CN109454338A - A kind of 5 axis of laser-beam drilling machine linkage calibration method - Google Patents

A kind of 5 axis of laser-beam drilling machine linkage calibration method Download PDF

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Publication number
CN109454338A
CN109454338A CN201811355707.9A CN201811355707A CN109454338A CN 109454338 A CN109454338 A CN 109454338A CN 201811355707 A CN201811355707 A CN 201811355707A CN 109454338 A CN109454338 A CN 109454338A
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axis
laser
value
panel
test plate
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CN109454338B (en
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张维权
罗斌
刘佳
张玮
崔宗凯
王斌
郑榜伟
田雅旭
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AECC Aviation Power Co Ltd
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AECC Aviation Power Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

5 axis of a kind of laser-beam drilling machine linkage calibration method disclosed by the invention, pedestal is fixed on the work top of lathe, system control laser nozzle different angle is punched on special stainless steel test plate (panel) under 5 axis linkage function states, realizes radius and the zero offset compensation of D axis.Then use magnet by the firm Level Adsorption of special stainless steel test plate (panel) on work top, according to C axis calibration process, system control laser nozzle different angle is punched in special stainless steel test plate (panel) plane, the positional offset amount of measured hole, realizes radius and the zero offset compensation of C axis.The calibration method is tested using simple laser boring, the whether close coincidence in dot center of round aperture is processed by observing different angle, it can be convenient the effect for detecting 5 axis calibrations, help to find 5 axis linkage offset issue in time, and it rectifies and improves in time, hidden danger is eliminated in budding state, laser boring, cut quality is effectively ensured.

Description

A kind of 5 axis of laser-beam drilling machine linkage calibration method
Technical field
The invention belongs to industrial lasers machining tool fields, are related to the 5 axis linkage functions calibration of laser process equipment, are promoted The accuracy of laser boring.
Background technique
Laser drilling device is in replacement head part, optical device or after occurring head collision, it is necessary to carry out 5 axis linkage school Otherwise standard will lead to the quality problems of laser boring and laser lancing positional shift.
For old equipment, first wife's appliance of 5 axis calibration of laser beam is corroded, is deformed because not having to for a long time, cannot be true Reflect true error situation, simultaneously because the update of equipment, the spare part of the calibration utensil of first wife can not be bought, so swashing It in light punch device use process, need to be completed by veteran operator's repetition test, lack a kind of simple and effective 5 axis connection Dynamic calibration method verifies calibration result, and there are the workpiece quality risk hidden danger of laser boring, cutting.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides a kind of 5 axis of laser-beam drilling machine linkage calibration method, realizes Laser process equipment five-axle linkage error measure and compensation have method simple, the advantage of strong operability.
The present invention is to be achieved through the following technical solutions:
A kind of 5 axis of laser-beam drilling machine linkage calibration method, includes the following steps,
Step 1, by test plate (panel) right angle setting on the table, the long side of test plate (panel) is parallel with Y-axis, and short side is parallel with X-axis；
Step 2, the C axis and D axis for adjusting laser-beam drilling machine, enable at the top of laser beam vertical focusing to test plate (panel)；D axis is to enclose The rotary shaft of any axis rotation in X/Y plane, C axis is the rotary shaft rotated around Z axis；
Step 3,5 axis linkage functions of starting, mobile X-axis make an edge weight at the top of the focus and test plate (panel) of laser prism It closes, the edge is parallel with Y-axis；
Step 4 rotates clockwise D axis, and laser beam horizontal irradiation is enable to get ready, measures in laser nozzle to step 3 The vertical range at edge, the distance are D axis radius compensation value；
D axis is rotated counterclockwise to plumbness by step 5, into Prism compensation interface, the D axis half measured according to step 4 Diameter offset compensates D axis radius value；
Step 6 repeats step 4 and step 5, until laser beam gets the intersection point weight got ready with horizontal irradiation ready in vertical irradiation It closes, D axis radius compensation is completed；
Step 7 rotates counterclockwise D axis, enables at the top of laser beam vertical focusing to test plate (panel), and mobile X-axis makes laser rib The focus of mirror is overlapped with another edge at the top of test plate (panel), and the edge is parallel with Y-axis；
Step 8, D axis are rotated by 90 ° counterclockwise, make laser beam horizontal irradiation, measurement laser nozzle to edge described in step 7 Vertical range, the vertical range are D axis zero offset offset；
Step 9,5 axis linkage functions of starting, into Prism compensation interface, the D axis zero offset that selecting step 8 measures is compensated The half of value compensates D axis zero offset value；
Step 10 repeats step 8 and step 9, until laser beam gets friendship when getting ready with horizontal irradiation ready in vertical irradiation Point is overlapped, and D zero offset value complement repays completion；
Test plate (panel) is horizontally arranged on the table by step 11, makes a call to a datum mark on its surface using laser beam；
Step 12, C axis rotate 180 ° counterclockwise, then make a call to a calibration point on test plate (panel) with laser beam, measurement calibration point with The shortest distance of datum mark along the y axis, the horizontal distance are C axis radius compensation value；Calibration point and datum mark are measured along X-axis side To the shortest distance, the distance be C axis zero offset offset；
Step 13, into Prism compensation interface, the C axis radius compensation value and C axis zero offset measured according to step 12 is mended Value is repaid, C axis radius value and C axis zero offset value are compensated；
Step 14 repeats step 12 to step 13, until datum mark is overlapped with calibration point, C axis calibration is completed.
