CN109586609B - 振动波致动器、成像装置和使用振动波致动器的台装置 - Google Patents
振动波致动器、成像装置和使用振动波致动器的台装置 Download PDFInfo
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- CN109586609B CN109586609B CN201811106848.7A CN201811106848A CN109586609B CN 109586609 B CN109586609 B CN 109586609B CN 201811106848 A CN201811106848 A CN 201811106848A CN 109586609 B CN109586609 B CN 109586609B
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
- G01R33/072—Constructional adaptation of the sensor to specific applications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0053—Driving means for the movement of one or more optical element
- G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Adjustment Of Camera Lenses (AREA)
- Hall/Mr Elements (AREA)
- Lens Barrels (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-192058 | 2017-09-29 | ||
| JP2017192058 | 2017-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109586609A CN109586609A (zh) | 2019-04-05 |
| CN109586609B true CN109586609B (zh) | 2020-06-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811106848.7A Active CN109586609B (zh) | 2017-09-29 | 2018-09-21 | 振动波致动器、成像装置和使用振动波致动器的台装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10978966B2 (https=) |
| EP (1) | EP3462595B1 (https=) |
| JP (1) | JP7321688B2 (https=) |
| CN (1) | CN109586609B (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10969269B1 (en) * | 2018-10-24 | 2021-04-06 | National Technology & Engineering Solutions Of Sandia, Llc | Remote vibration sensing through opaque media using permanent magnets |
| JP7313909B2 (ja) * | 2019-05-30 | 2023-07-25 | キヤノン株式会社 | 振動波モータおよび電子機器。 |
| JP7362366B2 (ja) * | 2019-08-30 | 2023-10-17 | キヤノン株式会社 | 振動型アクチュエータ、光学機器および電子機器 |
| KR20230159569A (ko) * | 2021-03-29 | 2023-11-21 | 가부시키가이샤 니콘 | 촬상 장치, 및 촬상 시스템 |
| WO2022214084A1 (zh) * | 2021-04-09 | 2022-10-13 | 宁波舜宇光电信息有限公司 | 潜望式摄像模组和可变焦摄像模组 |
| CN114123852B (zh) * | 2022-01-25 | 2022-05-13 | 上海隐冠半导体技术有限公司 | 一种微动台及运动装置 |
| JP2024090648A (ja) * | 2022-12-23 | 2024-07-04 | キヤノン株式会社 | 振動型アクチュエータ、レンズ鏡筒、撮像装置およびステージ装置 |
| JP2025114981A (ja) * | 2024-01-25 | 2025-08-06 | キヤノン株式会社 | 振動型アクチュエータ、光学機器、及び、電子機器 |
| CN118826535B (zh) * | 2024-08-23 | 2025-01-03 | 立讯智造科技(常熟)有限公司 | 压电致动器 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001069772A (ja) | 1999-08-25 | 2001-03-16 | Minolta Co Ltd | 弾性表面波モータ |
| JP4881064B2 (ja) | 2006-05-18 | 2012-02-22 | キヤノン株式会社 | 振動型駆動装置 |
| JP5006725B2 (ja) | 2007-07-20 | 2012-08-22 | オリンパス株式会社 | 微動機構及びその微動機構を備えた顕微鏡装置 |
| KR20110094464A (ko) * | 2010-02-16 | 2011-08-24 | 삼성전자주식회사 | 압전 액추에이터 조립체 및 이를 구비하는 광학 시스템 |
| JP5627258B2 (ja) * | 2010-03-23 | 2014-11-19 | キヤノン株式会社 | 振動型アクチュエータおよびその製造方法 |
| JP5780818B2 (ja) * | 2011-04-21 | 2015-09-16 | オリンパス株式会社 | 駆動装置およびそれを用いた画像装置 |
| JP6136349B2 (ja) * | 2013-02-22 | 2017-05-31 | セイコーエプソン株式会社 | 電子デバイス、電子機器及び移動体 |
| JP6481242B2 (ja) * | 2014-10-29 | 2019-03-13 | 新シコー科技株式会社 | レンズ駆動装置、カメラ装置及び電子機器 |
| JP6639244B2 (ja) | 2016-01-15 | 2020-02-05 | キヤノン株式会社 | 振動型アクチュエータ及び電子機器 |
| WO2018161016A1 (en) * | 2017-03-02 | 2018-09-07 | Discovery Technology International, Inc. | Linear piezoelectric actuator on rail system |
-
2018
- 2018-09-18 JP JP2018174102A patent/JP7321688B2/ja active Active
- 2018-09-21 CN CN201811106848.7A patent/CN109586609B/zh active Active
- 2018-09-25 US US16/141,192 patent/US10978966B2/en active Active
- 2018-09-25 EP EP18196662.3A patent/EP3462595B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10978966B2 (en) | 2021-04-13 |
| JP2019068725A (ja) | 2019-04-25 |
| EP3462595A1 (en) | 2019-04-03 |
| CN109586609A (zh) | 2019-04-05 |
| JP7321688B2 (ja) | 2023-08-07 |
| EP3462595B1 (en) | 2020-12-02 |
| US20190103822A1 (en) | 2019-04-04 |
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