CN109307850A - Magnetic sensor for suppressing low-frequency noise by utilizing magnetic flux electric control and application method thereof - Google Patents
Magnetic sensor for suppressing low-frequency noise by utilizing magnetic flux electric control and application method thereof Download PDFInfo
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- CN109307850A CN109307850A CN201811004089.3A CN201811004089A CN109307850A CN 109307850 A CN109307850 A CN 109307850A CN 201811004089 A CN201811004089 A CN 201811004089A CN 109307850 A CN109307850 A CN 109307850A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
Abstract
The invention discloses a magnetic sensor for inhibiting low-frequency noise by utilizing magnetic flux electric regulation and an application method thereof. According to the invention, the alternating current electric field is used for periodically regulating and controlling the magnetic permeability of the micro-magnetic structure, the high-frequency modulation of the measured magnetic field in the gap is realized, the influence of low-frequency noise of the sensor is inhibited through the high-pass filter, the low-frequency weak magnetic detection capability of the traditional magneto-resistance sensor is greatly improved, and the micro-magnetic structure has the advantages of low power consumption, good stability, strong anti-interference capability and capability of efficiently inhibiting the low-frequency noise.
Description
Technical field
The present invention relates to Weak magentic-field signal detection technologies, and in particular to a kind of to inhibit low-frequency noise using the regulation of magnetic flux electricity
Magnetic Sensor and its application method, for using electric field regulation micromagnetism structure magnetic conductivity inhibit sensor low-frequency noise shadow
It rings, traditional magnetic resistance sensor weak magnetic detectivity is substantially improved.
Background technique
Weak magentic-field detection is widely used in the fields such as space flight and aviation, intelligent transportation, resource exploration and biomedicine, especially exists
Magnetic target acquisition, geomagnetic matching navigation, Space environment monitor etc. are even more to have act foot concerning the focus technology field of national security
The status of weight.The sensor type that can be used for Weak magentic-field detection at this stage is more, and wherein magnetic resistance sensor is because having spirit
The advantages that sensitivity high, low in energy consumption, small in size, easy batch production, become the up-and-coming youngster in Magnetic Sensor family.
Although the output sensitivity of magnetic resistance sensor is high, the 1/f noise under its output noise especially low frequency
It is very high, it is seriously limited to static and low frequency magnetic field detectivity.For example, GMR Magnetic Sensor high frequency minimum detectable magnetic
The high frequency minimum detectable magnetic field of field energy up to 50pT/ √ Hz, TMR Magnetic Sensor is lower, can reach 2pT/ √ Hz.However by 1/
The influence of f noise, low frequency magnetic field detectivity are seriously affected, and are only capable of reaching 133pT/ √ Hz.It makes an uproar so solving 1/f
The problem of sound is the important means for improving magnetoresistive sensor low frequency magnetic field detectivity.Currently, solving or inhibiting Magnetic Sensor 1/f
The influence of noise is mainly by the following method: low frequency magnetic field being modulated to high frequency magnetic field and is measured, measuring signal is using height
Bandpass filter then realizes filtering out for low frequency 1/f noise.Magnetic can be effectively inhibited in order to which low frequency magnetic field is modulated to high frequency magnetic field
The influence of sensor 1/f noise, researcher successively propose a variety of magnetic modulation means.The Michal of Polytechnics of Czech
Vopalensky proposes the modulator approach of vertical AC bias magnetic field regulation sensitive body sensitivity, and the program may be implemented higher
Modulation efficiency, but the problem of due to coil response speed, modulation is difficult to reach higher frequency, and coil current compared with
Greatly, current noise directly generates magnetic noise, so that this method does not improve the detectivity of Magnetic Sensor.NVE company of the U.S.
