CN109387348A - A kind of flexibility multrirange capacitance pressure transducer, and its preparation method and application - Google Patents
A kind of flexibility multrirange capacitance pressure transducer, and its preparation method and application Download PDFInfo
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- CN109387348A CN109387348A CN201811400054.1A CN201811400054A CN109387348A CN 109387348 A CN109387348 A CN 109387348A CN 201811400054 A CN201811400054 A CN 201811400054A CN 109387348 A CN109387348 A CN 109387348A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/06—Measuring arrangements specially adapted for aerodynamic testing
- G01M9/062—Wind tunnel balances; Holding devices combined with measuring arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Abstract
The invention belongs to pressure sensor designs and manufacturing field, and specifically disclose a kind of flexible multrirange capacitance pressure transducer, and its preparation method and application, the sensor includes the flexible substrates set gradually from bottom to up, multistage support island and pressure-sensitive film, multistage support island is by being located at the intermediate circular bosses among pressure-sensitive film and being arranged on pressure-sensitive film and the n grade annular convex platform being arranged concentrically with intermediate circular bosses forms, top electrode is provided between intermediate circular bosses and pressure-sensitive film, n grades of annular convex platform are highly sequentially increased from the inside to the outside, and outermost layer annular convex platform is bonded with flexible substrates, the hearth electrode being provided in the middle part of flexible substrates immediately below intermediate circular bosses.Inventive sensor possesses wide in range survey while keeping highly sensitive and presses range, solves the contradiction of pressure sensor range and sensitivity, can meet the needs of different wind tunnel tests are to pressure range and sensitivity is surveyed.
Description
Technical field
The invention belongs to pressure sensor designs and manufacturing field, more particularly, to a kind of flexible multrirange condenser type
Pressure sensor and its preparation method and application.
Background technique
Smart skins be it is a kind of with self diagnosis, adaptive, self study, the abilities such as selfreparing Intelligent material structure, one
As be made of the sensor (nerve), controller (brain) and driver (muscle) of specific information, have information transmitting, at information
Three kinds of functions of reason and driving, before having very big application in fields such as space flight, aviation, navigation, high-speed rail, wind-tunnel, robot skins
Scape.Especially in space flight, aviation field, flying speed, operation mobility, environment sensing and the safety of aircraft can be greatly improved
The ability of maintenance.And aircraft surface pressure measurement is particularly important to the aerodynamic characteristic of exploratory flight device, pressure distribution measurement purpose
Be measurement each component of aircraft, such as wing, empennage, fuselage, control surface, store Combinations surface pressure distribution, be aircraft and
Its each modular construction Strength co-mputation provides load；For the performance of aircraft and its each component, the flow behavior studied around model is mentioned
For data.Can determine whether minimum pressure point position, shock-wave spot, air-flow separate on wing by pressure distribution measurement, with
And act on carry-on lift, pressure drag and the position of Center of Pressure etc..
Currently, conventional pressure distribution passes through pressure hole measurement.In wind tunnel test, pressure sensor generally has surface peace
Dress, insertion are installed and are external to scanning three kinds of modes of valve by pipe-line system.But the presence of pressure tap destroys the whole of model
Body increases the difficulty of processing of model, and cost is high, the period is long.For 1.2m magnitude across supersonic wind tunnel, in model table
500 pressure taps of general at most placement on face, in some positions (such as wing tip, airfoil trailing edge, wing body junction, plug-in of model
Object hanger, abdomeinal fin etc.) due to also very difficult, this sky for causing surveyed modal pressure to be distributed that limited placement pressure tap by structure
Between resolution ratio it is not high.In addition pressure tap change near flow curvature and hole in there are whirlpools, so as to cause pressure port institute
Measuring pressure is higher than true pressure, and different apertures and peritreme irregularly can also generate different influences to measurement.It is another
Kind pressure testing method is optical pressure measuring system (Optical Pressure Measurement System, OPMS), utilizes pressure
The luminous intensity of quick coating PSP (Pressure Sensitive Paint) changes to realize that surface is pressed with coating surface pressure
The measurement of power, this method can provide that spatial resolution is very high, press the pressure point of big several order of magnitude approximate continuous than conventional survey
Cloth measurement.But pressure sensitive paint PSP surface temperature is sensitive, it is necessary to correct, and it is improving measurement accuracy, is reducing measurement
Time etc., there is still a need for further investigations.
