CN109742048A - Stretching structure for graphite boat plug-in sheet machine chip transmission line - Google Patents
Stretching structure for graphite boat plug-in sheet machine chip transmission line Download PDFInfo
- Publication number
- CN109742048A CN109742048A CN201910168925.XA CN201910168925A CN109742048A CN 109742048 A CN109742048 A CN 109742048A CN 201910168925 A CN201910168925 A CN 201910168925A CN 109742048 A CN109742048 A CN 109742048A
- Authority
- CN
- China
- Prior art keywords
- driving wheel
- belt
- rack
- expansion plate
- stretching structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 14
- 239000010439 graphite Substances 0.000 title claims abstract description 14
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 230000000712 assembly Effects 0.000 claims description 7
- 238000000429 assembly Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 27
- 229910052710 silicon Inorganic materials 0.000 abstract description 27
- 239000010703 silicon Substances 0.000 abstract description 27
- 238000009434 installation Methods 0.000 abstract description 4
- 238000012797 qualification Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of stretching structures for graphite boat plug-in sheet machine chip transmission line, including rack (8), the line slide rail (15) being arranged on framework soleplate and the expansion plate (1) being mounted thereon, it further include driving wheel group, the motor (7) and belt (10) being drivingly connected with driving wheel group, the motor (7) makes belt (10) make transmission movement in the upper surface of rack (8) by driving wheel group, the expansion plate (1) is with line slide rail (15) guiding, pass through one end of the extended or retracted rack (8) of the flexible drive expansion plate (1) of telescopic cylinder (9), when extended or retracted rack (8) of the expansion plate (1), the belt (10) makes it be in tensioning state always by the driving wheel group.Stretching structure of the invention is not likely to produce belt print on silicon wafer, and the qualification rate of product is higher, and installation and debugging are convenient.
Description
Technical field
The present invention relates to photovoltaic cell manufacturing equipment technical fields, are to be related to one kind to insert for graphite boat more specifically
The stretching structure of piece machine chip transmission line.
Background technique
Over time, the scarcity of fossil energy is more and more obvious.The back being becoming tight day is supplied in fossil energy
Under scape, the solar energy renewable energy inexhaustible as the mankind, distinctive abundant spatter property is perfectly safe
Property, opposite popularity has important influence status in long-term energy strategy.Graphite boat automatic loading and unloading piece machine is as light
The Typical Representative for lying prostrate automated manufacturing equipment, before and after the pecvd process in solar battery sheet production process, by silicon wafer
Automatically it is loaded into graphite boat or the silicon wafer in graphite boat is loaded into automatically in piece basket, there is automation and production efficiency
It is high, reduce manually with the contact stain of silicon wafer, increase considerably the features such as stability for picking and placing piece, photovoltaic system is known as by industry
Make the emphasis equipment of industry.
In the silicon slice transmission course of graphite boat plug-in sheet machine, silicon wafer passes in and out piece basket by belt line and realizes automatic loading and unloading,
In cargo handling process, belt line needs to protrude into inside piece basket, and when silicon wafer is unsnatched or filled in piece basket, belt line must retract
To piece basket.Therefore, this needs belt line to have reliable stretching structure.
What traditional stretching structure mostly used greatly is all split type structure, i.e., stretching structure and belt line main body are two only
Vertical component, using independent motor driven.The structure exists as following drawbacks:
1, the feature light, thin, crisp due to silicon wafer, it is very high to the flatness of belt line and the requirement of straightness in transmission process, point
In an assembling process, stretching structure is extremely difficult to corresponding morpheme requirement to body formula structure when docking with belt line main body, and debugging is difficult
Degree is big.
2, in split type structure, stretching structure and the transmission speed of belt line main body are inconsistent, so that silicon wafer is right by this
It connects region Shi Huiyu belt and generates relative motion, so that largely will lead to silicon wafer plating damage layer generates belt print, finally
Greatly reduce the qualification rate of silicon wafer in PECVD process.
Summary of the invention
The purpose of the present invention is to provide a kind of stretching structures for graphite boat plug-in sheet machine chip transmission line, are passed with improving
System stretching structure leads to the problem of belt print, while mitigating installation and debugging difficulty.