A.Jander et al. propose GMR sensitive material or magnetic line of force collector are carried out using externally-applied magnetic field it is periodically magnetically saturated
Chopping modulation thought, but due to modulation efficiency (signal amplitude and former the ratio between direct current or low-frequency magnetic field signal amplitude after modulating) mistake
Low, magnetic signal loses very greatly during moving to high frequency, and the low-frequency acquisition level of Magnetic Sensor is not obviously changed
It is kind.Later, and scholar proposes effective magnetic conductance that magnetic line of force collector is periodically changed using semiconductor laser heating method
Rate is to modulate air-gap field (magnetic conductivity for changing collector soft magnetic materials using temperature change), unfortunately this magnetic modulation methods
Formula is excessively high for the temperature sensitivity requirement of collector soft magnetic materials, and is easy to be influenced by environmental temperature fluctuation, thus still
Have no direct Experimental report.Inhibiting the effective ways of magnetic field sensor 1/f noise at present is: regulating and controlling magnetic force by mechanical oscillation
The magnetic flux of line collector air gap realizes the modulation in tested magnetic field.
Magnetic field sensor 1/f noise is inhibited to have some schemes using mechanical oscillation regulation magnetic flux, wherein modulation effect
Preferably two of them modulation scheme.The first is that the A.Guedes et al. of Portuguese INESC proposes a kind of based on electrostatic
The modulation scheme of laminated film torsion-beam: the laminated film that one is deposited with soft magnetic materials is set above magneto-resistor sensing unit and is turned round
Beam, laminated film torsion-beam can twist up and down under static-electronic driving, directly modulate the magnetic of magneto-resistor sensing unit position
, although the program makes modulation efficiency get a promotion, reach 11%, due to the presence of electrostatic torsion-beam, it is quick to place magneto-resistor
Feel the limited space of unit, so that the volume of magneto-resistor sensing unit is too small, noise characteristic is bad.Second is that science and techniques of defence are big
It learns the vertical modulation scheme (patent No.: CN102353913A) proposed using Piezoelectric Driving: growing high magnetic on a cantilever beam
The soft magnetic film of conductance, soft magnetic film is right against magneto-resistor sensing unit position, and has certain elemental height, drives in piezoelectricity
Under dynamic, cantilever beam drives soft magnetic film to vibrate up and down in vertical direction, so that the magnetic field directly quilt that magneto-resistor sensing unit is detected
It is modulated to high-frequency alternating magnetic field.Modulation efficiency greatly improved in the program, and required driving voltage is relatively low.But due to adopting
The reason of with micro mechanical vibration, that there are resonance control difficulty is big, especially towards three axis in application, Q value is limited, shock resistance
The problems such as poor.
To sum up, in the existing method for inhibiting magnetic field sensor 1/f noise, by micro mechanical structure by low frequency magnetic field tune
Making high frequency and carrying out detection is current more effective method.However, such method introduces mechanical oscillation resonance control difficulty
Greatly, vulnerable to environmental disturbances, stability is insufficient the problems such as.
Summary of the invention
The technical problem to be solved in the present invention: the low-frequency noise for existing Magnetic Sensor based on mechanical oscillation Flux modulation
Suppressing method exist control difficulty it is big, vulnerable to environmental disturbances, stability is insufficient the problems such as, provide and a kind of utilize the regulation suppression of magnetic flux electricity
The Magnetic Sensor and its application method of low-frequency noise processed, the present invention regulate and control micromagnetism structure magnetic conductivity using electric field, inhibit sensing
Device 1/f noise influences, and traditional magnetic resistance sensor weak magnetic detectivity is substantially improved, with low in energy consumption, stability is good, anti-interference
Ability is strong, and the advantages of can efficiently inhibit 1/f noise.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention are as follows:
The present invention provides a kind of Magnetic Sensor for regulating and controlling inhibition low frequency 1/f noise using magnetic flux electricity, including dielectric base, institute
It is upper to state first magnetic line of force collector and second magnetic line of force collector, the dielectric base of the dielectric base equipped with gap arrangement
The bottom in the gap between the first magnetic line of force collector and the second magnetic line of force collector is equipped with magneto-resistor sensing unit, between described
The upside of gap is equipped with magnetic flux electricity and regulates and controls unit, magnetic flux electricity regulation unit include stack gradually from bottom to top arrangement electricity it is adjustable
Magnetic film, piezoelectric substrate hearth electrode, piezoelectric substrate and piezoelectric substrate top electrode, the piezoelectric substrate hearth electrode and piezoelectric substrate top
The driving electrodes of electrode composition piezoelectric substrate.