The sensitivity of sensor and range are the relationships of conflict, in the wind tunnel test of hypersonic speed, model surface
Pressure span is big, and luvisde and leeward surface pressure even differ several orders of magnitude, and under different stagnation pressures, simulate aircraft
Different flying heights, pressure difference is also very big, can only use different model, the sensor with different ranges and sensitivity at present
To measure.Patent CN103644985A and CN102798498A disclose a kind of multrirange MEMS pressure sensor chip respectively,
Multrirange is realized by integrating multiple independent sensing units on chip, but this method has the disadvantage that multiple independences
Sensor unit be distributed in different location, the pressure of actual measurement different location；Sensor is non-flexible, needs in model surface
The ring globality of model is broken in punching installation.The multi-level microstructure pressure sensor that Wang Jun et al. is proposed, passes through mask pattern
Change silicon chip erosion region, obtains the pyramid micro-structure with different height, that is, improve low pressure sensitivity, and widened measurement
Range.But the sensor is not useable for the measurement of absolute pressure, and uses PDMS for pressure-sensitive material, mechanical property is by temperature
Degree is affected, and is not suitable for aircraft surface pressure measurement.The Shyam of American South Florida State University of Tampa-
Aravamudhan et al. devises a kind of pressure sensor chip for collecting Wheatstone bridge sensing unit in pairs based on flat membrane structure
Back-etching has step-like back chamber to form two layers of diaphragm, and the varistor for organizing Wheatstone bridge in pairs is located at interior diaphragm and outer
Diaphragm edge.When the effect of small pressure, interior diaphragm deflection deformation is obviously to presser sensor, and outer membrane is insensitive.When
When big pressure effect, interior diaphragm bears tension, and varistor change in resistance can be used for measuring pressure on outer membrane at this time.But it should
The problem of sensor does not have flexibility using silicon as substrate, equally exists punching installation, can not be with the conformal installation of curved surface.
Therefore, aiming at the problem that limitation and transducer range that current aircraft surface surveys pressure are with sensitivity, one kind is developed
Flexible multrirange capacitance pressure transducer, suitable for aircraft smart skins has great importance in this field.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of flexible multrirange capacitive pressures
Sensor and its preparation method and application, the pressure sensor can adapt to different measurement of curved surface, and multistage island membrane structure is set
Meter makes sensor possess wide in range survey pressure range while keeping highly sensitive, can meet different wind tunnel tests to survey pressure range and
The demand of sensitivity, solves the contradiction of pressure sensor range and sensitivity, and is prepared by large area, array, can be with
The global measuring for realizing pressure overcomes the shortcomings that normal pressures measurement needs pressure tap and discrete type to measure.
To achieve the above object, according to one aspect of the present invention, a kind of flexible multrirange capacitive pressure biography is proposed
Sensor comprising flexible substrates, multistage support island and the pressure-sensitive film set gradually from bottom to up, wherein the multistage support
Island is by the intermediate circular bosses among pressure-sensitive film and the n for being arranged on pressure-sensitive film and being arranged concentrically with intermediate circular bosses
Grade annular convex platform composition, is provided with top electrode between the intermediate circular bosses and pressure-sensitive film, n grades of annular convex platform from the inside to the outside according to
The secondary first order annular convex platform that is defined as is to n-th grade of annular convex platform, and height is sequentially increased, n-th grade of annular convex platform and flexible
Substrate fitting, and other annular convex platform are not contacted with flexible substrates, are provided in the middle part of the flexible substrates positioned at intermediate boss
Hearth electrode immediately below platform；When sensor, which is under pressure, to be acted on, (n-1)th grade of annular convex platform is contacted with flexible substrates first, with
The increase of pressure, annular convex platform at different levels successively contact flexible substrates, intermediate circular bosses are as electrode effective coverage, when being pressurized
It moves down and does not occur bending and deformation in parallel.
As it is further preferred that the flexible substrates are made of polyimides, with a thickness of 6~10 μm；The multistage branch
Support island is made of polyimides, is highly 30~80 μm；The pressure-sensitive film is made of polyimides, with a thickness of 6~10 μm.
As it is further preferred that the spacing between adjacent annular boss is preferably 150~200 μm, between adjacent annular boss
Difference in height be preferably 10~20 μm；The annulus thickness of annular convex platform is preferably 30~50 μm.
As it is further preferred that the hearth electrode and top electrode are both designed as interdigital structure electrode, the interdigital structure is electric
Pole includes the interdigital electrode along horizontal left and right directions arrangement and the interdigital electrode along horizontal front-rear direction arrangement, and top electrode and bottom
The interdigital electrode of corresponding direction partly overlaps in electrode, to constitute along the differential capacitance of horizontal left and right directions and before and after level
The differential capacitance in direction.
As it is further preferred that the radius of intermediate circular bosses is preferably 200~500 μm, height is at least flexible island film
6 times of substrate thickness.
It is another aspect of this invention to provide that providing a kind of preparation side of flexible multrirange capacitance pressure transducer,
Method comprising following steps:
S1 prepares hearth electrode on a flexible substrate, prepares top electrode on pressure-sensitive film；
S2 spin coating flexible material on the pressure-sensitive film for be prepared with top electrode, front baking solidify back spin resist coating, then before
Baking, photoetching, development remove remaining photoresist to pattern the flexible material of spin coating, and imidization processing is completed at 180 DEG C
The intermediate circular bosses production on multistage support island；
S3 repeats step S2, is sequentially completed the production of first order annular convex platform to n-th grade of annular convex platform, thin in pressure-sensitive with this
The preparation on multistage support island is done directly on film；
The flexible substrates for being prepared with hearth electrode of step S1 are bonded by S4 with multistage support island prepared by step S3, so that more
N-th grade of annular convex platform on grade support island fits together with flexible substrates, completes flexible multrirange capacitive pressure sensing with this
The preparation of device.
