CN109789568A - 机械手臂、曝光机前单元和温度控制方法 - Google Patents

机械手臂、曝光机前单元和温度控制方法 Download PDF

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Publication number
CN109789568A
CN109789568A CN201780058780.7A CN201780058780A CN109789568A CN 109789568 A CN109789568 A CN 109789568A CN 201780058780 A CN201780058780 A CN 201780058780A CN 109789568 A CN109789568 A CN 109789568A
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CN
China
Prior art keywords
temperature
unit
mechanical arm
transmission unit
exposure machine
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Pending
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CN201780058780.7A
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English (en)
Inventor
黄顺宏
朱广飞
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Shenzhen Royole Technologies Co Ltd
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Shenzhen Royole Technologies Co Ltd
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Application filed by Shenzhen Royole Technologies Co Ltd filed Critical Shenzhen Royole Technologies Co Ltd
Publication of CN109789568A publication Critical patent/CN109789568A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Abstract

一种机械手臂(10)、曝光机前单元(1000)和温度控制方法。机械手臂(10)，用于曝光机前单元(1000)，曝光机前单元(1000)包括温度控制单元(200)和传送单元(100)，机械手臂(10)位于传送单元(100)内，机械手臂(10)包括：本体(12)和温度传感器(14)。本体(12)能够承托玻璃基板并将位于温度控制单元(200)内的玻璃基板传送至曝光机，温度传感器(14)设置于本体(12)上，用于监测传送单元(100)内的温度。该机械手臂(10)可使玻璃基板在传送过程中温度稳定，从而有效避免温度变化对曝光精度产生的影响。

Description

PCT国内申请，说明书已公开。

Claims (10)

  1. PCT国内申请，权利要求书已公开。
CN201780058780.7A 2017-09-11 2017-09-11 机械手臂、曝光机前单元和温度控制方法 Pending CN109789568A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2017/101308 WO2019047244A1 (zh) 2017-09-11 2017-09-11 机械手臂、曝光机前单元和温度控制方法

Publications (1)

Publication Number Publication Date
CN109789568A true CN109789568A (zh) 2019-05-21

Family

ID=65633384

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Application Number Title Priority Date Filing Date
CN201780058780.7A Pending CN109789568A (zh) 2017-09-11 2017-09-11 机械手臂、曝光机前单元和温度控制方法

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Country Link
CN (1) CN109789568A (zh)
WO (1) WO2019047244A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112198761A (zh) * 2020-09-07 2021-01-08 中国科学院微电子研究所 载片系统及物料传递方法

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JPH08274141A (ja) * 1995-04-03 1996-10-18 Dainippon Screen Mfg Co Ltd 基板搬送装置
CN1818787A (zh) * 2005-02-08 2006-08-16 东京毅力科创株式会社 涂布、显像装置和涂布、显像方法
CN1912748A (zh) * 2005-08-12 2007-02-14 株式会社Orc制作所 曝光装置及曝光方法
US20070159615A1 (en) * 2006-01-12 2007-07-12 Nikon Corporation Object transfer apparatus, exposure apparatus, object temperature control apparatus, object transfer method, and microdevice manufacturing method
JP2008147280A (ja) * 2006-12-07 2008-06-26 Nikon Corp 露光装置
CN102257437A (zh) * 2009-11-25 2011-11-23 日本精工株式会社 预对准装置以及预对准方法
CN104914676A (zh) * 2014-03-12 2015-09-16 旺昌机械工业(昆山)有限公司 网板曝光机监控系统
CN106078804A (zh) * 2016-07-29 2016-11-09 苏州高通机械科技有限公司 具有冷却功能的基板搬运机器人

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AU2003220830A1 (en) * 2002-03-12 2003-09-22 Olympus Corporation Semiconductor manufacturing method and device thereof
JP4020261B2 (ja) * 2003-11-05 2007-12-12 株式会社日立ハイテクノロジーズ 露光方法、露光装置、及び基板製造方法
CN106003096A (zh) * 2016-07-29 2016-10-12 苏州高通机械科技有限公司 一种基板冷却搬运机器人
CN106885476B (zh) * 2017-03-08 2019-08-27 合肥鑫晟光电科技有限公司 一种基板加热炉温度监测系统及方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274141A (ja) * 1995-04-03 1996-10-18 Dainippon Screen Mfg Co Ltd 基板搬送装置
CN1818787A (zh) * 2005-02-08 2006-08-16 东京毅力科创株式会社 涂布、显像装置和涂布、显像方法
CN1912748A (zh) * 2005-08-12 2007-02-14 株式会社Orc制作所 曝光装置及曝光方法
US20070159615A1 (en) * 2006-01-12 2007-07-12 Nikon Corporation Object transfer apparatus, exposure apparatus, object temperature control apparatus, object transfer method, and microdevice manufacturing method
JP2008147280A (ja) * 2006-12-07 2008-06-26 Nikon Corp 露光装置
CN102257437A (zh) * 2009-11-25 2011-11-23 日本精工株式会社 预对准装置以及预对准方法
CN104914676A (zh) * 2014-03-12 2015-09-16 旺昌机械工业(昆山)有限公司 网板曝光机监控系统
CN106078804A (zh) * 2016-07-29 2016-11-09 苏州高通机械科技有限公司 具有冷却功能的基板搬运机器人

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112198761A (zh) * 2020-09-07 2021-01-08 中国科学院微电子研究所 载片系统及物料传递方法
CN112198761B (zh) * 2020-09-07 2023-09-01 中国科学院微电子研究所 载片系统及物料传递方法

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Application publication date: 20190521