Preferably, piezoelectric substrate hearth electrode one end by the first articulamentum supporting and fixing on a dielectric base, it is another
End passes through the second articulamentum supporting and fixing on a dielectric base.
Preferably, the electric Adjustable magnetic film is the high magnetic conductive film of high-magnetostriction coefficient.
The present invention provides a kind of application method of aforementioned Magnetic Sensor for regulating and controlling to inhibit low frequency 1/f noise using magnetic flux electricity,
Implementation steps include:
1) ac voltage signal is loaded between the driving electrodes of piezoelectric substrate, exchange driving electricity is generated in piezoelectric substrate
Field simultaneously periodically strains, the periodic strain of piezoelectric substrate since the inverse piezoelectric effect of piezoelectric substrate is generated in stress axis direction
It is transferred to electric Adjustable magnetic film and generates periodic stress on electric Adjustable magnetic film, under the action of cyclic stress, electricity can
The magnetic conductivity cyclically-varying of magnetic film is adjusted, so that electric Adjustable magnetic film, the first magnetic line of force collector, the second magnetic line of force collector
Also generating period sexually revises the magnetic circuit formed between three, so that the low frequency in gap, which is tested magnetic field, is modulated to high frequency magnetic
, the output signal in the output signal of magneto-resistor sensing unit comprising required Magnetic Field and low-frequency noise are in frequency at this time
It separates；
2) output signal of magneto-resistor sensing unit is filtered out into low-frequency noise, accomplished magnetic sensing by high-pass filter
Measured signal after the inhibition of device low-frequency noise.
Preferably, it is generated shown in periodic stress such as formula (1) in step 1) in electric Adjustable magnetic film；
σ=Y εEsin(2πfEt) (1)
In formula (1), σ expression generates periodic stress on electric Adjustable magnetic film, and Y is the Young mould of electric Adjustable magnetic film
Amount, fEFor the frequency of the on-load voltage signal between the driving electrodes of piezoelectric substrate, εEIt is being answered for the inverse piezoelectric effect of piezoelectric substrate
Power axis direction generates the amplitude periodically strained.
Compared to the prior art, the present invention inhibits the Magnetic Sensor of low frequency 1/f noise to have subordinate using the regulation of magnetic flux electricity
The utility model has the advantages that the upside in gap of the present invention, which is equipped with magnetic flux electricity, regulates and controls unit, it includes successively layer from bottom to top that magnetic flux electricity, which regulates and controls unit,
Piezoelectric substrate hearth electrode, piezoelectric substrate and the piezoelectric substrate top electrode that laying up is set, piezoelectric substrate hearth electrode and piezoelectric substrate top electricity
Pole constitutes the driving electrodes of piezoelectric substrate, and the downside of piezoelectric substrate hearth electrode is equipped with electric Adjustable magnetic film, using piezoelectric substrate
Modulated structure is collectively formed with electric Adjustable magnetic layer, the modulation of air-gap field is realized by electric field, the mechanical resonant control avoided
Difficulty is big, vulnerable to environmental disturbances, the problem of stability deficiency, effectively increases the low-frequency acquisition ability of magnetic field sensor.