As it is further preferred that hearth electrode and top electrode are prepared using following same way: in flexible substrates or pressure-sensitive
Spin coating photoresist in film layer exposes under mask, develops, and magnetron sputtering metal electrode removes remaining photoresist, obtains
Patterned bottom electrode layer.
As it is further preferred that the cured temperature of front baking is 100 DEG C after spin coating flexible material in step S2, the time is
90s；The temperature of front baking is 90 DEG C after spin coating photoresist, time 60s.
As it is further preferred that the technique being bonded in step S4 is under bonder or litho machine, by hearth electrode and top
Electrode alignment presses together n-th grade of annular convex platform with flexible substrates (1) under the action of bonding agent.
It is another aspect of this invention to provide that providing a kind of multrirange smart skins comprising the flexible multrirange
Capacitance pressure transducer,.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, mainly have below
Technological merit:
1. the present invention devises multistage island membrane structure, so that sensor has multistage range and sensitivity, i.e. low pressure range
It is interior that there is high sensitivity, convenient for the measurement of low pressure, while there is high range again, meets the wind tunnel test pair under different wind speed
The demand of pressure range and sensitivity is surveyed, and by the design of film geometric parameters in island at different levels, can get the pressure of arbitrary number of level range
Sensor.
2. the central island film of multistage island of the invention membrane structure is electrode effective coverage, bending deformation is hardly happened, is passed through
Interdigital electrode design can decouple out horizontal direction disturbance and pressure at right angle bring capacitance variations, solve horizontal direction and disturb
Dynamic bring measurement error.
3. sensor of the invention uses flexible material, whole to have flexibility, can be conformal in model surface well, no
Need to punch, thus will not damage model globality, and eliminate punching bring measurement error.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of flexible multrirange capacitance pressure transducer,；
Fig. 2 is the stress diagram of flexible multrirange capacitance pressure transducer, wherein (a) is by positive pressure；
It (b) is to be disturbed by horizontal direction；
Fig. 3 (a)-(g) is the preparation technology flow chart of flexible multrirange capacitance pressure transducer,；
Fig. 4 is the smart skins systematic survey plane wing surfaces pressure for integrating flexible multrirange capacitance pressure transducer,
The schematic diagram of power.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
A kind of flexible multrirange capacitance pressure transducer, provided in an embodiment of the present invention, including set gradually from bottom to up
Flexible substrates 1, multistage support island 2 and pressure-sensitive film 3, flexible substrates be provided with hearth electrode 4 in the middle part of 1 upper surface, pressure-sensitive is thin
Top electrode 5 is provided in the middle part of 3 lower surface of film, hearth electrode 4 and top electrode 5 constitute parallel plate capacitor, wherein multistage support island
2 include that intermediate circular bosses and n grades of annular convex platform, n are defined as needed, generally includes at least two-stage, multistage support island
Upper surface is bonded with the lower surface of pressure-sensitive film 3, and the intermediate circular bosses and n grades of annular convex platform are set to the following table of pressure-sensitive film
Face, wherein intermediate circular bosses are located at the middle part of pressure-sensitive film lower surface, and n grades of annular convex platform are set on pressure-sensitive film lower surface simultaneously
It is arranged concentrically with intermediate circular bosses, n grades of annular convex platform is successively defined as first order annular convex platform, second level annular from the inside to the outside
Boss, third level annular convex platform ..., n-th grade of annular convex platform, and first order annular convex platform to n-th grade of annular convex platform height according to
Secondary increase, n-th grade of annular convex platform are bonded with flexible substrates 1, the hearth electrode 4 in flexible substrates 1 be located at intermediate circular bosses just under
Side.Sensor is initially first order range, when sensor top, which is under pressure, to be acted on, (n-1)th grade of annular convex platform first with it is soft
Property substrate 1 contact, into second level range, with the increase of pressure, annular convex platform at different levels successively contact flexible base from outside to inside
Bottom 1, i.e. the n-th -2 grades annular convex platform are contacted with flexible substrates 1, followed by the n-th -3 grades annular convex platform, until the 1st grade of annular convex platform
Contacted with flexible substrates 1, with sequentially enter third level range, fourth stage range ..., n-th grade of range, be equivalent to be integrated with it is more
A difference range, sensitivity pressure sensor, therefore sensor has both highly sensitive and high range, and intermediate circular bosses are as electricity
Very effective region, when being pressurized, electrode effective coverage hardly happens bending deformation, moves down in parallel.
