CN109778133A - Technical arrangement plan method Internet-based in technique for vacuum coating - Google Patents
Technical arrangement plan method Internet-based in technique for vacuum coating Download PDFInfo
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- CN109778133A CN109778133A CN201910141698.1A CN201910141698A CN109778133A CN 109778133 A CN109778133 A CN 109778133A CN 201910141698 A CN201910141698 A CN 201910141698A CN 109778133 A CN109778133 A CN 109778133A
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Abstract
The invention discloses technical arrangement plan method Internet-based in technique for vacuum coating, the PC terminal/handheld terminal used including user, the coating machine control electronic box for providing electric energy to multiple electrical components, carries multiple coating machine chambers for electrically monitoring controlling elements, the online monitoring and management APP that auxiliary user supervises technique for vacuum coating parameter at the industrial intelligent gateway for playing technological parameter real-time online transmitting effect.Mature Internet technology is utilized, various parameters in vacuum coating process are timely feedbacked by industrial intelligent gateway to PC terminal/handheld terminal of user, when user needs to be adjusted the parameter of technique for vacuum coating, only need by the online monitoring and management APP installed built in PC terminal/handheld terminal, parameter adjustment can be fast implemented, so that the more well-regulated progress of entire technique for vacuum coating, improves the working efficiency of coating process, has saved a large amount of human cost.
Description
Technical field
It is specially Internet-based in technique for vacuum coating the present invention relates to vacuum coating equipment remote control technology field
Technical arrangement plan method.
Background technique
Vacuum coating technology is also referred to as physical gas phase deposition technology, and early in early 20th century, some have been answered physical gas phase deposition technology
With, but 30 years rapidly develop, and become the new technology of gate pole tool broad prospect of application, and send out towards environment-friendly type, clean type trend
Exhibition.Early 1990s so far, reach more in terms of horological industry, the surface treatment of especially high-grade wrist-watch metal appearance part
To be more widely applied.
Vacuum evaporation basic principle is under vacuum conditions, to make metal, metal alloy or compound evaporation, be subsequently deposited upon
On matrix surface, the method for evaporation often uses resistance heating, high-frequency induction heating, electron beam, laser beam, the bombardment plating of ion beam high energy
Material, makes to flash to gas phase, is subsequently deposited upon matrix surface, and in history, vacuum evaporation is that earliest technology is used in PVD method.
Sputter coating basic principle is so that argon gas is carried out glow discharge, at this moment argon under the vacuum condition of argon filling (Ar) gas
(Ar) atom is ionized into argon ion (Ar+), and argon ion under the action of electric field force, accelerates bombardment to plate the cathode target of material production
Material, target can be sputtered out and deposit to workpiece surface.If claiming direct current (Qc) sputtering, radio frequency using direct current glow discharge
(RF) claim radio-frequency sputtering caused by glow discharge.Claim magnetron sputtering caused by magnetic control (M) glow discharge.Arc-plasma plated film
Basic principle is under vacuum conditions, with striking needle striking, to make to carry out arc light between vacuum Jin Bi (anode) and plating material (cathode)
Electric discharge, cathode surface fast move multiple cathodic arc spots, and constantly material is plated in evaporation even " different China " rapidly, are allowed to be ionized into plate
Expect arc-plasma as main component, and plating material can be deposited on matrix rapidly.Because there is multi-arc-spot, also referred to as multi sphere
Evaporate ionization process.
Ion plating basic principle is under vacuum conditions, using certain plasma ionization technique, to make plating material atomic component
It is ionized into ion, while generating the neutral atom of many high-energy, adds back bias voltage on plated matrix.In this way in depth back bias voltage
Under the action of, ion deposition forms film in matrix surface.
In vacuum coating technology, also it is not implemented at present and the technological parameter of vacuum coating equipment is passed through into internet or Internet of Things
It is associated together with PC terminal/handheld terminal of user, both remotely the technological parameter data of vacuum coating can not be adjusted,
The many places for causing coating process to produce are inconvenient, for this purpose, we have proposed techniques Internet-based in a kind of technique for vacuum coating
Parameter regulation means.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the existing defects, provides Internet-based in technique for vacuum coating
The technique of vacuum coating equipment is joined in technical arrangement plan method, being also not implemented at present for can effectively solving to propose in background technique
Number is associated together by internet or Internet of Things and the PC of user terminal/handheld terminal, both can not be remotely to vacuum coating
Technological parameter data are adjusted, the problem for many places inconvenience for causing coating process to produce.
