成的显示屏都可具有图8所绘示的间隔单元。
请参考图9,图9所示为本发明第五实施例的像素结构的剖面示意图。如图9所示,相较于第一实施例,本实施例的像素结构500还具有主动绝缘层510,覆盖在半导体主动层140上,且在主动绝缘层510中形成有二穿孔使源极S以及漏极D可分别透过二穿孔连接半导体主动层140。而在本实施例中,半导体主动层140可包括氧化物半导体材料,例如氧化铟镓锌(IGZO),但不以此为限。
请参考图10与图11,图10所示为本发明第六实施例的像素结构的部分俯视示意图,图11所示为图10的部分放大示意图,其中图11将半导体主动层放大绘示,而为了清楚表示半导体主动层内的区域分布,图11的半导体主动层以及第二导电层并未绘示底纹。如图10与图11所示,相较于第一实施例,本实施例的像素结构600的薄膜晶体管T的源极S的形状为弯折型,因此,本实施例的源极S为数据线DL的一部分,也就是说,数据线DL在作为源极S的部分或是靠近信道区140a的部分具有弯曲形状。类似地,本实施例的主信道区140m位于次信道区140s之间,且图10与图11中举例有三个主信道区140m与四个次信道区140s,但其设置位置与数量不以此为限,可依据实际需求而设计。并且,可选择性地,共同电极180的开口180a在第一基板110的表面110a的垂直投影可位于半导体主动层140在第一基板110的表面110a的垂直投影内,而共同电极180的开口180a可暴露出一部分的次信道区140s。
综上所述,本发明的像素结构由于其共同电极具有用以暴露出主信道区的开口,且共同电极覆盖至少部分的次信道区,因此,在此设置下,当共同电极被提供共同电压时,由于共同电极并未覆盖主信道区,因此共同电极并不会大幅影响薄膜晶体管开启时的阻值。另一方面,当薄膜晶体管关闭时,由于共同电极覆盖至少部分的次信道区,因此,对应被共同电极所覆盖的次信道区的背信道区会被共同电压所感应而使得关闭效果提升,借此降低漏电流。
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。

Claims (22)

1.一种像素结构,其特征在于,包括:
一基板,具有一表面;
一薄膜晶体管,设置在所述基板的所述表面上,且所述薄膜晶体管包括一栅极、一源极、一漏极、一栅极绝缘层以及一半导体主动层,所述栅极、所述源极与所述漏极在垂直于所述表面的方向上分别重叠于一部分的所述半导体主动层,所述栅极绝缘层设置在所述栅极与所述半导体主动层之间,所述半导体主动层具有一信道区,设置在所述源极与所述漏极之间,所述信道区包括一主信道区以及多个次信道区,所述主信道区位于所述次信道区之间,所述主信道区的信道长度小于所述次信道区的信道长度,且所述主信道区的信道长度等于所述信道区的最小信道长度,其中信道长度是指所述信道区由所述漏极到所述源极之间的距离;以及
一共同电极,设置在所述薄膜晶体管上,所述共同电极绝缘于所述薄膜晶体管,所述共同电极覆盖至少部分的所述次信道区,且所述共同电极具有一开口,暴露出所述主信道区。
2.如权利要求1所述的像素结构,其特征在于,所述共同电极在所述表面的垂直投影与所述主信道区在所述表面的垂直投影不重叠。
3.如权利要求1所述的像素结构,其特征在于,所述开口在所述表面的垂直投影位于所述半导体主动层在所述表面的垂直投影内。
4.如权利要求1所述的像素结构,其特征在于,所述开口暴露出一部分的所述次信道区。
5.如权利要求1所述的像素结构,其特征在于,所述主信道区在所述表面的垂直投影的边缘与所述开口在所述表面的垂直投影的边缘之间的距离小于或等于2微米。
6.如权利要求1所述的像素结构,其特征在于,还包括:
一像素电极,设置在所述栅极绝缘层上,所述像素电极电连接到所述薄膜晶体管的所述漏极;以及
一第一绝缘层,并设置在所述像素电极与所述共同电极之间。
