CN107910436A - A kind of preparation method of complex phase multi-iron material - Google Patents

A kind of preparation method of complex phase multi-iron material Download PDF

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Publication number
CN107910436A
CN107910436A CN201711334594.XA CN201711334594A CN107910436A CN 107910436 A CN107910436 A CN 107910436A CN 201711334594 A CN201711334594 A CN 201711334594A CN 107910436 A CN107910436 A CN 107910436A
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thin film
substrate
ferroelectric
ferromagnetic thin
stress
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CN107910436B (en
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李静
彭晓领
杨艳婷
徐靖才
王攀峰
金红晓
金顶峰
洪波
王新庆
葛洪良
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China Jiliang University
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00Magnetostrictive devices
    • H10N35/80Constructional details
    • H10N35/85Magnetostrictive active materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00Magnetostrictive devices
    • H10N35/01Manufacture or treatment

Abstract

The present invention relates to a kind of preparation method of complex phase multi-iron material.The present invention is on substrate or applying electric field makes ferroelectric substrate produce stress predeformation, or applies tension or compression generation predeformation in ferroelectric substrate by mechanical device;Ferromagnetic thin film is being grown by the methods of pulsed laser deposition, magnetron sputtering or molecular beam epitaxy on the ferroelectric thin film substrate of predeformation;After the completion of ferromagnetic thin film preparation, the electric field or mechanical device in ferroelectric substrate are removed, obtains complex phase multi-iron material;Ferroelectric substrate can not become original form again again under the constraint of ferromagnetic thin film, thus stress is produced in interface, and the magnetism of ferromagnetic thin film is regulated and controled by the stress.Prestressed presence in the complex phase multi-iron material that the present invention obtains so that less external electric field may change the magnetized state of ferromagnetic thin film, reduce response field.

