CN109254408B - 用于产生激光辐射的线状的强度分布的设备 - Google Patents
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Abstract
本发明涉及一种用于产生激光辐射的线状的强度分布的设备,其包括:两个彼此间隔开距离的光束变换装置(2、3);聚焦器件(5a、5b、6a、6b),这些聚焦器件能够将穿过所述两个光束变换装置(2、3)的激光辐射聚焦成线状的强度分布,所述设备设计成,使得沿线状的强度分布的线横向方向的线宽度能够通过在所述两个光束变换装置(2、3)之间的距离的改变而发生改变。
Description
技术领域
本发明涉及一种用于产生激光辐射的线状的强度分布的设备。
背景技术
为了产生具有特别大的景深的长的、均匀的且窄的激光线可以使用折射的或反射的光束变换装置,该光束变换装置这样重新排列多模激光器(M2>10)、例如固体激光器的模式组合,使得光束质量(或者说衍射指数或模式数量或光束发散度)对于一个横向方向(Y)而言明显降低并且对于另一个横向方向(X)而言提高。作为结果,利用设置在其后的光学系统可以非常好地使沿X方向(长线轴)的辐射均匀化。所述辐射可以沿Y方向(线横截面)非常好地聚焦并且实现大的景深。也有利的是,利用简单构造的低NA(数值孔径)聚焦光学系统可以实现大的工作距离。相应的设备在EP1896893A1中找到。
由两个透镜阵列组成的折射的光束变换器由US5,513,201已知。所述光束变换器用于将激光二极管阵列的辐射集束。由EP1006382A1已知另一种具有两个双凸柱面透镜阵列的光束变换器。
发明内容
本发明的任务是提供一种开头所述类型的设备,利用该设备可以影响沿线状的强度分布的线横向方向的线宽度。
这按照本发明通过一种根据本发明的设备解决,该用于产生激光辐射的线状的强度分布的设备包括:
两个彼此间隔开距离的光束变换装置;
聚焦器件,这些聚焦器件能够将穿过所述两个光束变换装置的激光辐射聚焦成线状的强度分布,
所述设备设计成,使得沿线状的强度分布的线横向方向的线宽度能够通过在所述两个光束变换装置之间的距离的改变而发生改变,
一个或两个所述光束变换装置能够使激光辐射转动,和/或所述一个或两个光束变换装置能够将所述激光辐射变换成,使得激光辐射的两个彼此垂直的横向方向的发散度或衍射指数互换,并且
该设备包括定位器件,该定位器件能够改变所述两个光束变换装置的距离,其方式为使两个光束变换装置中的一个光束变换装置相对于另一个光束变换装置运动。
根据本发明所述设备这样设计,使得沿线状的强度分布的线横向方向的线宽度能够通过在所述两个光束变换装置之间的距离的改变而发生改变。由此,可以以简单的方式影响沿线状的强度分布的线横向方向的线宽度。
尤其是在利用多模激光器、例如固体激光形成窄的激光线时得到线宽度的无级的且技术上能容易实现的控制。光束变换装置的制造公差以及在激光源与光束变换装置之间的光学器件的制造误差和校正误差(其影响沿X方向的发散度)以及与所述设备的设计有偏差的激光发散度能够以所述方式在光学上得到补偿。此外由此附加地可以这样减少在光束变换装置中的光强度,使得光强度低于所使用的材料的损坏阈值。
此外根据本发明优选规定,一个或两个所述光束变换装置构造为透镜阵列或反射镜阵列。
此外根据本发明优选规定,在所述透镜阵列中透镜构造为柱面透镜。
此外根据本发明优选规定,在所述反射镜阵列中反射镜具有凹形的弯曲部。
此外根据本发明优选规定,该设备包括激光源。
此外根据本发明优选规定,该设备包括均匀化器件。
此外根据本发明优选规定,该设备包括望远镜。
此外根据本发明优选规定,所述定位器件构造为精密机械或机电驱动器。
此外根据本发明优选规定,一个或两个所述光束变换装置能够使激光辐射围绕传播方向转动90°的角度。
此外根据本发明优选规定,该柱面透镜的圆柱轴线以45°的角度相对于如下方向定向,透镜沿该方向并排地设置。
此外根据本发明优选规定,该激光源构造为由激光二极管泵浦的固体激光器。
此外根据本发明优选规定,该均匀化器件设置在所述两个光束变换装置与所述聚焦器件之间。
此外根据本发明优选规定,所述望远镜是变形的望远镜。
