CN109514518A - Scribing equipment - Google Patents
Scribing equipment Download PDFInfo
- Publication number
- CN109514518A CN109514518A CN201711452569.1A CN201711452569A CN109514518A CN 109514518 A CN109514518 A CN 109514518A CN 201711452569 A CN201711452569 A CN 201711452569A CN 109514518 A CN109514518 A CN 109514518A
- Authority
- CN
- China
- Prior art keywords
- wheel support
- support sector
- score wheel
- score
- supporting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H7/00—Marking-out or setting-out work
- B25H7/04—Devices, e.g. scribers, for marking
- B25H7/045—Devices, e.g. scribers, for marking characterised by constructional details of the marking elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Abstract
The scribing equipment of the embodiment of the present invention, wherein include: scribing unit comprising scribe head, the scribe head include score wheel support sector supporting element, and the score wheel support sector of score wheel is maintained to be inserted in score wheel support sector supporting element；Score wheel support sector replacement unit holds the score wheel support sector, the score wheel support sector is installed on score wheel support sector supporting element, or the score wheel support sector is separated from score wheel support sector supporting element；And displacement measuring unit, when the score wheel support sector is mounted on score wheel support sector supporting element by score wheel support sector replacement unit, displacement of the measurement relative to the score wheel support sector supporting element of the score wheel support sector.
Description
Technical field
The present invention relates to a kind of scribing equipments, for forming scribing line on substrate.
Background technique
It is commonly used for the liquid crystal display panel, organic EL display panel, inorganic EL of flat-panel monitor
Display pannel, transmission projection substrate, reflective projection substrate etc. use unit glass panel hereinafter referred to as " unit substrate ", described
Unit glass panel is obtained by the way that such as glass brittleness mother glass panel hereinafter referred to as " substrate " to be cut to predetermine sizes
?.
The process of cutting substrate includes: dicing processes and sliver process, and the dicing processes are along desire cutting substrate
Preset lines, which are pressed and moved by the score wheel as made of the materials such as diamond, forms scribing line, and the sliver process be by along
Scribing line pressing substrate carrys out cutting substrate with obtaining unit substrate.
In dicing processes, on the basis of the transfer direction of substrate, in the front side end and rear side of supporting substrate
In the state of portion, field between the front side end and rear side end of substrate, score wheel exists substrate while moving
Upper formation scribing line.
On the other hand, during forming multiple scribing line on multiple substrates, since score wheel generates abrasion, in order to
Scribing line formation process can be smoothly performed, it is necessary to the score wheel being worn is replaced with new score wheel.
However, there are the following problems: previous operator is manual replacement score wheel, therefore replaces score wheel and need flower very
For a long time, and after replacement score wheel, it is also necessary to adjust other processes of the position of score wheel.
[existing technical literature]
[patent document]
KR published patent 10-2007-0070824 2007.07.04
Summary of the invention
The present invention is proposed to solve above-mentioned prior art problem, and the purpose of the present invention is to provide a kind of scribings
Equipment can replace score wheel automatically, thus, it is possible to the time needed for reducing dicing processes and can be improved operator just
Benefit.
In order to achieve the above objectives, the scribing equipment of the embodiment of the present invention, wherein include:
Scribing unit comprising scribe head, the scribe head include score wheel support sector supporting element, maintain drawing for score wheel
Pian Lun support sector is inserted in score wheel support sector supporting element；
Score wheel support sector replacement unit holds the score wheel support sector, the score wheel support sector is installed on
Score wheel support sector supporting element, or the score wheel support sector is separated from score wheel support sector supporting element；With
And
Measuring unit is conjugated, the score wheel support sector is mounted on described draw in score wheel support sector replacement unit
When Pian Lun support sector supporting element, change of the measurement relative to the score wheel support sector supporting element of the score wheel support sector
Position.
The scribing equipment of the embodiment of the present invention, wherein further comprise:
Control unit, the displacement that judgement passes through the score wheel support sector supporting element of the displacement measuring unit measurement
Whether beyond the range for having set displacement.
The scribing equipment of the embodiment of the present invention, wherein include:
Scribing unit comprising scribe head, the scribe head include score wheel support sector supporting element, maintain drawing for score wheel
Pian Lun support sector is inserted in score wheel support sector supporting element；
Score wheel support sector replacement unit holds the score wheel support sector, the score wheel support sector is installed on
Score wheel support sector supporting element, or the score wheel support sector is separated from score wheel support sector supporting element；With
And
The score wheel support sector is installed on described draw in score wheel support sector replacement unit by loading determination unit
When Pian Lun support sector supporting element, the loading that the score wheel support sector is applied to score wheel support sector supporting element is measured.
The scribing equipment of the embodiment of the present invention, wherein further comprise:
Control unit, judgement are applied to score wheel support sector supporting element by what the loading determination unit measured
Loading whether exceed the range for having set loading.
The scribing equipment of the embodiment of the present invention, wherein
Score wheel support sector replacement unit includes that score wheel support sector accommodates module, and the score wheel support sector accommodates
Module has multiple score wheel support sectors container in a circumferential direction, and the score wheel support sector accommodates module with the multiple
A mode against score wheel support sector supporting element in score wheel support sector container rotates.
The scribing equipment of the embodiment of the present invention, wherein the score wheel support sector accommodates module and includes:
First score wheel support sector accommodates component, corresponds to a scribing line in mutually oppositely disposed a pair of of scribe head
Head, and there is multiple score wheel support sectors container；And
Second score wheel support sector accommodates component, corresponds to another scribe head, and have multiple score wheel support sectors
Container.
