CN109724635B - 编码器标尺、编码器标尺的制造方法以及编码器 - Google Patents

编码器标尺、编码器标尺的制造方法以及编码器 Download PDF

Info

Publication number
CN109724635B
CN109724635B CN201811264212.5A CN201811264212A CN109724635B CN 109724635 B CN109724635 B CN 109724635B CN 201811264212 A CN201811264212 A CN 201811264212A CN 109724635 B CN109724635 B CN 109724635B
Authority
CN
China
Prior art keywords
encoder scale
region
encoder
base material
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201811264212.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN109724635A (zh
Inventor
小西晃雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN109724635A publication Critical patent/CN109724635A/zh
Application granted granted Critical
Publication of CN109724635B publication Critical patent/CN109724635B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35338—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using other arrangements than interferometer arrangements
    • G01D5/35354—Sensor working in reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
CN201811264212.5A 2017-10-30 2018-10-26 编码器标尺、编码器标尺的制造方法以及编码器 Active CN109724635B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-209385 2017-10-30
JP2017209385A JP6958237B2 (ja) 2017-10-30 2017-10-30 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Publications (2)

Publication Number Publication Date
CN109724635A CN109724635A (zh) 2019-05-07
CN109724635B true CN109724635B (zh) 2022-04-15

Family

ID=66242839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811264212.5A Active CN109724635B (zh) 2017-10-30 2018-10-26 编码器标尺、编码器标尺的制造方法以及编码器

Country Status (3)

Country Link
US (1) US10955265B2 (https=)
JP (1) JP6958237B2 (https=)
CN (1) CN109724635B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3399284B1 (de) * 2017-05-03 2019-07-10 Dr. Johannes Heidenhain GmbH Sensoreinheit zur positionsmessung
JP7574845B2 (ja) * 2020-03-31 2024-10-29 大日本印刷株式会社 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP7565179B2 (ja) * 2020-09-14 2024-10-10 株式会社ミツトヨ スケール
WO2022097399A1 (ja) * 2020-11-06 2022-05-12 パナソニックＩｐマネジメント株式会社 エンコーダ
WO2023035476A1 (zh) * 2021-09-09 2023-03-16 深圳市汇顶科技股份有限公司 光学编码器及电子设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211202A (ja) * 1990-03-19 1992-08-03 Canon Inc 反射型回折格子および該回折格子を用いた装置
US5916735A (en) * 1996-11-21 1999-06-29 Matsushita Electric Industrial Co., Ltd. Method for manufacturing fine pattern
DE19937023A1 (de) * 1999-08-05 2001-02-08 Heidenhain Gmbh Dr Johannes Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
US20040175843A1 (en) * 2003-03-04 2004-09-09 Roitman Daniel B. Near-field and far-field encoding and shaping of microbeads for bioassays
CN102980602B (zh) * 2007-09-05 2016-07-06 株式会社尼康 光学编码器用反射板及其制造方法、以及光学编码器
JP5562152B2 (ja) * 2010-07-12 2014-07-30 Ｄｍｇ森精機株式会社 回折格子
KR101856231B1 (ko) * 2011-12-19 2018-05-10 엘지이노텍 주식회사 나노패턴을 구비한 투명기판 및 그 제조방법
JP5420715B2 (ja) * 2012-05-28 2014-02-19 オリンパス株式会社 反射型光学式エンコーダー
JP6079122B2 (ja) * 2012-10-12 2017-02-15 日立金属株式会社 光基板、光基板の製造方法、及び光モジュール構造
JP6253929B2 (ja) * 2013-09-11 2017-12-27 株式会社オプトニクス精密 反射型エンコーダ装置

Also Published As

Publication number Publication date
JP2019082376A (ja) 2019-05-30
US10955265B2 (en) 2021-03-23
CN109724635A (zh) 2019-05-07
JP6958237B2 (ja) 2021-11-02
US20190128706A1 (en) 2019-05-02

Similar Documents

Publication Publication Date Title
CN109724635B (zh) 编码器标尺、编码器标尺的制造方法以及编码器
JP4408351B2 (ja) アライメント装置
JP5864929B2 (ja) インプリント装置および物品の製造方法
JP2018191437A (ja) 圧電駆動装置、電子部品搬送装置、ロボット、プロジェクターおよびプリンター
CN108801303B (zh) 编码器标尺及其制造方法、编码器、机器人以及打印机
JP4803703B2 (ja) 半導体ウエハの位置決定方法およびこれを用いた装置
KR20250165254A (ko) 반송 장치, 평탄화 장치 및 물품 제조 방법
JP2019095316A (ja) エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、プリンターおよびプロジェクター
US10958193B2 (en) Piezoelectric driving device, electronic-component-transporting device, robot, projector, and printer
JP2019032539A (ja) パターン形成装置
JP2019146364A (ja) 圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2009121920A (ja) 透明基板の位置測定装置、該位置測定装置を備える露光装置及び基板製造方法並びにプリアライメント装置
JP6114861B2 (ja) インプリント装置、インプリント方法および物品製造方法
JP6748428B2 (ja) リソグラフィ装置、物品の製造方法、ステージ装置及び計測装置
JP6413784B2 (ja) 基板処理装置及びデバイス製造方法
US20260115978A1 (en) Conveyance apparatus, planarization apparatus, and article manufacturing method
US20190128707A1 (en) Optical Scale, Encoder, Robot, Electronic-Component Conveying Apparatus, Printer, And Projector
TWI898453B (zh) 貼合基板之位置偏移量測定裝置及其方法以及半導體製造裝置
US12409558B2 (en) Conveyance apparatus, substrate processing apparatus, conveyance method, and article manufacturing method
JP2019068545A (ja) 圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2001127140A (ja) 基板位置決め装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant