CN109305814A - 一种陶瓷电容器的制备方法 - Google Patents
一种陶瓷电容器的制备方法 Download PDFInfo
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 41
- 238000002360 preparation method Methods 0.000 title claims abstract description 29
- 239000000919 ceramic Substances 0.000 claims abstract description 71
- 239000000843 powder Substances 0.000 claims abstract description 70
- 238000005253 cladding Methods 0.000 claims abstract description 51
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 24
- 238000009413 insulation Methods 0.000 claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 17
- 239000003990 capacitor Substances 0.000 claims description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 238000011056 performance test Methods 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- 229910052454 barium strontium titanate Inorganic materials 0.000 claims description 5
- 229910002113 barium titanate Inorganic materials 0.000 claims description 5
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052712 strontium Inorganic materials 0.000 claims description 5
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000007766 curtain coating Methods 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 abstract description 6
- 239000008187 granular material Substances 0.000 abstract description 5
- 239000000126 substance Substances 0.000 description 7
- 229910052573 porcelain Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000975 co-precipitation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 230000001976 improved effect Effects 0.000 description 2
- 238000003854 Surface Print Methods 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000011258 core-shell material Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000001935 peptisation Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
本发明公开一种陶瓷电容器的制备方法。采用原子层沉积(ALD)方法包覆陶瓷粉体，能够实现对每一个粉体颗粒的完全包覆，且包覆层的厚度可以方便地做到精确控制。包覆后的粉体烧结成陶瓷电容器，所述陶瓷电容器在额定电压下的绝缘电阻较未包覆样品提高了10倍，极大程度提高了陶瓷电容器的耐电压性能及可靠性。
Description
技术领域
本发明涉及陶瓷电容器制备技术领域，特别是涉及一种陶瓷电容器的制备方法。
背景技术
目前在陶瓷电容器制备过程中，对陶瓷粉体的包覆多采用化学方法包覆，如溶胶凝胶溶法、水热法、共沉淀法等。这些方法都是在溶液中进行，涉及因素众多，工艺控制条件复杂，工艺窗户窄，包覆过程变化大，包覆厚度不好控制，此外要实现粉体颗粒的完全包覆难度非常大。因此通常采用化学方法包覆的粉体无法实现完全包覆，且包覆厚度差异大，并且虽然化学法包覆对绝缘电阻有提高作用，但包覆后的粉体制备出来的电容器绝缘电阻只是稍有提高，耐电压和可靠性的提高并不明显。
发明内容
本发明的目的是提供一种陶瓷电容器的制备方法，以解决现有陶瓷粉体包覆方法无法实现完全包覆，且包覆后粉体制备出的陶瓷电容器耐电压低、可靠性不高的问题。
为实现上述目的，本发明提供了如下方案：
一种陶瓷电容器的制备方法，其特征在于，所述制备方法包括：
准备陶瓷粉体；
对所述陶瓷粉体进行原子层沉积ALD包覆，形成包覆后粉体；
将所述包覆后粉体制备成陶瓷生坯片；