Apply high-frequency alternating voltage in the piezoelectric substrate of Magnetic Sensor, the present invention inhibits low frequency 1/f using the regulation of magnetic flux electricity
The application method of the Magnetic Sensor of noise applies high-frequency alternating voltage by the piezoelectric substrate in Magnetic Sensor, and is filtered by high pass
Wave device filters out low-frequency noise, realizes the inhibition of Magnetic Sensor 1/f noise, can be improved Magnetic Sensor low frequency magnetic field measurement accuracy.
Detailed description of the invention
Fig. 1 is the overlooking structure diagram of Magnetic Sensor of the embodiment of the present invention.
Fig. 2 is schematic cross-section at the A-A of Fig. 1.
Fig. 3 is schematic cross-section at the B-B of Fig. 1.
Fig. 4 is the wire connection diagram of the magnetic susceptibility unit in the embodiment of the present invention.
Fig. 5 is the electrical schematics of the magnetic susceptibility unit composition electric bridge in the embodiment of the present invention.
Fig. 6 is the modulated structure schematic diagram in the embodiment of the present invention.
Fig. 7 is the schematic illustration of the air-gap field modulation in the embodiment of the present invention.
Fig. 8 is the schematic diagram of the 1/f noise suppressing method in the embodiment of the present invention.
Marginal data: 1, dielectric base；2, the first magnetic line of force collector；22, the second magnetic line of force collector；23, gap；3,
Magneto-resistor sensing unit；4, magnetic flux electricity regulates and controls unit；41, electric Adjustable magnetic film；42, piezoelectric substrate hearth electrode；43, piezoelectricity base
Bottom；44, piezoelectric substrate top electrode.
Specific embodiment
As shown in Figure 1, Figure 2 and Figure 3, regulate and control to inhibit the magnetic of low frequency 1/f noise using magnetic flux electricity the present embodiment provides a kind of
Sensor includes dielectric base 1, and dielectric base 1 is equipped with the first magnetic line of force collector 21 of gap arrangement and second magnetic line of force gathers
Storage 22, the bottom in the gap 23 in dielectric base 1 between the first magnetic line of force collector 21 and the second magnetic line of force collector 22
Portion is equipped with magneto-resistor sensing unit 3, and the upside in gap 23 is equipped with magnetic flux electricity and regulates and controls unit 4, and it includes under that magnetic flux electricity, which regulates and controls unit 4,
Piezoelectric substrate hearth electrode 42, piezoelectric substrate 43 and the piezoelectric substrate top electrode 44 of arrangement, piezoelectric substrate bottom electricity are stacked gradually on and
Pole 42 and piezoelectric substrate top electrode 44 constitute the driving electrodes of piezoelectric substrate 43, and the downside of the piezoelectric substrate hearth electrode 42 is set
There is electric Adjustable magnetic film 41.
In the present embodiment, the selection of dielectric base 1 has the silicon base of insulating layer.
There is gap 23, magnetic field is in magnetic in gap 23 between first magnetic line of force collector 21 and the second magnetic line of force collector 22
It is amplified under the action of line of force collector (the first magnetic line of force collector 21 and the second magnetic line of force collector 22).
In the present embodiment, electric Adjustable magnetic film 41 is the high magnetic conductive film of high-magnetostriction coefficient, between magnetic conductivity height is conducive to
The magnetic field of gap modulation gap, magnetostriction coefficient is conducive to improve greatly the ability of regulation and control of electric 41 magnetic conductivity of Adjustable magnetic film, used
Material is preferably chosen nickel, dilval or ferrocobalt.The position of electric Adjustable magnetic film 41 is located at magnetic line of force collector
The surface in gap 23.In the present embodiment, piezoelectric substrate hearth electrode 42 is metal layer, preferentially uses chromium, but not limited to this；
Piezoelectric substrate hearth electrode 42 is made of chromium, since the hardness of chromium is larger, is conducive to the strain high efficiency of the generation of piezoelectric substrate 42
Ground is transferred in electric Adjustable magnetic film 41.Piezoelectric substrate 43 is piezoelectric material, it is preferred to use lead magnesium niobate-lead titanate PMN-PT,
At least one of lead zirconate titanate PZT is made, but not limited to this.Piezoelectric substrate top electrode 44 is metal layer, is preferably used
Gold is made, but not limited to this.