In order to achieve the above purpose, the technical scheme is that
A kind of stretching structure for graphite boat plug-in sheet machine chip transmission line, including rack, are arranged in the straight line on framework soleplate
Sliding rail and the expansion plate being mounted thereon, further include driving wheel group, the motor and belt being drivingly connected with driving wheel group, described
Motor makes belt make transmission movement in the upper surface of rack by driving wheel group, and the expansion plate is oriented to line slide rail, by stretching
One end of the extended or retracted rack of flexible drive expansion plate of contracting cylinder, when the extended or retracted rack of the expansion plate
When, the belt makes it be in tensioning state always by the driving wheel group.
The driving wheel group includes driving wheel, the first driving wheel, the second driving wheel, third driving wheel and the 4th driving wheel,
The driving wheel is mounted on the side of rack, and is sequentially connected with the output shaft of the motor, and first driving wheel is mounted on
One end on the outside of the expansion plate, second driving wheel are mounted on one end on expansion plate bottom far from the first driving wheel, institute
The downside that third driving wheel is located at the second driving wheel is stated, and is mounted on the rack, the 4th driving wheel is mounted on the rack
The upper surface of far from the first driving wheel one end.
The side of the driving wheel by the belt and the 4th driving wheel, the first driving wheel, the second driving wheel and
The side of third driving wheel is drivingly connected, and the motor passes through driving wheel, the first driving wheel, the second driving wheel, third driving wheel
Belt is set to make transmission movement in the upper surface of rack with the 4th driving wheel, when cylinder assembly is flexible by the flexible drive of its telescopic rod
When one end of the extended or retracted rack of plate, second driving wheel can be mobile with the expansion plate, to drive belt
It moves together, so that belt is in tensioning state always.
The 5th driving wheel is additionally provided between the driving wheel and third driving wheel, the side of the 5th driving wheel passes through skin
Band is sequentially connected with driving wheel and third driving wheel respectively；The 6th transmission is additionally provided between the driving wheel and the 4th driving wheel
The side of wheel, the 6th driving wheel is sequentially connected with driving wheel and the 4th driving wheel respectively by belt.
The driving wheel group shares two groups, is separately positioned on the two sides of rack.
Two sides above the rack are respectively provided with a belt support bar, and one end of the belt support bar is fixedly mounted on
In rack, when expansion plate stretches out described rack one end, it can hold belt.
Two sides on the expansion plate are equipped with the escape groove being used cooperatively with the belt support bar, the belt support bar
Stretching motion back and forth is placed in the escape groove, and the evacuation groove width on the expansion plate is necessarily less than belt width, to work as
When expansion plate stretches out described rack one end, the belt above escape groove will not be shaken because hanging.
Slide assemblies are additionally provided between the expansion plate and telescopic cylinder, the slide assemblies include linking arm, pedestal, company
Connect block and sliding block；The top of the linking arm is fixedly connected with the bottom of expansion plate, the bottom end of the linking arm and the top of pedestal
End is fixedly connected, and the inner side end of the pedestal is fixedly connected with link block.
The two sides of the pedestal lower end are equipped with sliding block, and the bottom of the sliding block is recessed equipped with cooperating with the line slide rail
Slot, the groove are fastened on the line slide rail and are slidably connected.
The telescopic cylinder is fixed on the bottom of rack, and the telescopic cylinder is equipped with telescopic rod, and the one of the telescopic rod
End is fixedly connected with the link block.
Beneficial effects of the present invention:
Stretching structure of the invention is not likely to produce belt print on silicon wafer, and the qualification rate of product is higher, and installation and debugging are convenient.
Detailed description of the invention
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawing.
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the top view of Fig. 1.
Specific embodiment
In order to make present invention solves the technical problem that, use technical solution, the technical effect of acquirement it can be readily appreciated that below
In conjunction with specific attached drawing, a specific embodiment of the invention is described further.
It should be noted that illustrating only part related to the present invention for ease of description, in attached drawing and not all knot
Structure.
As shown in Figs. 1-2, in one particular embodiment of the present invention, it provides a kind of for graphite boat plug-in sheet machine silicon wafer
The stretching structure of transmission line, including rack 8, expansion plate 1, motor 7, driving wheel group, belt 10, slide assemblies and telescopic cylinder 9.
The two sides of 8 bottom of rack are respectively provided with a sliding rail 15, and center line is equipped with a cylinder 9, is fixedly mounted on
In rack 8.