To achieve the above object, the invention provides the following technical scheme: technique Internet-based in technique for vacuum coating
Parameter regulation means, including include user use PC terminal/handheld terminal, play technological parameter real-time online transmitting effect
Industrial intelligent gateway, the coating machine control electronic box for providing electric energy to multiple electrical components, the multiple electrically monitoring regulations of carrying
Online monitoring and management APP that the coating machine chamber of element, auxiliary user supervise technique for vacuum coating parameter, auxiliary user
The user log-in block logged on line supervision APP and the online upgrading for automatically updating upgrading to online monitoring and management APP
Module；
Multiple electrically monitoring controlling elements of the coating machine chamber carrying join the kinds of processes of coating machine chamber interior
Number carries out real time on-line monitoring, and by the data result of monitoring by industrial intelligent gateway Real-time Feedback to PC terminal/hand-held eventually
On the online monitoring and management APP of built-in installation in end, the parameter state of coating machine chamber interior, the plated film are understood convenient for user's moment
When the coating process parameter of machine cavity chamber interior is not within the scope of artificial setup parameter threshold, user can pass through the online monitoring and management
Each administration module in APP is modified processing to technological parameter, and the industrial intelligent gateway is by modified technological parameter number
According to coating machine control electronic box is transferred in time, each technique is controlled by the control unit that the coating machine chamber interior is arranged and is joined
Several executive components carries out amendment adjustment in time；
The inside of the coating machine chamber is equipped with vacuum transducer for monitoring internal vacuum, for monitoring inside
The temperature sensor of temperature, the humidity sensor for monitoring interior humidity and the speed for monitoring internal workpiece transmission speed
Rate sensor, the external relevance of the coating machine chamber are connected with for being adjusted to coating machine chamber interior vacuum degree
Vacuum pump and electromagnetic valve I, the condenser pump for adjusting to coating machine chamber interior temperature and electromagnetic valve II are used for plated film machine cavity
Argon, nitrogen delivery pump and the gas flow controller and carried out for the movement speed to workpiece that chamber interior humidity is adjusted
The speed regulating motor of adjustment, the vacuum transducer, temperature sensor, humidity sensor and rate sensor are by the data of monitoring
Coating machine, which is fed back to, by PLC controller controls human-computer interaction interface set on electronic box；
The online monitoring and management APP is built-in with multiple administration modules, supervises mould including vacuum degree administration module, temperature
Block, humidity administration module and rate administration module；
The vacuum degree administration module includes for showing that the vacuum degree of coating machine chamber interior vacuum degree data shows mould
Block and the vacuum degree adjustment module that directly coating machine chamber interior vacuum degree data are adjusted convenient for user；
The temperature administration module include temperature display module for showing coating machine chamber interior temperature data and
Module directly is adjusted to the temperature that coating machine chamber interior temperature data is adjusted convenient for user；
The humidity administration module include humidity display module for showing coating machine chamber interior humidity data and
Module directly is adjusted to the humidity that coating machine chamber interior humidity data is adjusted convenient for user；
The rate administration module includes the rate display module for showing coating machine chamber interior plating piece conveying speed
And the rate adjustment module that directly conveying speed of coating machine chamber interior plating piece is adjusted convenient for user.
As a preferred technical solution of the present invention, the model of the industrial intelligent gateway selects WG258, the industry
Intelligent gateway remotely can carry out safe encipherment protection, the industrial intelligent net to industrial data by VPN over p 2 p technology
Close and support a variety of data communication interfaces, compatible RS232 RS485 RS422 the various interface forms such as Ethernet PLC control
Device.
As a preferred technical solution of the present invention, the speed regulating motor is mounted on unreeling machine and the winding of coiling plating piece
On machine, cylinder and reel rotation are unreeled for driving.
As a preferred technical solution of the present invention, the electromagnetic valve I is serially connected in gas transmission at connection air-inlet of vacuum pump
On the section of pipe, the electromagnetic valve II is serially connected at connection condenser pump liquid outlet on the section of perfusion tube.
As a preferred technical solution of the present invention, the argon, nitrogen delivery pump are divided into nitrogen delivery pump and argon gas is defeated
Pump is sent, the quantity of the gas flow controller connects there are two being arranged altogether and concatenates one in the connecting tube of each delivery pump
Gas flow controller is regulated and controled.
