CN109309458B - 压电驱动装置及其驱动方法、机器人、电子部件输送装置 - Google Patents

压电驱动装置及其驱动方法、机器人、电子部件输送装置 Download PDF

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CN109309458B
CN109309458B CN201810832568.8A CN201810832568A CN109309458B CN 109309458 B CN109309458 B CN 109309458B CN 201810832568 A CN201810832568 A CN 201810832568A CN 109309458 B CN109309458 B CN 109309458B
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piezoelectric
driving
vibration
drive
frequency
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Chinese (zh)
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CN109309458A (zh
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梶野喜一
荒川豊
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/006—Projectors using an electronic spatial light modulator but not peculiar thereto using LCD's
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2006—Lamp housings characterised by the light source
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/56—Accessories
    • G03B17/561—Support related camera accessories

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201810832568.8A 2017-07-28 2018-07-25 压电驱动装置及其驱动方法、机器人、电子部件输送装置 Active CN109309458B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017146028A JP2019030091A (ja) 2017-07-28 2017-07-28 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンター、及び、プロジェクター
JP2017-146028 2017-07-28

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CN109309458A CN109309458A (zh) 2019-02-05
CN109309458B true CN109309458B (zh) 2023-01-10

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US (1) US11482661B2 (enExample)
JP (1) JP2019030091A (enExample)
CN (1) CN109309458B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6891619B2 (ja) * 2017-04-27 2021-06-18 セイコーエプソン株式会社 振動アクチュエーターの制御装置、振動アクチュエーターの制御方法、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP7388174B2 (ja) * 2019-12-20 2023-11-29 セイコーエプソン株式会社 圧電駆動装置の制御方法、圧電駆動装置、および、ロボット
JP7500963B2 (ja) * 2019-12-20 2024-06-18 セイコーエプソン株式会社 圧電駆動装置の制御方法、圧電駆動装置、および、ロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1032272A (zh) * 1987-09-25 1989-04-05 株式会社日立制作所 压电电动机
CN1531183A (zh) * 2003-02-28 2004-09-22 ������������ʽ���� 超声马达、操作装置、光学机构以及电气设备
CN106411173A (zh) * 2015-07-07 2017-02-15 精工爱普生株式会社 压电驱动装置以及机器人

Family Cites Families (17)

* Cited by examiner, † Cited by third party
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JPH07241090A (ja) * 1994-02-28 1995-09-12 Nikon Corp 超音波モータ
JP3453838B2 (ja) * 1994-03-23 2003-10-06 株式会社ニコン 超音波モータ
DE60115220T2 (de) * 2000-03-23 2006-08-17 Elliptec Resonant Actuator Ag Vibrationsantrieb und herstellungsverfahren sowie verwendung desselben
JP4529237B2 (ja) 2000-05-31 2010-08-25 株式会社ニコン 振動アクチュエータ
JP2002010656A (ja) * 2000-06-22 2002-01-11 Nikon Corp 振動アクチュエータ
JP2004320979A (ja) * 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
WO2004112158A1 (en) * 2003-06-13 2004-12-23 Koninklijke Philips Electronics N.V. Piezoelectric actuator and excitation method
WO2006004108A1 (ja) * 2004-07-07 2006-01-12 Seiko Epson Corporation 圧電アクチュエータおよび機器
JP4487662B2 (ja) * 2004-07-12 2010-06-23 セイコーエプソン株式会社 圧電アクチュエータの駆動方法、圧電アクチュエータの駆動装置、電子機器
JP2007151302A (ja) * 2005-11-28 2007-06-14 Seiko Epson Corp 駆動装置および電子機器
JP2007221865A (ja) * 2006-02-14 2007-08-30 Seiko Epson Corp 圧電振動体、圧電振動体の固有振動数調整方法、圧電アクチュエータ、および電子機器
JP4277921B2 (ja) * 2007-06-05 2009-06-10 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2009254198A (ja) * 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子
JP6268999B2 (ja) * 2013-12-06 2018-01-31 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP2015211604A (ja) * 2014-04-30 2015-11-24 セイコーエプソン株式会社 圧電アクチュエーター
JP6442913B2 (ja) * 2014-08-13 2018-12-26 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
JP2016154402A (ja) * 2015-02-20 2016-08-25 セイコーエプソン株式会社 圧電アクチュエーター、圧電アクチュエーターの駆動装置および電子機器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1032272A (zh) * 1987-09-25 1989-04-05 株式会社日立制作所 压电电动机
CN1531183A (zh) * 2003-02-28 2004-09-22 ������������ʽ���� 超声马达、操作装置、光学机构以及电气设备
CN106411173A (zh) * 2015-07-07 2017-02-15 精工爱普生株式会社 压电驱动装置以及机器人

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US11482661B2 (en) 2022-10-25
JP2019030091A (ja) 2019-02-21
CN109309458A (zh) 2019-02-05

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