As shown in figure 3,42 one end of piezoelectric substrate hearth electrode described in the present embodiment passes through 45 supporting and fixing of the first articulamentum
In dielectric base 1, the other end first articulamentum 45 and two connections in dielectric base 1 by 46 supporting and fixing of the second articulamentum
Layer 46 is for connecting magnetic flux electricity regulation unit 4 and insulation base 1, and fixed magnetic flux electricity regulates and controls unit 4.In the present embodiment, first connects
Layer 45 and two articulamentums 46 are connect using conductive silver glue, conductive silver glue is conducive to the lead of hearth electrode.
As shown in Figure 4 and Figure 5, magneto-resistor sensing unit 3 is that four magneto-resistor sensing unit 3#1~3#4 (are preferably used
TMR) the full bridge structure (Wheatstone bridge) formed, wherein the first magneto-resistor sensing unit 3#1 and the second magneto-resistor sensing unit
3#3 is sensitive magneto-resistor sensing unit, is located in gap 23, sensitive magnetic field signal, resistance value becomes R0+△R；Third magnetoelectricity
Hindering sensing unit 3#2 and the 4th magneto-resistor sensing unit 3#4 is to be located at the magnetic line of force collector with reference to magneto-resistor sensing unit
Lower section, insensitive magnetic field signal, resistance value R0It does not change；Two sensitive magneto-resistor sensing units and two refer to magnetic
Resistance sensing unit constitutes the Wheatstone bridge of half-bridge sensitivity.In supply voltage VcUnder the action of, the output V of Wheatstone bridgeo
Are as follows:
In above formula, R0For the resistance value with reference to magneto-resistor sensing unit, R0+ △ R is the resistance of sensitive magneto-resistor sensing unit
Value, VcFor supply voltage.
The working principle that magnetic flux electricity regulates and controls unit 4 is as follows: the piezoelectric substrate 43 is in piezoelectric substrate hearth electrode 42 and piezoelectricity
On-load voltage signal V between substrate top electrode 44Esin(2πfET), then driving electric field E=E is generated in piezoelectric substrate 43Esin
(2πfET), due to the inverse piezoelectric effect of piezoelectric substrate 43, periodic strain stress is generated in the stress axis direction of piezoelectric substrate 43
=εEsin(2πfET) (stress direction of strain is as shown in Figure 6), the strain of piezoelectric substrate 43 are transferred to electric Adjustable magnetic film 41,
Periodic stress σ=Y ε=Y ε is generated in electric Adjustable magnetic film 41Esin(2πfET), wherein Y be electric Adjustable magnetic film 41 poplar
Family name's modulus.It under the action of the converse magnetostriction coefficient of electric Adjustable magnetic film 41, is influenced by cyclic stress, electricity can adjustable magnetic
The magnetic conductivity of property film 41 is by periodical regulation.
The present embodiment inhibits the implementation steps packet of the application method of the Magnetic Sensor of low frequency 1/f noise using the regulation of magnetic flux electricity
It includes:
1) ac voltage signal is loaded between the driving electrodes of piezoelectric substrate 43, exchange is generated in piezoelectric substrate 43 and is driven
Electromotive field simultaneously periodically strains, the week of piezoelectric substrate 43 since the inverse piezoelectric effect of piezoelectric substrate 43 is generated in stress axis direction
The strain of phase property is transferred to electric Adjustable magnetic film 41 and generates periodic stress on electric Adjustable magnetic film 41, in cyclic stress
Under effect, the magnetic conductivity cyclically-varying of electric Adjustable magnetic film so that electric Adjustable magnetic film 41, the first magnetic line of force collector 21,
Also generating period sexually revises the magnetic circuit formed between second magnetic line of force collector, 22 three, so that the low frequency quilt in gap 23
It surveys magnetic field and is modulated to high frequency magnetic field, at this time include the output of required Magnetic Field in the output signal of magneto-resistor sensing unit 3
Signal and low-frequency noise separate in frequency；
2) output signal of magneto-resistor sensing unit 3 is filtered out into low-frequency noise by high-pass filter, accomplished magnetic passes
Measured signal after the inhibition of sensor low-frequency noise.