Compared with prior art, the beneficial effects of the present invention are: the method for adjustment of the technique for vacuum coating parameter, in reality
Various parameters in vacuum coating process are passed through industrial intelligent in use, mature Internet technology is utilized by adjustment
Gateway is timely feedbacked to PC terminal/handheld terminal of user, when user needs to be adjusted the parameter of technique for vacuum coating, only
It needs parameter adjustment can be fast implemented, without manually seeing by the online monitoring and management APP installed built in PC terminal/handheld terminal
The control cabinet and human-computer interaction interface of vacuum coating equipment are kept, so that the more well-regulated progress of entire technique for vacuum coating, mentions
The high working efficiency of coating process, has saved a large amount of human cost, the use suitable for small and medium-sized manufacturing enterprises.
Detailed description of the invention
Fig. 1 is the structural schematic block diagram of the embodiment of the present invention 1；
Fig. 2 is the structural schematic block diagram of coating machine chamber in the embodiment of the present invention 1；
Fig. 3 is the structural schematic block diagram of online monitoring and management APP in the embodiment of the present invention 1；
Fig. 4 is 2 structural schematic block diagram of the embodiment of the present invention；
Fig. 5 is the structural schematic block diagram of coating machine chamber in the embodiment of the present invention 2.
In figure: 1, PC terminal/handheld terminal；2, industrial intelligent gateway；3, coating machine controls electronic box；4, coating machine chamber；
41, PLC controller；42, vacuum transducer；43, temperature sensor；44, humidity sensor；45, rate sensor；46, vacuum
Pump；47, electromagnetic valve I；48, condenser pump；49, electromagnetic valve II；410, argon, nitrogen delivery pump；411, gas flow controller；412,
Speed regulating motor；5, online monitoring and management APP；51, vacuum degree administration module；511, vacuum degree display module；512, vacuum degree adjusts mould
Block；52, temperature administration module；521, temperature display module；522, temperature adjusts module；53, humidity administration module；531, humidity
Display module；532, humidity adjusts module；54, rate administration module；541, rate display module；542, rate adjustment module；
6, user log-in block；7, online upgrading module.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1:
Fig. 1-Fig. 3 is please referred to, the present invention provides a kind of technical solution: technique ginseng Internet-based in technique for vacuum coating
Number adjusting method, the PC terminal/handheld terminal 1 used including user, the industry for playing technological parameter real-time online transmitting effect
Intelligent gateway 2, the coating machine control electronic box 3 for providing electric energy to multiple electrical components, the multiple electrically monitoring regulation members of carrying
Online monitoring and management APP5 that the coating machine chamber 4 of part, auxiliary user supervise technique for vacuum coating parameter, auxiliary user
The user log-in block 6 logged on line supervision APP5 and the online liter for automatically updating upgrading to online monitoring and management APP5
Grade module 7；
Multiple electrically monitoring controlling elements that coating machine chamber 4 carries are to the kinds of processes parameter inside coating machine chamber 4
Real time on-line monitoring is carried out, and the data result of monitoring is passed through into 2 Real-time Feedback of industrial intelligent gateway to PC terminal/handheld terminal
On the online monitoring and management APP5 of built-in installation in 1, the parameter state inside coating machine chamber 4, coating machine are understood convenient for user's moment
When coating process parameter inside chamber 4 is not within the scope of artificial setup parameter threshold, user can be by online monitoring and management APP5
Each administration module processing is modified to technological parameter, industrial intelligent gateway 2 passes modified technological parameter data in time
It is defeated by coating machine control electronic box 3, executes member by what the control unit being arranged inside coating machine chamber 4 controlled each technological parameter
Part carries out amendment adjustment in time；
The inside of coating machine chamber 4 is equipped with vacuum transducer 42 for monitoring internal vacuum, for monitoring inside
The temperature sensor 43 of temperature, the humidity sensor 44 for monitoring interior humidity and for monitoring internal workpiece transmission speed
Rate sensor 45, the external relevance of coating machine chamber 4 is connected with for adjusting to 4 internal vacuum of coating machine chamber
Whole vacuum pump 46, the condenser pump 48 for being adjusted to 4 internal temperature of coating machine chamber, for wet to 4 inside of coating machine chamber
Argon, nitrogen delivery pump 410 and the speed regulating motor 412 being adjusted for the movement speed to workpiece being adjusted are spent, very
The data of monitoring are passed through PLC controller by empty sensor 42, temperature sensor 43, humidity sensor 44 and rate sensor 45
41 feed back to human-computer interaction interface set on coating machine control electronic box 3；
Online monitoring and management APP5 is built-in with multiple administration modules, including vacuum degree administration module 51, temperature administration module
52, humidity administration module 53 and rate administration module 54；
Vacuum degree administration module 51 includes the vacuum degree display module for showing 4 internal vacuum data of coating machine chamber