采用烧结工艺对所述陶瓷生坯片进行烧结处理，形成陶瓷基片；
在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件；
将所述大规模电容器组件划切为单个陶瓷电容器。
可选的，所述准备陶瓷粉体，具体包括：
准备陶瓷粉体；所述陶瓷粉体为钛酸钡、钛酸锶或钛酸锶钡中的一种。
可选的，所述准备陶瓷粉体，具体包括：
准备陶瓷粉体；所述陶瓷粉体为钛酸钡、钛酸锶或钛酸锶钡的掺杂陶瓷粉体。
可选的，所述对所述陶瓷粉体进行原子层沉积包覆，形成包覆后粉体，具体包括：
将所述陶瓷粉体放入到ALD专用腔室内，采用过滤、震动或者悬浮的方式对所述陶瓷粉体进行ALD包覆，形成包覆后粉体。
可选的，所述将所述包覆后粉体制备成陶瓷生坯片，具体包括：
通过流延或轧膜成型方式将所述包覆后粉体制备成陶瓷生坯片。
可选的，所述采用烧结工艺对所述陶瓷生坯片进行烧结处理，形成陶瓷基片，具体包括：
将所述陶瓷生坯片放入马弗炉或者气氛炉中，在1000℃～1400℃烧结2～6小时，形成陶瓷基片。
可选的，所述在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件，具体包括：
采用丝网印刷方式在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件。
可选的，所述将所述大规模电容器组件划切为单个陶瓷电容器之后，还包括：
对所述陶瓷电容器进行电性能测试，所述电性能测试包括所述陶瓷电容器的绝缘电阻测试及耐电压性能测试。
根据本发明提供的具体实施例，本发明公开了以下技术效果：
本发明提供一种陶瓷电容器的制备方法，采用原子层沉积(ALD)方法包覆陶瓷粉体，能够实现对每一个粉体颗粒的完全包覆，且包覆层的厚度可以方便地做到精确控制。包覆后的粉体烧结成陶瓷电容器，所述陶瓷电容器在额定电压下的绝缘电阻较未包覆样品提高了10倍，极大提高了陶瓷电容器的耐电压性能及可靠性。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据本发明提供的附图获得其他的附图。
图1为本发明提供的陶瓷电容器的制备方法的流程图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本发明的目的是提供一种陶瓷电容器的制备方法，以解决现有陶瓷粉体包覆方法无法实现完全包覆，且包覆后粉体制备出的陶瓷电容器耐电压低、可靠性不高的问题。
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
目前对陶瓷粉体的包覆多采用化学方法包覆，如溶胶凝胶溶法、水热法、共沉淀法等，这些方法都是在溶液中进行，涉及因素多，包覆过程变化大，包覆厚度不好控制。并且通常采用化学方法包覆的粉体无法完全包覆，包覆厚度差异大，包覆后的粉体制备出来的电容器绝缘电阻只是稍有提高，耐电压和可靠性的提高不明显。
ALD(Atomic layer deposition，原子层沉积)是一种可以将物质以单原子膜形式一层一层的沉积在基底或粉体表面的方法。原子层沉积法(ALD)能够对每一个粉体颗粒进行完全包覆，使得制备出的陶瓷电容器的绝缘电阻、耐电压及可靠性都能够得到显著提高。因此本发明基于ALD提出一种陶瓷电容器的制备方法。
图1为本发明提供的陶瓷电容器的制备方法的流程图。参见图1，本发明提供的陶瓷电容器的制备方法包括：
步骤101：准备陶瓷粉体。
所述陶瓷粉体为钛酸钡、钛酸锶、钛酸锶钡或三者对应的掺杂陶瓷粉体。
步骤102：对所述陶瓷粉体进行原子层沉积ALD包覆，形成包覆后粉体。
将所述陶瓷粉体放入到ALD专用腔室内，采用过滤、震动或者悬浮的方式对所述陶瓷粉体进行ALD包覆，形成包覆后粉体。
对所述陶瓷粉体进行ALD包覆的包覆材料为二氧化硅、三氧化二铝、氧化铪或氧化锆等金属或非金属氧化物，包覆厚度为2～6nm。
步骤103：将所述包覆后粉体制备成陶瓷生坯片。
将所述包覆后粉体，通过流延、轧膜等成型方式制备成厚度0.15～0.22mm的陶瓷生坯片。
步骤104：采用烧结工艺对所述陶瓷生坯片进行烧结处理，形成陶瓷基片。
将所述陶瓷生坯片放入马弗炉或者气氛炉中，在1000℃～1400℃内烧结2～6小时，形成陶瓷基片。
步骤105：在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件。
采用丝网印刷方式在烧成后的所述陶瓷基片的两面分别印上银电极，形成大规模电容器组件。
步骤106：将所述大规模电容器组件划切为单个陶瓷电容器。
根据所述大规模电容器组件表面印刷的银电极图案，对所述大规模电容器组件进行划切，制备出尺寸2.54mm×2.54mm的单个陶瓷电容器。
步骤107：对所述陶瓷电容器进行电性能测试。
所述电性能测试包括所述陶瓷电容器的绝缘电阻测试及耐电压性能测试。测试结果如下：
根据包覆前样品测试结果和包覆后样品测试结果可知，本发明采用原子层沉积(ALD)对陶瓷粉体进行包覆后，烧结成的陶瓷电容器样品，其额定电压下绝缘电阻比包覆前样品提高了10倍，耐电压也较未包覆样品提高了10倍，大大提高了陶瓷电容器的耐电压性能及可靠性。
本发明针对陶瓷电容器绝缘电阻小引起的陶瓷电容器耐电压低、可靠性不高等问题，提出一种原子层沉积(ALD)的包覆方式对陶瓷粉体表面进行修饰，从而获得核壳结构陶瓷粉体颗粒，与现有技术的化学包覆方法相比，本发明至少具有以下优点：
1.通过ALD方法包覆技术可以实现陶瓷颗粒表面的完整包覆。
2.包覆层的厚度可以方便地做到精确控制。
3.包覆后的陶瓷粉体烧结成陶瓷电容器后，耐电压较未包覆样品提高了10倍，能够制备出高耐电压的陶瓷电容器。