Optionally, the test plate (panel) is installed on the workbench by rectangular base, the center of test plate (panel) right angle setting pedestal, and is tried The side of plate and the side of pedestal are parallel.
Optionally, thickness≤1mm of the test plate (panel).
Optionally, it in step 3 and step 7, is imaged and is observed using CCD mirror, made at the top of the focus and test plate (panel) of laser prism Edge is overlapped.
Optionally, it in step 5, when the D axis radius compensation value of measurement is positive value, is surveyed on D axis radius value plus step 4 The D axis radius compensation value of amount；
When the D axis radius compensation value of measurement is negative value, the D axis radius compensation of step 4 measurement is subtracted on D axis radius value Value.
Optionally, it in step 9, when the D axis zero offset offset of measurement is positive value, is added on D axis zero offset The half for the D axis zero offset offset that step 8 measures；
When the D axis zero offset offset of measurement is negative value, the D axis zero of step 8 measurement is subtracted on D axis zero offset The half of point bias compensation value.
Optionally, D axis radius compensation value and D axis zero offset offset are measured in a manual mode.
Optionally, in step 11, test plate (panel) is adsorbed on the table by magnet, and test plate (panel) top surface keeps horizontal.
Optionally, corresponding datum mark and calibration point are all made of pulse and get mode ready and beat in the step 11 and step 12 Point.
Optionally, it in step 13, when the C axis radius compensation value that step 12 measures is positive value, is added on C axis radius value The C axis radius compensation value；When the C axis radius compensation value of measurement is negative value, C axis radius compensation value is subtracted on C axis radius value；
When the C axis zero offset offset that step 12 measures is positive value, the C axis zero point is added on C axis zero offset Bias compensation value；When the C axis zero offset of measurement is negative value, C axis zero offset compensation is subtracted on C axis zero offset Value.
Compared with prior art, the invention has the following beneficial technical effects:
Calibration method of the invention, pedestal is fixed on the work top of lathe, selects the linkage of 5 axis of laser process equipment Function, according to D axis calibration process, system controls laser nozzle and punches in different angle to test plate (panel), realizes the radius and zero of D axis Point bias compensation；Then using magnet by special stainless steel test plate (panel) Level Adsorption on work top, according to C axis calibration process, System control laser nozzle is punched in test plate (panel) plane using different angle, and the positional offset amount of measured hole realizes the radius of C axis It is compensated with zero offset.
The calibration method is tested using simple laser boring, is processed in the dot of round aperture by observing different angle Whether the heart can be convenient the effect that detects 5 axis calibrations close to being overlapped, and helps to find 5 axis linkage offset issue in time, and and When rectify and improve, by hidden danger eliminate in budding state, laser boring, cut quality is effectively ensured, and easy to operate, can be quick Laser-beam drilling machine is calibrated.
Detailed description of the invention
Fig. 1 is D axis calibration standard drawing of the present invention；
Fig. 2 is C axis calibration standard drawing of the present invention；
Fig. 3 is 5 axis linkage calibration frontal plane fine jade hole pattern of the invention；
Fig. 4 is plane fine jade hole pattern after 5 axis linkage calibration of the invention；
Fig. 5 is that D axis radius of the present invention calibrates schematic diagram 1；
Fig. 6 is that D axis radius of the present invention calibrates schematic diagram 2；
Fig. 7 is that D axis zero offset of the present invention calibrates schematic diagram 1；
Fig. 8 is that D axis zero offset of the present invention calibrates schematic diagram 2；
Fig. 9 is that C axis radius of the present invention calibrates schematic diagram 1；
Figure 10 is that C axis radius of the present invention calibrates schematic diagram 2；
Figure 11 is that C axis zero offset of the present invention calibrates schematic diagram 1；
Figure 12 is that C axis zero offset of the present invention calibrates schematic diagram 2；
In figure: 1 pedestal；2 fixing screws；3 test plate (panel)s；4 laser nozzles；5 magnet.
Specific embodiment
Present invention will be described in further detail below with reference to the accompanying drawings, described to be explanation of the invention rather than limit It is fixed.
A kind of 5 axis of laser-beam drilling machine linkage calibration method, it should be noted that in a calibration process firstly the need of to D axis It is calibrated, then C axis is carried out, offset can just come into force.Secondly as laser-beam drilling machine is in a calibration process, the linkage of 5 axis When space changes in coordinates it is bigger, it is necessary to will be cleaned out around workbench in advance, avoid interference with or collide.
Definition: D axis is the rotary shaft of any axis rotation in X/Y plane,
D axis slewed laser beam irradiates vertically downward, and D axis is -90 °, and it is 0 ° that D axis, which rotates counterclockwise to horizontality, and D axis is suitable It is -180 ° that hour hands, which are rotated to horizontality,.
C axis is the rotary shaft rotated around Z axis.
For C axis at 0 °, D axis is parallel with X-axis, and is located at the negative direction of X-axis, and C axis rotates clockwise, and angle value successively decreases.
Specific 5 axis linkage calibration method includes the following steps；
D axis calibration process
Calibration measurer is mounted on the workbench of laser drilling device by step 1 by fixing screws 2.
As shown in Figure 1, calibration measurer includes pedestal 1, pedestal 1 is installed on the workbench by fixing screws 2, on pedestal 1 Vertical test plate (panel) 3 is installed.
Pedestal 1 and test plate (panel) 3 are rectangle, and thickness≤1mm of test plate (panel) 3, which is stainless steel material.
Step 2 calibrates calibration measurer, keeps two sides of test plate (panel) 3 parallel with X-axis and Y-axis respectively；Wherein test plate (panel) 3 Long side it is parallel with Y-axis, short side is parallel with X-axis.
Step 3, adjustment C axis and D axis, the laser beam vertical irradiation for projecting laser nozzle 4, i.e., C-90 °, D-90 ° of position, Then moving coordinate enables laser beam vertical focusing to 3 top of test plate (panel).
Step 4,5 axis linkage functions of selection, and given feeding G01F2500 is at a slow speed.
Step 5 moves X-axis manually, and the right edge at 3 top of test plate (panel) is found by the camera shooting observation of CCD mirror, then mobile Z manually Axis is overlapped the focus of laser prism with the right edge.
Step 6, selection are manually entered (MDI) mode: D axis rotates to -180 °, i.e., as figure rotates clockwise 90 °, observation swashs Z axis, the vertical range at the top of recording laser nozzle to test plate (panel), the distance are moved in the relative position of light nozzle 4 and 3 edge of test plate (panel) For D axis radius compensation value.
As shown in figure 5, then D axis radius of turn is too short when laser nozzle is located at the top of test plate (panel) 3；
As shown in fig. 6, then D axis radius of turn is too long when laser nozzle is located at the lower section of test plate (panel) 3.
D axis is rotated to -90 ° of positions by step 7, i.e., adjusts laser nozzle to plumbness, into Prism compensation circle Face is adjusted D axis radius value according to the D axis radius compensation value that step 6 records.
When the D axis radius compensation value of measurement is positive value, D axis radius compensation value is added on D axis radius value；When measurement When D axis radius compensation value is negative value, D axis radius compensation value is subtracted on D axis radius value.
Step 8 repeats step 6 and step 7, intersection point coincidence when laser beam is in vertical irradiation and horizontal irradiation, D axis Radius compensation is completed.
Step 9, adjustment D axis, making laser beam, vertical irradiation is taken the photograph at the top of test plate (panel), i.e. -90 ° of D axis by CCD mirror again The left margin that 3 top of test plate (panel) is found as observing, moves Z axis manually, and the focus of laser prism is made to be in left margin coincidence.
Step 10, counterclockwise rotation D axis to horizontality, i.e. rotation are to 0 ° of D axis, observation laser nozzle 4 and 3 edge of test plate (panel) Relative position, close 5 axis linkage functions, mobile D axis, the vertical range of recording laser nozzle to 3 top of test plate (panel), this vertically away from From for D axis zero offset offset；
As shown in fig. 7, then D axis zero offset is excessive when laser nozzle is located at the lower section of 3 top surface of test plate (panel)；
As shown in figure 8, then D axis zero offset is too small when laser nozzle is located at the top at 3 top of test plate (panel).
Step 11 opens 5 axis linkage functions, and laser nozzle rotates to plumbness, that is, returns to -90 ° of positions of D axis, enters Prism compensation interface, the D axis zero offset offset recorded in upper step 10 that adds deduct in D axis zero offset two/ One, D axis zero offset value is adjusted.
When the D axis zero offset offset of measurement is positive value, compensated on D axis zero offset plus D axis zero offset Value；When the D axis zero offset offset of measurement is negative value, D axis zero offset offset is subtracted on D axis zero offset.
Step 12 repeats step 10 and step 11, intersection point coincidence when laser beam is in vertical irradiation and horizontal irradiation, D zero offset value complement repays completion.
C axis calibration process, C axial adjustment must carry out after the completion of D axis calibration.
Step 13, using magnet 5 by 3 Level Adsorption of stainless steel test plate (panel) on the table, select C-90 °, D-90 ° of position, Pulse gets mode ready, one datum mark of label on stainless steel test plate (panel) 3.
Step 14 opens 5 axis linkage functions, and given feeding G01F2500 is at a slow speed.
Step 15 keeps 3 position of stainless steel test plate (panel) motionless, and C axis rotates 180 ° counterclockwise, that is, rotates to -270 ° of C axis, then Make a call to a calibration point on test plate (panel) 3 with laser beam, measure the shortest distance of the Y direction of calibration point and datum mark, this vertically away from From for C axis radius compensation value；5 axis linkage functions are turned off, manually mobile C axis, the X-direction of measurement calibration point and datum mark is most Short distance, the distance are C axis zero offset value.
As shown in figure 9, then C axis radius is too long when calibration point is located at the top of datum mark.
As shown in Figure 10, when calibration point is located at the lower section of datum mark, then C axis radius is too short.
As shown in figure 11, when calibration point is located at the left side of datum mark, then C axis zero offset is excessive.
As shown in figure 12, when calibration point is located at the right of datum mark, then C axis zero offset is too small.
Step 16, into Prism compensation interface, the zero offset value and radius compensation value that are recorded according to step 4 to C axis into Conduct value and zero offset value are according to being adjusted.
When the C axis radius compensation value of measurement is positive value, the C axis radius compensation value is added on C axis radius value；Work as measurement C axis radius compensation value be negative value when, C axis radius compensation value is subtracted on C axis radius value；
When the C axis zero offset offset of measurement is positive value, mended on C axis zero offset plus the C axis zero offset Repay value；When the C axis zero offset offset of measurement is negative value, C axis zero offset compensation is subtracted on C axis zero offset Value.
Step 17 repeats above step 13-16, as shown in Fig. 2, until the datum mark got of single pulse mode and calibration Point is completed to be overlapped, and C axis calibration is completed.
1 Prism compensation interface of table
Prism number Focusing length Axis name Radius compensation Zero offset Coordinate position Dead-center position
1 8.000 X 0.0000 -29.027
2 5.000 Y 0.0000 -16.692
3 5.000 Z 0.0000 -15.007
4 6.000 A 0.0000 0.0008
5 6.000 C 5.4649 -90.000 -90.000
6 6.000 D 10.689 -90.000 -90.000
Calibration test
As shown in figure 3, carrying out test specimen after the completion of C axis and D axis calibration for 5 axis linkage calibration frontal plane fine jade hole pattern and adding Work verifies calibration result, as shown in figure 4,5 axis linkage motion cutting functions are opened, using same processing conditions before calibrating, in C axis- - 90 ° of positions of 90 ° of D axis, i.e. laser beam fine jade hole on test plate (panel) under plumbness, then -60 ° of D axis of -90 ° of C axis and D-60 ° and D- 150 ° of difference fine jade holes, laser beam are not in secondary operation pyrophoric behavio(u)r during fine jade hole, get 3 aperture centers of circle and overlap to A bit, it was demonstrated that 5 axis linkage control precision are significantly improved.
Pedestal 1 is fixed on the work top of lathe by calibration method of the invention, selects laser process equipment " 5 axis connection Dynamic function " and " single laser pulse processing method ", according to D axis calibration process, system controls 4 different angle of laser nozzle dedicated It is punched on stainless steel test plate (panel) 3, realizes radius and the zero offset compensation of D axis.
Using magnet 5 by the firm Level Adsorption of special stainless steel test plate (panel) 3 on work top, according to C axis calibration process, System control 4 different angle of laser nozzle is punched in 3 plane of special stainless steel test plate (panel), and the positional offset amount of measured hole realizes C The radius and zero offset of axis compensate.
The calibration method is tested using simple laser boring (or fine jade hole), processes round aperture by observation different angle Dot center whether close to being overlapped, can be convenient the effect for detecting 5 axis calibrations, help to find 5 axis linkage deviation in time Problem, and rectify and improve in time, hidden danger is eliminated in budding state, laser boring, cut quality is effectively ensured, and easy to operate, Quickly laser-beam drilling machine can be calibrated.
The above content is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, all to press According to technical idea proposed by the present invention, any changes made on the basis of the technical scheme each falls within claims of the present invention Protection scope within.

Claims (10)

  1. The calibration method 1. a kind of 5 axis of laser-beam drilling machine links, which is characterized in that include the following steps,
    Step 1, by test plate (panel) (3) right angle setting on the table, the long side of test plate (panel) (3) is parallel with Y-axis, and short side is parallel with X-axis；
    Step 2, the C axis and D axis for adjusting laser-beam drilling machine, enable at the top of laser beam vertical focusing to test plate (panel) (3)；D axis is to enclose The rotary shaft of any axis rotation in X/Y plane, C axis is the rotary shaft rotated around Z axis；
    Step 3,5 axis linkage functions of starting, mobile X-axis, the focus for making laser prism and an edge weight at the top of test plate (panel) (3) It closes, the edge is parallel with Y-axis；
    Step 4 rotates clockwise D axis, and laser beam horizontal irradiation is enable to get ready, measures edge in laser nozzle to step 3 Vertical range, the distance be D axis radius compensation value；
    D axis is rotated counterclockwise to plumbness by step 5, into Prism compensation interface, is mended according to the D axis radius that step 4 measures Value is repaid to compensate D axis radius value；
    Step 6 repeats step 4 and step 5, until laser beam gets the intersection point got ready with horizontal irradiation coincidence, D ready in vertical irradiation Axis radius compensation is completed；
    Step 7 rotates counterclockwise D axis, enables at the top of laser beam vertical focusing to test plate (panel) (3), and mobile X-axis makes laser rib The focus of mirror is overlapped with another edge at the top of test plate (panel), and the edge is parallel with Y-axis；
    Step 8, D axis are rotated by 90 ° counterclockwise, make laser beam horizontal irradiation, turn off 5 axis linkage functions, measurement laser nozzle to step The vertical range at rapid 7 edge, the vertical range are D axis zero offset offset；
    Step 9,5 axis linkage functions of starting, the D axis zero offset offset measured into Prism compensation interface, selecting step 8 Half compensates D axis zero offset value；
    Step 10 repeats step 8 and step 9, until laser beam gets intersection point weight when getting ready with horizontal irradiation ready in vertical irradiation It closes, D zero offset value complement repays completion；
    Test plate (panel) (3) are horizontally arranged on the table by step 11, make a call to a datum mark on its surface using laser beam；
    Step 12, C axis rotate 180 ° counterclockwise, then a calibration point, shutdown 5 axis linkage function are made a call on test plate (panel) (3) with laser beam Can, measurement calibration point and the shortest distance of datum mark along the y axis, the horizontal distance are C axis radius compensation value；It is capable of measuring calibration The shortest distance of the point with datum mark along the x axis, the distance are C axis zero offset offset；
    Step 13, into Prism compensation interface, the C axis radius compensation value and C axis zero offset offset measured according to step 12, C axis radius value and C axis zero offset value are compensated；
    Step 14,5 axis linkage functions of starting, repeat step 12 to step 13, until datum mark is overlapped with calibration point, C axis calibration It completes.
  2. 2. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that the test plate (panel) (3) passes through square Shape pedestal (1) is installed on the workbench, the center of test plate (panel) (3) right angle setting pedestal, and the side of the side of test plate (panel) (3) and pedestal In parallel.
  3. 3. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that the thickness of the test plate (panel) (3) ≤1mm。
  4. 4. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that in step 3 and step 7, adopt It is imaged and is observed with CCD mirror, be overlapped the focus of laser prism with the edge at the top of test plate (panel).
  5. 5. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that in step 5, as the D of measurement When axis radius compensation value is positive value, plus the D axis radius compensation value of step 4 measurement on D axis radius value；
    When the D axis radius compensation value of measurement is negative value, the D axis radius compensation value of step 4 measurement is subtracted on D axis radius value.
  6. 6. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that in step 9, as the D of measurement When axis zero offset offset is positive value, the two of the D axis zero offset offset measured on D axis zero offset plus step 8 / mono-；
    When the D axis zero offset offset of measurement is negative value, the D axis zero point that step 8 measurement is subtracted on D axis zero offset is inclined Set the half of offset.
  7. 7. according to 5 axis of the laser-beam drilling machine linkage calibration method of claim 5 or 6, which is characterized in that in a manual mode, Measure D axis radius compensation value and D axis zero offset offset.
  8. 8. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that in step 11, test plate (panel) (3) On the table by magnet (5) absorption, test plate (panel) (3) top surface keeps horizontal.
  9. 9. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that the step 11 and step Datum mark and calibration point in 12, which are all made of pulse, to be got mode ready and gets ready.
  10. 10. 5 axis of laser-beam drilling machine linkage calibration method according to claim 1, which is characterized in that in step 13, work as step When the C axis radius compensation value of 12 measurements is positive value, the C axis radius compensation value is added on C axis radius value；When the C axis half of measurement When diameter offset is negative value, C axis radius compensation value is subtracted on C axis radius value；
    When the C axis zero offset offset that step 12 measures is positive value, the C axis zero offset is added on C axis zero offset Offset；When the C axis zero offset of measurement is negative value, the C axis zero offset offset is subtracted on C axis zero offset.
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CN112197723A (en) * 2020-09-29 2021-01-08 中国航发动力股份有限公司 Checking standard component and checking method of coordinate measuring machine
CN112264718A (en) * 2020-10-13 2021-01-26 镭煌激光技术(苏州)有限公司 Laser plate cutting machine
CN113732819A (en) * 2020-05-29 2021-12-03 大族激光科技产业集团股份有限公司 Method and device for calibrating C axis of numerical control machine tool, computer equipment and storage medium
CN113732818A (en) * 2020-05-29 2021-12-03 大族激光科技产业集团股份有限公司 Method, device and equipment for calibrating rotating shaft of numerical control machine tool and storage medium
CN113732817A (en) * 2020-05-29 2021-12-03 大族激光科技产业集团股份有限公司 Method and device for calibrating A axis of numerical control machine tool, computer equipment and storage medium
CN113970293A (en) * 2021-10-15 2022-01-25 湖北三江航天险峰电子信息有限公司 Accurate on-machine measuring method and system of point laser
CN114211140A (en) * 2021-11-26 2022-03-22 中国科学院西安光学精密机械研究所 Light beam pointing adjusting method for laser double swing shafts
WO2023103354A1 (en) * 2021-12-10 2023-06-15 西安交通大学 Precision machining apparatus and method for group holes of ultrafast laser controllable hole pattern

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