Specifically, the material for preparing of flexible substrates 1, multistage support island 2 and pressure-sensitive film 3 is temperature-resistant poly-
Acid imide, stability is good, have excellent anticorrosive, antiacid alkali ability, wherein flexible substrates 1 with a thickness of 6~10 μm, it is more
Grade support island 2 height be 30~80 μm, pressure-sensitive film 3 with a thickness of 6~10 μm, will not be because of too thin and easy volume with this substrate
Song is not easy to subsequent technique, too thick sensitivity will not be caused too low, and controls the integral thickness of sensor at hundred microns
It is interior, there is entire sensor flexible well, it can be conformal in curved surface.Further, the spacing between adjacent annular boss is preferred
It is 150~200 μm, the difference in height between adjacent annular boss is preferably 10~20 μm, and the annulus thickness of annular convex platform is preferably 30
~50 μm, keep ranges at different levels and sensitivity profile uniformly appropriate with this.More specifically, the radius of intermediate circular bosses is preferably
200~500 μm, height is at least 6 times of pressure-sensitive film thickness, will not be too small with this testing capacitance value, is convenient for subsequent measurement,
The density that array measures will not be reduced greatly very much, while its bending stiffness is much larger than pressure-sensitive film, guarantees in pressurized process
In hardly happen bending deformation, move down in parallel.
Sensor of the invention uses parallel plate capacitor formula measuring principle, for reference to empty between pressure-sensitive film and flexible substrates
Cavity layer, as the reference pressure chamber for surveying pressure.
According to parallel plate capacitor formula:
Wherein, ε0For permittivity of vacuum, A is upper bottom crown (i.e. hearth electrode 4 and top electrode 5) positive area, εlFor multistage
Support relative dielectric constant, the ε of circular bosses among islandairFor the relative dielectric constant with reference to cavity, dlFor in multistage support island
Between the overall thickness of circular bosses and pressure-sensitive film, dairCavity between the intermediate circular bosses and flexible substrates on multistage support island is thick
Degree, dairWith pressure change.
When ambient pressure variation, pressure-sensitive deformation of thin membrane causes the two poles of the earth plate spacing to change, and capacitor also changes correspondingly,
To realize the measurement of pressure.By making annular convex platform on pressure-sensitive film, multistage island membrane structure is constituted.In low pressure,
The across footpath of pressure-sensitive film is big, is easily deformed, and capacitance variations are also big, high sensitivity.As pressure increases, annular convex platform and flexible base
Lower layer contacts, reduce the across footpath of pressure-sensitive film, when relatively low pressure, it is difficult to deform, capacitance variations are small, improve survey pressure range.
Similar, based on the criterion designed from the inside to the outside, from high to low, step by step, nested multiple annular convex platform be can be realized multiple range
Load cell.Theoretically, the range number that may be implemented is unrestricted, makes it in low pressure with high sensitivity, while again
With big range, meets the needs of wind-tunnel aircraft surface is to pressure range and sensitivity is surveyed.
Since sensor surface unavoidably will receive the effect of horizontal shear force in wind tunnel test, upper/lower electrode is caused to be sent out
The displacement of raw horizontal direction, in order to decouple capacitance variations caused by horizontal direction disturbance and vertical direction pressure.By intermediate island
Thickness design is the several times of pressure-sensitive film thickness, therefore the bending stiffness of intermediate island film is much larger than the bending stiffness of pressure-sensitive film,
Therefore intermediate island film hardly occurs bending and deformation in loading process, which is defined as to " effective coverage " of electrode, it can
Theoretically to realize decoupling by the design of interdigital electrode.
