CN109454338B - 5-axis linkage calibration method for laser drilling machine - Google Patents

5-axis linkage calibration method for laser drilling machine Download PDF

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Publication number
CN109454338B
CN109454338B CN201811355707.9A CN201811355707A CN109454338B CN 109454338 B CN109454338 B CN 109454338B CN 201811355707 A CN201811355707 A CN 201811355707A CN 109454338 B CN109454338 B CN 109454338B
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axis
laser
value
compensation value
zero
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CN109454338A (en
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张维权
罗斌
刘佳
张玮
崔宗凯
王斌
郑榜伟
田雅旭
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AECC Aviation Power Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a 5-axis linkage calibration method of a laser drilling machine, which is characterized in that a base is fixed on a working table of a machine tool, and a system controls a laser nozzle to drill holes on a special stainless steel test plate at different angles under the 5-axis linkage function state, so that the radius and zero offset compensation of a D axis is realized. And then, a magnet is adopted to firmly and horizontally adsorb the special stainless steel test plate on the working table, according to the C-axis calibration process, the system controls the laser nozzle to punch holes on the plane of the special stainless steel test plate at different angles, and the position deviation of the holes is measured, so that the radius and zero offset compensation of the C axis is realized. The calibration method adopts a simple laser drilling test, can conveniently detect the effect of 5-axis calibration by observing whether the centers of the circular dots for processing the circular small holes at different angles are close to coincidence, is favorable for timely finding the problem of 5-axis linkage deviation, and can timely correct and correct the problems, eliminate hidden dangers in a bud state, and effectively ensure the quality of laser drilling and cutting.

Description

5-axis linkage calibration method for laser drilling machine
Technical Field
The invention belongs to the field of industrial laser processing machines, and relates to 5-axis linkage function calibration of laser processing equipment, which improves the precision of laser drilling.
Background
The laser drilling equipment needs to carry out 5-axis linkage calibration after replacing a machine head part and an optical device or generating machine head collision, otherwise, the quality problems of laser drilling and laser kerf position deviation can be caused.
For old equipment, an original matched using tool for laser beam 5-axis calibration cannot truly reflect the real error condition due to long-term disuse, corrosion and deformation, and meanwhile, due to the fact that the equipment is updated and replaced, spare parts of the original matched calibrating tool cannot be purchased, so that repeated tests of operators with rich experience are needed to complete the use of the laser drilling equipment, a simple and effective 5-axis linkage calibration method is lacked to verify the calibration result, and the potential risk of workpiece quality of laser drilling and cutting exists.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a 5-axis linkage calibration method of a laser drilling machine, which is used for realizing five-axis linkage error measurement and compensation of laser processing equipment and has the advantages of simple method and strong operability.
The invention is realized by the following technical scheme:
a5-axis linkage calibration method of a laser drilling machine comprises the following steps,
step 1, vertically mounting a test board on a workbench, wherein the long side of the test board is parallel to a Y axis, and the short side of the test board is parallel to an X axis;
step 2, adjusting the C axis and the D axis of the laser drilling machine to enable the laser beam to be vertically focused on the top of the test board; the D axis is a rotating axis rotating around any axis in the XY plane, and the C axis is a rotating axis rotating around the Z axis;
step 3, starting a 5-axis linkage function, and moving an X axis to enable the focus of the laser prism to coincide with one edge of the top of the test plate, wherein the edge is parallel to a Y axis;
step 4, rotating the D axis clockwise to enable the laser beam to horizontally irradiate and strike points, and measuring the vertical distance from the laser nozzle to the edge in the step 3, wherein the distance is the radius compensation value of the D axis;
step 5, rotating the D axis anticlockwise to be in a vertical state, entering a prism compensation interface, and compensating the D axis radius value according to the D axis radius compensation value measured in the step 4;
step 6, repeating the step 4 and the step 5 until the intersection points of the laser beams at the vertical irradiation dotting point and the horizontal irradiation dotting point are superposed, and completing the D-axis radius compensation;
step 7, rotating the D axis anticlockwise to enable the laser beam to be vertically focused on the top of the test board, moving the X axis to enable the focus of the laser prism to be overlapped with the other edge of the top of the test board, wherein the edge is parallel to the Y axis;