Slide assemblies include linking arm 20, pedestal 4, link block 5 and sliding block 14；The top of linking arm 20 and expansion plate 1
Bottom is fixedly connected, and the bottom end of linking arm 20 is fixedly connected with the top of pedestal 4, and the inner side end and link block 5 of pedestal 4 are fixed
Connection, link block 5 are fixedly connected with one end of the telescopic rod 6 on cylinder 9, and the two sides of 4 lower end of pedestal are equipped with sliding block 14, sliding block 14
Bottom be equipped with the groove (being not drawn into figure) that cooperates with line slide rail 15, groove is fastened on line slide rail 15 and is slidably connected.
Two sides above rack 8 are respectively provided with a belt support bar 3, and one end of belt support bar 3 is fixedly mounted on rack 8
On.
The connection of the linking arm 20 of 1 bottom of expansion plate and slide assemblies；Two sides and 3 phase of belt support bar above expansion plate 1
It answers and is equipped with escape groove 2 at position, belt support bar 3, which is placed in escape groove 2, moves back and forth (actually expansion plate 1 is moving).
When expansion plate 1 stretches out 8 one end of rack, belt support bar 3 can hold belt 10.
2 width of escape groove on expansion plate 1 is necessarily less than 10 width of belt, thus when expansion plate 1 stretches out 8 one end of rack
When, the belt 10 of 2 top of escape groove will not be shaken because hanging.
Motor 7, set on the rear side of rack 8, motor 7 is equipped with output shaft；Motor 7 can use servo motor.
Driving wheel group includes driving wheel 16, the first driving wheel 11, the second driving wheel 12, third driving wheel 13 and the 4th transmission
Wheel 17, driving wheel 16 is mounted on the side of rack 8, and is fixedly connected with the output shaft of motor 7, and the first driving wheel 11, which is mounted on, to be stretched
The one end in 1 outside of contracting plate, the second driving wheel 12 are mounted on the linking arm 20 on 1 bottom of expansion plate far from 11 one end of the first driving wheel
On, third driving wheel 13 is located at the downside of the second driving wheel 12, and is mounted in rack 8, and the 4th driving wheel 17 is mounted on rack 1
The upper surface of far from the first driving wheel 11 one end.
The side of driving wheel 16 passes through belt 10 and the 4th driving wheel 17, the first driving wheel 11, the second driving wheel 12 and the
The side of three driving wheels 13 is drivingly connected, and motor 7 passes through driving wheel 16, the first driving wheel 11, the second driving wheel 12, third transmission
Wheel 13 and the 4th driving wheel 17 make belt 10 make transmission movement in the upper surface of rack 8, drive expansion plate 1 to stretch out when cylinder 9 is flexible
Or when being retracted one end of rack 8, the second driving wheel 12 can be moved together with expansion plate 1, so that belt 10 is driven to move together,
So that belt 10 is in tensioning state always.
The 5th driving wheel 19 being mounted in rack 8, the 5th transmission are additionally provided between driving wheel 16 and third driving wheel 13
The side of wheel 19 is sequentially connected with driving wheel 16 and third driving wheel 13 respectively by belt 10；Driving wheel 16 and the 4th driving wheel
Be additionally provided with the 6th driving wheel 18 being mounted in rack 8 between 17, the side of the 6th driving wheel 18 by belt 10 respectively with master
Driving wheel 16 and the transmission connection of the 4th driving wheel 17.The 5th driving wheel 19 and the 6th driving wheel 18, which is arranged, can increase driving wheel 16
Cornerite increases its frictional force (driving force) with belt 10.
One section of belt 10 between the first driving wheel 11 and the 4th driving wheel 17 can make cross in the upper surface of rack 8
To movement, can be used for transmitting silicon wafer.
Driving wheel group shares two groups, is separately positioned on the two sides of rack 8.
It should be understood that the belt 10 in Fig. 2 only depicts one, another does not have in order to draw and indicate conveniently
It draws, is hidden.
Stretching structure of the invention, when in use, motor can make belt in the upper of rack by driving driving wheel rotation
Transmission movement is made in face, and cylinder assembly can drive one end of the extended or retracted rack of expansion plate by the flexible of its telescopic rod.