The present invention also provides the preparation methods of flexible multrirange capacitance pressure transducer, include the following steps:
The preparation of S1 hearth electrode 4 and top electrode 5
Take a clean fexible film as flexible substrates 1, cleaning, drying, it is preferred that consider different wind tunnel test temperature
It is very big to spend span, selects high temperature and the good polyimides of Heat pretreatment, it can -200 DEG C of long-term use temperature range~300
℃；The spin coating photoresist in flexible substrates 1 exposes under mask, develops, prepares for the patterning of hearth electrode, it is preferred that
The positive photoresists such as AZ5214 or AZ4620 can be selected；Then magnetron sputtering metal electrode removes remaining photoresist, obtains
Patterned bottom electrode layer, the electrode layer can select the copper or gold of good conductivity, due to copper or gold electrode and flexible substrates
Adhesion is bad, so needing first to sputter one layer of crome metal as adhesion layer；
Take a clean fexible film as pressure-sensitive film 3, cleaning, drying, it is preferred that select high temperature and Heat pretreatment equal
Good Kapton, the spin coating photoresist on flexible package layer expose under mask, develop, and are the figure of top electrode
Case is turned into preparation, it is preferred that can select the positive photoresists such as AZ5214 or AZ4620；Then magnetron sputtering metal electrode is gone
Except remaining photoresist, obtain patterned top electrode layer, which can select the copper or gold of good conductivity, due to copper or
The adhesion of gold electrode and flexible substrates is bad, so needing first to sputter one layer of crome metal as adhesion layer；
The preparation on S2 multistage support island 2
Similarly, it is contemplated that different wind tunnel test temperature spans are very big, select high temperature and the good polyamides of Heat pretreatment
Imines supports island to make multistage, and island films at different levels are successively made by the way of multiple lithographic patterning from the inside to the outside, specific to wrap
Include following steps:
S21 spin coating flexible material solution (polyimide precursor solution) on the pressure-sensitive film 3 for be prepared with top electrode 5,
The front baking 90s time at 100 DEG C of temperature so that flexible material solution solidifies, the then spin coating light on cured flexible material layer
Photoresist, then (or to directly adopt light sensitivity polyamides sub- to pattern the flexible material of photoresist and spin coating simultaneously for photoetching, development
Polyimide resin), remaining photoresist is removed, the production of circular bosses among multistage support island is completed in imidization processing at 180 DEG C, by
In the precursor solution that the flexible material of spin coating is polyimides, in order to obtain high temperature resistant, low temperature resistant, anticorrosive, antiacid alkali is excellent
Good polyimides, needs to make at 180 DEG C of high temperature the polyimide precursor dehydration imidization of spin coating, and reaction obtains polyamides
Imines, when development link for guaranteeing to prepare next stage annular convex platform with this, will not remove annular convex platform prepared by upper level
Fall；
S22 repeats step S21, is sequentially completed the production of first order annular convex platform to n-th grade of annular convex platform, i.e., thin in pressure-sensitive
Except the position spin coating flexible material solution (polyimide precursor solution) for having prepared intermediate circular bosses on film 3, at 100 DEG C of temperature
The lower front baking 90s time so that flexible material solution solidifies, the then spin coating photoresist on cured flexible material layer, then light
It carves, develop to pattern the flexible material of spin coating, remove remaining photoresist, pressure-sensitive is completed in imidization processing at 180 DEG C
The production of the first order annular convex platform of film；Except the intermediate circular bosses and first order annular convex platform prepared on pressure-sensitive film 3
Position spin coating flexible material solution complete second level annular convex platform production, preparation processes at different levels are identical, thin in pressure-sensitive with this
The preparation on multistage support island 2 is done directly on film 3；
The flexible substrates 1 for being prepared with hearth electrode 4 are bonded by S3 with multistage support island 2, so that n-th on pressure-sensitive film grade ring
Shape boss fits together with flexible substrates 1, and the preparation of flexible multrirange capacitance pressure transducer, is completed with this.Preferably,
AZ4620, SU-8 or epoxy resin can be used in bonding agent, and such as in hypervelocity wind tunnel, pressure is often very low, and absolute pressure is logical
Often there was only several hundred pas, can be bonded under vacuum at this time.
Flexible multrirange capacitance pressure transducer, designed by the present invention is carried out by taking the membrane structure of three-level island as an example below
Illustrate, as shown in Figure 1, mainly being formed by 5 layers: flexible base layer 1, the support as entire device；Bottom electrode layer 4 and top electrode
Layer 5, constitutes parallel plate capacitor；Multistage support island 2, pressure-sensitive part and key point of the invention for sensor have
Three-level supports island structure, and sensor is made to have three-level range, and wherein the annular convex platform of innermost layer (close to intermediate circular bosses) is the
Level-one island film, outermost layer annular convex platform are third level island film, the annular convex platform between innermost layer and outermost layer is the second level
Island film, the height of intermediate circular bosses are H1, radius a1, the distance of center to the first order island film of intermediate circular bosses is A1, pressure-sensitive
Film thickness is h, and the height of first order island film is H2, internal diameter A1, outer diameter a2, the height of second level island film is H3, internal diameter be
A2, outer diameter a3, the height of third level island film is H4, internal diameter A3, outer diameter a4, according to from the inside to the outside, from high range to low amounts
Journey, the principle designed step by step successively design the size of island films at different levels, realize different ranges and sensitivity.
Fig. 2 is the stress diagram of the flexible multrirange capacitance pressure transducer, of three-level island membrane structure, such as Fig. 2 (a) institute
Show, under the action of the underpressure, pressure-sensitive deformation of thin membrane region is radius r≤A3Border circular areas, be easily bent deformation, high sensitivity,
Convenient for low pressure measurement, with the increase of pressure, after the annular region of second level island film touches flexible substrates 1, the second level
The support boundary that island film is deformed as film bends, into second level range, pressure-sensitive deformation of thin membrane region becomes radius r≤A2's
Border circular areas, bending resistance improve, and range increases；After when first order island, film annular region touches flexible substrates 1, this first
The support boundary that grade island film is deformed as film bends, into third level range, pressure-sensitive deformation of thin membrane region becomes radius r≤A1
Border circular areas, bending resistance further increases, and range continues to increase, until intermediate island region (i.e. intermediate circular bosses) connects
It contacts flexible substrates 1, is equivalent to and is integrated with the pressure sensor of three different ranges.Theoretically, n island film can be done, is formed
Pressure sensor with n grades of ranges.