7.如权利要求6所述的像素结构,其特征在于,所述共同电极设置在所述第一绝缘层与所述像素电极上。
8.如权利要求6所述的像素结构,其特征在于,还包括一第二绝缘层,所述第二绝缘层设置在所述像素电极与所述栅极绝缘层之间,并设置在所述共同电极与所述栅极绝缘层之间。
9.如权利要求8所述的像素结构,其特征在于,所述像素电极设置在所述第一绝缘层与所述第二绝缘层之间,所述共同电极设置在所述第一绝缘层与所述像素电极上。
10.如权利要求8所述的像素结构,其特征在于,所述共同电极设置在所述第一绝缘层与所述第二绝缘层之间,所述像素电极设置在所述第一绝缘层与所述共同电极上。
11.如权利要求8所述的像素结构,其特征在于,所述第一绝缘层与所述第二绝缘层分别包括氧化硅、氮化硅或氮氧化硅。
12.如权利要求11所述的像素结构,其特征在于,所述第二绝缘层还包括有机绝缘材料。
13.如权利要求6所述的像素结构,其特征在于,所述半导体主动层为氧化铟镓锌,所述第一绝缘层靠近所述半导体主动层的位置的氧含量高于所述第一绝缘层远离所述半导体主动层的位置的氧含量。
14.如权利要求6所述的像素结构,其特征在于,所述共同电极或所述像素电极具有多条狭缝。
15.如权利要求1所述的像素结构,其特征在于,还包括:
一扫描线,沿着一第一方向延伸设置,所述扫描线电连接所述薄膜晶体管的所述栅极;以及
一数据线,沿着一第二方向延伸设置,所述数据线电连接所述薄膜晶体管的所述源极,其中所述第一方向不平行所述第二方向;
其中所述源极具有一第一部分以及一第二部分,所述第一部分包含所述数据线的一部分,所述第二部分从所述数据线突出,使所述源极具有一钩子形状。
16.如权利要求1所述的像素结构,其特征在于,所述源极的形状为弯折型。
17.如权利要求1所述的像素结构,其特征在于,所述共同电极电连接一共同电压,且所述共同电压小于或等于0伏特。
18.如权利要求1所述的像素结构,其特征在于,所述主信道区的信道长度为2.5微米到5.5微米。
19.如权利要求1所述的像素结构,其特征在于,所述半导体主动层包括氧化铟镓锌、氧化铟锡锌、氧化铟镓、氧化铟锌、氧化镓、氧化镉、氧化镁、氧化钙、氧化锶、氧化钡、氧化钛、氧化钽、氧化铝、氧化铟、氧化铌、氧化铪、氧化锡、氧化锌、氧化锆、氧化铜、氧化钇、氧化钡钇、氧化钐锡等氧化物半导体材料其一或其任意组合。
20.如权利要求19所述的像素结构,其特征在于,所述半导体主动层为氧化铟镓锌,且所述栅极绝缘层靠近所述半导体主动层的位置包含硅酸盐。
21.一种像素结构,其特征在于,包括:
一第一基板,具有一表面;
一薄膜晶体管,设置在所述第一基板的所述表面上,且所述薄膜晶体管包括一栅极、一源极、一漏极、一栅极绝缘层以及一半导体主动层,
所述栅极、所述源极与所述漏极在垂直于所述表面的方向上分别重叠于一部分的所述半导体主动层,所述栅极绝缘层设置在所述栅极与所述半导体主动层之间,所述半导体主动层具有一信道区,设置在所述源极与所述漏极之间,所述信道区包括一主信道区以及多个次信道区,所述主信道区位于所述次信道区之间,所述主信道区的信道长度小于所述次信道区的信道长度,且所述主信道区的信道长度等于所述信道区的最小信道长度,其中信道长度是指所述信道区由所述漏极到所述源极之间的距离;
一第一透明导电层,设置在所述薄膜晶体管上,所述第一透明导电层绝缘于所述薄膜晶体管,所述第一透明导电层覆盖至少部分的所述次信道区,且所述第一透明导电层具有一开口,暴露出所述主信道区;
一第二基板,设置于所述第一基板的所述表面上方;以及
一液晶层,设置于所述第一基板和所述第二基板之间。
22.如权利要求21所述的像素结构,其特征在于,还包括一第二透明导电层设置于所述第二基板与所述液晶层之间,且所述第二透明导电层连接一共同电压。
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