Expansion plate is docked with piece basket, and silicon wafer is moved in the upper surface of belt, while being carried basket lifting assembly and (this being not shown in the figure
Structure) up and down motion of support piece basket, to realize the handling of silicon wafer.In piece basket cargo handling process, need to put in expansion plate into piece basket
Silicon wafer could be sent into piece basket in this way or produce piece basket by inside；When piece basket handling piece is completed, carrying basket assembly needs will be on piece basket
It rises or drops to designated position, then transport piece basket, in this course of work, expansion plate must be retracted, and avoid interference with collision.
There are two types of working conditions for stretching structure tool of the invention: stretching out state and retracted mode.The structure is driven by motor
Driving wheel, and then drive belt movement.Silicon wafer is placed in belt upper surface, realizes silicon wafer by the stiction between belt
Transmission.On the other hand, expansion plate is connected by cylinder, and by two line slide rail installed in parallel guiding, by controlling cylinder
To realize the flexible of expansion plate.The structure has following feature: 1. entire mechanism only needs one section of belt, reduces installation and debugging
Difficulty, avoid turn the stage to silicon wafer cause belt print influence；2. it is at low cost by a motor driven, while can guarantee skin
Band travelling speed is synchronous, avoids the influence that the speed difference between multistage belt causes belt to print silicon wafer；3. use and cooperation
Structure guarantees also have backing plate to support belt under expansion plate stretching state, reduces belt shake, to reduce the belt print of silicon wafer.
The purpose of the present invention is realizing transmission of the silicon wafer between piece basket and graphite boat, stretching structure provided by the invention,
Using integral type, silicon wafer may be implemented and moved on a belt always in entire transmission process, reduce group section,
Very important effect is printed on to the belt for improving silicon wafer.Through practical proof, after graphite boat inserted sheet machine equipment uses this structure,
Disqualification rate caused by silicon wafer is printed because of belt is reduced to 0.2% by 4%.In addition, silicon of the structure also portable to other equipment
On piece transmission structure or other similar transmission structure.
Above embodiments and attached drawing are only used to illustrate the technical scheme of the present invention, and are not constituted a limitation of the present invention, and are answered
When explanation, those of ordinary skill in the art can modify to technical solution documented by previous embodiment or right
Part of or all technical features are equivalently replaced, and these are modified or replaceed should be included in claims of the present invention
In the range of protection.
Claims (10)
1. a kind of stretching structure for graphite boat plug-in sheet machine chip transmission line, including rack (8), are arranged on framework soleplate
Line slide rail (15) and the expansion plate (1) being mounted thereon, further include driving wheel group, the motor being drivingly connected with driving wheel group
(7) and belt (10), it is characterised in that: the motor (7) passes belt (10) in the upper surface of rack (8) by driving wheel group
Transport dynamic, the expansion plate (1) is stretched out with line slide rail (15) guiding by the flexible drive expansion plate (1) of telescopic cylinder (9)
Or one end of the retraction rack (8), when extended or retracted rack (8) of the expansion plate (1), the belt (10) is logical
Crossing the driving wheel group makes it be in tensioning state always.
2. stretching structure according to claim 1, it is characterised in that: the driving wheel group includes driving wheel (16), first
Driving wheel (11), the second driving wheel (12), third driving wheel (13) and the 4th driving wheel (17), the driving wheel (16) are mounted on
The side of rack (8), and be sequentially connected with the output shaft of the motor (7), first driving wheel (11) is mounted on described stretch
One end on the outside of contracting plate (1), second driving wheel (12) are mounted on expansion plate (1) bottom far from the first driving wheel (11)
One end, the third driving wheel (13) are located at the downside of the second driving wheel (12), and are mounted on rack (8), and the described 4th passes
Driving wheel (17) is mounted on the one end of the upper surface of described rack (8) far from the first driving wheel (11).
3. stretching structure according to claim 2, it is characterised in that: the driving wheel (16) by the belt (10) with
4th driving wheel (17), the first driving wheel (11), the second driving wheel (12) and third driving wheel (13) transmission connection, it is described
Motor (7) passes through driving wheel (16), the first driving wheel (11), the second driving wheel (12), third driving wheel (13) and the 4th transmission
Wheel (17) makes belt (10) in the work transmission movement of the upper surface of rack (8), when telescopic cylinder (9) driving expansion plate (1) is stretched out or is contracted
When into one end of the rack (8), second driving wheel (12) can be mobile with the expansion plate (1), to drive belt
(10) it moves together, so that belt (10) is in tensioning state always.