In wind-tunnel, sensor inevitably will receive the interference of horizontal direction shearing force, and shearing force can make pressure-sensitive
Film moves horizontally, and lateral displacement occurs for top electrode and hearth electrode, capacitance variations is also resulted in, as shown in Fig. 2 (b).To understand
Coupling positive direction pressure and horizontal direction interfere bring capacitance variations, and the present invention is in one radius of pressure-sensitive film intermediate fabrication
a1Island, and guarantee H1>=6h, makes the bending stiffness of the part be much larger than the bending stiffness of film portion, and such film is being pressurized
In deformation process, r≤a1Partial island is hardly bent, which is defined as to the effective coverage of electrode.In effective coverage
It is interior, electrode is made into interdigital structure.
As shown in Fig. 2 (b), top electrode and hearth electrode are made of two interdigital electrodes, and the two of one of interdigital electrode
It is interdigital along horizontal left and right directions (be defined as x to) distribution, the two of another interdigital electrode are interdigital (to be defined as along horizontal front-rear direction
Y to) distribution, and top electrode is Chong Die with the interdigitated portions of hearth electrode corresponding direction, i.e. two forks that are distributed of top electrode level or so
Refer to two interdigital and hearth electrode levels Chong Die with two interdigitated portions of hearth electrode level or so distribution, the horizontal front and back of top electrode is distributed
The two interdigitated portions overlapping of front and back distribution is constituted the differential capacitance along horizontal left and right directions and the distribution of horizontal front-rear direction with this,
Specifically, the two interdigital two interdigital composition capacitor C with hearth electrode level or so distribution respectively of top electrode level or so distribution1With
C2, the interdigital two interdigital composition capacitor C being distributed respectively with the horizontal front and back of hearth electrode of the two of the horizontal front and back distribution of top electrode3And C4, C1
With C2Constitute the differential capacitance of horizontal left and right directions, C3With C4Horizontal differential capacitance in the front-back direction is constituted, is sheared when by wall surface
When the interference of power, then have:
In formula, ε0For permittivity of vacuum, εlRelative dielectric constant, ε for pressure-sensitive filmairIt is normal for the opposite dielectric of cavity
Number, dlIntermediate lands for multistage support island add the overall thickness of pressure-sensitive film, dairFor the intermediate lands on multistage support island and soft
Property substrate between cavity thickness, Δ d is the distance declined between two-plate (i.e. hearth electrode and top electrode) under pressure, Ax0
The initial positive area of the direction x interdigital electrode, A between two-platey0The initial right opposite of the direction y interdigital electrode between two-plate
Product, Ax、AyRespectively since horizontal direction disturbance causes two-plate along the variation of the direction x, y positive area.
Then:
In formula,The initial capacitance of respectively each capacitor,The only function of Δ d, instead
The corresponding relationship of capacitor and pressure has been answered, it is further noted thatWith Ax、AyIt is all unrelated, illustrate that the electrode design can solve decoupling
Positive direction and horizontal direction bring capacitance variations, that is, eliminate the disturbance of horizontal direction.