step 8, rotating the D axis by 90 degrees anticlockwise, enabling the laser beam to horizontally irradiate, and measuring the vertical distance from the laser nozzle to the edge in the step 7, wherein the vertical distance is a zero offset compensation value of the D axis;
9, starting a 5-axis linkage function, entering a prism compensation interface, selecting one half of the D-axis zero-point offset compensation value measured in the step 8, and compensating the D-axis zero-point offset value;
step 10, repeating the step 8 and the step 9 until intersection points of the laser beams when the laser beams are subjected to vertical irradiation dotting and horizontal irradiation dotting coincide, and completing compensation of the D zero offset value;
step 11, horizontally placing the test plate on a workbench, and marking a reference point on the surface of the test plate by using a laser beam;
step 12, rotating the C axis by 180 degrees anticlockwise, then using a laser beam to punch a calibration point on the test plate, and measuring the shortest distance between the calibration point and the reference point along the Y axis direction, wherein the shortest distance is a C axis radius compensation value; measuring the shortest distance between the calibration point and the reference point along the X-axis direction, wherein the distance is a C-axis zero offset compensation value;
step 13, entering a prism compensation interface, and compensating the C-axis radius value and the C-axis zero offset value according to the C-axis radius compensation value and the C-axis zero offset compensation value measured in the step 12;
and 14, repeating the steps 12 to 13 until the reference point is superposed with the calibration point, and finishing the calibration of the C axis.
Optionally, the test panel is mounted on the workbench through a rectangular base, the test panel is vertically mounted at the center of the base, and the side surface of the test panel is parallel to the side surface of the base.
Optionally, the thickness of the test plate is less than or equal to 1 mm.
Optionally, in step 3 and step 7, a CCD mirror is used for photographing and observing, so that the focal point of the laser prism coincides with the edge of the top of the test panel.
Optionally, in step 5, when the measured D-axis radius compensation value is a positive value, the D-axis radius compensation value measured in step 4 is added to the D-axis radius value;
and when the measured D-axis radius compensation value is a negative value, subtracting the D-axis radius compensation value measured in the step 4 from the D-axis radius value.
Optionally, in step 9, when the measured D-axis zero-point offset compensation value is a positive value, adding one half of the D-axis zero-point offset compensation value measured in step 8 to the D-axis zero-point offset value;
and when the measured D-axis zero-point offset compensation value is a negative value, subtracting one half of the D-axis zero-point offset compensation value measured in the step 8 from the D-axis zero-point offset value.
Optionally, the D-axis radius compensation value and the D-axis zero offset compensation value are measured in a manual mode.
Optionally, in step 11, the test plate is attracted to the worktable by a magnet, and the top surface of the test plate is kept horizontal.
Optionally, the reference points and the calibration points corresponding to the steps 11 and 12 are dotted by using a single-pulse dotting mode.
Optionally, in step 13, when the C-axis radius compensation value measured in step 12 is a positive value, adding the C-axis radius compensation value to the C-axis radius value; when the measured C-axis radius compensation value is a negative value, subtracting the C-axis radius compensation value from the C-axis radius value;
when the C-axis zero-point offset compensation value measured in step 12 is a positive value, adding the C-axis zero-point offset compensation value to the C-axis zero-point offset value; when the measured C-axis zero-point offset compensation value is a negative value, the C-axis zero-point offset compensation value is subtracted from the C-axis zero-point offset value.
Compared with the prior art, the invention has the following beneficial technical effects:
according to the calibration method, the base is fixed on the working table of the machine tool, the 5-axis linkage function of the laser processing equipment is selected, and according to the D-axis calibration process, the system controls the laser nozzle to punch holes on the test plate at different angles, so that the radius and zero offset compensation of the D axis is realized; and then, horizontally adsorbing the special stainless steel test plate on a worktable by adopting a magnet, drilling holes on the plane of the test plate by adopting different angles through a system control laser nozzle according to a C-axis calibration flow, and measuring the position deviation of the holes to realize the radius and zero offset compensation of the C axis.
The calibration method adopts a simple laser punching test, whether the centers of the circular dots for processing the circular small holes at different angles are close to coincidence or not is observed, the effect of 5-axis calibration can be conveniently detected, the problem of 5-axis linkage deviation can be timely found, the potential hazards are eliminated in a bud state, the laser punching and cutting quality is effectively guaranteed, the operation is simple, and the laser punching machine can be quickly calibrated.