Description

A kind of preparation method of complex phase multi-iron material
Technical field
The present invention relates to a kind of preparation method of complex phase multi-iron material, belong to field of material preparation.
Background technology
In modern science and technology, magnetic material and ferroelectric material have very extensive and important application, have penetrated into us The various pieces of daily life.With the development of science and technology and the requirement to device miniaturization, multifunction, people are natural And it is right expect two kinds of properties being incorporated among same material, obtain has magnetic and ferroelectric material at the same time.And material Intercouple between magnetism and ferroelectricity in material, it, to magnetic regulation and control, is new prototype to ferroelectricity or electric field to realize magnetic field The storage mode that device such as autotelegraph magnetic is read provides may.
The Schmid of University of Geneva proposed the concept of multi-ferroic material in 1994 first, it refers in the material There are two or more iron, such as ferroelectricity, ferromagnetic, iron bullet at the same time.However, up to the present really ferromagnetic ferroelectricity coexists Single-phase compounds it is considerably less, the single phase multi-iron material largely studied is the material for having anti-ferromagnetism and spontaneous electric polarization. Ferroelectric-ferromagnetic is difficult to coexist in monophase materials, and its magnetoelectric effect is weaker, limits their practical application.But By ferromagnetic material and ferroelectric material, as certain way, the composite material with reference to obtained from is referred to as complex phase multi-iron material.
Magneto-electric coupled in the more iron of complex phase needs intermediate physical parameter, is transmitted by the interface between two-phase.Piezoelectricity Complicated utilization between material and magnetostriction materials is stress transfer between two-phase, since product effect result in magnetoelectricity Coupling.Ferroelectric material can produce strain under applied voltage(Inverse piezoelectric effect), and voltage can be produced under impressed pressure(Piezoelectricity Effect);Ferromagnetic material can produce strain under externally-applied magnetic field(Magnetostrictive effect), and magnetizing under impressed pressure to become Change(Piezomagnetism).If ferroelectric material and ferromagnetic material is compound in some way, such as block Particles dispersed system, iron Ferroelectric magnetic sheet bonds the layer structure of composition and ferromagnetic thin film prepares hetero-junctions formed on the substrate of piezoelectricity etc., leads to Cross extra electric field(Magnetic field)Strain is produced to be delivered in another phase so as to magnetism via interface(Polarization)Have an impact, realize electricity Field regulation and control are magnetic or magnetic field regulates and controls electric polarization.
Complex phase multi-iron material can be divided into according to the mode of communicating between two-phase:0-3 type Particles dispersed systems, 2-2 type layers Shape compound system and 1-3 type nano-pillar compound systems.Wherein 2-2 types lamellar composite system refers to ferromagnetic and ferroelectric one One layer of layer is deposited on substrate, either directly ferromagnetic layer is grown in ferroelectric substrate or will be ferromagnetic with ferroelectric material high temperature Sintering connects the multi-iron material of composition.This complex method can show larger magnetoelectric effect.Recent complex phase More iron develop along the direction of more iron hetero-junctions, and ferromagnetic layer is grown in ferroelectric substrate, or by ferroelectricity on nanoscale With ferromagnetic material is compound prepares more iron tunnels section, research multi-iron material interface is magnetic, the coupling between ferroelectricity and transport property Close.
But in the research of current multiferroic heterojunction structure the automatically controlled magnetic effect of generally existing it is weak, it is necessary to regulation and control field intensity it is high The shortcomings of, therefore the preparation method of new hetero-junction thin-film is developed, forceful electric power control magnetic effect and low-response field etc. are obtained as working as Business is anxious.
The content of the invention
It is an object of the invention to provide a kind of preparation method of complex phase multi-iron material.
The present invention makes ferroelectric substrate that predeformation occur by applying electric field or mechanical device, then prepares complex phase on substrate Multi-iron material, removes electric field or mechanical device after the completion of preparation, ferroelectric substrate can not become again again under the constraint of ferromagnetic thin film Original form, thus stress is produced in interface, the magnetism of ferromagnetic thin film is regulated and controled by the stress.
The present invention's concretely comprises the following steps:
1)Substrate selects
It is ferroelectric substrate material to select one kind in PMN-PT, BFO, PZT, BTO, PTO, PZN-PT;
2)Substrate prestressing force loads
By step 1)In ferroelectric substrate material be fixed in membrane equipment, or apply electric field make ferroelectric substrate produce stress become in advance Shape, or apply tension or compression generation predeformation in ferroelectric substrate by mechanical device;
3)It is prepared by ferromagnetic thin film
Grown on the ferroelectric thin film substrate of predeformation by the methods of pulsed laser deposition, magnetron sputtering or molecular beam epitaxy Ferromagnetic thin film;