511 and directly 4 internal vacuum data of coating machine chamber are adjusted convenient for user vacuum degree adjust module 512；
Temperature administration module 52 include for show the temperature display module 521 of 4 internal temperature data of coating machine chamber with
And module 522 directly is adjusted to the temperature that 4 internal temperature data of coating machine chamber is adjusted convenient for user；
Humidity administration module 53 include for show the humidity display module 531 of 4 interior humidity data of coating machine chamber with
And module 532 directly is adjusted to the humidity that 4 interior humidity data of coating machine chamber are adjusted convenient for user；
Rate administration module 54 includes the rate display module for showing 4 inside plating piece conveying speed of coating machine chamber
541 and directly the conveying speed of 4 inside plating piece of coating machine chamber is adjusted convenient for user rate adjustment module 542.
The model of industrial intelligent gateway 2 selects WG258, and industrial intelligent gateway 2 can be by VPN over p 2 p technology, remotely
Safe encipherment protection carried out to industrial data, industrial intelligent gateway 2 supports a variety of data communication interfaces, compatible RS232
RS485 RS422 the various interface forms such as Ethernet PLC controller 41.
Speed regulating motor 412 is mounted on the unreeling machine and winder of coiling plating piece, unreels cylinder and reel turn for driving
It is dynamic.
Embodiment 2:
Fig. 4-Fig. 5 is please referred to, the present invention provides a kind of technical solution: technique ginseng Internet-based in technique for vacuum coating
Number adjusting method, the PC terminal/handheld terminal 1 used including user, the industry for playing technological parameter real-time online transmitting effect
Intelligent gateway 2, the coating machine control electronic box 3 for providing electric energy to multiple electrical components, the multiple electrically monitoring regulation members of carrying
Online monitoring and management APP5 that the coating machine chamber 4 of part, auxiliary user supervise technique for vacuum coating parameter, auxiliary user
The user log-in block 6 logged on line supervision APP5 and the online liter for automatically updating upgrading to online monitoring and management APP5
Grade module 7；
Multiple electrically monitoring controlling elements that coating machine chamber 4 carries are to the kinds of processes parameter inside coating machine chamber 4
Real time on-line monitoring is carried out, and the data result of monitoring is passed through into 2 Real-time Feedback of industrial intelligent gateway to PC terminal/handheld terminal
On the online monitoring and management APP5 of built-in installation in 1, the parameter state inside coating machine chamber 4, coating machine are understood convenient for user's moment
When coating process parameter inside chamber 4 is not within the scope of artificial setup parameter threshold, user can be by online monitoring and management APP5
Each administration module processing is modified to technological parameter, industrial intelligent gateway 2 passes modified technological parameter data in time
It is defeated by coating machine control electronic box 3, executes member by what the control unit being arranged inside coating machine chamber 4 controlled each technological parameter
Part carries out amendment adjustment in time；
The inside of coating machine chamber 4 is equipped with vacuum transducer 42 for monitoring internal vacuum, for monitoring inside
The temperature sensor 43 of temperature, the humidity sensor 44 for monitoring interior humidity and for monitoring internal workpiece transmission speed
Rate sensor 45, the external relevance of coating machine chamber 4 is connected with for adjusting to 4 internal vacuum of coating machine chamber
Whole vacuum pump 46 and electromagnetic valve I 47, the condenser pump 48 for being adjusted to 4 internal temperature of coating machine chamber and electromagnetic valve II 49,
Argon, nitrogen delivery pump 410 and gas flow controller 411 and use for being adjusted to 4 interior humidity of coating machine chamber
In the speed regulating motor 412 that the movement speed to workpiece is adjusted, vacuum transducer 42, temperature sensor 43, humidity sensor
44 and rate sensor 45 by the data of monitoring by PLC controller 41 feed back to coating machine control it is set on electronic box 3
Human-computer interaction interface；
Online monitoring and management APP5 is built-in with multiple administration modules, including vacuum degree administration module 51, temperature administration module
52, humidity administration module 53 and rate administration module 54；
Vacuum degree administration module 51 includes the vacuum degree display module for showing 4 internal vacuum data of coating machine chamber
511 and directly 4 internal vacuum data of coating machine chamber are adjusted convenient for user vacuum degree adjust module 512；
Temperature administration module 52 include for show the temperature display module 521 of 4 internal temperature data of coating machine chamber with
And module 522 directly is adjusted to the temperature that 4 internal temperature data of coating machine chamber is adjusted convenient for user；
Humidity administration module 53 include for show the humidity display module 531 of 4 interior humidity data of coating machine chamber with
And module 532 directly is adjusted to the humidity that 4 interior humidity data of coating machine chamber are adjusted convenient for user；
Rate administration module 54 includes the rate display module for showing 4 inside plating piece conveying speed of coating machine chamber
541 and directly the conveying speed of 4 inside plating piece of coating machine chamber is adjusted convenient for user rate adjustment module 542.