Drawings
FIG. 1 is a D-axis calibration standard of the present invention;
FIG. 2 is a C-axis calibration standard of the present invention;
FIG. 3 is a plane spin-painting view before the axis-linked calibration of the present invention 5;
FIG. 4 is a plane spin-drilling diagram after the 5-axis linkage calibration according to the present invention;
FIG. 5 is a schematic view of the D-axis radius calibration of the present invention 1;
FIG. 6 is a schematic view of the D-axis radius calibration of the present invention, FIG. 2;
FIG. 7 is a schematic diagram of the D-axis zero offset calibration of the present invention 1;
FIG. 8 is a schematic diagram of the D-axis zero offset calibration of the present invention 2;
FIG. 9 is a schematic view of the C-axis radius calibration of the present invention 1;
FIG. 10 is a schematic view of the C-axis radius calibration of the present invention, FIG. 2;
FIG. 11 is a schematic view of the C-axis zero offset calibration of the present invention 1;
FIG. 12 is a schematic diagram of the C-axis zero offset calibration of the present invention 2;
in the figure: 1, a base; 2, fixing a screw; 3, testing the plate; 4, a laser nozzle; 5 a magnet.
Detailed Description
The present invention will now be described in further detail with reference to the attached drawings, which are illustrative, but not limiting, of the present invention.
A5-axis linkage calibration method for a laser drilling machine needs to be explained, wherein a D axis needs to be calibrated firstly in the calibration process, then a C axis needs to be calibrated, and a compensation value can only take effect. Secondly, in the calibration process of the laser drilling machine, the change of the space coordinate is large when the 5-axis linkage is carried out, so that the periphery of the workbench needs to be cleaned in advance, and interference or collision is avoided.
Defining: the D-axis is a rotation axis rotating around an arbitrary axis in the XY plane,
the laser beam is vertically irradiated downwards by rotating the D axis, the D axis is-90 degrees, the D axis is anticlockwise rotated to be in a horizontal state and is 0 degree, and the D axis is clockwise rotated to be in a horizontal state and is-180 degrees.
The C-axis is a rotation axis rotating around the Z-axis.
When the C axis is at 0 degree, the D axis is parallel to the X axis and is positioned in the negative direction of the X axis, the C axis rotates clockwise, and the angle value decreases progressively.
The specific 5-axis linkage calibration method comprises the following steps;
d-axis calibration procedure
Step 1, mounting the calibration measuring tool on a workbench of laser drilling equipment through a fixing screw 2.
As shown in fig. 1, the calibration gauge includes a base 1, the base 1 is mounted on a worktable by means of fixing screws 2, and a vertical test plate 3 is mounted on the base 1.
The base 1 and the test plate 3 are both rectangular, the thickness of the test plate 3 is less than or equal to 1mm, and the test plate is made of stainless steel.
Step 2, calibrating the calibration measuring tool to enable two edges of the test plate 3 to be parallel to the X axis and the Y axis respectively; wherein the long side of the test panel 3 is parallel to the Y axis and the short side is parallel to the X axis.
And 3, adjusting the C axis and the D axis to enable the laser beam emitted by the laser nozzle 4 to vertically irradiate, namely, the positions of C-90 degrees and D-90 degrees, and then moving the coordinate to enable the laser beam to be vertically focused on the top of the test plate 3.
And 4, selecting a 5-axis linkage function, and giving a slow speed of feeding G01F 2500.
And 5, manually moving the X axis, finding the right edge of the top of the test plate 3 through CCD (charge coupled device) mirror image pickup observation, and manually moving the Z axis to enable the focus of the laser prism to coincide with the right edge.
And 6, selecting a manual input (MDI) mode: and rotating the D axis to-180 degrees, namely rotating the D axis by 90 degrees clockwise as shown in the figure, observing the relative position of the laser nozzle 4 and the edge of the test plate 3, moving the Z axis, and recording the vertical distance from the laser nozzle to the top of the test plate, wherein the distance is the radius compensation value of the D axis.