4. stretching structure according to claim 3, it is characterised in that: the driving wheel (16) and third driving wheel (13) it
Between be additionally provided with the 5th driving wheel (19), the 5th driving wheel (19) by belt (10) respectively with driving wheel (16) and third biography
Driving wheel (13) transmission connection；It is additionally provided with the 6th driving wheel (18) between the driving wheel (16) and the 4th driving wheel (17), it is described
6th driving wheel (18) is sequentially connected with driving wheel (16) and the 4th driving wheel (17) respectively by belt (10).
5. stretching structure according to claim 4, it is characterised in that: the driving wheel group shares two groups, is separately positioned on
The two sides of rack (8).
6. stretching structure according to claim 1, it is characterised in that: the two sides of the rack (8) above are respectively provided with one
One end of belt support bar (3), the belt support bar (3) is fixedly mounted on rack (8), described in expansion plate (1) stretching
When rack (8) one end, it can hold belt (10).
7. stretching structure according to claim 6, it is characterised in that: two sides on the expansion plate (1) be equipped with it is described
The escape groove (2) that belt support bar (3) is used cooperatively, the belt support bar (3) is placed in the escape groove (2) stretches back and forth
It moves, escape groove (2) width on the expansion plate (1) is necessarily less than belt (10) width, thus when expansion plate (1) stretches out institute
When stating rack (8) one end, the belt (10) above escape groove (2) will not be shaken because hanging.
8. stretching structure according to claim 1, it is characterised in that: between the expansion plate (1) and telescopic cylinder (9) also
Equipped with slide assemblies, the slide assemblies include linking arm (20), pedestal (4), link block (5) and sliding block (14)；The connection
The top of arm (20) is fixedly connected with the bottom of expansion plate (1), and the bottom end of the linking arm (20) and the top of pedestal (4) are fixed
Connection, the inner side end of the pedestal (14) are fixedly connected with link block (5).
9. stretching structure according to claim 8, it is characterised in that: the two sides of pedestal (4) lower end are equipped with sliding block
(14), the bottom of the sliding block (14) is equipped with the groove cooperated with the line slide rail (15), and the groove is fastened on described straight
Line sliding rail is slidably connected on (15).
10. stretching structure according to claim 9, it is characterised in that: the telescopic cylinder (9) is fixed on rack (8)
Bottom, the telescopic cylinder (9) are equipped with telescopic rod (6), and one end and the link block (5) of the telescopic rod (6) are fixed to be connected
It connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910168925.XA CN109742048A (en) | 2019-03-06 | 2019-03-06 | Stretching structure for graphite boat plug-in sheet machine chip transmission line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910168925.XA CN109742048A (en) | 2019-03-06 | 2019-03-06 | Stretching structure for graphite boat plug-in sheet machine chip transmission line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109742048A true CN109742048A (en) | 2019-05-10 |
Family
ID=66369656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910168925.XA Pending CN109742048A (en) | 2019-03-06 | 2019-03-06 | Stretching structure for graphite boat plug-in sheet machine chip transmission line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109742048A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110104383A (en) * | 2019-06-13 | 2019-08-09 | 无锡威孚精密机械制造有限责任公司 | Extensible belt conveyor structure |
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| CN108438728A (en) * | 2018-05-13 | 2018-08-24 | 东莞晟能自动化设备有限公司 | A kind of flexible transmission belt mechanism |
| CN209401603U (en) * | 2019-03-06 | 2019-09-17 | 深圳市捷佳伟创新能源装备股份有限公司 | Stretching structure for graphite boat plug-in sheet machine chip transmission line |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202575246U (en) * | 2012-04-28 | 2012-12-05 | 库特勒自动化系统(苏州)有限公司 | Telescopic transmission mechanism for solar battery silicon slice |
| CN204713910U (en) * | 2015-06-29 | 2015-10-21 | 苏州隆士丹自动化技术有限公司 | A kind of telescopic belt line |
| CN205050814U (en) * | 2015-07-20 | 2016-02-24 | 宁波精达成形装备股份有限公司 | Silicon chip feeding and discharging device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110104383A (en) * | 2019-06-13 | 2019-08-09 | 无锡威孚精密机械制造有限责任公司 | Extensible belt conveyor structure |
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