The scribing equipment of the embodiment of the present invention, wherein
Score wheel support sector replacement unit further comprises rotary module, and the rotary module is arranged described first
Score wheel support sector accommodates between component and the second score wheel support sector receiving component, makes the first score wheel support sector receiving portion
Part and the second score wheel support sector receiving component carry out relative rotation.
The scribing equipment of the embodiment of the present invention, wherein the rotary module makes first score wheel support sector receiving portion
Part and the second score wheel support sector receiving component are in the same direction or different direction is rotated.
The scribing equipment of the embodiment of the present invention, wherein the rotary module makes first score wheel support sector receiving portion
Part and the second score wheel support sector receiving component are rotated with mutually different angle.
The scribing equipment of the embodiment of the present invention, wherein score wheel support sector replacement unit further comprises locking mould
Block, the lock modules are set to score wheel support sector container, and fix and be inserted in the score wheel support sector receiving
The score wheel support sector of slot.
The scribing equipment of the embodiment of the present invention, wherein the displacement measuring unit includes reference component and detection part, institute
State the frame for being used to carry the scribe head that one of reference component and the detection part are set to the scribing unit
On, the reference component and detection part is wherein another is set on score wheel support sector supporting element, thus institute
Detection part is stated against the reference component, for detecting relative position of the detection part about the reference component.
The scribing equipment of the embodiment of the present invention, wherein the reference component is configured to the scale with determined graduation mark；And
And the detection part is configured to shoot the camera of the scale.
The scribing equipment of the embodiment of the present invention, wherein the reference component is configured to according to position difference reflection angle not
Same reflecting surface；And the detection part includes: the luminescence sensor to the reflection surface launching light；With receive from described anti-
Penetrate face reflection light by optical sensor.
The scribing equipment of the embodiment of the present invention, wherein the loading determination unit includes load sensor, and the loading passes
Sensor is set to the part that score wheel support sector supporting element is connected to the scribe head.
Invention effect
The scribing equipment of the embodiment of the present invention is due to having the score wheel support sector that can replace score wheel support sector automatically
Replacement unit, therefore score wheel can be promptly replaced, the time required to reducing scribing process, and improve the convenience of operator.
Detailed description of the invention
Fig. 1 is the top view that scribing equipment described in the embodiment of the present invention is outlined.
Fig. 2 is the side view that scribing equipment described in the embodiment of the present invention is outlined.
Fig. 3 is the figure that a part of scribing equipment described in the embodiment of the present invention is outlined.
Fig. 4 is a part that the score wheel support sector replacement unit of scribing equipment described in the embodiment of the present invention is outlined
Figure.
Fig. 5 to Figure 11 is the figure that the movement of scribing equipment described in the embodiment of the present invention is outlined.
Figure 12 to Figure 13 is the figure that the mian part of scribing equipment described in another embodiment of the present invention is outlined.
Figure 14 and Figure 15 is the figure that the mian part of scribing equipment described in further embodiment of this invention is outlined.
Wherein, the reference numerals are as follows:
10: loading stage 20: scribing unit
30: base plate transfer device 40: score wheel support sector replacement unit
44: score wheel support sector accommodates module 45: rotary module
46: lock modules 47: lifting module
48: supporting table 49: guide rail
Specific embodiment
Hereinafter, being illustrated referring to scribing equipment of the attached drawing to the embodiment of the present invention.
Hereinafter, the direction that definition transfer will be performed the substrate S of scribing process is Y direction, definition is with transfer substrate S's
Y direction vertical direction in direction is X-direction.Also, defining the direction vertical with the X-Y plane of substrate S is placed is Z axis side
To.
As shown in Figure 1 and Figure 2, scribing equipment described in the embodiment of the present invention includes: loading stage 10；Scribing unit 20,
Including scribe head 23, the scribe head 23 includes score wheel support sector supporting element 26, score wheel support sector supporting element 26
Support the score wheel support sector 22 for maintaining score wheel 21；Base plate transfer device 30 is used to hold substrate S and moves substrate S
It send to scribing unit 20；And score wheel support sector replacement unit 40, it is used to replace score wheel support sector 22.
Loading stage includes that the loading bench 11 and relieving platform 12 of determining (predetermined) interval configuration are separated along Y direction.Add
Microscope carrier 11 provides the field loaded to scribing equipment substrate S, and relieving platform 12, which is provided from scribing equipment unloading, passes through dicing processes shape
At the field for the substrate S for having scribing line.
Loading bench 11 and relieving platform 12 can respectively include multiple conveyer belts 13.Multiple conveyer belts 13 can be in X-axis side
To being provided spaced.Each conveyer belt 13 is supported by multiple rollers 14, at least one roller in multiple rollers 14 is to provide and makes to transmit
The driven roller of driving force with 13 rotations.
As shown in FIG. 2 and 3, scribing unit 20 includes: a supporting table 24, is used to install scribe head 23；And frame
Frame 25 is configured to keep a supporting table 24 mobile to X-direction.
Multiple scribe heads 23 are spaced at intervals in the Z-axis direction and are arranged opposite each other.For example, passing through a pair of of scribing line
First 23 is spaced at intervals in the Z-axis direction and be arranged opposite each other, and a pair of of score wheel 21 can be on the one side of substrate S
And it is configured opposite each other below another side.A pair of of score wheel 21 is in the one side of pressurization substrate S and the shape of another side as a result,
Under state, the relative movement by the substrate S relative to a pair of of scribe head 23 and/or a pair of of scribe head relative to substrate S
23 relative movement can be respectively formed scribing line in the one side and another side of substrate S.
