CN109477714B - 非接触式测头和操作方法 - Google Patents

非接触式测头和操作方法 Download PDF

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Publication number
CN109477714B
CN109477714B CN201780045928.3A CN201780045928A CN109477714B CN 109477714 B CN109477714 B CN 109477714B CN 201780045928 A CN201780045928 A CN 201780045928A CN 109477714 B CN109477714 B CN 109477714B
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China
Prior art keywords
contact stylus
interest
optical
point
inspection system
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CN201780045928.3A
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English (en)
Chinese (zh)
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CN109477714A (zh
Inventor
尼古拉斯·约翰·韦斯顿
伊冯娜·鲁思·赫德阿特
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Renishaw PLC
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Renishaw PLC
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Publication of CN109477714A publication Critical patent/CN109477714A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201780045928.3A 2016-07-28 2017-07-26 非接触式测头和操作方法 Active CN109477714B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16275107.7 2016-07-28
EP16275107 2016-07-28
PCT/GB2017/052182 WO2018020244A1 (en) 2016-07-28 2017-07-26 Non-contact probe and method of operation

Publications (2)

Publication Number Publication Date
CN109477714A CN109477714A (zh) 2019-03-15
CN109477714B true CN109477714B (zh) 2022-02-18

Family

ID=56555347

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780045928.3A Active CN109477714B (zh) 2016-07-28 2017-07-26 非接触式测头和操作方法

Country Status (5)

Country Link
US (1) US11105607B2 (https=)
EP (1) EP3491333B1 (https=)
JP (1) JP7090068B2 (https=)
CN (1) CN109477714B (https=)
WO (1) WO2018020244A1 (https=)

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* Cited by examiner, † Cited by third party
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JP7434535B2 (ja) * 2019-09-18 2024-02-20 ディーダブリュー・フリッツ・オートメーション・インコーポレイテッド 非接触光学測定装置および交換可能光プローブ
CH718308B1 (fr) * 2019-12-11 2024-04-30 Chugai Pharmaceutical Co Ltd Dispositif d'alimentation en pièces et système de transfert de pièce.
EP3839418A1 (en) 2019-12-18 2021-06-23 Hexagon Technology Center GmbH Optical sensor with overview camera
US11481917B2 (en) * 2020-10-21 2022-10-25 Faro Technologies, Inc. Compensation of three-dimensional measuring instrument having an autofocus camera
US11763491B2 (en) 2020-10-21 2023-09-19 Faro Technologies, Inc. Compensation of three-dimensional measuring instrument having an autofocus camera
CN114018816B (zh) * 2021-12-03 2025-08-19 北京中车重工机械有限公司 车顶检测系统的检测相机连接装置

Citations (6)

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JPH03162645A (ja) * 1989-06-01 1991-07-12 Babcock & Wilcox Co:The 非接触オンライン形紙強度測定装置
US6628322B1 (en) * 1998-08-07 2003-09-30 Brown & Sharpe Dea, S.P.A. Device and method for positioning a measuring head on a noncontact three-dimensional measuring machine
CN101107558A (zh) * 2005-01-21 2008-01-16 光子动力学公司 自动聚焦跟踪系统
CN102483319A (zh) * 2009-09-11 2012-05-30 瑞尼斯豪公司 非接触式物体检查
CN101821579B (zh) * 2007-08-17 2013-01-23 瑞尼斯豪公司 相位分析测量装置和方法
CN103026211A (zh) * 2010-07-16 2013-04-03 3M创新有限公司 高分辨率自动对焦检查系统

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US4847687A (en) 1988-04-18 1989-07-11 General Electric Company Video ranging system
GB8908854D0 (en) 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
GB9705105D0 (en) 1997-03-12 1997-04-30 Brown & Sharpe Limited Optical surface measurement apparatus and methods
JP2001033306A (ja) 1999-07-16 2001-02-09 Seiko Precision Inc 反射型光センサ
JP3792679B2 (ja) 2003-06-23 2006-07-05 Ｎｅｃビューテクノロジー株式会社 投射面距離測定装置を有するプロジェクタ
US7299145B2 (en) * 2005-08-16 2007-11-20 Metris N.V. Method for the automatic simultaneous synchronization, calibration and qualification of a non-contact probe
US7652275B2 (en) * 2006-07-28 2010-01-26 Mitutoyo Corporation Non-contact probe control interface
DE102006049695A1 (de) 2006-10-16 2008-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum berührungslosen Erfassen einer dreidimensionalen Kontur
GB0707720D0 (en) 2007-04-23 2007-05-30 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
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CN101261118A (zh) 2008-04-17 2008-09-10 天津大学 基于机器人的快速自动化三维形貌在线测量方法和系统
GB201013938D0 (en) * 2010-08-20 2010-10-06 Renishaw Plc Method for recalibrating coordinate positioning apparatus
JP5218514B2 (ja) 2010-09-30 2013-06-26 オムロン株式会社 受光レンズの配置方法、および光学式変位センサ
US8826719B2 (en) * 2010-12-16 2014-09-09 Hexagon Metrology, Inc. Machine calibration artifact
CN102445183B (zh) 2011-10-09 2013-12-18 福建汇川数码技术科技有限公司 基于激光与摄像机平行实现的远程测距系统测距激光点的定位方法
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
EP2959681A1 (en) * 2013-02-25 2015-12-30 Nikon Metrology NV Projection system
CN104165599B (zh) 2014-08-20 2017-01-25 南京理工大学 偏摆工件非球面的非接触式测量系统与方法
GB201603496D0 (en) * 2016-02-29 2016-04-13 Renishaw Plc Method and apparatus for calibrating a scanning probe
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Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03162645A (ja) * 1989-06-01 1991-07-12 Babcock & Wilcox Co:The 非接触オンライン形紙強度測定装置
US6628322B1 (en) * 1998-08-07 2003-09-30 Brown & Sharpe Dea, S.P.A. Device and method for positioning a measuring head on a noncontact three-dimensional measuring machine
CN101107558A (zh) * 2005-01-21 2008-01-16 光子动力学公司 自动聚焦跟踪系统
CN101821579B (zh) * 2007-08-17 2013-01-23 瑞尼斯豪公司 相位分析测量装置和方法
CN102483319A (zh) * 2009-09-11 2012-05-30 瑞尼斯豪公司 非接触式物体检查
CN102483319B (zh) * 2009-09-11 2015-04-22 瑞尼斯豪公司 非接触式物体检查
CN103026211A (zh) * 2010-07-16 2013-04-03 3M创新有限公司 高分辨率自动对焦检查系统

Also Published As

Publication number Publication date
CN109477714A (zh) 2019-03-15
JP7090068B2 (ja) 2022-06-23
JP2019522213A (ja) 2019-08-08
EP3491333B1 (en) 2022-03-30
WO2018020244A1 (en) 2018-02-01
US11105607B2 (en) 2021-08-31
US20190154430A1 (en) 2019-05-23
EP3491333A1 (en) 2019-06-05

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