The ferromagnetic thin film is Fe, Co, Ni, TbDyFe, NiMnGa, CoFe, CoFe2O4、Fe3O4, in LaSrMnO one Kind;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetic thin film preparation, removing step 2)In be applied to electric field or mechanical device in ferroelectric substrate, obtain Complex phase multi-iron material;Ferroelectric substrate can not become original form again again under the constraint of ferromagnetic thin film, thus be produced in interface Stress, the magnetism of ferromagnetic thin film are regulated and controled by the stress.
Beneficial effects of the present invention:Make ferroelectric substrate that predeformation occur by applying electric field or mechanical device, it is more in complex phase After the completion of prepared by iron material, electric field or mechanical device are removed, ferroelectric substrate can not become original again again under the constraint of ferromagnetic thin film Carry out shape, thus stress is produced in interface, the magnetism of ferromagnetic thin film is regulated and controled by the stress;Subsequently again by applying electric field When studying its automatically controlled magnetic effect, stress and prestressing force existing for script is superimposed in complex phase multi-iron material that electric field produces, produce Combined stress the magnetized state of ferromagnetic thin film is changed, realize the technique effect of automatically controlled magnetic;Due to the more iron materials of complex phase Prestressed presence in material so that less external electric field may change the magnetized state of ferromagnetic thin film, reduce response field.
Embodiment
With reference to embodiment, the present invention will be described in detail, so as to more fully understand the purpose of the present invention, feature and Advantage.Although the present invention is described with reference to the specific embodiment, it is not intended that the invention be limited to described Specific embodiment.On the contrary, the embodiment that can be included in the protection domain defined in the claims in the present invention is carried out Replacement, improvement and equivalent embodiment, belong to protection scope of the present invention.For the technological parameter not marked especially, Can routinely technology it carry out.
The present invention's concretely comprises the following steps:
1)Substrate selects
It is ferroelectric substrate material to select one kind in PMN-PT, BFO, PZT, BTO, PTO, PZN-PT;
2)Substrate prestressing force loads
By step 1)In ferroelectric substrate material be fixed in membrane equipment, or apply electric field make ferroelectric substrate produce stress become in advance Shape, or apply tension or compression generation predeformation in ferroelectric substrate by mechanical device;
3)It is prepared by ferromagnetic thin film
Grown on the ferroelectric thin film substrate of predeformation by the methods of pulsed laser deposition, magnetron sputtering or molecular beam epitaxy Ferromagnetic thin film;
The ferromagnetic thin film is Fe, Co, Ni, TbDyFe, NiMnGa, CoFe, CoFe2O4、Fe3O4, in LaSrMnO one Kind;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetic thin film preparation, removing step 2)In be applied to electric field or mechanical device in ferroelectric substrate, obtain Complex phase multi-iron material;Ferroelectric substrate can not become original form again again under the constraint of ferromagnetic thin film, thus be produced in interface Stress, the magnetism of ferromagnetic thin film are regulated and controled by the stress.
On compound multi-iron material apply electric field study its automatically controlled magnetic effect when, electric field produce stress and in the more iron of complex phase Prestressing force existing for script is superimposed in material, and the combined stress of generation makes the magnetized state of ferromagnetic thin film change, and is realized The technique effect of automatically controlled magnetic.
Embodiment 1:
Step is:
1)Substrate selects
It is ferroelectric substrate material to select PMN-PT;
2)Substrate prestressing force loads
By step 1)In PMN-PT ferroelectric substrate materials be fixed in pulsed laser deposition equipment, apply electric field make ferroelectric substrate Produce stress predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetic Fe film is grown by pulse laser sediment method on the PMN-PT ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetic Fe film preparation, removing step 2)In be applied to electric field in PMN-PT ferroelectric substrates, answered Phase multi-iron material;PMN-PT ferroelectric substrates can not become original form again again under the constraint of ferromagnetic Fe film, thus at interface Place produces stress, and the magnetism of ferromagnetic Fe film is regulated and controled by the stress.
Embodiment 2:
1)Substrate selects
It is ferroelectric substrate material to select BFO;
2)Substrate prestressing force loads
By step 1)In BFO ferroelectric substrate materials be fixed in magnetron sputtering apparatus, by mechanical device in ferroelectric substrate Apply tension and produce predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism Co films are grown by magnetically controlled sputter method on the BFO ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism Co film preparations, removing step 2)In be applied to mechanical device in ferroelectric substrate, obtain complex phase Multi-iron material;BFO ferroelectric substrates can not become original form again again under the constraint of ferromagnetism Co films, thus be produced in interface Stress, the magnetism of ferromagnetism Co films are regulated and controled by the stress.
Embodiment 3:
1)Substrate selects
It is ferroelectric substrate material to select PZT;
2)Substrate prestressing force loads