Scribe head 23 is configured to mobile to Z-direction relative to head supporting table 24.In scribe head 23 and head branch
It supports between platform 24, can be set through the actuator of pneumatics or hydraulic, the straight line to be worked with electromagnetic interaction
Linear moving mechanism as motor or ball screw.Scribe head 23 can be by linear moving mechanism relative to head as a result,
Supporting table 24 is mobile to Z-direction, and the score wheel support sector 22 for being scribed first 23 support as a result, also can be mobile to Z-direction.
Between head supporting table 24 and frame 25, it can be set through the actuator of pneumatics or hydraulic, use electromagnetism
Interaction and work linear motor or ball screw as linear moving mechanism.Head supporting table 24 passes through straight as a result,
Line mobile mechanism can move along frame 25 to X-direction, and scribe head 23 can be mobile to X-direction as a result,.
For example, the multiple scribe heads 23 for separating predetermined interval along the x axis can be configured on frame 25.
The score wheel support sector supporting element 26 of support score wheel support sector 22 can be installed on scribe head 23.Score wheel is supported
Portion's supporting element 26 can be inserted to scribe head 23.Score wheel support sector supporting element 26 can be parallel to centered on the axis of Z-direction
It is rotatably installed in scribe head 23.For this purpose, score wheel support sector supporting element 26, which is connected on the part of scribe head 23, to pacify
Equipped with bearing (not shown).
In this way, pressing base in score wheel 21 because score wheel support sector supporting element 26 is rotatably mounted in scribe head 23
In the state of plate S, if scribe head 23 and/or substrate S are moved, score wheel support sector supporting element 26 rotates, so as to
The direction of the sword of score wheel 21 is consistent with the moving direction of score wheel 21.The rotation of score wheel support sector supporting element 26 in this way
Turn, can determine the direction of score wheel 21 and score wheel support sector 22.
It could be formed with the insertion groove 261 being inserted into for score wheel support sector 22 on score wheel support sector supporting element 26.Insertion
Magnetite 262 is can be set in slot 261, the part for being inserted in insertion groove 261 of score wheel support sector 22 can be by can be with magnetic
The material of 262 phase of stone attachment is constituted.As a result, when score wheel support sector 22 is inserted in insertion groove 261, score wheel support sector 22 adheres to
In magnetite 262, score wheel support sector 22 is thus fixed.It, can be in addition, by pulling score wheel support sector 22 from magnetite 262
Score wheel support sector 22 is easily separated from insertion groove 261.
Base plate transfer device 30 may include: the holding unit 31 for holding substrate S, the support rod for supporting holding unit 31
32 and it is connected to the both ends of support rod 32 and along the extended guide rail 33 of Y direction.The both ends of support rod 32 and guide rail 33 it
Between, the linear motor to work by the actuator of pneumatics or hydraulic, with electromagnetic interaction or rolling can be set
Linear moving mechanism as pearl screw rod.In the state that substrate S is held by holding unit 31 as a result, pass through linear moving mechanism
It is transferred to Y direction.
Support rod 32 can have multiple holding units 31.At this point, multiple holding units 31 can hold substrate S together.
Holding unit 31 can be movably arranged at support rod 32 along X-direction.For example, holding unit 31 and support rod 32 it
Between, the linear motor to work by the actuator of pneumatics or hydraulic, with electromagnetic interaction or rolling can be set
Linear moving mechanism as pearl screw rod.As a result, holding unit 31 can by linear moving mechanism along support rod 32 to X-axis
Direction is mobile.
As shown in Fig. 2, holding unit 31 may include that can hold a pair of of substrate S to hold component 311.Such as it is general
Fixture is such, and a pair holds component 311 can be to adjoin each other or be located remotely from each other mobile by oil pressure or pneumatics.One
To hold component 311 adjoin each other it is mobile, physically pressurization substrate S can also be with being located remotely from each other mobile to maintain substrate S,
To release substrate S.
As shown in Figure 4 and 5, score wheel support sector replacement unit 40 may include: that score wheel support sector accommodates module
44, the score wheel support sector 22 that will be replaced or replace can be accommodated；Rotary module 45 makes score wheel support sector
Module 44 is accommodated to pivot about with the axis for being parallel to Z-direction；Lock modules 46 are set to score wheel support sector appearance
It receives module 44, the score wheel support sector 22 for being contained in score wheel support sector and accommodating module 44 is selectively latched or is solved
Lock；Module 47 is gone up and down, so that score wheel support sector is accommodated module 44 mobile to Z-direction；Supporting table 48, in the X-axis direction can
Enough movably support score wheel support sectors accommodate module 44；And guide rail 49, the both ends of supporting table 48 are connected to, to Y-axis side
To extension.
Score wheel support sector accommodates module 44 to be capable of the score wheel support sector branch of the scribe head 23 of close scribing unit 20
The mode of support member 26 is constituted.Score wheel support sector accommodate module 44 can along on 10 top of loading stage to the extended branch of X-direction
It is mobile to X-direction to support platform 48.For this purpose, being accommodated between module 44 and supporting table 48 in score wheel support sector, it can be set and pass through
It is straight as the actuator of pneumatics or hydraulic, the linear motor or ball screw to be worked with electromagnetic interaction
Line mobile mechanism 481.
Score wheel support sector accommodates module 44 and can be crossed by linear moving mechanism 481 to X-direction is mobile to approach
First 23.It is moved along supporting table 48 to X-direction in addition, score wheel support sector accommodates module 44 by linear moving mechanism 481,
Come be detached from base plate transfer device 30 holding unit 31 movement routine and the substrate S that is transferred by base plate transfer device 30
Transfer path.Thereby, it is possible to prevent, score wheel support sector from accommodating module 44 and base plate transfer device 30 or substrate S occurs to do
It relates to.