以上所述仅为本发明较佳的具体实施例，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明披露的技术范围内，可轻易想到的变化或替换，都应该涵盖在本发明的保护范围之内。因此，本发明的保护范围应该以权利要求书的保护范围为准。
本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的装置核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处。综上所述，本说明书内容不应理解为对本发明的限制。
Claims (8)
1.一种陶瓷电容器的制备方法，其特征在于，所述制备方法包括：
准备陶瓷粉体；
对所述陶瓷粉体进行原子层沉积ALD包覆，形成包覆后粉体；
将所述包覆后粉体制备成陶瓷生坯片；
采用烧结工艺对所述陶瓷生坯片进行烧结处理，形成陶瓷基片；
在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件；
将所述大规模电容器组件划切为单个陶瓷电容器。
2.根据权利要求1所述的制备方法，其特征在于，所述准备陶瓷粉体，具体包括：
准备陶瓷粉体；所述陶瓷粉体为钛酸钡、钛酸锶或钛酸锶钡中的一种。
3.根据权利要求1所述的制备方法，其特征在于，所述准备陶瓷粉体，具体包括：
准备陶瓷粉体；所述陶瓷粉体为钛酸钡、钛酸锶或钛酸锶钡的掺杂陶瓷粉体。
4.根据权利要求1所述的制备方法，其特征在于，所述对所述陶瓷粉体进行原子层沉积包覆，形成包覆后粉体，具体包括：
将所述陶瓷粉体放入到ALD腔室内，采用过滤、震动或者悬浮的方式对所述陶瓷粉体进行ALD包覆，形成包覆后粉体。
5.根据权利要求1所述的制备方法，其特征在于，所述将所述包覆后粉体制备成陶瓷生坯片，具体包括：
通过流延或轧膜成型方式将所述包覆后粉体制备成陶瓷生坯片。
6.根据权利要求1所述的制备方法，其特征在于，所述采用烧结工艺对所述陶瓷生坯片进行烧结处理，形成陶瓷基片，具体包括：
将所述陶瓷生坯片放入马弗炉或者气氛炉中，在1000℃～1400℃烧结2～6小时，形成陶瓷基片。
7.根据权利要求1所述的制备方法，其特征在于，所述在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件，具体包括：
采用丝网印刷方式在所述陶瓷基片的两面分别制备银电极，形成大规模电容器组件。
8.根据权利要求1所述的制备方法，其特征在于，所述将所述大规模电容器组件划切为单个陶瓷电容器之后，还包括：
对所述陶瓷电容器进行电性能测试，所述电性能测试包括所述陶瓷电容器的绝缘电阻测试及耐电压性能测试。
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1024122A1 (en) * | 1999-01-28 | 2000-08-02 | Shin-Etsu Chemical Co., Ltd. | Barium titanate particles with surface deposition of rare earth element |
| CN101016623A (zh) * | 2006-12-30 | 2007-08-15 | 江苏天一超细金属粉末有限公司 | 非金属材料镀覆铁磁性、磁性金属镀层的方法及设备 |
| CN102531580A (zh) * | 2011-12-14 | 2012-07-04 | 同济大学 | 一种利用铝硅复合氧化物包覆纳米钛酸锶钡介质储能材料及其制备方法 |
| CN103864435A (zh) * | 2014-03-07 | 2014-06-18 | 武汉理工大学 | 宽温耐高压高储能密度陶瓷介质材料的制备方法 |
| CN106011791A (zh) * | 2016-07-07 | 2016-10-12 | 王禄荣 | 在粉末表面均匀镀膜的原子层沉积装置及其方法 |
-
2018
- 2018-12-21 CN CN201811570206.2A patent/CN109305814A/zh active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1024122A1 (en) * | 1999-01-28 | 2000-08-02 | Shin-Etsu Chemical Co., Ltd. | Barium titanate particles with surface deposition of rare earth element |
| CN101016623A (zh) * | 2006-12-30 | 2007-08-15 | 江苏天一超细金属粉末有限公司 | 非金属材料镀覆铁磁性、磁性金属镀层的方法及设备 |
| CN102531580A (zh) * | 2011-12-14 | 2012-07-04 | 同济大学 | 一种利用铝硅复合氧化物包覆纳米钛酸锶钡介质储能材料及其制备方法 |
| CN103864435A (zh) * | 2014-03-07 | 2014-06-18 | 武汉理工大学 | 宽温耐高压高储能密度陶瓷介质材料的制备方法 |
| CN106011791A (zh) * | 2016-07-07 | 2016-10-12 | 王禄荣 | 在粉末表面均匀镀膜的原子层沉积装置及其方法 |
Non-Patent Citations (1)
| Title |
|---|
| 谭毅，李敬锋等: "《新材料概论》", 31 March 2004, 冶金工业出版社 * |
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