By step 1)In PZT ferroelectric substrate materials be fixed in molecular beam epitaxial device, by mechanical device in ferroelectric substrate Upper application compression produces predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism Ni films are grown by molecular beam epitaxial method on the PZT ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism Ni film preparations, removing step 2)In be applied to mechanical device in PZT ferroelectric substrates, answered Phase multi-iron material;PZT ferroelectric substrates can not become original form again again under the constraint of ferromagnetism Ni films, thus be produced in interface Raw stress, the magnetism of ferromagnetism Ni films are regulated and controled by the stress.
Embodiment 4:
1)Substrate selects
It is ferroelectric substrate material to select BTO;
2)Substrate prestressing force loads
By step 1)In BTO ferroelectric substrate materials be fixed in pulsed laser deposition equipment, apply electric field produce ferroelectric substrate Raw stress predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism TbDyFe films are grown by pulse laser sediment method on the BTO ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism TbDyFe film preparations, removing step 2)In be applied to electric field in BTO ferroelectric substrates, answered Phase multi-iron material;BTO ferroelectric substrates can not become original form again again under the constraint of ferromagnetism TbDyFe films, thus at interface Place produces stress, and the magnetism of ferromagnetism TbDyFe films is regulated and controled by the stress.
Embodiment 5:
1)Substrate selects
It is ferroelectric substrate material to select PTO;
2)Substrate prestressing force loads
By step 1)In PTO ferroelectric substrate materials be fixed in magnetron sputtering apparatus, apply electric field make ferroelectric substrate produce should Power predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism NiMnGa films are grown by magnetically controlled sputter method on the PTO ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism NiMnGa film preparations, removing step 2)In be applied to electric field in ferroelectric substrate, obtain complex phase Multi-iron material;PTO ferroelectric substrates can not become original form again again under the constraint of ferromagnetism NiMnGa films, thus in interface Stress is produced, the magnetism of ferromagnetism NiMnGa films is regulated and controled by the stress.
Embodiment 6:
1)Substrate selects
It is ferroelectric substrate material to select PZN-PT;
2)Substrate prestressing force loads
By step 1)In PZN-PT ferroelectric substrate materials be fixed in molecular beam epitaxial device, by mechanical device ferroelectricity serve as a contrast Apply compression on bottom and produce predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism CoFe films are grown by method on the PZN-PT ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism CoFe film preparations, removing step 2)In be applied to mechanical device in ferroelectric substrate, answered Phase multi-iron material;PZN-PT ferroelectric substrates can not become original form again again under the constraint of ferromagnetism CoFe films, thus on boundary Stress is produced at face, the magnetism of ferromagnetism CoFe films is regulated and controled by the stress.
Embodiment 7:
1)Substrate selects
It is ferroelectric substrate material to select PMN-PT;
2)Substrate prestressing force loads
By step 1)In PMN-PT ferroelectric substrate materials be fixed in molecular beam epitaxial device, by mechanical device ferroelectricity serve as a contrast Apply tension on bottom and produce predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism CoFe is grown by molecular beam epitaxial method on the PMN-PT ferroelectric thin film substrates of predeformation2O4Film;
4)Obtain complex phase multi-iron material
In ferromagnetism CoFe2O4After the completion of film preparation, removing step 2)In be applied to mechanical device in ferroelectric substrate, obtain Complex phase multi-iron material;PMN-PT ferroelectric substrates are in ferromagnetism CoFe2O4Original form can not be become under the constraint of film again again, thus Stress, ferromagnetism CoFe are produced in interface2O4The magnetism of film is regulated and controled by the stress.
Embodiment 8:
1)Substrate selects
It is ferroelectric substrate material to select PZT;
2)Substrate prestressing force loads
By step 1)In PZT ferroelectric substrate materials be fixed in magnetron sputtering apparatus, apply electric field make ferroelectric substrate produce should Power predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetic Fe is grown by magnetically controlled sputter method on the PZT ferroelectric thin film substrates of predeformation3O4Film;
4)Obtain complex phase multi-iron material
In ferromagnetic Fe3O4After the completion of film preparation, removing step 2)In be applied to electric field arrangement in ferroelectric substrate, answered Phase multi-iron material;PZT ferroelectric substrates are in ferromagnetic Fe3O4Original form can not be become under the constraint of film again again, thus in interface Produce stress, ferromagnetic Fe3O4The magnetism of film is regulated and controled by the stress.
Embodiment 9:
1)Substrate selects
It is ferroelectric substrate material to select BFO;
2)Substrate prestressing force loads
By step 1)In BFO ferroelectric substrate materials be fixed in magnetron sputtering apparatus, apply electric field make ferroelectric substrate produce should Power predeformation;
3)It is prepared by ferromagnetic thin film
Ferromagnetism LaSrMnO films are grown by magnetically controlled sputter method on the BFO ferroelectric thin film substrates of predeformation;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetism LaSrMnO film preparations, removing step 2)In be applied to electric field in ferroelectric substrate, obtain complex phase Multi-iron material;BFO ferroelectric substrates can not become original form again again under the constraint of ferromagnetism LaSrMnO films, thus at interface Place produces stress, and the magnetism of ferromagnetism LaSrMnO films is regulated and controled by the stress.

