CN109545729B - 一种半导体硅片干法自动插篮设备 - Google Patents
一种半导体硅片干法自动插篮设备 Download PDFInfo
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- CN109545729B CN109545729B CN201910015435.6A CN201910015435A CN109545729B CN 109545729 B CN109545729 B CN 109545729B CN 201910015435 A CN201910015435 A CN 201910015435A CN 109545729 B CN109545729 B CN 109545729B
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- silicon wafer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 109
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 109
- 239000010703 silicon Substances 0.000 title claims abstract description 109
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 238000001035 drying Methods 0.000 title claims description 4
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000007306 turnover Effects 0.000 claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 88
- 238000007664 blowing Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 abstract description 2
- 239000012634 fragment Substances 0.000 abstract description 2
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910015435.6A CN109545729B (zh) | 2019-01-08 | 2019-01-08 | 一种半导体硅片干法自动插篮设备 |
Applications Claiming Priority (1)
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CN201910015435.6A CN109545729B (zh) | 2019-01-08 | 2019-01-08 | 一种半导体硅片干法自动插篮设备 |
Publications (2)
Publication Number | Publication Date |
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CN109545729A CN109545729A (zh) | 2019-03-29 |
CN109545729B true CN109545729B (zh) | 2023-04-14 |
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CN201910015435.6A Active CN109545729B (zh) | 2019-01-08 | 2019-01-08 | 一种半导体硅片干法自动插篮设备 |
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CN (1) | CN109545729B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111508860B (zh) * | 2019-09-12 | 2023-03-14 | 大连佳峰自动化股份有限公司 | 一种半导体封装贴片机复合上料装置 |
CN111627851B (zh) * | 2020-07-29 | 2020-10-16 | 山东元旭光电股份有限公司 | 一种上片机用晶圆自动上料装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4947784A (en) * | 1987-12-07 | 1990-08-14 | Tel Sagami Limited | Apparatus and method for transferring wafers between a cassette and a boat |
JP2005033119A (ja) * | 2003-07-11 | 2005-02-03 | Nitto Denko Corp | 半導体ウエハ搬送方法および搬送装置 |
CN102760676A (zh) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | 一种硅片装卸篮装置 |
WO2016141650A1 (zh) * | 2015-03-10 | 2016-09-15 | 北京七星华创电子股份有限公司 | 一种盘状物夹持装置 |
CN205817898U (zh) * | 2016-05-27 | 2016-12-21 | 昆山福亿特精密自动化设备有限公司 | 一种三爪抓取机构 |
CN106876527A (zh) * | 2017-03-30 | 2017-06-20 | 江西比太科技有限公司 | 集合式干法制绒装置及生产线 |
CN208307817U (zh) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | 一种硅片篮翻转装置 |
CN208315513U (zh) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | 一种双头进料自动上料机 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6817823B2 (en) * | 2001-09-11 | 2004-11-16 | Marian Corporation | Method, device and system for semiconductor wafer transfer |
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2019
- 2019-01-08 CN CN201910015435.6A patent/CN109545729B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4947784A (en) * | 1987-12-07 | 1990-08-14 | Tel Sagami Limited | Apparatus and method for transferring wafers between a cassette and a boat |
JP2005033119A (ja) * | 2003-07-11 | 2005-02-03 | Nitto Denko Corp | 半導体ウエハ搬送方法および搬送装置 |
CN102760676A (zh) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | 一种硅片装卸篮装置 |
WO2016141650A1 (zh) * | 2015-03-10 | 2016-09-15 | 北京七星华创电子股份有限公司 | 一种盘状物夹持装置 |
CN205817898U (zh) * | 2016-05-27 | 2016-12-21 | 昆山福亿特精密自动化设备有限公司 | 一种三爪抓取机构 |
CN106876527A (zh) * | 2017-03-30 | 2017-06-20 | 江西比太科技有限公司 | 集合式干法制绒装置及生产线 |
CN208307817U (zh) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | 一种硅片篮翻转装置 |
CN208315513U (zh) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | 一种双头进料自动上料机 |
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Effective date of registration: 20240205 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China |
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