此外根据本发明优选规定,该望远镜设置在所述激光源与所述两个光束变换装置之间。
此外根据本发明优选规定,所述定位器件构造为压电驱动器。
附图说明
借助以下参照附图对各优选实施例的描述清楚地得出本发明的其它特征和优点。其中:
图1a示出按照本发明的设备的一种实施形式的示意性侧视图;
图1b示出根据图1a的设备的示意性俯视图;
图2示出在两个光束变换装置中的第一光束变换装置的入射面上的激光辐射的横截面视图;
图3a、3b示出用于阐明光束变换的草图;
图4a示出在两个光束变换装置中的第一光束变换装置的入射面上的激光辐射的横截面示意图;
图4b示出在两个光束变换装置中的第二光束变换装置的出射面上的激光辐射的横截面示意图;
图5示出所述设备的一部分的示意性透视图;
图6示出光束变换装置的第一种实施形式的剖面;
图7示出光束变换装置的第二种实施形式的剖面;
图8示出通过两个光束变换装置和聚焦器件的不按比例的示例性的光路;
图9示出一图表,其示出沿线横向方向的光束束腰与两个光束变换装置彼此的距离的相关性;
图10示出所述两个光束变换装置的透视图。
具体实施方式
在附图中相同或功能相同的部件设有相同的附图标记。在此,在一些所述附图中标绘有笛卡尔坐标系,以易于定向。
激光辐射的待产生的线状的强度分布在笛卡尔坐标系中具有沿X方向延伸的线纵向方向以及沿Y方向延伸的线横向方向。
在图1中示出的设备包括仅示意性示出的激光源10、变形的望远镜1、第一和第二光束变换装置2、3以及均匀化器件4,它们尤其是作用到X方向上或者说线纵向方向上。所述设备此外包括用于X方向的傅立叶光学器件5a、5b和用于Y方向的聚焦器件6a、6b。
所述激光源10例如可以构造为由激光二极管泵浦的固体激光器。所述均匀化器件4例如可以包括两个沿激光辐射的传播方向或者说沿Z方向依次相继设置的柱面透镜阵列,其圆柱轴线沿Y方向延伸。
所述变形的望远镜1用于在第一光束变换装置2的入射面上沿长轴X构成窄的椭圆束腰7(对此参见图2)。所述光束变换装置2、3可以构造为两个折射的或反射的阵列。
在光束变换装置2、3的后面以及在均匀化器件4的前面可以设置有作用到X方向上的光学器件8。
尤其是,每个所述光束变换装置2、3都由一个折射阵列组成。在第一阵列上,所述椭圆束腰7在X方向上分解成多个、尤其是m个子光束9或分段。替代地,激光辐射可以在所述阵列之前利用附加的切分的光学系统被分解。此外,子光束9这样被变换,使得子光束在光束变换装置2、3的输出端上与在输入端上相比关于在XY平面中的45°轴线成镜像。在图3a和3b中,这通过一个子光束9的横截面的角A、B、C、D的变换示出。在图4a中示出在输入侧还毗邻的子光束9并且在图4b中示出在输出侧经变换的子光束9’。
这些子光束以确定的尺寸聚焦在阵列的中间空间中。
所述变换各向异性地改变整个光束的衍射指数M2。在此,M2尤其是对于Y方向m倍地减少并且对于X方向m倍地增大。也可以这样描述,即一方面关于X方向或椭圆束腰7的长轴的小的输入发散度θx并且另一方面关于Y方向或椭圆束腰7的短轴的大的输入发散度θy在变换后被互换。
θx→θ′y,θy→θ′x
(1)
所述光束变换装置2、3的一种优选设计由两个柱面透镜阵列组成,其圆柱轴线相对于X方向以及相对于Y方向以45°的角度定向(对此参见图2、图5和图10)。在此,形成第一光束变换装置2的阵列的圆柱轴线平行于形成第二光束变换装置3的阵列的圆柱轴线定向。
所述阵列的各单个柱面透镜对为子光束形成具有放大率-1的开普勒望远镜:
k1=k2=-n2
(2)
等式(2)仅适用于根据图6的实施形式。根据图6的实施形式具有如下优点:在内透镜面上的能量密度小于在根据图7的实施形式中。在图6和图7中,第一和第二光束变换装置2、3的透镜面的半径用R1和R2标记。在彼此对置的透镜面之间的距离用d标记。在图6和图7中,柱面透镜的前面和后面的焦距用F1、F1’、F2和F2’标记。在图7中柱面透镜的厚度用dg标记。
具有带有凹形阶梯的交叉阶梯镜的实施形式原理上也是可能的。不过,所述凹形阶梯应该具有能够补偿像差的合适形状。
根据等式(1)的在输出端上的光束发散度在如下情况时也适用:在各透镜阵列之间的距离d选择成使得例如根据用于根据图6的配置的等式(2)的放缩条件被准确地满足。
通过所述距离d的精调可以一方面改变输出光束的发散度。另一方面可以校正半径的制造误差。此外,在激光源和光束变换装置之间的光学器件的制造误差和校正误差(其影响沿X方向的发散度)以及与所述设备的设计有偏差的激光发散度可以在光学上得以补偿。
在距离Δ=d-d0改变时,子光束9、9’在光束变换装置2、3之后得到附加的发散度:
δθ=-Δ*P/(2fT 2)
(3)
其中,P是光束变换装置2、3的柱面透镜垂直于圆柱轴线的节距或者说中心距,并且fT是光束变换装置2、3的柱面透镜的焦距。
对于Y所造成的发散度
θ′y+δθ
(4)
在所述距离减小时增大。当所述距离增大时或者说在正的Δ时所述发散度最初减小。在达到值δθ=-θ′y之后,发散度重新开始提高(公式带有“-”标志)。
所述两个光束变换装置2、3的相对彼此运动在图10中示出。
所述线宽度wy与发散度有关。这应该借助于下面的示例阐述:
给定具有节距P=1.06mm、fT=7.5mm、θ′y=0.25mrad(毫弧度)的光束变换装置;具有f1=586mm的用作第一聚焦器件6a的聚焦透镜和具有f2=170mm的用作第二聚焦器件6b的投影透镜,该投影透镜具有放大率V=S’/S=(2467-586)/187=1/10.06(参见图8)。在图8中给出的尺寸为以mm计算的距离。
所述光束变换装置在Δ=+0.04…-0.12mm的范围内的距离改变使线宽度wy=HW@e-2从14μm变为38μm(参见图9)。使用配合的精密机械可以无问题地实现这种移动。精密的机电驱动器、例如压电驱动器也良好地适合于此。
Claims (15)
1.一种用于产生激光辐射的线状的强度分布的设备,该设备包括:
两个彼此间隔开距离的光束变换装置(2、3);
聚焦器件(6a、6b),这些聚焦器件能够将穿过所述两个光束变换装置(2、3)的激光辐射聚焦成线状的强度分布,
所述设备设计成,使得沿线状的强度分布的线横向方向的线宽度能够通过在所述两个光束变换装置(2、3)之间的距离的改变而发生改变,
其特征在于,一个或两个所述光束变换装置(2、3)能够使激光辐射转动,和/或所述一个或两个光束变换装置(2、3)能够将所述激光辐射变换成,使得激光辐射的两个彼此垂直的横向方向的发散度或衍射指数互换,并且
该设备包括定位器件,该定位器件能够改变所述两个光束变换装置(2、3)的距离,其方式为使两个光束变换装置(2、3)中的一个光束变换装置相对于另一个光束变换装置运动。
2.根据权利要求1所述的设备,其特征在于,一个或两个所述光束变换装置(2、3)构造为透镜阵列或反射镜阵列。
3.根据权利要求2所述的设备,其特征在于,在所述透镜阵列中透镜构造为柱面透镜。
4.根据权利要求2所述的设备,其特征在于,在所述反射镜阵列中反射镜具有凹形的弯曲部。
5.根据权利要求1至4中任一项所述的设备,其特征在于,该设备包括激光源(10)。
6.根据权利要求1至4中任一项所述的设备,其特征在于,该设备包括均匀化器件(4)。
7.根据权利要求1至4中任一项所述的设备,其特征在于,该设备包括望远镜。
8.根据权利要求1所述的设备,其特征在于,所述定位器件构造为精密机械或机电驱动器。
9.根据权利要求1至4中任一项所述的设备,其特征在于,一个或两个所述光束变换装置(2、3)能够使激光辐射围绕传播方向转动90°的角度。
10.根据权利要求3所述的设备,其特征在于,该柱面透镜的圆柱轴线以45°的角度相对于如下方向定向,透镜沿该方向并排地设置。
11.根据权利要求5所述的设备,其特征在于,该激光源构造为由激光二极管泵浦的固体激光器。
12.根据权利要求6所述的设备,其特征在于,该均匀化器件设置在所述两个光束变换装置(2、3)与所述聚焦器件之间。
13.根据权利要求7所述的设备,其特征在于,所述望远镜是变形的望远镜(1)。
14.根据权利要求5所述的设备,其特征在于,该设备包括望远镜,该望远镜设置在所述激光源(10)与所述两个光束变换装置(2、3)之间。
15.根据权利要求8所述的设备,其特征在于,所述定位器件构造为压电驱动器。
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