The preparation method of sensor of the present invention is illustrated by taking the membrane structure of three-level island as an example, as shown in figure 3, packet
Include following steps:
(1) PI (polyimides) film with a thickness of 6 μm is taken, it is successively ultrasonic respectively in acetone, ethyl alcohol and deionized water
10min is cleaned, with being dried with nitrogen, and 4h is toasted in 80 DEG C of baking oven, then attaches to PI film on 2 cun of silicon wafers, by PI
Film is cut into 2 cun of sizes；
(2) hearth electrode makes, one layer of AZ5214 positive photoresist 7 of spin coating on 2 cun of PI film, revolving speed 3000rpm, when
Between 60s；Then the front baking on hot plate, 90 DEG C of temperature, time 60s；Photo-etching machine exposal 9s again, develop 45s；Then magnetron sputtering C u
Electrode need to first sputter one layer of metal Cr as adhesion layer, specifically first magnetic since the adhesion of Cu electrode and flexible substrates is bad
Control sputtering 100nmCr, sputtering power 75W, pre-sputtering 3min, the oxide layer of removal Cr target material surface, formal sputtering 5min, then
Magnetron sputtering 500nmCu removes the oxide layer of Cu target material surface, formally as hearth electrode, sputtering power 75W, pre-sputtering 3min
15min is sputtered, as shown in Fig. 3 (e)；Above-mentioned PI film is placed in acetone soln, and removes remaining light by sonic oscillation
Photoresist obtains patterned bottom electrode layer, as shown in Fig. 3 (f)；
(3) top electrode makes, and separately takes PI (polyimides) film of a piece of 6 μ m-thick, 2 cun of sizes, the production work with hearth electrode
Skill is identical, and the production of top electrode is completed according to step (2)；
(4) multistage support island production, on the Kapton of step (3) containing top electrode layer before spin-on polyimide
It drives liquid solution (Beijing Bomi Sci. & Tech. Co., Ltd.'s production), spin coating speed and time set according to the island film dimensional parameters of design,
100 DEG C of front baking, time 90s, with primary solidification, 120~140 DEG C of post bake, the time 30~60 minutes, with further solidify and at
Film；Then spin coating AZ5214 positive photoresist, revolving speed 3000rpm, time 60s, the then front baking on hot plate, 90 DEG C of temperature, when
Between 60s, photo-etching machine exposal 9s, by polyimide precursor in ZX-238 developer solution (contain 2.38% tetramethylammonium hydroxide)
It is patterned simultaneously with AZ5214 photoresist, remaining photoresist, last imidization processing, temperature is then removed in acetone soln
180 DEG C, time 60min, polyimide precursor imines is turned into polyimides, completes the intermediate circular bosses on pressure-sensitive film
Production, as shown in Fig. 3 (a), is repeated 3 times above-mentioned steps, selects different masks 6, respectively as shown in Fig. 3 (b), (c), (d),
It is sequentially completed the preparation of level-one island film, second level island film and three-level island membrane structure；
(5) hearth electrode Kapton and step (4) that step (2) obtains are obtained on bonder or litho machine
Kapton containing three-level island membrane structure is aligned and is bonded together, and AZ4620, SU-8 photoresist can be used in bonding agent
Or epoxy resin, AZ4620 and SU-8 needs are heating and curing, epoxy resin can solidify at normal temperatures and pressures, such as Fig. 3 (g) institute
Show.
Multrirange capacitance pressure transducer, of the invention can be applied in smart skins, as shown in figure 4, passing through collection
At the surface pressing for the smart skins systematic survey aircraft wing 8 for having multrirange capacitance pressure transducer, of the invention, array
The pressure sensor film of change is conformal in aerofoil surface, and under the action of stream pressure, sensitization capacitance generates variation, passes through front end
Multiplexer (MUX) is connected to capacitive digital converter (CDC), and capacitance signal is converted directly into voltage digital signal, from
And realize the measurement of entire array capacitor.Generally in wind tunnel test, influence of the lead to air-flow in order to prevent, sensor connects
Wiring is walked inside model, is then connected with equipment below, here for description, by line drawing in outside.In order to reduce parasitism
The influence (conducting wire, tie point etc.) of capacitor, is measured, each capacitive path uses a virtual reference electricity using difference modes
Hold.Sensor array is connected on circuit board by shielded cable.Miniature control unit (MCU) plays control to whole work process
The effect of system should control capacitor conversion chip and acquire in real time, and it is supreme storage measurement chip to be transmitted through again the data output come
Position machine, is further processed, and restores wind-tunnel model surface pressure field distribution.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of flexibility multrirange capacitance pressure transducer, which is characterized in that including the flexible base set gradually from bottom to up
Bottom (1), multistage support island (2) and pressure-sensitive film (3), wherein multistage support island (2) is by among pressure-sensitive film
Between circular bosses and be arranged on pressure-sensitive film and be arranged concentrically with intermediate circular bosses n grade annular convex platform composition, the centre
It is provided between circular bosses and pressure-sensitive film (3) top electrode (5), n grades of annular convex platform are successively defined as first order ring from the inside to the outside
Shape boss is to n-th grade of annular convex platform, and height is sequentially increased, and n-th grade of annular convex platform is bonded with flexible substrates (1), and its
He does not contact annular convex platform with flexible substrates (1), is provided with immediately below intermediate circular bosses in the middle part of the flexible substrates (1)
Hearth electrode (4)；When sensor, which is under pressure, to be acted on, (n-1)th grade of annular convex platform is contacted with flexible substrates (1) first, with
The increase of pressure, annular convex platform at different levels successively contact flexible substrates (1), and intermediate circular bosses are being pressurized as electrode effective coverage
Shi Pinghang, which is moved down, not to occur bending and deformation.
2. flexibility multrirange capacitance pressure transducer, as described in claim 1, which is characterized in that the flexible substrates (1)
It is made of polyimides, with a thickness of 6~10 μm；Multistage support island (2) is made of polyimides, is highly 30~80 μm；
The pressure-sensitive film (3) is made of polyimides, with a thickness of 6~10 μm.
3. flexibility multrirange capacitance pressure transducer, as described in claim 1, which is characterized in that between adjacent annular boss
Spacing is preferably 150~200 μm, and the difference in height between adjacent annular boss is preferably 10~20 μm；The annulus thickness of annular convex platform
Preferably 30~50 μm.