As shown in fig. 5, when the laser nozzle is positioned above the test panel 3, the D-axis rotation radius is too short;
as shown in fig. 6, when the laser nozzle is positioned below the test panel 3, the D-axis rotation radius is too long.
And 7, rotating the D shaft to a-90-degree position, namely adjusting the laser nozzle to be in a vertical state, entering a prism compensation interface, and adjusting the D shaft radius value according to the D shaft radius compensation value recorded in the step 6.
When the measured D-axis radius compensation value is a positive value, adding the D-axis radius compensation value to the D-axis radius value; when the measured D-axis radius compensation value is negative, the D-axis radius compensation value is subtracted from the D-axis radius value.
And 8, repeating the step 6 and the step 7 until the intersection points of the laser beams during vertical irradiation and horizontal irradiation are overlapped, and completing the D-axis radius compensation.
And 9, adjusting the D axis to enable the laser beam to vertically irradiate the top of the test plate again, namely the D axis is minus 90 degrees, finding the left edge of the top of the test plate 3 through CCD (charge coupled device) mirror image pickup observation, and manually moving the Z axis to enable the focus of the laser prism to be coincident with the left edge.
Step 10, rotating the D shaft anticlockwise to a horizontal state, namely rotating the D shaft to 0 degrees, observing the relative position of the laser nozzle 4 and the edge of the test plate 3, closing the 5-shaft linkage function, moving the D shaft, and recording the vertical distance from the laser nozzle to the top of the test plate 3, wherein the vertical distance is a zero offset compensation value of the D shaft;
as shown in fig. 7, when the laser nozzle is located below the top surface of the test panel 3, the D-axis zero-point offset value is too large;
as shown in fig. 8, when the laser nozzle is positioned above the top of the test panel 3, the D-axis zero-point offset value is too small.
And 11, opening the 5-axis linkage function, rotating the laser nozzle to a vertical state, namely returning to the D-axis-90-degree position, entering a prism compensation interface, adding or subtracting one half of the D-axis zero-point offset compensation value recorded in the step 10 from the D-axis zero-point offset value, and adjusting the D-axis zero-point offset value.
When the measured D-axis zero-point offset compensation value is a positive value, adding the D-axis zero-point offset compensation value to the D-axis zero-point offset value; and when the measured D-axis zero-point offset compensation value is a negative value, subtracting the D-axis zero-point offset compensation value from the D-axis zero-point offset value.
And step 12, repeating the step 10 and the step 11 until the intersection points of the laser beams during vertical irradiation and horizontal irradiation are coincided, and completing the compensation of the D zero point offset value.
And in the C-axis calibration process, the C-axis adjustment must be carried out after the D-axis calibration is finished.
And step 13, horizontally adsorbing the stainless steel test plate 3 on a workbench by using a magnet 5, selecting the positions of C-90 degrees and D-90 degrees, and marking a datum point on the stainless steel test plate 3 in a single-pulse dotting mode.
Step 14, turn on 5-axis linkage function and give a slow feed of G01F 2500.
Step 15, keeping the stainless steel test plate 3 in a fixed position, rotating the C axis by 180 degrees anticlockwise, namely rotating the C axis to-270 degrees, then marking a calibration point on the test plate 3 by using a laser beam, measuring the shortest distance between the calibration point and the reference point in the Y axis direction, wherein the vertical distance is a C axis radius compensation value; and (4) switching off the 5-axis linkage function, manually moving the C axis, and measuring the shortest distance between the calibration point and the reference point in the X axis direction, wherein the distance is the zero offset value of the C axis.
As shown in fig. 9, when the calibration point is above the reference point, the C-axis radius is too long.
As shown in fig. 10, when the calibration point is below the reference point, the C-axis radius is too short.
As shown in fig. 11, when the calibration point is located to the left of the reference point, the C-axis zero offset value is too large.
As shown in fig. 12, when the calibration point is located to the right of the reference point, the C-axis zero-point offset value is too small.
And step 16, entering a prism compensation interface, and adjusting the diameter value and the zero offset value of the C axis according to the zero offset value and the radius compensation value recorded in the step 4.