Although illustrating and being provided with the example that a score wheel support sector accommodates module 44 in supporting table 48, multiple strokes
Pian Lun support sector accommodates module 44 can also be arranged in supporting table 48 at spaced intervals.Supporting table 48 can be along guide rail 49 to Y
Axis direction is mobile.For example, between supporting table 48 and guide rail 49, can be set by the actuator of pneumatics or hydraulic,
Linear moving mechanism as the linear motor or ball screw that are worked with electromagnetic interaction.Supporting table 48 is logical as a result,
It is mobile to Y direction to cross linear moving mechanism, thus score wheel support sector receiving module 44 can be mobile to Y direction.
Lifting module 47 can by by pneumatics or hydraulic actuator, worked with electromagnetic interaction it is straight
Linear moving mechanism as line motor or ball screw is constituted.
It is mobile to Z-direction by lifting module 47 that score wheel support sector accommodates module 44, and thus, it is possible to by score wheel branch
It holds portion 22 to be separated from score wheel support sector supporting element 26, the score wheel branch of score wheel support sector receiving module 44 will be housed in
It holds portion 22 and is mounted on score wheel support sector supporting element 26.In addition, score wheel support sector accommodates module 44 by going up and down module 47 to Z
Axis direction is mobile, is thus detached from the movement routine of the holding unit 31 of base plate transfer device 30 and the transfer path of substrate S.By
This, can prevent score wheel support sector from accommodating module 44 and interfere with base plate transfer device 30 or substrate S.
On the other hand, scribe head 23 in the Z-axis direction it is mutually isolated and it is mutual configure oppositely, including configure on top
When the second scribe head 23 of lower part, score wheel support sector, which accommodates module 44, can replace installation for first scribe head 23 and configuration
In all score wheel support sectors 22 of the first scribe head 23 and the score wheel support sector supporting element 26 of the second scribe head 23.
For this purpose, it may include first scribing of configuration corresponding to the first scribe head 23 that score wheel support sector, which accommodates module 44,
It takes turns support sector and accommodates component 41, and the second score wheel support sector configured corresponding to the second scribe head 23 accommodates component 42.
First score wheel support sector receiving component 41 and the second score wheel support sector receiving component 42 can be formed as circular plate
Form.In this way, because it includes the first score wheel support sector receiving component 41 and second stroke that score wheel support sector, which accommodates module 44,
Pian Lun support sector accommodates component 42, can sequentially or simultaneously be replaced the first scribe head 23 and the second scribe head 23 rapidly
Score wheel support sector 22 movement.
In addition, rotary module 45, which can be set, accommodates component 41 and the support of the second score wheel in the first score wheel support sector
Portion accommodates between component 42.Rotary module 45 can be connected to lifting module 47 by connecting rod 451.Rotary module 45 can be by
It can be formed to positive and counter-rotating general motor.Rotary module 45 may include the multiple teeth connecting with rotation motor
Wheel and/or ring, thus, it is possible to which various ways support the first score wheel support sector receiving component 41 and the second score wheel
Portion accommodates component 42 and carries out relative rotation.
For example, rotary module 45 can be such that the first score wheel support sector receiving component 41 and the second score wheel support sector receives
Hold component 42 to be rotated to direction same to each other and/or mutually different direction.In addition, rotary module 45 can make
First score wheel support sector accommodates component 41 and the second score wheel support sector receiving component 42 is carried out with mutually different angle
Rotation.For example, the first score wheel support sector receiving component 41 is rotated, score wheel support sector 22 is installed in the first scribe head 23
Or from the first scribe head 23 separate score wheel support sector 22 during, the second score wheel support sector accommodate component 42 can with
The opposite direction in direction of rotation of first score wheel support sector receiving component 41 is rotated, or can with the first score wheel
The angle that the rotation angle of support sector's receiving component 41 is different is rotated.Score wheel is installed in the first scribe head 23 as a result,
Support sector 22 or from the first scribe head 23 separate score wheel support sector 22 during, the second score wheel support sector accommodate component 42
The score wheel support sector 22 for being especially contained in the second score wheel support sector receiving component 42 can not be done with other component
It is rotated with relating to.
In addition, the first score wheel support sector receiving component 41 and the second score wheel support sector receiving component 42 be not with mutually
Same direction or mutually different angle is rotated, and can be separated simultaneously from the first scribe head 23 and the second scribe head 23
Score wheel support sector 22 can also be mounted on the first scribe head 23 and the second scribe head 23 by score wheel support sector 22 simultaneously.
In addition, rotary module 45 can only make the first score wheel support sector receiving component 41 and the second score wheel support sector
Some in receiving component 42 is rotated.For example, installing score wheel support sector 22 on the first scribe head 23 or from the
During one scribe head 23 separates score wheel support sector 22, in the state that the second score wheel support sector receiving component 42 is static
Under, only the first score wheel support sector receiving component 41 is rotated.Score wheel is installed as a result, to support on the first scribe head 23
Portion 22 or from the first scribe head 23 separate score wheel support sector 22 during, the second score wheel support sector receiving component 42 have
It is likely to be at stationary state, the score wheel support sector 22 accommodated in the second score wheel support sector receiving component 42 and week can be prevented
The component parts on side interferes.
First score wheel support sector receiving component 41 and the second score wheel support sector receiving component 42 can respectively include
Multiple score wheel support sectors container 441, multiple score wheel support sectors container 441 is around the rotation center of rotary module 45
Circumferentially it is configured.Score wheel support sector 22 can be inserted in multiple score wheel support sectors container 441.Score wheel branch
Holding portion's container 441 can have shape corresponding with the shape of score wheel support sector 22 of score wheel 21 is equipped with.