In the present embodiment, generated shown in periodic stress such as formula (1) in step 1) in electric Adjustable magnetic film 41；
σ=Y ε=Y εEsin(2πfEt) (1)
In formula (1), σ expression generates periodic stress on electric Adjustable magnetic film 41, and Y is the poplar of electric Adjustable magnetic film 41
Family name's modulus, ε are that the stress axis direction of piezoelectric substrate 43 generates periodically strain, fEFor the driving electrodes of piezoelectric substrate 43 it
Between on-load voltage signal frequency, εEIt generates in stress axis direction and periodically strains for the inverse piezoelectric effect of piezoelectric substrate 43
Amplitude.
As shown in fig. 7, magnetic flux is assembled through the first magnetic line of force collector 21, magnetic flux passes through from two-way when reaching at gap 23,
Respectively electric Adjustable magnetic film 41 and gap 23, magnetic flux is returning to the second magnetic line of force collector 22 later.In electric Adjustable magnetic film
In the case where 41 magnetic conductivity variation, it is unaffected by the magnetic flux that the first magnetic line of force collector 21 is assembled, such as Fig. 7
(a) shown in, electric 41 magnetic conductivity of Adjustable magnetic film is larger, and the magnetic flux of the first magnetic line of force collector 21 is mainly from electric Adjustable magnetic film 41
Pass through, at this point, the tested magnetic field in gap 23 is smaller；However as shown in Fig. 7 (b), electric 41 magnetic conductivity of Adjustable magnetic film is smaller, from electricity
The magnetic flux that Adjustable magnetic film 41 passes through becomes smaller, at this point, the magnetic field in gap 23 becomes larger.So making electric Adjustable magnetic in alternating current
In the case where the magnetic conductivity cyclically-varying of film 41, the tested magnetic field in gap 23 is modulated to high-frequency signal, as shown in Fig. 8 (a).
Output signal is high-frequency signal from low frequency modulations in frequency, that is, realizes point of measured signal and low-frequency noise on frequency spectrum
From as shown in Fig. 8 (b).At this point, using High frequency filter technology and locking amplifying technique can be realized low-frequency noise inhibition and by
Survey the detection of signal.The application method for the Magnetic Sensor that the present embodiment regulates and controls inhibition low frequency 1/f noise using magnetic flux electricity makes magnetic
Field is tested magnetic field modulation to high frequency output from low frequency, then the inhibition of low-frequency noise, magnetic field modulation are realized by high-pass filtering technology
Frequency, that is, piezoelectric substrate drive voltage signal frequency fE.Compared to the modulating frequency of machinery modulation before, modulating frequency fEIt can
By the frequency active control of driving voltage signal, it more can guarantee that modulating frequency approaches or cross the 1/f noise of sensor
Break frequency.And the shortcomings that being easy this method avoid mechanical oscillation by external interference, improves the stability of modulation.