When the measured C-axis radius compensation value is a positive value, adding the C-axis radius compensation value to the C-axis radius value; when the measured C-axis radius compensation value is a negative value, subtracting the C-axis radius compensation value from the C-axis radius value;
when the measured C-axis zero-point offset compensation value is a positive value, adding the C-axis zero-point offset compensation value to the C-axis zero-point offset value; when the measured C-axis zero-point offset compensation value is a negative value, the C-axis zero-point offset compensation value is subtracted from the C-axis zero-point offset value.
And step 17, repeating the steps 13-16 again, as shown in fig. 2, until the reference point printed in the single pulse mode is coincided with the calibration point, and the calibration of the C axis is completed.
TABLE 1 prism Compensation interface
Prism number Length of focus Axle name Radius compensation Zero offset Coordinate position Zero position
1 8.000 X 0.0000 -29.027
2 5.000 Y 0.0000 -16.692
3 5.000 Z 0.0000 -15.007
4 6.000 A 0.0000 0.0008
5 6.000 C 5.4649 -90.000 -90.000
6 6.000 D 10.689 -90.000 -90.000
Calibration test
As shown in fig. 3, a plane spin map before 5-axis linkage calibration is obtained, after calibration of the C axis and the D axis is completed, a test piece is processed, a calibration result is verified, as shown in fig. 4, a 5-axis linkage processing function is started, the same processing conditions before calibration are used, a laser beam is spun on a test board at a position of-90 ° to-90 ° of the C axis, that is, the laser beam is spun in a vertical state, then the C axis is spun at-90 ° to-60 ° and D-150 ° respectively, secondary processing sparks are not generated in the process of spinning the laser beam, and a circle center with 3 small holes is spun to be overlapped, thereby proving that the precision of 5-axis linkage control is remarkably improved.
According to the calibration method, the base 1 is fixed on the working table of the machine tool, the 5-axis linkage function and the laser single pulse processing mode of the laser processing equipment are selected, and the system controls the laser nozzle 4 to punch holes on the special stainless steel test plate 3 at different angles according to the D-axis calibration flow, so that the radius and zero offset compensation of the D axis is realized.
Adopt magnet 5 with the firm level of special stainless steel test panel 3 adsorb on table surface, according to C axle calibration flow, the different angles of system control laser nozzle 4 punch on special stainless steel test panel 3 plane, the offset of position of measuring hole realizes the radius and the offset compensation of zero point of C axle.
This calibration method adopts simple laser beam drilling (or Jade the hole) experiment, whether is close the coincidence through observing the dot center of the circular aperture of different angle processing, can conveniently detect out the effect of 5 axle calibrations, helps in time discovering 5 axle linkage deviation problems to in time rectifying and reforming, eliminate hidden danger in the bud state, effectively guarantee laser beam drilling, cutting quality, easy operation moreover, can be quick calibrate laser-beam drilling machine.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.

Claims (10)

1. A5-axis linkage calibration method of a laser drilling machine is characterized by comprising the following steps,
step 1, vertically installing a test board (3) on a workbench, wherein the long side of the test board (3) is parallel to a Y axis, and the short side is parallel to an X axis;
step 2, adjusting the C axis and the D axis of the laser drilling machine to enable the laser beam to be vertically focused on the top of the test plate (3); the D axis is a rotating axis rotating around any axis in the XY plane, and the C axis is a rotating axis rotating around the Z axis;
step 3, starting a 5-axis linkage function, and moving an X axis to enable the focus of the laser prism to coincide with one edge of the top of the test plate (3), wherein the edge is parallel to a Y axis;
step 4, rotating the D axis clockwise to enable the laser beam to horizontally irradiate and strike points, and measuring the vertical distance from the laser nozzle to the edge in the step 3, wherein the distance is the radius compensation value of the D axis;
step 5, rotating the D axis anticlockwise to be in a vertical state, entering a prism compensation interface, and compensating the D axis radius value according to the D axis radius compensation value measured in the step 4;
step 6, repeating the step 4 and the step 5 until the intersection points of the laser beams at the vertical irradiation dotting point and the horizontal irradiation dotting point are superposed, and completing the D-axis radius compensation;
step 7, rotating the D axis anticlockwise to enable the laser beam to be vertically focused on the top of the test plate (3), moving the X axis to enable the focus of the laser prism to be overlapped with the other edge of the top of the test plate, wherein the edge is parallel to the Y axis;