Lock modules 46 are arranged in score wheel support sector container 441, to being inserted into score wheel support sector container 441
Score wheel support sector 22 be selectively latched or unlocked.For example, lock modules 46 may include: pressing member 461,
It pressurizes on one side to the score wheel support sector 22 being inserted into score wheel support sector container 441；And for moving
The driving device 462 of pressing member 461.Multiple lock modules 46 can be set in a score wheel support sector container 441.
The uniformly applied pressure in side of multiple pressing member 461 to score wheel support sectors 22, to fix score wheel support sector 22.
As another example, lock modules 46 are arranged in score wheel support sector container 441, can adsorb and be inserted into scribing
Take turns the score wheel support sector 22 of support sector's container 441.As long as being inserted in this way, being capable of fixing in score wheel support sector container 441
The score wheel support sector 22 entered, then the composition of lock modules 46 does not do any restrictions.
Hereinafter, illustrating the movement of scribing equipment referring to Fig. 5 or even Figure 11.
Firstly, as shown in Fig. 2, base plate transfer device 30 holding unit 31 hold substrate S rear row end in the state of,
Support rod 32 is moved along guide rail 33 to Y direction, then substrate S is moved to scribing unit 20.Substrate S is filled by base plate transfer
It sets 30 intermittently to be moved, forms scribing line on substrate S by scribing unit 20.
During forming multiple scribing line on multiple substrate S, score wheel 21 can be worn.As a result, in order to more sleekly into
The process that row forms scribing line, it is necessary to the score wheel 21 of the new replacement abrasion of score wheel 21.The replacement of this score wheel 21 can
To be replaced after formation scribing line on the substrate S of predetermined number, or it is replaced with predetermined time interval.Score wheel 21
Replacement can be carried out by replacement score wheel support sector 22.
As shown in Fig. 5 or even Figure 11, the replacement of score wheel support sector 22 can the score wheel through the embodiment of the present invention
Support sector's replacement unit 40 carries out.Hereinafter, be directed to score wheel support sector 22 replacement process, with configuration on the upside of attached drawing
First scribe head 23 is illustrated in association, but similar process, can also to scribe head 23 of the configuration on the downside of attached drawing into
Row.
Firstly, as shown in figure 5, score wheel support sector receiving module 44 can be from the holding list for being detached from base plate transfer device 30
It is moved to close to the position of scribing unit 20 position in the transfer path of the movement routine and substrate S of member 31.During this,
Score wheel support sector accommodates module 44 and can be moved along supporting table 48 to X-direction by linear moving mechanism 481, with branch
Support platform 48 is moved along guide rail 49 to Y direction, and score wheel support sector accommodates module 44 can be mobile to Y direction, score wheel
Support sector accommodates module 44 can be mobile to Z-direction by lifting module 47.
Shown in Fig. 6, as supporting table 48 is moved along guide rail 49 to Y direction, score wheel support sector accommodates module 44 along Y
Axis direction is mobile towards scribing unit 20.At this point, scribe head 23 rises fixed height, so that score wheel support sector accommodates module
44 provide easy access to the score wheel support sector 22 for being inserted in score wheel support sector supporting element 26.
In addition, as shown in fig. 7, the score wheel support sector container 441 of the first score wheel support sector receiving component 41 is located at
It is inserted in 22 lower section of score wheel support sector of score wheel support sector supporting element 26, then passes through lifting module 47, the first score wheel branch
It holds portion and accommodates component 41 towards the rising of score wheel support sector 22, score wheel support sector 22 is inserted in score wheel support sector receipts as a result,
In tank 441.
At this point, the fixed score wheel support sector 22 being inserted in score wheel support sector container 441 of lock modules 46.
In addition, as shown in figure 8, the receiving decline of component 41 of the first score wheel support sector, is blocked what module 46 was fixed as a result,
Score wheel support sector 22 separates from score wheel support sector supporting element 26.
In addition, as shown in figure 9, the first score wheel support sector receiving component 41 is rotated by rotary module 45, as a result,
The new score wheel support sector 22 for being housed in the first score wheel support sector receiving component 41 in advance is located at the support of score wheel support sector
The lower section of part 26.
In addition, as shown in Figure 10, the first score wheel support sector receiving component 41 rises again, it is housed in the first score wheel branch
The score wheel support sector 22 for holding portion's receiving component 41 is inserted in the insertion groove 261 of score wheel support sector supporting element 26.
At this point, lock modules 46 are unlocked score wheel support sector 22, score wheel support sector 22 is being inserted by setting
The magnetic force of magnetite 262 in slot 261 maintains in insertion groove 261.
In addition, as shown in figure 11, after the first score wheel support sector accommodates the decline of component 41, it is restored to original position, or
Person is moved to replace the score wheel support sector 22 for being mounted on other scribe heads 23.
When there are supporting table 48 multiple score wheel support sectors to accommodate module 44, multiple score wheel support sectors accommodate module 44
In a part can be implemented the first scribe head 23 of replacement score wheel support sector 22 movement, replacement can be implemented in another part
The movement of the score wheel support sector 22 of second scribe head 23.
Scribing equipment described in the embodiment of the present invention has the score wheel support sector that can actively replace score wheel support sector 22
Replacement unit 40 can replace rapidly score wheel 21, the time required to thus shortening dicing processes, improve the convenience of operator.
On the other hand, as shown in Figure 12 and Figure 13, scribe head 23 can have the displacement of the displacement of measurement scribe head 23
Measuring unit 50.Score wheel support sector supporting element 26 is connected to scribe head 23, and displacement measuring unit 50 is configured to measurement and draws
The displacement of Pian Lun support sector supporting element 26.