Claims (1)

1. a kind of preparation method of complex phase multi-iron material, it is characterised in that concretely comprise the following steps:
1)Substrate selects
It is ferroelectric substrate material to select one kind in PMN-PT, BFO, PZT, BTO, PTO, PZN-PT;
2)Substrate prestressing force loads
By step 1)In ferroelectric substrate material be fixed in membrane equipment, or apply electric field make ferroelectric substrate produce stress become in advance Shape, or apply tension or compression generation predeformation in ferroelectric substrate by mechanical device;
3)It is prepared by ferromagnetic thin film
Grown on the ferroelectric thin film substrate of predeformation by the methods of pulsed laser deposition, magnetron sputtering or molecular beam epitaxy Ferromagnetic thin film;
The ferromagnetic thin film is Fe, Co, Ni, TbDyFe, NiMnGa, CoFe, CoFe2O4、Fe3O4, in LaSrMnO one Kind;
4)Obtain complex phase multi-iron material
After the completion of ferromagnetic thin film preparation, removing step 2)In be applied to electric field or mechanical device in ferroelectric substrate, obtain Complex phase multi-iron material;Ferroelectric substrate can not become original form again again under the constraint of ferromagnetic thin film, thus be produced in interface Stress, the magnetism of ferromagnetic thin film are regulated and controled by the stress.
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CN108598255A (en) * 2018-04-24 2018-09-28 湘潭大学 A kind of more iron hetero-junctions and preparation method thereof
CN109307850A (en) * 2018-08-30 2019-02-05 中国人民解放军国防科技大学 Magnetic sensor for suppressing low-frequency noise by utilizing magnetic flux electric control and application method thereof
CN110137343A (en) * 2019-05-15 2019-08-16 南京大学 A method of magnetic Skyrmion is generated and wiped using electric field
CN110228822A (en) * 2019-05-17 2019-09-13 华中科技大学 A kind of Ferromagnetic/Antiferromagnetic hetero-junctions and its preparation with exchange bias effect
CN110534143A (en) * 2019-05-15 2019-12-03 南京大学 A kind of multi-electrode wiring method of the racing track memory based on magnetic lattice pine torch
CN112725741A (en) * 2020-12-09 2021-04-30 湘潭大学 Preparation method of flexible ferroelectric film loaded by in-situ stress
CN113698194A (en) * 2021-06-16 2021-11-26 中国科学院深圳先进技术研究院 Flexible self-supporting BaTiO3-CoFe2O4Multiferroic self-assembled nanostructure and preparation method thereof
CN116018050A (en) * 2023-01-09 2023-04-25 中国矿业大学 Multiferroic heterostructure based on copper ferrite and preparation method thereof

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CN108598255A (en) * 2018-04-24 2018-09-28 湘潭大学 A kind of more iron hetero-junctions and preparation method thereof
CN108539008A (en) * 2018-05-17 2018-09-14 西北工业大学 A kind of unleaded Nanopiezoelectric generator and preparation method based on bismuth ferrous acid bismuth compound
CN109307850A (en) * 2018-08-30 2019-02-05 中国人民解放军国防科技大学 Magnetic sensor for suppressing low-frequency noise by utilizing magnetic flux electric control and application method thereof
CN110137343A (en) * 2019-05-15 2019-08-16 南京大学 A method of magnetic Skyrmion is generated and wiped using electric field
CN110534143A (en) * 2019-05-15 2019-12-03 南京大学 A kind of multi-electrode wiring method of the racing track memory based on magnetic lattice pine torch
CN110228822A (en) * 2019-05-17 2019-09-13 华中科技大学 A kind of Ferromagnetic/Antiferromagnetic hetero-junctions and its preparation with exchange bias effect
CN112725741A (en) * 2020-12-09 2021-04-30 湘潭大学 Preparation method of flexible ferroelectric film loaded by in-situ stress
CN112725741B (en) * 2020-12-09 2024-03-08 湘潭大学 Preparation method of in-situ stress loaded flexible ferroelectric film
CN113698194A (en) * 2021-06-16 2021-11-26 中国科学院深圳先进技术研究院 Flexible self-supporting BaTiO3-CoFe2O4Multiferroic self-assembled nanostructure and preparation method thereof
CN116018050A (en) * 2023-01-09 2023-04-25 中国矿业大学 Multiferroic heterostructure based on copper ferrite and preparation method thereof

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Inventor after: Li Jing

Inventor after: Wang Xinqing

Inventor after: Ge Hongliang

Inventor after: Jia Hanlin

Inventor after: Peng Xiaoling

Inventor after: Yang Yanting

Inventor after: Xu Jingcai

Inventor after: Wang Panfeng

Inventor after: Jin Hongxiao

Inventor after: Jin Dingfeng

Inventor after: Hong Bo

Inventor before: Li Jing

Inventor before: Ge Hongliang

Inventor before: Peng Xiaoling

Inventor before: Yang Yanting

Inventor before: Xu Jingcai

Inventor before: Wang Panfeng

Inventor before: Jin Hongxiao

Inventor before: Jin Dingfeng

Inventor before: Hong Bo

Inventor before: Wang Xinqing

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