The model of industrial intelligent gateway 2 selects WG258, and industrial intelligent gateway 2 can be by VPN over p 2 p technology, remotely
Safe encipherment protection carried out to industrial data, industrial intelligent gateway 2 supports a variety of data communication interfaces, compatible RS232
RS485 RS422 the various interface forms such as Ethernet PLC controller 41.
Speed regulating motor 412 is mounted on the unreeling machine and winder of coiling plating piece, unreels cylinder and reel turn for driving
It is dynamic.
Electromagnetic valve I 47 is serially connected at connection 46 air inlet of vacuum pump on the section of appendix, 49 company of being serially connected in of electromagnetic valve II
It connects at 48 liquid outlet of condenser pump on the section of perfusion tube.
Argon, nitrogen delivery pump 410 divide for nitrogen delivery pump and argon gas delivery pump, and the quantity of gas flow controller 411 is total
There are two settings, connects and concatenates a gas flow controller 411 in the connecting tube of each delivery pump and regulated and controled.
It should be understood that the place different from embodiment 1 of embodiment 2 is: embodiment 1 is that user passes through online monitoring and management
Various parameters on APP5 adjust module, and the technological parameter data modified will be needed to be conveyed to PLC control by industrial intelligent gateway 2
After device 41 processed, PLC controller 41 can only pass through the output power to vacuum pump 46, condenser pump 48 and argon, nitrogen delivery pump 410
It is adjusted, is just able to achieve and vacuum degree, temperature and the humidity inside coating machine chamber 4 are adjusted, and embodiment 2 is in reality
On the basis of applying example 1, increase electromagnetic valve I 47, electromagnetic valve II 49 and gas flow controller 411 realize auxiliary adjustment,
PLC controller 41 while controlling to adjust the output power of vacuum pump 46, condenser pump 48 and argon, nitrogen delivery pump 410,
The flow of controllable electromagnetic valve I 47, electromagnetic valve II 49 and gas flow controller 411, to realize more efficient, quick tune
Section, on the basis of internet, the response speed of technique for vacuum coating parameter adjustment faster, improves the product matter of coating process
Amount.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. technical arrangement plan method Internet-based in technique for vacuum coating, the PC terminal used including user/hand-held whole
Hold, the industrial intelligent gateway that plays technological parameter real-time online transmitting effect, for providing the plating of electric energy to multiple electrical components
Film machine controls electronic box, the coating machine chamber of the multiple electrically monitoring controlling elements of carrying, auxiliary user to technique for vacuum coating parameter
User log-in block that the online monitoring and management APP that is supervised, auxiliary user are logged on online monitoring and management APP and for
Online monitoring and management APP automatically updates the online upgrading module of upgrading, it is characterised in that:
Multiple electrically monitoring controlling elements of coating machine chamber carrying to the kinds of processes parameter of coating machine chamber interior into
Row real time on-line monitoring, and the data result of monitoring is passed through into industrial intelligent gateway Real-time Feedback in PC terminal/handheld terminal
On the online monitoring and management APP of built-in installation, the parameter state of coating machine chamber interior, the plated film machine cavity are understood convenient for user's moment
When the coating process parameter of chamber interior is not within the scope of artificial setup parameter threshold, user can be by the online monitoring and management APP
Each administration module processing is modified to technological parameter, the industrial intelligent gateway is timely by modified technological parameter data
It is transferred to coating machine control electronic box, holding for each technological parameter is controlled by the control unit that the coating machine chamber interior is arranged
Units carry out amendment adjustment in time；
The inside of the coating machine chamber is equipped with vacuum transducer for monitoring internal vacuum, for monitoring internal temperature
Temperature sensor, the humidity sensor for monitoring interior humidity and the rate for monitoring internal workpiece transmission speed pass