Here, the change of X-direction and Y direction that the displacement of score wheel support sector supporting element 26 can be horizontally oriented
The displacement of the Z-direction of position and/or vertical (vertical) direction.In the embodiment of the present invention, displacement measuring unit 50 is measured
The composition of the displacement of score wheel support sector supporting element 26 in the Z-axis direction is illustrated.But the present invention is not limited thereto,
The composition that score wheel support sector supporting element 26 is measured in the displacement of Z-direction can also be used as measurement score wheel support sector supporting element 26
The composition of displacement in X-direction and/or Y direction is also suitable for conjugating measuring unit 50.
For example, displacement measuring unit 50 may include: reference component 51, it is set to frame 25；And detection part 52, institute
It states detection part 52 and is set to score wheel support sector supporting element 26, to be used to detect relative to benchmark against reference component 51
The relative position of component 51.As another example, reference component 51 also be can be set in score wheel support sector supporting element 26, test section
Part 52 is set to frame 25.This displacement measuring unit 50 uses the interaction of reference component 51 and detection part 52, to survey
Determine position and the displacement of score wheel support sector supporting element 26.
As an example, reference component 51 is configured to the scale with determined graduation mark, and detection part 52 may be constructed
For the camera for shooting scale.At this point, on the basis of the image for the scale that detection part 52 takes, measurement reference component 51 and inspection
The relative position between component 52 is surveyed, (according to the relative position of measurement) on the basis of the relative position of measurement, measures score wheel
The position of support sector's supporting element 26 and displacement.
As another example, reference component 51 be may be constructed as the reflecting surface different according to position difference reflection angle, detection
Component 52 may include to the luminescence sensor for reflecting surface launching light and receiving from the light of reflective surface by optical sensor.This
When, by measuring the angle of reflection from the light of reflective surface, can measure opposite between reference component 51 and detection part 52
Position can measure position and the displacement of score wheel support sector supporting element 26 on the basis of the relative position of measurement.
In addition, scribing equipment described in the embodiment of the present invention may further include control unit 70, described control unit 70
It is connect with displacement measuring unit 50, judges the displacement of score wheel support sector supporting element 26 whether beyond the range for having set displacement.
Score wheel support sector replacement unit 40 by score wheel support sector 22 be mounted on score wheel support sector supporting element 26 it
Border, displacement measuring unit 50 measure the displacement of score wheel support sector supporting element 26.
Here, 40 normal operation of score wheel support sector replacement unit, score wheel support sector 22 are normally inserted in score wheel branch
When the insertion groove 261 for holding portion's supporting element 26, score wheel support sector supporting element 26 does not occur to conjugate or occur very small
Displacement.
But as shown in figure 13, if score wheel support sector 22 is not normally plugged in score wheel support sector supporting element
It is accommodated in 26 insertion groove 261, the first score wheel support sector receiving component 41 or the second score wheel support sector receiving component 42
Score wheel support sector 22 conflict when the outside of score wheel support sector supporting element 26, such as the first score wheel support sector receiving portion
Part 41 or the second score wheel support sector receiving component 42 a part conflict in the outside of score wheel support sector supporting element 26 that
Sample, is applied with improper external force on score wheel support sector supporting element 26, and score wheel support sector supporting element 26 may be to be more than
The distance of setting range is conjugated.
Here, the conflict of score wheel support sector 22 when the outside of score wheel support sector supporting element 26, due to its impact, is drawn
The end of a thread 23 may be mobile to Z-direction relative to head supporting table 24, as a result, score wheel support sector supporting element 26 to Z-direction into
Row displacement.
As another example, score wheel support sector supporting element 26 can be moved relative to scribe head 23 to Z-direction, by
This, score wheel support sector 22 conflicts when the outside of score wheel support sector supporting element 26, due to its impact, score wheel support sector
Supporting element 26 is conjugated relative to scribe head 23 to Z-direction.
In this case, control unit 70 judges the score wheel support sector supporting element measured by displacement measuring unit 50
Whether 26 displacement exceeds setting range, can be with when the displacement of score wheel support sector supporting element 26 is beyond setting range
It is judged as that score wheel support sector 22 is not normally mounted to score wheel support sector supporting element 26, score wheel support sector supporting element 26
It is conjugated by improper external force.
In this case, control unit 70 informs score wheel to user for example, by display device, audio device etc.
The fact that support sector 22 is abnormally installed.As another example, control unit 70 can stop the driving of scribing equipment.
In this way, according to embodiments of the present invention, the displacement of score wheel support sector supporting element 26 is measured, with the score wheel branch of measurement
On the basis of the displacement for holding portion's supporting element 26, to judge whether score wheel support sector 22 is normally mounted to the support of score wheel support sector
Part 26, when score wheel support sector 22 is not normally mounted to score wheel support sector supporting element 26, inform user or
Stop the driving of scribing equipment.Thereby, it is possible to prevent score wheel support sector 22 to be abnormally mounted on score wheel support in advance
Issuable score wheel support sector 22, institute, score wheel support sector supporting element 26, the first score wheel are supported when portion's supporting element 26
Portion accommodates the breakage of component 41 or the second score wheel support sector receiving component 42 and/or scribe head 23.
As another example, as shown in Figure 14 and Figure 15, scribe head 23, which can have, is applied to score wheel branch for measuring
Hold the loading determination unit 60 of the loading of portion's supporting element 26.Score wheel support sector supporting element 26 is connected to scribe head 23, and loading is surveyed
Order member 60 is configured to the loading that measurement is applied to scribe head 23.