It should be noted that more iron hetero-junctions are collectively formed with piezoelectric substrate 43 in electric Adjustable magnetic film 41 in the present embodiment
Structure preferentially realizes that electric field regulates and controls magnetic anisotropy using stress as medium, but its implementation method is without being limited thereto, to magnetic
Anisotropy, which is regulated and controled, to be realized by the modes such as charge medium, exchange biased.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (5)
1. a kind of regulate and control to inhibit the Magnetic Sensor of low-frequency noise using magnetic flux electricity, including dielectric base (1), the dielectric base
(1) the first magnetic line of force collector (21) and the second magnetic line of force collector (22) of gap arrangement, the dielectric base (1) are equipped with
The bottom in the upper gap (23) between the first magnetic line of force collector (21) and the second magnetic line of force collector (22) is equipped with magnetoelectricity
It hinders sensing unit (3), it is characterised in that: the upside of the gap (23) is equipped with magnetic flux electricity regulation unit (4), the magnetic flux electricity tune
Controlling unit (4) includes the electric Adjustable magnetic film (41) for stacking gradually arrangement from bottom to top, piezoelectric substrate hearth electrode (42), piezoelectricity base
Bottom (43) and piezoelectric substrate top electrode (44), the piezoelectric substrate hearth electrode (42) and piezoelectric substrate top electrode (44) constitute piezoelectricity
The driving electrodes of substrate (43).
2. according to claim 1 regulate and control to inhibit the Magnetic Sensor of low-frequency noise using magnetic flux electricity, it is characterised in that: described
Piezoelectric substrate hearth electrode (42) one end by (45) supporting and fixing of the first articulamentum on dielectric base (1), the other end pass through the
(46) supporting and fixing of two articulamentums is on dielectric base (1).
3. according to claim 1 regulate and control to inhibit the Magnetic Sensor of low-frequency noise using magnetic flux electricity, it is characterised in that: described
Electric Adjustable magnetic film (41) is the high magnetic conductive film of high-magnetostriction coefficient.
4. regulating and controlling to inhibit the Magnetic Sensor of low-frequency noise described in a kind of any one of claims 1 to 3 using magnetic flux electricity
Application method, it is characterised in that implementation steps include:
1) ac voltage signal is loaded between the driving electrodes of piezoelectric substrate (43), exchange is generated in piezoelectric substrate (43) and is driven
Electromotive field simultaneously periodically strains, piezoelectric substrate (43) since the inverse piezoelectric effect of piezoelectric substrate (43) is generated in stress axis direction
Periodic strain be transferred to electric Adjustable magnetic film (41) and generate periodic stress on electric Adjustable magnetic film (41), in the period
Property stress under the action of, the magnetic conductivity cyclically-varying of electric Adjustable magnetic film, so that electric Adjustable magnetic film (41), first magnetic line of force
Also generating period sexually revises the magnetic circuit formed between collector (21), the second magnetic line of force collector (22) three, so that
Low frequency in gap (23) is tested magnetic field and is modulated to high frequency magnetic field, includes in the output signal of magneto-resistor sensing unit (3) at this time
The output signal and low-frequency noise of required Magnetic Field separate in frequency；
2) output signal of magneto-resistor sensing unit (3) is filtered out into low-frequency noise, accomplished magnetic sensing by high-pass filter
Measured signal after the inhibition of device low-frequency noise.
5. the application method of the Magnetic Sensor according to claim 4 for regulating and controlling to inhibit low-frequency noise using magnetic flux electricity, special
Sign is, generates shown in periodic stress such as formula (1) in step 1) in electric Adjustable magnetic film (41)；
σ=Y εEsin(2πfEt) (1)
In formula (1), σ expression generates periodic stress on electric Adjustable magnetic film (41), and Y is the poplar of electric Adjustable magnetic film (41)
Family name's modulus, fEFor the frequency of the on-load voltage signal between the driving electrodes of piezoelectric substrate (43), εEFor the inverse of piezoelectric substrate (43)
Piezoelectric effect generates the amplitude periodically strained in stress axis direction.
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| CN109556647A (en) * | 2018-11-30 | 2019-04-02 | 苏州大学 | A kind of low-frequency noise inhibition device and method of tunnel magneto-resistance effect sensor |
| CN111613718A (en) * | 2020-05-26 | 2020-09-01 | 中国人民解放军国防科技大学 | Enhancement mode film magnetism adjustable structure |
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