4. flexibility multrirange capacitance pressure transducer, as described in claim 1, which is characterized in that the hearth electrode (4) and
Top electrode (5) is both designed as interdigital structure electrode, which includes the interdigital electrode along horizontal left and right directions arrangement
With the interdigital electrode arranged along horizontal front-rear direction, and the interdigital electrode of top electrode and corresponding direction in hearth electrode partly overlaps,
To constitute along the differential capacitance of horizontal left and right directions and along horizontal differential capacitance in the front-back direction.
5. flexibility multrirange capacitance pressure transducer, as described in claim 1, which is characterized in that the radius of intermediate circular bosses
Preferably 200~500 μm, height is at least 6 times of flexible island film substrate thickness.
6. a kind of preparation method of multrirange capacitance pressure transducer, flexible as described in claim any one of 1-5, feature
It is, includes the following steps:
S1 prepares hearth electrode (4) on flexible substrates (1), and top electrode (5) are prepared on pressure-sensitive film (3)；
S2 spin coating flexible material on the pressure-sensitive film (3) for be prepared with top electrode (5), front baking solidify back spin resist coating, then
Front baking, photoetching, development remove remaining photoresist, imidization has been handled at 180 DEG C to pattern the flexible material of spin coating
At the intermediate circular bosses production on multistage support island；
S3 repeats step S2, the production of first order annular convex platform to n-th grade of annular convex platform is sequentially completed, with this in pressure-sensitive film
(3) preparation of multistage support island (2) is done directly on；
The flexible substrates (1) for being prepared with hearth electrode (4) of step S1 are bonded by S4 with multistage support island (2) prepared by step S3,
So that n-th grade of annular convex platform on multistage support island fits together with flexible substrates (1), flexible multrirange condenser type is completed with this
The preparation of pressure sensor.
7. preparation method as claimed in claim 6, which is characterized in that hearth electrode (4) and top electrode (5) use following phase Tongfang
Formula preparation: the spin coating photoresist in flexible substrates (1) or pressure-sensitive film layer (3) exposes under mask, develops, magnetron sputtering
Metal electrode removes remaining photoresist, obtains patterned bottom electrode layer.
8. preparation method as claimed in claim 6, which is characterized in that the cured temperature of front baking after spin coating flexible material in step S2
Degree is 100 DEG C, time 90s；The temperature of front baking is 90 DEG C after spin coating photoresist, time 60s.
9. preparation method as claimed in claim 6, which is characterized in that the technique being bonded in step S4 is in bonder or photoetching
Under machine, hearth electrode and top electrode are aligned, under the action of bonding agent, are pressed together on n-th grade of annular convex platform with flexible substrates (1)
Together.
10. a kind of multrirange smart skins, which is characterized in that including flexible multrirange as described in any one in claim 1-5
Capacitance pressure transducer,.
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| CN109813470A (en) * | 2019-03-25 | 2019-05-28 | 重庆大学 | A kind of highly sensitive and wide-range pressure sensor |
| CN109974926A (en) * | 2019-05-06 | 2019-07-05 | 深圳市湃科集成技术有限公司 | Multi gear position exports differential pressure pickup |
| CN111169654A (en) * | 2019-12-25 | 2020-05-19 | 中国航空工业集团公司西安飞机设计研究所 | Deformation monitoring device of aircraft wing |
| CN111735560A (en) * | 2020-07-22 | 2020-10-02 | 钛深科技(深圳)有限公司 | Flexible touch pressure sensor |
| CN111780897A (en) * | 2020-08-05 | 2020-10-16 | 吉林大学 | Bionic multilayer capacitive flexible pressure sensor and preparation method thereof |
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| CN113401861A (en) * | 2021-05-21 | 2021-09-17 | 成都凯天电子股份有限公司 | Multi-range integrated composite membrane type MEMS pressure sensor |
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| EP4155705A1 (en) * | 2021-09-23 | 2023-03-29 | BIOTRONIK SE & Co. KG | Pressure sensor |
| CN114061433A (en) * | 2021-09-24 | 2022-02-18 | 华中科技大学 | Breathable wearable strain sensor and preparation method and application thereof |
| WO2023138195A1 (en) * | 2022-01-18 | 2023-07-27 | 清华大学 | Flexible pressure sensor provided with microstructure and manufacturing method therefor |
| CN114414108A (en) * | 2022-01-18 | 2022-04-29 | 清华大学 | Flexible pressure sensor provided with microstructures and method for manufacturing same |
| CN116046226B (en) * | 2023-01-07 | 2023-12-29 | 厚盟深科(杭州)科技有限公司 | MEMS pressure sensor for depth-to-width ratio etching |
| CN116046226A (en) * | 2023-01-07 | 2023-05-02 | 常州大学怀德学院 | MEMS pressure sensor for depth-to-width ratio etching |
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