Here, the lotus of X-direction and Y direction that the loading of score wheel support sector supporting element 26 can be horizontally oriented
The loading of the Z-direction of weight and/or vertical direction.In embodiments of the present invention, illustrate that loading determination unit 60 measures
Loading of the score wheel support sector supporting element 26 in Z-direction.But the present invention is not limited thereto, measures score wheel support sector supporting element
26 the loading of Z-direction composition, can also be used as measurement score wheel support sector supporting element 26 in X-direction and/or Y
The composition of the loading of axis direction is also suitable for loading determination unit 60.
For example, loading determination unit 60 may include load sensor 61, the load sensor 61 is set to score wheel
Support sector's supporting element 26 is connected to the part of scribe head 23.As load sensor 61, it can be used and for example become physics loading
It is changed to survey pressure original part (load cell) of electric signal.In addition, score wheel support sector supporting element 26 is by by score wheel support sector 22
The power pressurization load sensor 61 of application.For example, score wheel support sector supporting element 26 can be to Z-direction relative to scribe head 23
Mobile, score wheel support sector supporting element 26 is pressurizeed load sensor 61 by the power applied by score wheel support sector 22 as a result,.
In addition, control unit 70 is connected with loading determination unit 60 in the scribing equipment described in the embodiment of the present invention, sentence
Whether the loading of disconnected score wheel support sector supporting element 26 exceeds the range for having set loading.
Loading determination unit 60 can measure score wheel support sector replacement unit 40 by score wheel support sector 22 be mounted on draw
When Pian Lun support sector supporting element 26, it is applied to the loading of score wheel support sector supporting element 26.
Here, score wheel support sector replacement unit 40 works normally, score wheel support sector 22 is normally inserted in score wheel branch
The case where holding insertion groove 261 of portion's supporting element 26, the loading in setting range can act on score wheel support sector supporting element 26.
But as shown in figure 15, score wheel support sector 22 is not normally plugged in score wheel support sector supporting element 26
Insertion groove 261 is contained in stroke of the first score wheel support sector receiving component 41 or the second score wheel support sector receiving component 42
Pian Lun support sector 22 conflicts when the outside of score wheel support sector supporting element 26, and such as the first score wheel support sector accommodates component 41
Or second score wheel support sector receiving component 42 a part conflict in the outside of score wheel support sector supporting element 26 the case where
It is identical, in the case where being applied with improper external force on score wheel support sector supporting element 26, in score wheel support sector supporting element 26
On can be applied be more than setting range loading.
What control unit 70 judged to be measured by loading determination unit 60 as a result, is applied to score wheel support sector supporting element 26
Whether loading exceeds setting range, and the loading for being applied to score wheel support sector supporting element 26 is more than when setting range, can
To be judged as that score wheel support sector 22 is not normally mounted to score wheel support sector supporting element 26, score wheel support sector supporting element
Improper external force is applied on 26.
At this point, control unit 70 informs that score wheel support sector 22 is in for example, by display, audio device etc., to user
The fact that improper installation.As another example, control unit 70 can stop the driving of scribing equipment.
In this way, according to embodiments of the present invention, measurement is applied to the loading of score wheel support sector supporting element 26, with the lotus of measurement
On the basis of weight, judge whether score wheel support sector 22 is normally mounted to score wheel support sector supporting element 26, when score wheel is supported
When portion 22 is not normally mounted to score wheel support sector supporting element 26, it can inform user or stop the drive of scribing equipment
It is dynamic.Thus, it is possible to can when preventing from being abnormally mounted on score wheel support sector supporting element 26 because of score wheel support sector 22 in advance
The score wheel support sector 22 that can occur, score wheel support sector supporting element 26, the first score wheel support sector receiving component 41 or the
Two score wheel support sectors accommodate the breakage of component 42 and/or scribe head 23.
More than, illustrated for preferred embodiment, but the scope of the present invention be not limited to it is such
Specific embodiment, can be to carry out change appropriate in the range of record in claim.
Claims (14)
1. a kind of scribing equipment, wherein include:
Scribing unit comprising scribe head, the scribe head include score wheel support sector supporting element, maintain the score wheel of score wheel
Support sector is inserted in score wheel support sector supporting element；
Score wheel support sector replacement unit holds the score wheel support sector, the score wheel support sector is installed on described
Score wheel support sector supporting element, or the score wheel support sector is separated from score wheel support sector supporting element；And
Measuring unit is conjugated, the score wheel support sector is mounted on the score wheel in score wheel support sector replacement unit
When support sector's supporting element, displacement of the measurement relative to the score wheel support sector supporting element of the score wheel support sector.
2. scribing equipment as described in claim 1, wherein further comprise:
Control unit, judgement by it is described displacement measuring unit measure score wheel support sector supporting element displacement whether
Beyond the range for having set displacement.
3. scribing equipment as described in claim 1, wherein
The displacement measuring unit includes reference component and detection part, one of the reference component and the detection part
It is set to the frame for being used to carry the scribe head of the scribing unit, the reference component and the detection part are wherein
It is another be set on score wheel support sector supporting element, so that the detection part is used for against the reference component
Detect relative position of the detection part about the reference component.
4. scribing equipment as claimed in claim 3, wherein
The reference component is configured to the scale with determined graduation mark；And
The detection part is configured to shoot the camera of the scale.
5. scribing equipment as claimed in claim 3, wherein
The reference component is configured to the reflecting surface different according to position difference reflection angle；And
The detection part includes: the luminescence sensor to the reflection surface launching light；With receive from the reflective surface
Light by optical sensor.