Sensor, the external relevance of the coating machine chamber are connected with the vacuum for being adjusted to coating machine chamber interior vacuum degree
Pump and electromagnetic valve I, the condenser pump for adjusting to coating machine chamber interior temperature and electromagnetic valve II are used for in coating machine chamber
Argon, nitrogen delivery pump and the gas flow controller and the movement speed for workpiece that portion's humidity is adjusted are adjusted
Speed regulating motor, the vacuum transducer, temperature sensor, humidity sensor and rate sensor pass through the data of monitoring
PLC controller feeds back to human-computer interaction interface set on coating machine control electronic box；
The online monitoring and management APP is built-in with multiple administration modules, including vacuum degree administration module, temperature administration module, wet
Spend administration module and rate administration module；
The vacuum degree administration module include for show the vacuum degree display module of coating machine chamber interior vacuum degree data with
And module directly is adjusted to the vacuum degree that coating machine chamber interior vacuum degree data are adjusted convenient for user；
The temperature administration module includes temperature display module for showing coating machine chamber interior temperature data and is convenient for
User directly adjusts module to the temperature that coating machine chamber interior temperature data is adjusted；
The humidity administration module includes humidity display module for showing coating machine chamber interior humidity data and is convenient for
User directly adjusts module to the humidity that coating machine chamber interior humidity data is adjusted；
The rate administration module include rate display module for showing coating machine chamber interior plating piece conveying speed and
The rate adjustment module that directly conveying speed of coating machine chamber interior plating piece is adjusted convenient for user.
2. technical arrangement plan method Internet-based, feature exist in technique for vacuum coating according to claim 1
In: the model of the industrial intelligent gateway selects WG258, and the industrial intelligent gateway can be by VPN over p 2 p technology, far
Journey carries out safe encipherment protection to industrial data, and the industrial intelligent gateway supports a variety of data communication interfaces, compatible
RS232 RS485 RS422 the various interface forms such as Ethernet PLC controller.
3. technical arrangement plan method Internet-based, feature exist in technique for vacuum coating according to claim 1
In: the speed regulating motor is mounted on the unreeling machine and winder of coiling plating piece, unreels cylinder and reel rotation for driving.
4. technical arrangement plan method Internet-based, feature exist in technique for vacuum coating according to claim 1
In: the electromagnetic valve I is serially connected at connection air-inlet of vacuum pump on the section of appendix, and it is cold that the electromagnetic valve II is serially connected in connection
At solidifying pump liquid outlet on the section of perfusion tube.
5. technical arrangement plan method Internet-based, feature exist in technique for vacuum coating according to claim 1
In: the argon, nitrogen delivery pump are divided into nitrogen delivery pump and argon gas delivery pump, and the quantity of the gas flow controller is arranged altogether
There are two, it connects and concatenates a gas flow controller in the connecting tube of each delivery pump and regulated and controled.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910141698.1A CN109778133A (en) | 2019-02-26 | 2019-02-26 | Technical arrangement plan method Internet-based in technique for vacuum coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910141698.1A CN109778133A (en) | 2019-02-26 | 2019-02-26 | Technical arrangement plan method Internet-based in technique for vacuum coating |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111103859A (en) * | 2019-12-31 | 2020-05-05 | 唐山旭华智能科技有限公司 | Data transmission device, process parameter setting system and method |
| CN114080470A (en) * | 2019-07-16 | 2022-02-22 | 株式会社神户制钢所 | Machine learning method, machine learning device, machine learning program, communication method, and film forming apparatus |
| CN115305450A (en) * | 2022-09-06 | 2022-11-08 | 嘉兴云浩纳米技术有限公司 | Production line system based on digital factory intelligent networking nano coating |
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Application publication date: 20190521 |
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