step 8, rotating the D shaft by 90 degrees anticlockwise, enabling the laser beam to horizontally irradiate, switching off the 5-shaft linkage function, and measuring the vertical distance from the laser nozzle to the edge in the step 7, wherein the vertical distance is a zero offset compensation value of the D shaft;
9, starting a 5-axis linkage function, entering a prism compensation interface, selecting one half of the D-axis zero-point offset compensation value measured in the step 8, and compensating the D-axis zero-point offset value;
step 10, repeating the step 8 and the step 9 until intersection points of the laser beams when the laser beams are subjected to vertical irradiation dotting and horizontal irradiation dotting coincide, and completing compensation of the D zero offset value;
step 11, horizontally placing the test plate (3) on a workbench, and marking a reference point on the surface of the test plate by adopting a laser beam;
step 12, rotating the C axis by 180 degrees anticlockwise, then marking a calibration point on the test board (3) by using a laser beam, switching off the 5-axis linkage function, and measuring the shortest distance between the calibration point and the reference point along the Y axis direction, wherein the shortest distance is a C axis radius compensation value; measuring the shortest distance between the calibration point and the reference point along the X-axis direction, wherein the distance is a C-axis zero offset compensation value;
step 13, entering a prism compensation interface, and compensating the C-axis radius value and the C-axis zero offset value according to the C-axis radius compensation value and the C-axis zero offset compensation value measured in the step 12;
and 14, starting a 5-axis linkage function, and repeating the steps 12 to 13 until the reference point is superposed with the calibration point, so that the C-axis calibration is completed.
2. The laser-beam drilling machine 5-axis linkage calibration method according to claim 1, wherein the test board (3) is mounted on the workbench through a rectangular base (1), the test board (3) is vertically mounted at the center of the base, and the side surface of the test board (3) is parallel to the side surface of the base.
3. The laser-beam drilling machine 5-axis linkage calibration method according to claim 1, wherein the thickness of the test board (3) is less than or equal to 1 mm.
4. The method for calibrating the 5-axis linkage of the laser-beam drilling machine according to claim 1, wherein in the steps 3 and 7, the CCD mirror is used for shooting and observing, so that the focal point of the laser prism is coincided with the edge of the top of the test board.
5. The laser-beam drilling machine 5-axis linkage calibration method according to claim 1, wherein in step 5, when the measured D-axis radius compensation value is positive, the D-axis radius compensation value measured in step 4 is added to the D-axis radius value;
and when the measured D-axis radius compensation value is a negative value, subtracting the D-axis radius compensation value measured in the step 4 from the D-axis radius value.
6. The laser-beam drilling machine 5-axis linkage calibration method according to claim 1, wherein in step 9, when the measured D-axis zero-point offset compensation value is a positive value, one half of the D-axis zero-point offset compensation value measured in step 8 is added to the D-axis zero-point offset value; and when the measured D-axis zero-point offset compensation value is a negative value, subtracting one half of the D-axis zero-point offset compensation value measured in the step 8 from the D-axis zero-point offset value.
7. The laser-beam drilling machine 5-axis linkage calibration method according to claim 5 or 6, wherein the D-axis radius compensation value and the D-axis zero-point offset compensation value are measured in a manual mode.
8. The method for calibrating 5-axis linkage of a laser-beam drilling machine according to claim 1, wherein in step 11, the test plate (3) is attracted to the table by the magnet (5) and the top surface of the test plate (3) is kept horizontal.
9. The method for calibrating the 5-axis linkage of the laser-beam drilling machine according to claim 1, wherein the reference point and the calibration point in step 11 and step 12 are both marked by using a single-pulse marking mode.
10. The laser-beam drilling machine 5-axis linkage calibration method according to claim 1, wherein in step 13, when the C-axis radius compensation value measured in step 12 is positive, the C-axis radius compensation value is added to the C-axis radius value; when the measured C-axis radius compensation value is a negative value, subtracting the C-axis radius compensation value from the C-axis radius value;
when the C-axis zero-point offset compensation value measured in step 12 is a positive value, adding the C-axis zero-point offset compensation value to the C-axis zero-point offset value; when the measured C-axis zero-point offset compensation value is a negative value, the C-axis zero-point offset compensation value is subtracted from the C-axis zero-point offset value.
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