6. a kind of scribing equipment, wherein include:
Scribing unit comprising scribe head, the scribe head include score wheel support sector supporting element, maintain the score wheel of score wheel
Support sector is inserted in score wheel support sector supporting element；
Score wheel support sector replacement unit holds the score wheel support sector, the score wheel support sector is installed on described
Score wheel support sector supporting element, or the score wheel support sector is separated from score wheel support sector supporting element；And
The score wheel support sector is installed on the score wheel in score wheel support sector replacement unit by loading determination unit
When support sector's supporting element, the loading that the score wheel support sector is applied to score wheel support sector supporting element is measured.
7. scribing equipment as claimed in claim 6, wherein further comprise:
Control unit judges the lotus for being applied to score wheel support sector supporting element measured by the loading determination unit
Whether weight is beyond the range for having set loading.
8. scribing equipment as claimed in claim 6, wherein
The loading determination unit includes load sensor, and the load sensor is set to score wheel support sector supporting element
It is connected to the part of the scribe head.
9. such as scribing equipment described in any item of the claim 1 to 8, wherein
Score wheel support sector replacement unit includes that score wheel support sector accommodates module, and the score wheel support sector accommodates module
There is multiple score wheel support sectors container in a circumferential direction, the score wheel support sector accommodates module with the multiple scribing
A mode against score wheel support sector supporting element in wheel support sector's container rotates.
10. scribing equipment as claimed in claim 9, wherein
The score wheel support sector accommodates module
First score wheel support sector accommodates component, corresponds to a scribe head in mutually oppositely disposed a pair of of scribe head,
And there is multiple score wheel support sectors container；And
Second score wheel support sector accommodates component, corresponds to another scribe head, and has the receiving of multiple score wheel support sectors
Slot.
11. scribing equipment as claimed in claim 10, wherein
Score wheel support sector replacement unit further comprises rotary module, and the rotary module is arranged in first scribing
Take turns support sector receiving component and the second score wheel support sector receiving component between, make the first score wheel support sector receiving component with
And second score wheel support sector receiving component carry out relative rotation.
12. scribing equipment as claimed in claim 11, wherein
The rotary module make first score wheel support sector receiving component and the second score wheel support sector receiving component with
Identical direction or different direction are rotated.
13. scribing equipment as claimed in claim 11, wherein
The rotary module make first score wheel support sector receiving component and the second score wheel support sector receiving component with
Mutually different angle is rotated.
14. scribing equipment as claimed in claim 9, wherein
Score wheel support sector replacement unit further comprises lock modules, and the lock modules are set to the score wheel branch
Hold portion's container, and the fixed score wheel support sector for being inserted in score wheel support sector container.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170120638A KR102582732B1 (en) | 2017-09-19 | 2017-09-19 | Scribing apparatus |
| KR10-2017-0120638 | 2017-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109514518A true CN109514518A (en) | 2019-03-26 |
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ID=65767978
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711452569.1A Pending CN109514518A (en) | 2017-09-19 | 2017-12-28 | Scribing equipment |
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| Country | Link |
|---|---|
| KR (1) | KR102582732B1 (en) |
| CN (1) | CN109514518A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536786A (en) * | 2020-11-17 | 2021-03-23 | 宁波金凤焊割机械制造有限公司 | Metal slat spouts a yard marking off system |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102267732B1 (en) * | 2019-10-08 | 2021-06-22 | 주식회사 탑 엔지니어링 | Device for changing scribing wheel and scribing apparatus including the same |
| KR102494806B1 (en) * | 2020-08-13 | 2023-02-06 | (주)피엔피 | Auto Tool Change Device for Ultra Thin Glass Block Cutting |
| KR102494807B1 (en) * | 2020-08-13 | 2023-02-06 | (주)피엔피 | Auto Tool Change Device for Ultra Thin Glass Block Cutting |
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| JP3709604B2 (en) * | 1996-03-19 | 2005-10-26 | 株式会社片岡機械製作所 | Automatic positioning control device for turret |
| KR200284232Y1 (en) * | 2001-12-15 | 2002-08-10 | 미 휴앙 짐 | Center cutting process device for exchange multiknife |
| KR100724237B1 (en) * | 2004-12-28 | 2007-05-31 | 삼성코닝정밀유리 주식회사 | Scoring wheel unit auto-changing apparatus for use in an oriental cutting machine |
| KR100753162B1 (en) | 2005-12-29 | 2007-08-30 | 주식회사 탑 엔지니어링 | Method for Detecting Position of Substrate Using Position Error of Motor And Scriber Using The Same |
| JP2009248203A (en) * | 2008-04-01 | 2009-10-29 | Sony Corp | Machining apparatus and method of manufacturing display panel |
| KR101470956B1 (en) * | 2008-06-13 | 2014-12-09 | 엘지디스플레이 주식회사 | Apparatus for cutting glass and method of automatically exchanging wheel using the same |
| JP5457131B2 (en) * | 2009-10-07 | 2014-04-02 | 株式会社ディスコ | Blade changer |
| KR101573065B1 (en) * | 2014-03-10 | 2015-12-01 | 민치훈 | Head portion for mechanical scribing performing the exchange of needle easily |
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2017
- 2017-09-19 KR KR1020170120638A patent/KR102582732B1/en active IP Right Grant
- 2017-12-28 CN CN201711452569.1A patent/CN109514518A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536786A (en) * | 2020-11-17 | 2021-03-23 | 宁波金凤焊割机械制造有限公司 | Metal slat spouts a yard marking off system |
| CN112536786B (en) * | 2020-11-17 | 2022-01-28 | 宁波金凤焊割机械制造有限公司 | Metal slat spouts a yard marking off system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102582732B1 (en) | 2023-09-27 |
| KR20190032720A (en) | 2019-03-28 |
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Application publication date: 20190326 |